Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating
    5.
    发明授权
    Method for producing a hydrophobic coating, device for implementing said method and support provided with a hydrophobic coating 有权
    用于制备疏水涂层的方法,用于实施所述方法的装置和具有疏水涂层的支撑体

    公开(公告)号:US08282997B2

    公开(公告)日:2012-10-09

    申请号:US11597658

    申请日:2005-05-26

    IPC分类号: C23C14/02 H05H1/00 C04B41/00

    摘要: The invention concerns a method for producing a coating on a support, in particular a glass support, wherein a thin-film metal oxide is deposited on the support, said thin film being subjected to an etching process to roughen its surface, a second coating capable of adhering to the first metal oxide film is then applied on the roughened surface. The invention is characterized in that it consists in depositing a first doped metal oxide or metal oxynitride doped with at least a second metal oxide or metal oxynitride, the second metal oxide or metal oxynitride being distributed in the deposited film. During the etching process, a plasma-activated gas is used which removes at least a second metal oxide or metal oxynitride less than the first metal oxide or metal oxynitride so as to form, after the etching process, on the surface raised irregularities consisting of at least a second metal oxide or metal oxynitride.

    摘要翻译: 本发明涉及一种用于在载体上制备涂层的方法,特别是一种玻璃载体,其中在载体上沉积薄膜金属氧化物,所述薄膜经受蚀刻处理使其表面变粗糙,第二涂层能够 然后将第一金属氧化物膜附着在粗糙表面上。 本发明的特征在于其中沉积掺杂有至少第二金属氧化物或金属氮氧化物的第一掺杂金属氧化物或金属氮氧化物,第二金属氧化物或金属氮氧化物分布在沉积膜中。 在蚀刻过程中,使用等离子体活化气体,其除去比第一金属氧化物或金属氧氮化物少的至少第二金属氧化物或金属氮氧化物,以在蚀刻工艺之后形成由在 至少第二金属氧化物或金属氮氧化物。