公开(公告)号：US20110049369A1

公开(公告)日：2011-03-03

申请号：US12680286

申请日：2008-09-29

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

IPC分类号： G01J5/02 ,  G01R3/00

CPC分类号： H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

摘要： A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.

摘要翻译： 用于检测热辐射的装置具有膜和至少两个检测器元件，其分别设置为将热辐射转换成电信号并且彼此相邻地安装在膜上，其中至少一个散热路径设置在 膜的侧面朝向检测器元件和/或在膜的远离检测器元件的侧面上，该散热路径具有比膜更高的导热性并且与导热的检测器元件连接 通过隔膜使得热量可以从散热路径从检测器元件排出，从而检测器元件的响应时间短; 并且其中集成在所述膜中的至少一个具有比所述膜低的热导率并且在所述检测器元件之间延伸的热屏障被提供，使得通过所述膜从所述一个检测器元件到另一检测器元件的热传导被 热障; 从而检测器元件的串扰低。

公开(公告)号：US08969811B2

公开(公告)日：2015-03-03

申请号：US12680286

申请日：2008-09-29

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

IPC分类号： G01J5/02 ,  H01L31/101 ,  G01J5/04 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02

CPC分类号： H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

摘要： A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.

摘要翻译： 用于检测热辐射的装置具有膜和至少两个检测器元件，其分别设置为将热辐射转换成电信号并且彼此相邻地安装在膜上，其中至少一个散热路径设置在 膜的侧面朝向检测器元件和/或在膜的远离检测器元件的侧面上，该散热路径具有比膜更高的导热性并且与导热的检测器元件连接 通过隔膜使得热量可以从散热路径从检测器元件排出，从而检测器元件的响应时间短; 并且其中集成在所述膜中的至少一个具有比所述膜低的热导率并且在所述检测器元件之间延伸的热屏障被提供，使得通过所述膜从所述一个检测器元件到另一检测器元件的热传导被 热障; 从而检测器元件的串扰低。

公开(公告)号：US20100264311A1

公开(公告)日：2010-10-21

申请号：US12601613

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

IPC分类号： G01J5/10 ,  H01L21/02

CPC分类号： H01L27/16 ,  G01J5/04 ,  G01J5/045 ,  G01J5/10 ,  G01J5/34 ,  H01L27/14618 ,  H01L2924/0002 ,  H01L2924/00

摘要： In a device for the detection of thermal radiation which and a method for production of such a device, a stack is formed with at least one detector support having at least one detector element for the conversion of the thermal radiation into an electric signal, at least one circuit support with at least one read-out circuit for reading out the electrical signal and at least one cover to shield the detector element, wherein the detector support and the cover are so arranged with respect to one another that a first stack cavity bounded by the detector support and the cover is provided between the detector element of the detector support and the cover and that the circuit support and the detector support are so arranged with respect to one another that at least one second stack cavity bounded by the circuit support and the detector support is provided between detector support and the circuit support and that the first hollow stack support and/or the second stack cavity is evacuated or can be evacuated. Preferably, the detector support, circuit support and cover are made of silicon. The manufacturing operation takes place at wafer-level. Functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detector, presence reporters and thermal-image cameras.

摘要翻译： 在用于检测热辐射的装置及其制造方法中，堆叠形成有至少一个具有至少一个用于将热辐射转换成电信号的检测器元件的检测器支架，至少 一个电路支撑件，具有用于读出电信号的至少一个读出电路和用于屏蔽检测器元件的至少一个盖子，其中检测器支撑件和盖子相对于彼此布置成使得第一堆叠腔体被 检测器支撑件和盖被设置在检测器支撑件的检测器元件和盖之间，并且电路支撑件和检测器支撑件相对于彼此布置成使得由电路支撑件限定的至少一个第二堆叠空腔和 检测器支撑件设置在检测器支撑件和电路支撑件之间，并且第一中空堆叠支撑件和/或第二堆叠腔体被抽空或可以 被疏散 优选地，检测器支撑件，电路支撑件和盖子由硅制成。 制造操作在晶圆级进行。 功能化的硅衬底彼此堆叠，牢固地结合在一起并随后被细分。 优选地，检测器元件是热电探测器元件。 该装置在运动检测器，存在记录器和热像摄像机中找到应用。

公开(公告)号：US09279730B2

公开(公告)日：2016-03-08

申请号：US12601556

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

IPC分类号： G01J5/02 ,  G01J5/34 ,  G01J5/14 ,  G01J5/22 ,  G01J5/04 ,  G01N21/01 ,  H01L27/146 ,  H01L41/09 ,  G01J5/00 ,  G01J5/20

CPC分类号： G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

摘要： In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalized silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.

摘要翻译： 在用于检测热辐射的装置中，提供至少一个膜，其上安装有至少一个热检测器元件，用于将热辐射转换成电信号，以及至少一个用于承载膜的电路支架， 一个用于读出电信号的读出电路，检测器元件和读出电路由通过膜的电接点电连接在一起。 此外，提供了一种通过以下方法步骤制造该装置的方法：a）提供具有检测器元件的膜和至少一个电气通过连接和提供电路支撑件，以及b）将膜和 电路支撑件以检测器元件和读出电路通过穿过膜的电接触电连接在一起的方式。 生产活性优选在晶片级进行：功能化的硅衬底相互堆叠，彼此牢固地结合，然后分成单个元件。 优选地，检测器元件包括热电检测元件。 该设备在运动检测器，存在检测器和热成像相机中可以应用。

公开(公告)号：US20110006211A1

公开(公告)日：2011-01-13

申请号：US12601556

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

IPC分类号： G01J5/00 ,  B32B37/02 ,  B32B38/10 ,  B32B37/24

CPC分类号： G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

摘要： In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalised silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.

摘要翻译： 在用于检测热辐射的装置中，提供至少一个膜，其上安装有至少一个热检测器元件，用于将热辐射转换成电信号，以及至少一个用于承载膜的电路支架， 一个用于读出电信号的读出电路，检测器元件和读出电路由通过膜的电接点电连接在一起。 此外，提供了一种通过以下方法步骤制造该装置的方法：a）提供具有检测器元件的膜和至少一个电气通过连接和提供电路支撑件，以及b）将膜和 电路支撑件以检测器元件和读出电路通过穿过膜的电接触电连接在一起的方式。 生产活动优选在晶片级进行：功能化的硅衬底彼此堆叠，彼此牢固地结合，然后分成单个元件。 优选地，检测器元件包括热电检测元件。 该设备在运动检测器，存在检测器和热成像相机中可以应用。

公开(公告)号：US08487257B2

公开(公告)日：2013-07-16

申请号：US12601613

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

IPC分类号： G01J5/00

CPC分类号： H01L27/16 ,  G01J5/04 ,  G01J5/045 ,  G01J5/10 ,  G01J5/34 ,  H01L27/14618 ,  H01L2924/0002 ,  H01L2924/00

摘要： In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

摘要翻译： 在用于检测热辐射的装置和用于生产这种装置的方法中，叠层形成有具有用于将热辐射转换成电信号的检测器元件的检测器支架，具有读出电路的电路支架 用于读出电信号和盖以屏蔽检测器元件。 检测器支架和盖被布置成使得在检测器元件和盖之间形成第一堆叠空腔，并且在检测器支架和电路支架之间形成第二堆叠腔。 将第一堆叠空腔和/或第二堆叠空腔抽真空并密封。 在制造操作中，将功能化的硅衬底彼此堆叠，牢固地结合在一起并随后进行细分。 优选地，检测器元件是热电探测器元件。 该设备在运动检测器，存在记录器和热像摄像机中找到应用。

公开(公告)号：US20140049136A1

公开(公告)日：2014-02-20

申请号：US13985646

申请日：2012-02-13

申请人： Carsten Giebeler ,  Neil Conway

发明人： Carsten Giebeler ,  Neil Conway

IPC分类号： H01L41/316 ,  H01L41/187

CPC分类号： H01L41/1876 ,  C23C14/0036 ,  C23C14/088 ,  C23C14/3464 ,  H01L21/02197 ,  H01L21/02266 ,  H01L37/025 ,  H01L41/316

摘要： The invention relates to a method for producing the thin film made of lead zirconate titanate in a 111-oriented perovskite structure, comprising the following steps: providing a substrate having a substrate temperature above 450° C. and a lead target, a zirconium target, and a titanium target; applying the thin film by sputtering lead, zirconium, and titanium from the respective targets onto the substrate, wherein the total deposition rate of lead, zirconium, and titanium is greater than 10 nm/min, the deposition rate of zirconium is selected in such a way that the atomic concentration of zirconium with respect to the atomic concentration of zirconium together with titanium in the thin film is between 0.2 and 0.3, and the deposition rate of lead is selected to be sufficiently low, depending on the substrate temperature and the total deposition rate of lead, zirconium, and titanium, for an X-ray diffractometer graph of the 111-oriented lead zirconate titanate to have a significant peak value (19) in a diffraction angle range from 33 to 35.5°; and completing the thin film.

摘要翻译： 本发明涉及一种在111取向的钙钛矿结构中制造由锆钛酸铅制成的薄膜的方法，包括以下步骤：提供基片温度高于450℃的基片和引线靶，锆靶， 和钛靶; 通过将铅，锆和钛从各个靶溅射到衬底上来施加薄膜，其中铅，锆和钛的总沉积速率大于10nm / min，锆的沉积速率选择在 锆的原子浓度相对于锆的原子浓度与钛一起在薄膜中的原子浓度在0.2和0.3之间的方式，并且根据衬底温度和总沉积选择铅的沉积速率足够低 对于111取向铅锆钛酸铅的X射线衍射仪图，在33〜35.5°的衍射角范围内具有显着的峰值（19）的铅，锆和钛的比率; 并完成薄膜。

公开(公告)号：US08648303B2

公开(公告)日：2014-02-11

申请号：US13390057

申请日：2010-05-21

申请人： Carsten Giebeler ,  Neil Conway ,  Timothy John Chamberlain

发明人： Carsten Giebeler ,  Neil Conway ,  Timothy John Chamberlain

IPC分类号： G01J5/00

CPC分类号： G01J5/34 ,  G01J1/46 ,  G01J5/02 ,  G01J5/022 ,  G01J5/024 ,  H01L37/02

摘要： An infrared light detector having a sensor chip (4), which includes a thin-film element (5) made from a pyroelectrically sensitive material, having an electrical insulator (27), at least one electronic component (17, 18) having a thin-film design, which forms part of a readout electronics unit, and a thin-film membrane (2), on which the sensor chip (4) and the electronic component (17, 18) are mounted side by side in an integrated manner such that the electronic component (17, 18) is electrically conductively coupled to the thin-film element (5). A signal amplifier (22), with which, in co-operation with the electronic component (17, 18), an electrical signal emitted from the sensor chip (4) can be amplified, can be connected to the electronic component (17, 18).

摘要翻译： 一种具有传感器芯片（4）的红外光检测器，其包括由热敏材料制成的薄膜元件（5），具有电绝缘体（27），至少一个电子部件（17,18）具有薄的 形成读出电子单元的一部分的薄膜设计和薄膜（2），传感器芯片（4）和电子部件（17,18）以这样一体的方式并排安装在该薄膜上 电子部件（17,18）导电地耦合到薄膜元件（5）。 与电子部件（17,18）配合可以放大从传感器芯片（4）发射的电信号的信号放大器（22）可以连接到电子部件（17,18） ）。

公开(公告)号：US20110272582A1

公开(公告)日：2011-11-10

申请号：US13125527

申请日：2009-09-29

申请人： Carsten Giebeler

发明人： Carsten Giebeler

IPC分类号： G01J5/10 ,  H01L31/18

CPC分类号： G01J5/0014 ,  G01J5/04 ,  G01J5/045 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/10

摘要： An infrared light detector has a first substrate having a sensor chip thereon that has an exposure surface that can be irradiated with infrared light, the sensor chip converting the incident infrared light into an electrical signal. The infrared light detector also has a second substrate having a window therein that is located adjacent to the exposure surface of the sensor chip, the window masking infrared light of a predetermined wavelength. The size (dimensions) of the window and the distance of the window with respect to the exposure surface are dimensioned to cause infrared light passing through the window to completely strike the exposure area of the sensor chip.

摘要翻译： 红外光检测器具有第一基板，其上具有可以被红外光照射的曝光表面的传感器芯片，传感器芯片将入射的红外光转换成电信号。 红外光检测器还具有其中具有窗口的第二基板，其位于与传感器芯片的曝光表面相邻的位置，掩模具有预定波长的红外光。 窗口的尺寸（尺寸）和窗口相对于曝光表面的距离的尺寸被设计成使得穿过窗口的红外光完全地撞击传感器芯片的曝光区域。

公开(公告)号：US20070077368A1

公开(公告)日：2007-04-05

申请号：US10551647

申请日：2004-04-02

申请人： Alastair Buckley ,  Georg Bodammer ,  Carsten Giebeler

发明人： Alastair Buckley ,  Georg Bodammer ,  Carsten Giebeler

IPC分类号： C23C14/02 ,  C03C15/00 ,  C23F1/00

CPC分类号： H01L51/0017 ,  H01L51/56

摘要： A method of removing an organic, preferably polymeric, light-emitting material (4) from defined areas of a substrate (1) comprises the steps of arranging a shadow mask (5) to overlie the organic material other than in the defined areas, and applying a beam of ions (7) to the defined areas through the mask. The method is useful in forming organic light-emitting diode arrays.

摘要翻译： 从衬底（1）的限定区域去除有机的，优选聚合的发光材料（4）的方法包括以下步骤：将荫罩（5）布置在除了限定区域之外的有机材料上，以及 通过掩模将一束离子（7）施加到限定的区域。 该方法在形成有机发光二极管阵列方面是有用的。