Plasma enhanced chemical vapor deposition (PECVD) method of forming
vanadium oxide films and vanadium oxide thin-films prepared thereby
    1.
    发明授权
    Plasma enhanced chemical vapor deposition (PECVD) method of forming vanadium oxide films and vanadium oxide thin-films prepared thereby 有权
    等离子体增强化学气相沉积(PECVD)法制备钒氧化物薄膜和氧化钒薄膜

    公开(公告)号:US6156395A

    公开(公告)日:2000-12-05

    申请号:US325146

    申请日:1999-06-03

    摘要: A method is disclosed of forming a vanadium oxide film on a substrate utilizing plasma enhanced chemical vapor deposition. The method includes positioning a substrate within a plasma reaction chamber and then forming a precursor gas comprised of a vanadium-containing chloride gas in an inert carrier gas. This precursor gas is then mixed with selected amounts of hydrogen and oxygen and directed into the reaction chamber. The amounts of precursor gas, oxygen and hydrogen are selected to optimize the final properties of the vanadium oxide film An rf plasma is generated within the reaction chamber to chemically react the precursor gas with the hydrogen and the oxygen to cause deposition of a vanadium oxide film on the substrate while the chamber deposition pressure is maintained at about one torr or less. Finally, the byproduct gases are removed from the plasma reaction chamber.

    摘要翻译: 公开了一种利用等离子体增强化学气相沉积在基片上形成氧化钒薄膜的方法。 该方法包括将衬底定位在等离子体反应室内,然后在惰性载气中形成由含钒氯化物气体组成的前体气体。 然后将该前体气体与选定量的氢气和氧气混合并引入反应室。 选择前体气体,氧气和氢气的量以优化氧化钒膜的最终性能在反应室内产生rf等离子体,以使前体气体与氢气和氧化物反应以使氧化钒膜沉积 在室沉积压力保持在约一托或更小的情况下在基板上。 最后,从等离子体反应室中除去副产物气体。

    Welding/sealing glass-enclosed space in a vacuum
    2.
    发明授权
    Welding/sealing glass-enclosed space in a vacuum 失效
    在真空中焊接/密封玻璃封闭空间

    公开(公告)号:US5489321A

    公开(公告)日:1996-02-06

    申请号:US274788

    申请日:1994-07-14

    IPC分类号: C03B23/24 C03B23/203

    摘要: A method of welding and sealing the edges of two juxtaposed glass sheets together to seal a vacuum space between the sheets comprises the steps of positioning a radiation absorbant material, such as FeO, VO.sub.2, or NiO, between the radiation transmissive glass sheets adjacent the edges and then irradiating the absorbant material, preferably with a laser beam, through at least one of the glass sheets. Heat produced by the absorbed radiation in the absorbant material melts glass in the portions of both glass sheets that are adjacent the absorbant material, and the melted glass from both sheets flows together to create the weld when the melted glass cools and hardens. The absorbant material can be dissolved and diffused into the melted glass to the extent that it no longer absorbs enough energy to keep the glass melted, thus, with appropriate proportioning of absorbant material to source energy power and welding heat needed, the process can be made self-stopping.

    摘要翻译: 将两个并置的玻璃板的边缘焊接和密封在一起以密封片材之间的真空空间的方法包括以下步骤:在邻近边缘的辐射透射玻璃板之间放置诸如FeO,VO2或NiO的辐射吸收材料 然后通过至少一个玻璃板照射吸收材料,优选用激光束照射。 由吸收材料中的吸收辐射产生的热量在与吸收材料相邻的玻璃板的部分中熔化玻璃,并且当熔融的玻璃冷却和硬化时,来自两片的熔融玻璃流动在一起形成焊缝。 吸收剂材料可以溶解并扩散到熔融玻璃中,使其不再吸收足够的能量以保持玻璃熔化,从而通过适当的吸收材料配比对源能量和所需的焊接热量进行处理, 自我停止

    Laser sealed vacuum insulation window
    3.
    发明授权
    Laser sealed vacuum insulation window 失效
    激光密封真空保温窗

    公开(公告)号:US4683154A

    公开(公告)日:1987-07-28

    申请号:US767218

    申请日:1985-08-19

    摘要: A laser sealed evacuated window panel is comprised of two glass panes held spaced apart in relation to each other by a plurality of spherical glass beads and glass welded around the edges to provide an evacuated space between the glass panes that is completely glass sealed from the exterior. The glass welded edge seal is obtained by welding the edges of the glass panes together with a laser beam while the glass panes and bead spacers are positioned in a vacuum furnace and heated to the annealing point of the glass to avoid stress fracture in the area of the glass weld. The laser welding in the furnace can be directed around the perimeter of the glass panel by a combination of rotating the glass panel and linearly translating or aiming the laser with a relay mirror.

    摘要翻译: 激光密封的抽真空窗板由两个玻璃板组成,两个玻璃板通过多个球形玻璃珠彼此隔开间隔开,并且玻璃焊接在边缘周围,以在玻璃板之间提供抽真空的空间,玻璃板从外部完全玻璃密封 。 玻璃焊接边缘密封是通过将玻璃板的边缘与激光束焊接在一起而获得的,同时将玻璃板和珠粒间隔件定位在真空炉中并加热到玻璃的退火点,以避免在 玻璃焊接。 炉中的激光焊接可以通过旋转玻璃面板并使激光器与中继反射镜线性地平移或对准的组合而围绕玻璃面板的周边定向。

    Method for charging a hydrogen getter
    4.
    发明授权
    Method for charging a hydrogen getter 失效
    氢吸气剂充气方法

    公开(公告)号:US5807533A

    公开(公告)日:1998-09-15

    申请号:US772484

    申请日:1996-12-23

    IPC分类号: C01B3/00 C01B6/24

    摘要: A method for charging a sample of either a permanent or reversible getter material with a high concentration of hydrogen while maintaining a base pressure below 10.sup.-4 torr at room temperature involves placing the sample of hydrogen getter material in a chamber, activating the sample of hydrogen getter material, overcharging the sample of getter material through conventional charging techniques to a high concentration of hydrogen, and then subjecting the sample of getter material to a low temperature vacuum bake-out process. Application of the method results in a reversible hydrogen getter which is highly charged to maximum capacities of hydrogen and which concurrently exhibits minimum hydrogen vapor pressures at room temperatures.

    摘要翻译: 在室温下将基础压力保持在10-4乇以下的情况下,将具有高浓度氢气的永久或可逆吸气剂材料的样品充入的方法包括将吸气剂材料样品置于室中,激活氢样品 吸气剂材料,通过常规装料技术将吸气剂样品过度充电到高浓度的氢气,然后将吸气剂样品进行低温真空烘烤处理。 该方法的应用产生了可逆氢吸气剂,其高度充电至氢的最大容量,并且其在室温下同时呈现最小的氢蒸汽压力。

    Low voltage solid-state lateral coloration electrochromic device
    6.
    发明授权
    Low voltage solid-state lateral coloration electrochromic device 失效
    低电压固态侧面着色电致变色器件

    公开(公告)号:US4645308A

    公开(公告)日:1987-02-24

    申请号:US685177

    申请日:1984-12-21

    摘要: A solid-state transition metal oxide device comprising a plurality of lay having a predisposed orientation including an electrochromic oxide layer. Conductive material including anode and cathode contacts is secured to the device. Coloration is actuated within the electrochromic oxide layer after the application of a predetermined potential between the contacts. The coloration action is adapted to sweep or dynamically extend across the length of the electrochromic oxide layer.

    摘要翻译: 一种固态过渡金属氧化物装置,其包括具有包含电致变色氧化物层的易位取向的多个层。 包括阳极和阴极触点的导电材料固定在该装置上。 在触点之间施加预定电位之后,在电致变色氧化物层内致动着色。 着色作用适于在电致变色氧化物层的长度上扫掠或动态地延伸。

    Simultaneous laser cutting and welding of metal foil to edge of a plate
    9.
    发明授权
    Simultaneous laser cutting and welding of metal foil to edge of a plate 失效
    金属箔同时激光切割和焊接到板的边缘

    公开(公告)号:US5500503A

    公开(公告)日:1996-03-19

    申请号:US285700

    申请日:1994-08-04

    摘要: A method of welding an ultra-thin foil to the edge of a thicker sheet to form a vacuum insulation panel comprising the steps of providing an ultra-thin foil having a thickness less than 0.002, providing a top plate having an edge and a bottom plate having an edge, clamping the foil to the edge of the plate wherein the clamps act as heat sinks to distribute heat through the foil, providing a laser, moving the laser relative to the foil and the plate edges to form overlapping weld beads to weld the foil to the plate edges while simultaneously cutting the foil along the weld line formed by the overlapping beads.

    摘要翻译: 将超薄箔焊接到较厚片材的边缘以形成真空绝热面板的方法包括以下步骤:提供厚度小于0.002的超薄箔片,提供具有边缘的顶板和底板 具有边缘,将箔夹紧到板的边缘,其中夹具用作散热器以将热量分布通过箔,提供激光器,使激光相对于箔和板边缘移动以形成重叠的焊缝,以焊接 同时沿着由重叠珠形成的焊接线切割箔,同时切割板边缘。