公开(公告)号：US10580725B2

公开(公告)日：2020-03-03

申请号：US15977195

申请日：2018-05-11

Applicant: Corning Incorporated

Inventor： Tian Huang ,  Yuhui Jin ,  Matthew Evan Wilhelm

IPC: H01L23/498 ,  H01L23/15 ,  H01L21/48 ,  H01L23/00

Abstract: Articles and semiconductor packages that incorporate glass-based substrates are disclosed, as well as methods of forming thereof. An article includes a glass-based substrate comprising first and second major surfaces spaced a distance from and parallel to each other, and a tapered via extending through the substrate. The tapered via includes a cross section that is symmetrical about a plane that is between and equidistant to the first and second major surfaces of the glass-based substrate and an interior wall with a first tapered region and a second tapered region positioned between the first major surface and the plane. The respective slopes of the first and second tapered regions are constant and the slope of the first tapered region is not equal to the slope of the second tapered region.

公开(公告)号：US11062986B2

公开(公告)日：2021-07-13

申请号：US16749503

申请日：2020-01-22

Applicant: Corning Incorporated

Inventor： Tian Huang ,  Yuhui Jin ,  Matthew Evan Wilhelm

IPC: H01L23/498 ,  H01L23/15 ,  H01L21/48 ,  H01L23/00

Abstract: Articles and semiconductor packages that incorporate glass-based substrates are disclosed, as well as methods of forming thereof. An article includes a glass-based substrate comprising first and second major surfaces spaced a distance from and parallel to each other, and a tapered via extending through the substrate. The tapered via includes a cross section that is symmetrical about a plane that is between and equidistant to the first and second major surfaces of the glass-based substrate and an interior wall with a first tapered region and a second tapered region positioned between the first major surface and the plane. The respective slopes of the first and second tapered regions are constant and the slope of the first tapered region is not equal to the slope of the second tapered region.

公开(公告)号：US10438039B2

公开(公告)日：2019-10-08

申请号：US16131247

申请日：2018-09-14

Applicant: CORNING INCORPORATED

Inventor： Yuhui Jin ,  Matthew Evan Wilhelm

IPC: C03C15/00 ,  G06K9/00 ,  C03B33/02 ,  B23K26/53 ,  B23K26/00 ,  C03C23/00 ,  H05K1/03 ,  H05K1/11 ,  H05K3/00 ,  H05K3/22 ,  H05K3/40 ,  H05K5/00 ,  C03C17/36 ,  C03C21/00 ,  B23K26/382 ,  B23K26/386 ,  B23K26/402 ,  B23K101/42 ,  B23K103/00

Abstract: A glass sensor substrate including metallizable through vias and related process is provided. The glass substrate has a first major surface, a second major surface and an average thickness of greater than 0.3 mm. A plurality of etch paths are created through the glass substrate by directing a laser at the substrate in a predetermined pattern. A plurality of through vias through the glass substrate are etched along the etch paths using a hydroxide based etching material. The hydroxide based etching material highly preferentially etches the substrate along the etch path. Each of the plurality of through vias is long compared to their diameter for example such that a ratio of the thickness of the glass substrate to a maximum diameter of each of the through vias is greater than 8 to 1.

公开(公告)号：US20180342450A1

公开(公告)日：2018-11-29

申请号：US15977195

申请日：2018-05-11

Applicant: Corning Incorporated

Inventor： Tian Huang ,  Yuhui Jin ,  Matthew Evan Wilhelm

IPC: H01L23/498 ,  H01L23/00 ,  H01L21/48

CPC classification number: H01L23/49827 ,  H01L21/486 ,  H01L21/4864 ,  H01L23/15 ,  H01L23/49838 ,  H01L24/16 ,  H01L2224/16235

Abstract: Articles and semiconductor packages that incorporate glass-based substrates are disclosed, as well as methods of forming thereof An article includes a glass-based substrate comprising first and second major surfaces spaced a distance from and parallel to each other, and a tapered via extending through the substrate. The tapered via includes a cross section that is symmetrical about a plane that is between and equidistant to the first and second major surfaces of the glass-based substrate and an interior wall with a first tapered region and a second tapered region positioned between the first major surface and the plane. The respective slopes of the first and second tapered regions are constant and the slope of the first tapered region is not equal to the slope of the second tapered region.

公开(公告)号：US20200161232A1

公开(公告)日：2020-05-21

申请号：US16749503

申请日：2020-01-22

Applicant: Corning Incorporated

Inventor： Tian Huang ,  Yuhui Jin ,  Matthew Evan Wilhelm

IPC: H01L23/498 ,  H01L23/00 ,  H01L21/48 ,  H01L23/15

Abstract: Articles and semiconductor packages that incorporate glass-based substrates are disclosed, as well as methods of forming thereof. An article includes a glass-based substrate comprising first and second major surfaces spaced a distance from and parallel to each other, and a tapered via extending through the substrate. The tapered via includes a cross section that is symmetrical about a plane that is between and equidistant to the first and second major surfaces of the glass-based substrate and an interior wall with a first tapered region and a second tapered region positioned between the first major surface and the plane. The respective slopes of the first and second tapered regions are constant and the slope of the first tapered region is not equal to the slope of the second tapered region.

公开(公告)号：US20190012514A1

公开(公告)日：2019-01-10

申请号：US16131247

申请日：2018-09-14

Applicant: CORNING INCORPORATED

Inventor： Yuhui Jin ,  Matthew Evan Wilhelm

IPC: G06K9/00 ,  C03C17/36 ,  B23K26/382 ,  B23K26/53 ,  B23K26/00 ,  H05K5/00 ,  H05K3/40 ,  H05K3/22 ,  H05K3/00 ,  H05K1/11 ,  H05K1/03 ,  C03C23/00 ,  C03C21/00 ,  C03C15/00 ,  C03B33/02 ,  B23K26/402 ,  B23K26/386 ,  B23K101/42 ,  B23K103/00

CPC classification number: G06K9/00013 ,  B23K26/0006 ,  B23K26/382 ,  B23K26/386 ,  B23K26/389 ,  B23K26/402 ,  B23K26/53 ,  B23K2101/42 ,  B23K2103/54 ,  C03B33/0222 ,  C03C15/00 ,  C03C17/36 ,  C03C17/3649 ,  C03C17/3668 ,  C03C21/002 ,  C03C23/0025 ,  H05K1/0306 ,  H05K1/115 ,  H05K3/002 ,  H05K3/0029 ,  H05K3/22 ,  H05K3/4038 ,  H05K5/0017 ,  H05K2201/09509 ,  H05K2201/10151

Abstract: A glass sensor substrate including metallizable through vias and related process is provided. The glass substrate has a first major surface, a second major surface and an average thickness of greater than 0.3 mm. A plurality of etch paths are created through the glass substrate by directing a laser at the substrate in a predetermined pattern. A plurality of through vias through the glass substrate are etched along the etch paths using a hydroxide based etching material. The hydroxide based etching material highly preferentially etches the substrate along the etch path. Each of the plurality of through vias is long compared to their diameter for example such that a ratio of the thickness of the glass substrate to a maximum diameter of each of the through vias is greater than 8 to 1.

公开(公告)号：US20170103249A1

公开(公告)日：2017-04-13

申请号：US15286803

申请日：2016-10-06

Applicant: CORNING INCORPORATED

Inventor： Yuhui Jin ,  Matthew Evan Wilhelm

IPC: G06K9/00 ,  C03C15/00 ,  H05K3/00 ,  H05K3/40 ,  B23K26/53 ,  H05K3/22 ,  H05K1/11 ,  H05K5/00 ,  B23K26/00 ,  C03C23/00 ,  H05K1/03

CPC classification number: G06K9/00013 ,  B23K26/0006 ,  B23K26/382 ,  B23K26/386 ,  B23K26/389 ,  B23K26/402 ,  B23K26/53 ,  B23K2101/42 ,  B23K2103/54 ,  C03B33/0222 ,  C03C15/00 ,  C03C17/36 ,  C03C17/3649 ,  C03C17/3668 ,  C03C21/002 ,  C03C23/0025 ,  H05K1/0306 ,  H05K1/115 ,  H05K3/002 ,  H05K3/0029 ,  H05K3/22 ,  H05K3/4038 ,  H05K5/0017 ,  H05K2201/09509 ,  H05K2201/10151

Abstract: A glass sensor substrate including metallizable through vias and related process is provided. The glass substrate has a first major surface, a second major surface and an average thickness of greater than 0.3 mm. A plurality of etch paths are created through the glass substrate by directing a laser at the substrate in a predetermined pattern. A plurality of through vias through the glass substrate are etched along the etch paths using a hydroxide based etching material. The hydroxide based etching material highly preferentially etches the substrate along the etch path. Each of the plurality of through vias is long compared to their diameter for example such that a ratio of the thickness of the glass substrate to a maximum diameter of each of the through vias is greater than 8 to 1.