公开(公告)号：US09279730B2

公开(公告)日：2016-03-08

申请号：US12601556

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

IPC分类号： G01J5/02 ,  G01J5/34 ,  G01J5/14 ,  G01J5/22 ,  G01J5/04 ,  G01N21/01 ,  H01L27/146 ,  H01L41/09 ,  G01J5/00 ,  G01J5/20

CPC分类号： G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

摘要： In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalized silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.

摘要翻译： 在用于检测热辐射的装置中，提供至少一个膜，其上安装有至少一个热检测器元件，用于将热辐射转换成电信号，以及至少一个用于承载膜的电路支架， 一个用于读出电信号的读出电路，检测器元件和读出电路由通过膜的电接点电连接在一起。 此外，提供了一种通过以下方法步骤制造该装置的方法：a）提供具有检测器元件的膜和至少一个电气通过连接和提供电路支撑件，以及b）将膜和 电路支撑件以检测器元件和读出电路通过穿过膜的电接触电连接在一起的方式。 生产活性优选在晶片级进行：功能化的硅衬底相互堆叠，彼此牢固地结合，然后分成单个元件。 优选地，检测器元件包括热电检测元件。 该设备在运动检测器，存在检测器和热成像相机中可以应用。

公开(公告)号：US20110006211A1

公开(公告)日：2011-01-13

申请号：US12601556

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Christian Paulus

IPC分类号： G01J5/00 ,  B32B37/02 ,  B32B38/10 ,  B32B37/24

CPC分类号： G01J5/34 ,  G01J5/00 ,  G01J5/0205 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/04 ,  G01J5/041 ,  G01J5/045 ,  G01J5/14 ,  G01J5/22 ,  G01J2005/0077 ,  G01J2005/204 ,  G01N2021/0106 ,  H01L27/14683 ,  H01L41/0973 ,  Y10T156/10

摘要： In a device for detecting thermal radiation, at least one membrane is provided on which at least one thermal detector element is mounted for the conversion of the thermal radiation into an electric signal and at least one circuit support for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being connected together electrically by an electric contact which passes through the membrane. In addition, a method of producing the device with the following method steps is provided: a) provision of the membrane with the detector element and of at least one electrical through-connection and provision of the circuit support and b) bringing together the membrane and the circuit support in such a manner that the detector element and the readout circuit are connected together electrically by an electrical contact passing through the membrane. Production activity is preferably carried out at wafer level: functionalised silicon substrates are stacked upon one another, firmly bonded to one another and then divided into individual elements. Preferably, the detector elements comprise of pyro-electrical detector elements. The device finds application in motion detectors, presence detectors and in thermal imaging cameras.

摘要翻译： 在用于检测热辐射的装置中，提供至少一个膜，其上安装有至少一个热检测器元件，用于将热辐射转换成电信号，以及至少一个用于承载膜的电路支架， 一个用于读出电信号的读出电路，检测器元件和读出电路由通过膜的电接点电连接在一起。 此外，提供了一种通过以下方法步骤制造该装置的方法：a）提供具有检测器元件的膜和至少一个电气通过连接和提供电路支撑件，以及b）将膜和 电路支撑件以检测器元件和读出电路通过穿过膜的电接触电连接在一起的方式。 生产活动优选在晶片级进行：功能化的硅衬底彼此堆叠，彼此牢固地结合，然后分成单个元件。 优选地，检测器元件包括热电检测元件。 该设备在运动检测器，存在检测器和热成像相机中可以应用。

公开(公告)号：US08969811B2

公开(公告)日：2015-03-03

申请号：US12680286

申请日：2008-09-29

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

IPC分类号： G01J5/02 ,  H01L31/101 ,  G01J5/04 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02

CPC分类号： H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

摘要： A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.

摘要翻译： 用于检测热辐射的装置具有膜和至少两个检测器元件，其分别设置为将热辐射转换成电信号并且彼此相邻地安装在膜上，其中至少一个散热路径设置在 膜的侧面朝向检测器元件和/或在膜的远离检测器元件的侧面上，该散热路径具有比膜更高的导热性并且与导热的检测器元件连接 通过隔膜使得热量可以从散热路径从检测器元件排出，从而检测器元件的响应时间短; 并且其中集成在所述膜中的至少一个具有比所述膜低的热导率并且在所述检测器元件之间延伸的热屏障被提供，使得通过所述膜从所述一个检测器元件到另一检测器元件的热传导被 热障; 从而检测器元件的串扰低。

公开(公告)号：US08487257B2

公开(公告)日：2013-07-16

申请号：US12601613

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

IPC分类号： G01J5/00

CPC分类号： H01L27/16 ,  G01J5/04 ,  G01J5/045 ,  G01J5/10 ,  G01J5/34 ,  H01L27/14618 ,  H01L2924/0002 ,  H01L2924/00

摘要： In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

摘要翻译： 在用于检测热辐射的装置和用于生产这种装置的方法中，叠层形成有具有用于将热辐射转换成电信号的检测器元件的检测器支架，具有读出电路的电路支架 用于读出电信号和盖以屏蔽检测器元件。 检测器支架和盖被布置成使得在检测器元件和盖之间形成第一堆叠空腔，并且在检测器支架和电路支架之间形成第二堆叠腔。 将第一堆叠空腔和/或第二堆叠空腔抽真空并密封。 在制造操作中，将功能化的硅衬底彼此堆叠，牢固地结合在一起并随后进行细分。 优选地，检测器元件是热电探测器元件。 该设备在运动检测器，存在记录器和热像摄像机中找到应用。

公开(公告)号：US20110049369A1

公开(公告)日：2011-03-03

申请号：US12680286

申请日：2008-09-29

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Uwe Rettig

IPC分类号： G01J5/02 ,  G01R3/00

CPC分类号： H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

摘要： A device to detect thermal radiation has a membrane and at least two detector elements that are respectively set up to transduce thermal radiation into an electrical signal and are mounted situated next to one another on the membrane, wherein at least one heat dissipation path is provided on the side of the membrane facing towards the detector elements and/or on the side of the membrane facing away from the detector elements, which heat dissipation path has a higher heat conductivity than the membrane and is connected with the detector elements in a heat-conductive manner via the membrane so that heat can be discharged from the detector elements with the heat dissipation path, whereby the response time of the detector elements is short; and wherein at least one heat barrier that has a lower heat conductivity than the membrane and extends between the detector elements is provided integrated into the membrane, such that a heat conduction in the membrane from the one detector element to the other detector element is prevented by the heat barrier; whereby the crosstalk of the detector elements is low.

摘要翻译： 用于检测热辐射的装置具有膜和至少两个检测器元件，其分别设置为将热辐射转换成电信号并且彼此相邻地安装在膜上，其中至少一个散热路径设置在 膜的侧面朝向检测器元件和/或在膜的远离检测器元件的侧面上，该散热路径具有比膜更高的导热性并且与导热的检测器元件连接 通过隔膜使得热量可以从散热路径从检测器元件排出，从而检测器元件的响应时间短; 并且其中集成在所述膜中的至少一个具有比所述膜低的热导率并且在所述检测器元件之间延伸的热屏障被提供，使得通过所述膜从所述一个检测器元件到另一检测器元件的热传导被 热障; 从而检测器元件的串扰低。

公开(公告)号：US20100264311A1

公开(公告)日：2010-10-21

申请号：US12601613

申请日：2008-05-28

申请人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

发明人： Carsten Giebeler ,  Matthias Schreiter ,  Jörg Zapf

IPC分类号： G01J5/10 ,  H01L21/02

CPC分类号： H01L27/16 ,  G01J5/04 ,  G01J5/045 ,  G01J5/10 ,  G01J5/34 ,  H01L27/14618 ,  H01L2924/0002 ,  H01L2924/00

摘要： In a device for the detection of thermal radiation which and a method for production of such a device, a stack is formed with at least one detector support having at least one detector element for the conversion of the thermal radiation into an electric signal, at least one circuit support with at least one read-out circuit for reading out the electrical signal and at least one cover to shield the detector element, wherein the detector support and the cover are so arranged with respect to one another that a first stack cavity bounded by the detector support and the cover is provided between the detector element of the detector support and the cover and that the circuit support and the detector support are so arranged with respect to one another that at least one second stack cavity bounded by the circuit support and the detector support is provided between detector support and the circuit support and that the first hollow stack support and/or the second stack cavity is evacuated or can be evacuated. Preferably, the detector support, circuit support and cover are made of silicon. The manufacturing operation takes place at wafer-level. Functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detector, presence reporters and thermal-image cameras.

摘要翻译： 在用于检测热辐射的装置及其制造方法中，堆叠形成有至少一个具有至少一个用于将热辐射转换成电信号的检测器元件的检测器支架，至少 一个电路支撑件，具有用于读出电信号的至少一个读出电路和用于屏蔽检测器元件的至少一个盖子，其中检测器支撑件和盖子相对于彼此布置成使得第一堆叠腔体被 检测器支撑件和盖被设置在检测器支撑件的检测器元件和盖之间，并且电路支撑件和检测器支撑件相对于彼此布置成使得由电路支撑件限定的至少一个第二堆叠空腔和 检测器支撑件设置在检测器支撑件和电路支撑件之间，并且第一中空堆叠支撑件和/或第二堆叠腔体被抽空或可以 被疏散 优选地，检测器支撑件，电路支撑件和盖子由硅制成。 制造操作在晶圆级进行。 功能化的硅衬底彼此堆叠，牢固地结合在一起并随后被细分。 优选地，检测器元件是热电探测器元件。 该装置在运动检测器，存在记录器和热像摄像机中找到应用。

公开(公告)号：US09046464B2

公开(公告)日：2015-06-02

申请号：US13124913

申请日：2009-09-29

申请人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

发明人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

IPC分类号： G01R29/22 ,  G01N29/036 ,  G01N29/02

CPC分类号： G01N29/036 ,  G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426

摘要： A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency fR which depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer.

摘要翻译： 一种用于检测至少一种流体物质的装置，具有压电层薄膜谐振器，其上设置有电极层的压电层和用于吸附流体物质的吸附表面，其中压电层和电极层和吸附面是 设计和布置在彼此之间，使得通过电激活电极层，激励交变场可耦合到压电层中。 可以将薄膜谐振器激发到谐振振荡频率fR，其取决于吸附在吸附表面上的物质的量，因为耦合到压电层中的激发交变场。 电绝缘层直接布置在背离压电层的一个电极层的一侧上。 铝电极层和二氧化硅绝缘层的组合特别有利。

公开(公告)号：US20120227474A1

公开(公告)日：2012-09-13

申请号：US13499229

申请日：2010-09-20

申请人： Martin Nirschl ,  Matthias Schreiter ,  Daniel Sickert

发明人： Martin Nirschl ,  Matthias Schreiter ,  Daniel Sickert

IPC分类号： G01N29/02

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/02809 ,  G01N2291/0426

摘要： A device for detecting a substance of a fluid or the concentration of a substance of a fluid may include a carrier to which a resonator is applied, to which a chemically sensitive material for adsorption of a substance to be detected is applied. The adsorption of the substance increases the mass of the resonator. The concentration of the substance in the liquid can be determined by measuring the frequency change of the resonator.

摘要翻译： 用于检测流体物质或流体物质浓度的装置可以包括施加有谐振器的载体，施加用于吸附待检测物质的化学敏感材料。 物质的吸附增加了谐振器的质量。 物质在液体中的浓度可以通过测量谐振器的频率变化来确定。

公开(公告)号：US08240907B2

公开(公告)日：2012-08-14

申请号：US12066085

申请日：2006-09-07

申请人： Reinhard Gabl ,  Mathias Link ,  Matthias Schreiter ,  Jan Weber

发明人： Reinhard Gabl ,  Mathias Link ,  Matthias Schreiter ,  Jan Weber

IPC分类号： B01F11/02

CPC分类号： B01F13/0059 ,  B01F11/0266 ,  B01L3/50273 ,  B01L2300/0636 ,  B01L2300/0663 ,  B01L2300/0877 ,  B01L2400/0436 ,  B01L2400/0439 ,  F04B19/006 ,  F04B43/046 ,  G01N29/022 ,  G01N2291/0224 ,  G01N2291/0252 ,  G01N2291/0256 ,  G01N2291/0421 ,  G01N2291/0422 ,  Y10T137/2213

摘要： An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element (11) having at least one piezoelectric layer (110) and two electrodes (111 and 112) present on the piezoelectric layer (110). The piezoacoustic resonator element (11) is designed such that, owing to a voltage being applied to the piezoelectric layer (110) by means of the electrodes (111 or 112), a volume oscillation of the piezoelectric layer (110) is excited at a resonant frequency. The piezoelectric resonator element (11) can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements (41) for detecting the attachment of substance.

摘要翻译： 具有用于移动液体的装置的装置包括具有至少一个压电层（110）的压电谐振元件（11）和存在于压电层（110）上的两个电极（111和112）。 压电谐振元件（11）被设计为使得由于通过电极（111或112）施加到压电层（110）的电压，压电层（110）的体积振荡在 谐振频率。 压电谐振元件（11）可以以合适的方式与液体进行声学耦合，以将激发的振荡传输到用于移动液体的液体。 该装置可以是微混合器的形式或者是微型泵的形式，并且还可以包括用于检测物质附着的传感器元件（41）。

公开(公告)号：US20110089786A1

公开(公告)日：2011-04-21

申请号：US12997094

申请日：2009-06-15

申请人： Dana Pitzer ,  Matthias Schreiter

发明人： Dana Pitzer ,  Matthias Schreiter

IPC分类号： H03H9/17 ,  H01L41/22 ,  G01N33/00

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  H03H3/04 ,  H03H9/0557 ,  H03H9/175 ,  H03H2003/025

摘要： In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having λ/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor).

摘要翻译： 在衬底表面上的至少一个压电声谐振器的布置中，谐振器具有压电层，电极和另外的电极，其布置成使得电极的激活导致谐振振荡，衬底表面由声镜组成 在用于声学绝缘衬底和谐振器的衬底中，并且谐振频率评估装置通过经由反射镜开口的轨道连接到电极。 声镜具有具有不同声阻抗的λ/ 4层的布拉格反射器。 最上层由用作电绝缘导体轨道和导电布拉格反射器层的反射镜开口中的绝缘层的二氧化硅制成。 该装置用作用于检测流体物质（特别是液体形式的流体（生物传感器））的物质的物理换能器。