Microfabricated microscope assembly
    3.
    发明授权
    Microfabricated microscope assembly 失效
    微型显微镜组件

    公开(公告)号:US5015850A

    公开(公告)日:1991-05-14

    申请号:US368664

    申请日:1989-06-20

    摘要: A microfabricated microscope assembly including a piezoelectric bimorph cantilever arm mounted at one end to a first substrate. The free end of the canitlever arm has a tip mounted thereto for scanning a scanned surface mounted on a second substrate. The cantilever arm and the substrate are configured to carry out a predetermined write or read mode of operation, such as scanning tunneling microscopy or atomic force microscopy. The two substrates are spaced apart a fixed distance by spacer feet which project from one of the substrates and which have their ends fixed to ther surface of the other substrate by eutectic, aniodic, or adhesive bonding. An array of microfabricated microscope assemblies is formed using a plurality of individual assemblies. A number of different write/read modes of operation are accommodated, such as charge storage, molecular attachment, or magnetic domains. An array of piezoelectric cantilever arms having tips fixed to the free ends thereof and mounted to a substrate form are used to scan a scanned surface. The array is moved laterally with respect to the scanned surface using mechanical actuators as micropositioners for coarse positioning and using the piezoelectric cantilever arms for fine positioning.

    摘要翻译: 一种微加工显微镜组件,其包括一端安装在第一基板上的压电双压电晶片悬臂。 角色手臂的自由端具有安装在其上的尖端,用于扫描安装在第二基底上的扫描表面。 悬臂和衬底被配置为执行预定的写入或读取操作模式,例如扫描隧道显微镜或原子力显微镜。 两个基板通过间隔脚间隔一定距离,该间隔脚从一个基底突出,并且其端部通过共晶,非碘化或粘合粘合固定在另一个基底的其它表面上。 使用多个单独的组件形成微阵列显微镜组件阵列。 容纳许多不同的写入/读取操作模式,例如电荷存储,分子附着或磁畴。 使用具有固定到其自由端并安装到基板形式的顶端的压电悬臂的阵列来扫描扫描的表面。 使用机械致动器作为用于粗定位的微定位器并使用压电悬臂来进行精细定位,阵列相对于扫描表面横向移动。

    Microfabricated cantilever stylus with integrated conical tip
    5.
    发明授权
    Microfabricated cantilever stylus with integrated conical tip 失效
    具有集成锥形尖端的微型悬臂式触控笔

    公开(公告)号:US4968585A

    公开(公告)日:1990-11-06

    申请号:US368580

    申请日:1989-06-20

    CPC分类号: G01Q60/38 B82Y35/00 G03F7/00

    摘要: A cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.

    摘要翻译: 提供具有整体形成的锥形尖端的悬臂式触针用于原子力显微镜AFM。 用于形成触针的方法包括在硅衬底的表面上形成圆形掩模图案,并各向异性地蚀刻硅以在掩模图案下形成柱。 然后将该柱进行各向同性蚀刻以产生锥形硅尖端模具。 在本发明的一个实施例中,硅衬底和圆锥形硅尖端模具被热氧化以形成悬臂式触针,其包括具有固定到其自由端的锥形尖端的悬臂。 在本发明的另一个实施例中,硅衬底和圆锥形硅尖端模具用电介质材料的薄膜涂覆以形成具有锥形尖端的悬臂式触笔。 在该实施例中,触针的背面涂覆有导电材料,并且将强电场施加到尖端,以使导电材料的电迁移到尖端的点。

    Shingled recording systems using multiple pass write, single pass read architecture
    6.
    发明授权
    Shingled recording systems using multiple pass write, single pass read architecture 有权
    嵌入式录音系统采用多通写,单通读结构

    公开(公告)号:US08786969B2

    公开(公告)日:2014-07-22

    申请号:US13251031

    申请日:2011-09-30

    IPC分类号: G11B20/10

    CPC分类号: G11B5/012 G11B5/746

    摘要: In one embodiment, a magnetic data storage system includes a bit patterned magnetic medium, wherein centers of bits in adjacent data tracks do not lie on a common line in a cross-track direction, a magnetic head having a writer element having a width greater than a width of a data track in a track width direction adapted for writing data successively to at least two adjacent data tracks of the magnetic medium, and a reader element having a width larger than the width of a data track in the track width direction adapted for reading data concurrently from the at least two adjacent data tracks of the magnetic medium in a single pass, a drive mechanism for passing the magnetic medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head.

    摘要翻译: 在一个实施例中,磁数据存储系统包括位图形磁介质,其中相邻数据磁道中的位中心不位于交叉磁道方向上的公共线上,磁头具有写入器元件,宽度大于 适于将数据连续地写入磁介质的至少两个相邻数据轨道的轨道宽度方向上的数据轨道的宽度,以及宽度大于轨道宽度方向上的数据轨道的宽度的读取器元件, 在单次通过中从磁介质的至少两个相邻数据轨道同时读取数据,用于使磁介质通过磁头的驱动机构,以及电耦合到磁头的控制器,用于控制磁头的操作。

    Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks
    7.
    发明授权
    Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
    使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法

    公开(公告)号:US08501022B2

    公开(公告)日:2013-08-06

    申请号:US13287761

    申请日:2011-11-02

    IPC分类号: B44C1/22

    摘要: A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.

    摘要翻译: 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。 该方法使用嵌段共聚物(BCP)的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。 线和/或环的图案具有垂直于衬底的薄片对准的BCP组分,而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除,另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具,然后用于制造主磁盘。

    FABRICATION OF BIT PATTERNED MEDIA USING MICROCONTACT PRINTING
    8.
    发明申请
    FABRICATION OF BIT PATTERNED MEDIA USING MICROCONTACT PRINTING 审中-公开
    使用微孔印刷制作印刷图案的介质

    公开(公告)号:US20130084468A1

    公开(公告)日:2013-04-04

    申请号:US13251125

    申请日:2011-09-30

    IPC分类号: G11B5/65 B05D5/12

    摘要: A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes selectively depositing a self assembled monolayer over a seed layer and then oxidizing the deposited self assembled monolayer. The self-assembled monolayer can be deposited by use of a stamp to form a pattern covering areas where a non-magnetic segregant (such as an oxide) is to be formed and openings where a magnetic material is to be formed. A magnetic alloy and a segregant (such as an oxide) are then co-sputtered. The magnetic alloy grows only or selectively over the seed layer, whereas the segregant grows only or selectively over the oxidized self-assembled monolayer.

    摘要翻译: 一种用于制造用于磁数据记录的位图形磁介质的方法。 该方法包括在种子层上选择性地沉积自组装单层,然后氧化沉积的自组装单层。 可以通过使用印模来沉积自组装单层以形成覆盖要形成非磁性分离器(例如氧化物)的区域的图案,并且形成磁性材料的开口。 然后将磁性合金和分离剂(例如氧化物)共溅射。 磁性合金仅在种子层上生长或选择性地生长,而分离器在氧化的自组装单层上仅生长或选择性生长。

    BIT PATTERNED MAGNETIC MEDIA FABRICATED BY TEMPLATED GROWTH FROM A PRINTED TOPOGRAPHIC PATTERN
    9.
    发明申请
    BIT PATTERNED MAGNETIC MEDIA FABRICATED BY TEMPLATED GROWTH FROM A PRINTED TOPOGRAPHIC PATTERN 审中-公开
    由打印的地形图形模拟生长形成的位图形磁化介质

    公开(公告)号:US20130081937A1

    公开(公告)日:2013-04-04

    申请号:US13370131

    申请日:2012-02-09

    IPC分类号: C23C14/34 C01B13/14 B01J19/12

    摘要: A method for manufacturing a bit patterned magnetic media for magnetic data recording. The method includes patterning a topography that includes an array of raised regions separated by a recessed portion. The array can be patterned by micro-printing using a stamp that has raised islands. The raised regions can have a height of 1 to 5 nm as measured from the recessed region. A magnetic alloy and a non-magnetic segregant are then co-sputtered. The magnetic alloy preferentially grows over the raised portions and the non-magnetic segregant grow preferentially over the recessed region between the raised portions.

    摘要翻译: 一种用于制造用于磁数据记录的位图形磁介质的方法。 该方法包括图案化,其包括由凹部分开的凸起区域的阵列。 该阵列可以通过使用凸起凸起的印模进行微印而进行图案化。 凸起区域可以具有从凹陷区域测量的1至5nm的高度。 然后将磁性合金和非磁性分离器共溅射。 磁性合金优先生长在凸起部分之上,非磁性分离器优先在凸起部分之间的凹陷区域上生长。

    SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA
    10.
    发明申请
    SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA 有权
    用于制作图形磁介质的自组装结构

    公开(公告)号:US20110215070A1

    公开(公告)日:2011-09-08

    申请号:US13108515

    申请日:2011-05-16

    IPC分类号: B29C33/42 B05D5/12

    摘要: Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.

    摘要翻译: 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法,执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到(即蚀刻)数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域,并将第二数据模式传送到数据区域。 因此,通过光刻工艺定义伺服图案,同时通过光刻工艺和自组装的组合来定义数据图案。