公开(公告)号：US20140319676A1

公开(公告)日：2014-10-30

申请号：US14327985

申请日：2014-07-10

Applicant: CANON ANELVA CORPORATION

Inventor： Akira MATSUO ,  Yohsuke SHIBUYA ,  Naomu KITANO ,  Eitaroh MORIMOTO ,  Koji YAMAZAKI ,  Yu SATO ,  Takuya SEINO

IPC: H01L29/49 ,  H01L21/28

CPC classification number: H01L29/4966 ,  C23C14/046 ,  C23C14/345 ,  C23C14/35 ,  C23C14/5826 ,  C23C14/586 ,  H01J37/3402 ,  H01J37/3447 ,  H01J37/3452 ,  H01L21/28088 ,  H01L21/2855 ,  H01L21/32051 ,  H01L21/321 ,  H01L21/76843 ,  H01L21/76856 ,  H01L21/823842 ,  H01L29/66545

Abstract: It is an object of the present invention to provide an electronic component manufacturing method, capable of suppressing reduction in a trench opening and suppressing diffusion of a metal film embedded in a trench. An embodiment of the present invention is an electronic component manufacturing method, including the steps of: forming a first electrode constituting layer (e.g., a TiAl film) in a recess (e.g., a trench) formed in a workpiece; forming an ultrathin barrier layer (e.g., a TiAlN film) by forming a nitride layer by plasma-nitriding a surface of the first electrode constituting layer; and forming a second electrode constituting layer (e.g., an Al wiring layer) on the ultrathin barrier layer.

Abstract translation: 本发明的目的是提供一种电子部件制造方法，能够抑制沟槽开口的减少和抑制嵌入在沟槽中的金属膜的扩散。 本发明的一个实施例是一种电子部件制造方法，包括以下步骤：在形成在工件中的凹部（例如沟槽）中形成第一电极构成层（例如TiAl膜）; 通过等离子体氮化第一电极构成层的表面形成氮化物层来形成超薄势垒层（例如，TiAlN膜）; 以及在所述超薄阻挡层上形成第二电极构成层（例如Al布线层）。

公开(公告)号：US20130277213A1

公开(公告)日：2013-10-24

申请号：US13922353

申请日：2013-06-20

Applicant: CANON ANELVA CORPORATION

Inventor： Yohsuke SHIBUYA

IPC: C23C14/35

CPC classification number: H01J37/3476 ,  B08B7/00 ,  C23C14/3407 ,  C23C14/3414 ,  C23C14/35 ,  C23C14/564 ,  H01J37/3405 ,  H01J37/3455 ,  H01J37/3461 ,  H01J37/3482 ,  H01J37/3485

Abstract: The present invention provides a means capable of determining the surface state of the target to execute accurate and quick cleaning of necessary part. The means includes: a magnet unit capable of forming a magnetic field on the surface of a target; a rotary system capable of driving the magnet unit of change the magnetic field pattern; and an ammeter configured to measure target current when the magnetic field is formed by the magnet unit and discharge voltage is applied to a target electrode to which the target is attached. The position of the magnet unit is variously changed by the rotary system, and the target current is measured at each position and compared with a reference value. It is then determined whether cleaning is necessary at each position, so that cleaning can be performed only for necessary part.

Abstract translation: 本发明提供一种能够确定目标的表面状态以执行对必要部件的准确和快速清洁的装置。 该装置包括：能够在目标表面上形成磁场的磁体单元; 能够驱动所述磁体单元以改变所述磁场图案的旋转系统; 以及电流计，被配置为当由磁体单元形成磁场时测量目标电流，并且对目标附着的目标电极施加放电电压。 通过旋转系统不同地改变磁体单元的位置，并且在每个位置测量目标电流并与参考值进行比较。 然后确定是否需要在每个位置进行清洁，从而可以仅对必需的部分执行清洁。