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公开(公告)号：US06676994B2
公开(公告)日：2004-01-13
申请号：US09819277
申请日：2001-03-28
IPC分类号： C23C1600
CPC分类号： C23C14/228 , C23C14/0629 , C23C14/0694
摘要： Thin films are produced by a method wherein a material is heated in a furnace placed inside a vacuum system. An inert gas is flown over/through the heated material. The vapors of the material are entrained in the carrier gas which is then directed onto a substrate heated to a temperature below that of the furnace temperature and placed in close proximity to the exit of the furnace.
摘要翻译： 通过一种方法制造薄膜，其中将材料在放置在真空系统内的炉中加热。 惰性气体流过/通过加热的材料。 材料的蒸气被夹带在载气中，然后将其引导到加热到低于炉温的温度的基底上，并放置在靠近炉的出口处。
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2.发明申请Nozzle-based, Vapor-phase, Plume Delivery Structure for Use in Production of Thin-film Deposition Layer 审中-公开喷嘴为基础，蒸气相，用于生产薄膜沉积层的羽流输送结构公开(公告)号：US20120156372A1
公开(公告)日：2012-06-21
申请号：US13006086
申请日：2011-01-13
IPC分类号： C23C16/44
CPC分类号： C23C14/562 , C23C14/0021 , C23C14/0623 , C23C14/24 , C23C14/243 , C23C14/548 , H01L21/02554 , H01L21/02568 , H01L21/02631 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.
摘要翻译： 一种物理气相沉积渗出方法，包括将条状材料平移通过沉积室中的物理气相沉积区，并提供沿同一沉积室中的处理路径串联设置的第一和第二基本上密封的容器，每个容器发射不同的源材料以产生重叠 羽流并且具有沿着该区域的宽度均匀地分布在该容器上的蒸气输送喷嘴的阵列，并且被配置为排出重叠的羽流以产生具有穿过该宽度的基本上均匀的组成的雾和跨越该区域长度的变化的组合。 另外，细长的气相沉积容器具有细长的盖子，其细长的盖子包括沿着其细长轴线彼此分开的多个喷嘴，以及围绕多个喷嘴的盖子中的连续的加热元件，加热元件具有电连接到电源 船的同一侧。
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3.发明申请Nozzle-Based, Vapor-Phase, Plume Delivery Structure for Use in Production of Thin-Film Deposition Layer 审中-公开喷嘴为基础，蒸气相，用于生产薄膜沉积层的羽流输送结构公开(公告)号：US20100173440A1
公开(公告)日：2010-07-08
申请号：US12466981
申请日：2009-05-15
IPC分类号： H01L31/18
CPC分类号： C23C14/562 , C23C14/0021 , C23C14/0623 , C23C14/24 , C23C14/243 , C23C14/548 , H01L21/02554 , H01L21/02568 , H01L21/02631 , H01L31/0749 , Y02E10/541 , Y02P70/521
摘要： A physical vapor deposition effusion method comprising translating a strip material through a physical vapor deposition zone in a deposition chamber and providing first and second substantially closed vessels located serially along the processing path in the same deposition chamber, each vessel emitting different source materials to produce overlapping plumes and having an array of vapor delivery nozzles distributed uniformly across the vessel along the width of the zone, and configured to expel overlapping plumes to create a fog having a substantially uniform composition across the width and a varying composition across the length of the zone. Also, an elongate vapor deposition effusion vessel having an elongate lid including plural nozzles spaced from each other along its elongate axis, and a continuous heating element in the lid encircling the plural nozzles, the heating element having electrical contacts connected to an electrical source on the same side of the vessel.
摘要翻译： 一种物理气相沉积渗出方法，包括将条状材料平移通过沉积室中的物理气相沉积区，并提供沿同一沉积室中的处理路径串联设置的第一和第二基本封闭的容器，每个容器发射不同的源材料以产生重叠 羽流并且具有沿着该区域的宽度均匀地分布在该容器上的蒸气输送喷嘴的阵列，并且被配置为排出重叠的羽流以产生具有穿过该宽度的基本上均匀的组成的雾和跨越该区域长度的变化的组合。 另外，细长的气相沉积容器具有细长的盖子，其细长的盖子包括沿着其细长轴线彼此分开的多个喷嘴，以及围绕多个喷嘴的盖子中的连续的加热元件，加热元件具有电连接到电源 船的同一侧。
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公开(公告)号：US06372538B1
公开(公告)日：2002-04-16
申请号：US09527316
申请日：2000-03-16
申请人： Robert G. Wendt , Gregory M. Hanket , Robert W. Birkmire , T. W. Fraser Russell , Scott Wiedeman
发明人： Robert G. Wendt , Gregory M. Hanket , Robert W. Birkmire , T. W. Fraser Russell , Scott Wiedeman
IPC分类号： H01L2100
CPC分类号： H01L31/0749 , H01L31/0322 , Y02E10/541 , Y02P70/521
摘要： A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.
摘要翻译： 公开了一种新的，大面积的薄膜柔性光伏结构，以及一般的制造程序，包括优选的卷对卷型，工艺室分离的“连续运动”方法 生产这样的结构。 公开了一种特殊的多材料蒸气沉积环境，以实现在制造过程中和作为制造过程的一部分中执行的重要的共蒸镀层沉积程序。 公开了适于产生通常类似于刚刚提及的蒸气环境的结构系统，以及涉及产生这种蒸气环境的方法步骤的组织。 另外，一种独特的蒸气创造的材料分配系统，其中包括专门设计的加热坩埚，精心布置，空间分布，局部和大体上点状的不同金属蒸气的加热喷嘴源，以及特殊的多指， 梳状，蒸汽输送歧管结构。
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公开(公告)号：US06310281B1
公开(公告)日：2001-10-30
申请号：US09527542
申请日：2000-03-16
申请人： Robert G. Wendt , Gregory M. Hanket , Robert W. Birkmire , T. W. Fraser Russell , Scott Wiedeman
发明人： Robert G. Wendt , Gregory M. Hanket , Robert W. Birkmire , T. W. Fraser Russell , Scott Wiedeman
IPC分类号： H01L3104
CPC分类号： H01L31/03928 , C23C14/0623 , C23C14/562 , H01L31/0392 , H01L31/03925 , H01L31/046 , H01L31/0463 , H01L31/0465 , H01L31/0749 , H01L31/1836 , H01L31/1876 , Y02E10/541 , Y02P70/521
摘要： A new, large-area, thin-film, flexible photovoltaic structure is disclosed, as well as a general fabrication procedure, including a preferably roll-to-roll-type, process-chamber-segregated, “continuous-motion”, method for producing such a structure. A special multi-material vapor-deposition environment is disclosed to implement an important co-evaporation, layer-deposition procedure performed in and as part of the fabrication procedure. A structural system adapted to create a vapor environment generally like that just referred to is disclosed, as is an organization of method steps involved in the generation of such a vapor environment. Also, a unique, vapor-creating, materials-distributing system, which includes specially designed heated crucibles with carefully arranged, spatially distributed, localized and generally point-like, heated-nozzle sources of different metallic vapors, and a special multi-fingered, comb-like, vapor-delivering manifold structure is shown.
摘要翻译： 公开了一种新的，大面积的薄膜柔性光伏结构，以及一般的制造程序，包括优选的卷对卷型，工艺室分离的“连续运动”方法 生产这样的结构。 公开了一种特殊的多材料蒸气沉积环境，以实现在制造过程中和作为制造过程的一部分中执行的重要的共蒸镀层沉积程序。 公开了适于产生通常类似于刚刚提及的蒸气环境的结构系统，以及涉及产生这种蒸气环境的方法步骤的组织。 另外，一种独特的蒸气创造的材料分配系统，其中包括专门设计的加热坩埚，精心布置，空间分布，局部和大体上点状的不同金属蒸气的加热喷嘴源，以及特殊的多指， 梳状，蒸汽输送歧管结构。
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公开(公告)号：US08986455B2
公开(公告)日：2015-03-24
申请号：US12250172
申请日：2008-10-13
CPC分类号： F27B14/00 , C23C14/243
摘要： A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.
摘要翻译： 热蒸发源包括：坩埚，其构造成容纳蒸发剂的体积和蒸发器上方的蒸汽空间; 歧管主体，在其内部具有中空膨胀室，其经由一个或多个限制孔流动地连接到蒸气空间; 一个或多个渗出喷嘴可流动地连接到膨胀室并离开热蒸发源的外表面，喷嘴被定向成将蒸发蒸气流沿垂直向下的一个或多个水平方向引导出源，或者在 在水平和垂直向下之间中间的一个或多个方向; 以及当将真空加到热蒸发源上时能够将部分或全部热蒸发源加热到足以产生一个或多个蒸发蒸气流的温度的加热器。
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公开(公告)号：US20090095213A1
公开(公告)日：2009-04-16
申请号：US12250172
申请日：2008-10-13
IPC分类号： C23C14/24
CPC分类号： F27B14/00 , C23C14/243
摘要： A thermal evaporation source includes: a crucible configured to contain a volume of evaporant and a vapor space above the evaporant; a manifold body having within it a hollow expansion chamber that is flowably connected to the vapor space via one or more restriction orifices; one or more effusion nozzles flowably connected to the expansion chamber and exiting an outer surface of the thermal evaporation source, the nozzle(s) oriented to direct an evaporant vapor flow out of the source vertically downward, in one or more horizontal directions, or in one or more directions intermediate between horizontal and vertically downward; and a heater capable of heating some or all of the thermal evaporation source to a temperature sufficient to produce the one or more evaporant vapor flows when a vacuum is applied to the thermal evaporation source.
摘要翻译： 热蒸发源包括：坩埚，其构造成容纳蒸发剂的体积和蒸发器上方的蒸汽空间; 歧管主体，在其内部具有中空膨胀室，其经由一个或多个限制孔流动地连接到蒸气空间; 一个或多个渗出喷嘴可流动地连接到膨胀室并离开热蒸发源的外表面，喷嘴被定向成将蒸发蒸气流沿垂直向下的一个或多个水平方向引导出源，或者在 在水平和垂直向下之间中间的一个或多个方向; 以及当将真空加到热蒸发源上时能够将部分或全部热蒸发源加热到足以产生一个或多个蒸发蒸气流的温度的加热器。
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公开(公告)号：US4709466A
公开(公告)日：1987-12-01
申请号：US723054
申请日：1985-04-15
IPC分类号： H01L31/073 , H01L31/18
CPC分类号： H01L31/073 , H01L31/1828 , H01L31/186 , Y02E10/543 , Y02P70/521
摘要： Thin film photovoltaic solar cells are made by forming the cell structure from a number of layers including the contact layers and semiconductor layers. At least one of the semiconductor layers is a tellurium containing II-VI compound. After the structure is formed, it is heated to temperatures above 300.degree. C. and then rapidly cooled at rates greater than 10.degree. C./s. Cells comprising CdS and CdTe have increased fill factor when the fabrication process includes heating and rapid cooling.
摘要翻译： 通过从包括接触层和半导体层的多个层形成电池结构来制造薄膜光伏太阳能电池。 至少一个半导体层是含Ⅵ-VI化合物的碲。 在结构形成之后，将其加热到高于300℃的温度，然后以大于10℃/ s的速率快速冷却。 当制造工艺包括加热和快速冷却时，包含CdS和CdTe的电池具有增加的填充因子。
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公开(公告)号：US4909863A
公开(公告)日：1990-03-20
申请号：US218758
申请日：1988-07-13
IPC分类号： H01L21/465 , H01L25/04 , H01L31/0224 , H01L31/032 , H01L31/0336
CPC分类号： H01L31/0749 , H01L21/465 , H01L31/022466 , H01L31/0322 , H01L31/043 , Y02E10/541 , Y10S148/051 , Y10S438/964
摘要： Semiconductor films and photovoltaic devices prepared therefrom are provided wherein the semiconductor films have a specular surface with a texture less than about 0.25 micron greater than the average planar film surface and wherein the semiconductor films are surface modified by exposing the surface to an aqueous solution of bromine containing an acid or salt and continuing such exposure for a time sufficient to etch the surface.
摘要翻译： 提供了由其制备的半导体膜和光伏器件，其中半导体膜具有比平均平面膜表面小约0.25微米的纹理的镜面，并且其中半导体膜通过将表面暴露于溴水溶液 含有酸或盐并持续这样的暴露足以蚀刻表面的时间。
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10.发明申请DEVICES AND METHODS FOR INCREASING SOLAR HYDROGEN CONVERSION EFFICIENCY IN PHOTOVOLTAIC ELECTROLYSIS 审中-公开在光伏电解中增加太阳能转化效率的装置和方法公开(公告)号：US20130175180A1
公开(公告)日：2013-07-11
申请号：US13821399
申请日：2011-09-30
IPC分类号： C25B9/04
CPC分类号： C25B9/04 , C25B1/003 , H01L31/048 , Y02E10/50 , Y02P20/134
摘要： Devices and methods for photovoltaic electrolysis are disclosed. A device comprises a photovoltaic cell element and an electrolysis compartment. The photovoltaic cell element is configured to convert a portion of solar energy into electrical energy and to pass another portion of the solar energy. The electrolysis compartment includes an aqueous electrolyte positioned to receive the other portion of the solar energy and electrodes electrically connected to receive the electrical energy produced by the photovoltaic cell element. A method comprises receiving solar energy with a photovoltaic cell element, converting a portion of the solar energy into electrical energy, passing another portion of the solar energy through the photovoltaic cell element, receiving with an aqueous electrolyte the other portion of the solar energy, transmitting the electrical energy generated by the photovoltaic cell element to a pair of electrodes, and electrolyzing the aqueous electrolyte with the pair of electrodes.
摘要翻译： 公开了用于光伏电解的装置和方法。 一种装置包括光电池元件和电解室。 太阳能电池元件被配置为将太阳能的一部分转换成电能并通过太阳能的另一部分。 电解室包括位于接收太阳能的另一部分的水性电解质和电连接以接收由光伏电池元件产生的电能的电极。 一种方法包括用光伏电池元件接收太阳能，将太阳能的一部分转换成电能，将太阳能的另一部分通过光伏电池元件，用水性电解质接收太阳能的另一部分，透射 由光伏电池元件产生的电能到一对电极，并用该对电极电解含水电解质。
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