公开(公告)号：US20100152879A1

公开(公告)日：2010-06-17

申请号：US12711163

申请日：2010-02-23

申请人： Chad R. Weetman ,  Chung-Ho Huang ,  Jacqueline Seto ,  John Jensen

发明人： Chad R. Weetman ,  Chung-Ho Huang ,  Jacqueline Seto ,  John Jensen

IPC分类号： G06F19/00 ,  G06F17/30 ,  G06F3/048

CPC分类号： G05B19/4183 ,  G05B2219/31304 ,  G05B2219/35391 ,  G05B2219/45031 ,  Y02P90/10 ,  Y02P90/20

摘要： A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.

摘要翻译： 提供了一种用于使用至少第一处理配方和第二处理配方来处理衬底的等离子体处理工具。 等离子体处理工具包括被配置为收集过程数据流的换能器，与在配方执行期间被监控的过程参数相关的每个过程数据流。 该工具还包括配置用于接收一组元数据的逻辑电路，其中每个元数据包括关于衬底的识别数据和正在执行的工艺配方。 逻辑电路还被配置为用于接收一组过程数据流，每个过程数据流与特定的处理配方相关联。 逻辑电路还包括将与第一处理配方相关联的元数据和过程数据流存储为第一文件，将与第二处理配方关联的元数据和过程数据流存储为第二文件。

公开(公告)号：US08000827B2

公开(公告)日：2011-08-16

申请号：US12711163

申请日：2010-02-23

申请人： Chad R. Weetman ,  Chung-Ho Huang ,  Jacqueline Seto ,  John Jensen

发明人： Chad R. Weetman ,  Chung-Ho Huang ,  Jacqueline Seto ,  John Jensen

IPC分类号： G06F19/00

CPC分类号： G05B19/4183 ,  G05B2219/31304 ,  G05B2219/35391 ,  G05B2219/45031 ,  Y02P90/10 ,  Y02P90/20

摘要： A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.

摘要翻译： 提供了一种用于使用至少第一处理配方和第二处理配方来处理衬底的等离子体处理工具。 等离子体处理工具包括被配置为收集过程数据流的换能器，与在配方执行期间被监控的过程参数相关的每个过程数据流。 该工具还包括配置用于接收一组元数据的逻辑电路，其中每个元数据包括关于衬底的识别数据和正在执行的工艺配方。 逻辑电路还被配置为用于接收一组过程数据流，每个过程数据流与特定的处理配方相关联。 逻辑电路还包括将与第一处理配方相关联的元数据和过程数据流存储为第一文件，将与第二处理配方关联的元数据和过程数据流存储为第二文件。

公开(公告)号：US20050084988A1

公开(公告)日：2005-04-21

申请号：US10973551

申请日：2004-10-25

申请人： Chung-Ho Huang ,  John Jensen

发明人： Chung-Ho Huang ,  John Jensen

IPC分类号： H01J37/32 ,  H01L21/00 ,  C03C15/00 ,  C23F1/00 ,  G05B9/02

CPC分类号： H01J37/32935

摘要： An automated process control system configured for controlling a plasma processing system having a chamber, the chamber being configured for processing a substrate. The automatic process control system includes a first sensor disposed within the chamber, the first sensor being configured for making a first plurality of measurements pertaining to a first parameter associated with a structure disposed at least partially within the chamber. The performing the first plurality of measurements is performed during the processing of the substrate. The automatic process control system further includes first logic coupled to receive the first plurality of measurements from the first sensor. The first logic is configured for analyzing using SPC methodologies the first plurality of measurements during the processing. There is also included second logic coupled to receive a first signal from the first logic, the second logic being configured to stop the processing prior to completing the processing if the first signal indicates a fault with the processing.

摘要翻译： 一种自动化过程控制系统，被配置为控制具有室的等离子体处理系统，所述室被配置用于处理衬底。 自动过程控制系统包括设置在室内的第一传感器，第一传感器被配置用于进行与至少部分地设置在室内的结构相关联的第一参数的第一多个测量。 在处理基板期间执行执行第一多个测量。 自动过程控制系统还包括耦合以从第一传感器接收第一多个测量值的第一逻辑。 第一逻辑被配置为在处理期间使用SPC方法来分析第一多个测量。 还包括耦合以从第一逻辑接收第一信号的第二逻辑，第二逻辑被配置为如果第一信号指示处理的故障则在完成处理之前停止处理。

公开(公告)号：US20060093434A1

公开(公告)日：2006-05-04

申请号：US10980667

申请日：2004-11-03

申请人： John Jensen ,  John Jensen

发明人： John Jensen ,  John Jensen

IPC分类号： E02B3/12

CPC分类号： E02B3/04

摘要： An erosion control device for use on beach and land areas subject to erosion includes: (a) an elongated beam portion comprising a first wall and a first base; (b) a cross-beam portion having a length that is less than half the length of the elongated beam portion, the cross-beam portion including a second wall and a second base; and (c) a mechanism for connecting the device to a second erosion control device; wherein the cross-beam portion extends transversely through the elongated beam portion at about a mid-point of the elongated beam portion. Also included herein is a matrix of interconnectable, relatively uniform erosion control devices.

摘要翻译： 用于在受到侵蚀的海滩和陆地区域上的侵蚀控制装置包括：（a）细长梁部分，包括第一壁和第一基部; （b）横梁部分，其长度小于所述细长梁部分的长度的一半，所述横梁部分包括第二壁和第二基部; 和（c）用于将装置连接到第二侵蚀控制装置的机构; 其中所述横梁部分在所述细长梁部分的大约中点处横向延伸穿过所述细长梁部分。 这里还包括可互连的相对均匀的侵蚀控制装置的矩阵。

公开(公告)号：US08965820B2

公开(公告)日：2015-02-24

申请号：US13602706

申请日：2012-09-04

申请人： Vishal Kapadia ,  John Jensen ,  Geralyn McBride ,  Jagan Sundaramoothy ,  Raghavendra Deshmukh ,  Piyush Sacheti ,  Chandrashekar Althati

发明人： Vishal Kapadia ,  John Jensen ,  Geralyn McBride ,  Jagan Sundaramoothy ,  Raghavendra Deshmukh ,  Piyush Sacheti ,  Chandrashekar Althati

IPC分类号： G06F15/18 ,  G06N5/02

CPC分类号： G06Q10/101 ,  G06F17/30598 ,  G06N5/025

摘要： Embodiments relate to classification of transactions based upon analysis of multiple variables. For a purchase transaction, such variables can include but are not limited to: buying location, source system, line of business, cost center, functional area, supplier capabilities, item description, account description, organization, department, custom parameters, and others. Embodiments may rely upon one or more classification schemes, such as statistical classification, semantic classification, and/or knowledge base classification, taken alone or in combination. In a purchase transaction, classification based on multivariate analysis facilitates identification of a purchased item or service, and hence accuracy in classifying and assigning a central classification code. Particular embodiments may include a feature allowing user review/revision of category assignments via a feedback loop linked to past classification. This revision feature may add clarity to a current transaction, allow modification of future classification for ongoing improvement, and provide a user-driven measure of system performance.

摘要翻译： 实施例涉及基于多变量分析的交易分类。 对于购买交易，这些变量可以包括但不限于：购买位置，源系统，业务线，成本中心，功能区域，供应商能力，项目描述，帐户描述，组织，部门，自定义参数等。 实施例可以依赖一个或多个分类方案，例如统计分类，语义分类和/或知识库分类，单独或组合使用。 在购买交易中，基于多变量分析的分类便于识别所购买的商品或服务，因此有助于分类和分配中央分类代码的准确性。 特定实施例可以包括允许用户通过与过去分类相关联的反馈循环来审查/修改类别分配的特征。 此修订功能可以增加当前事务的清晰度，允许修改未来的分类以进行持续改进，并提供用户驱动的系统性能测量。

公开(公告)号：US20060116900A1

公开(公告)日：2006-06-01

申请号：US11299051

申请日：2006-02-06

申请人： John Jensen

发明人： John Jensen

IPC分类号： G06Q99/00

CPC分类号： G06Q30/06

摘要： The present invention is a method and system for enabling, organizing, and facilitating the transmission of communication for a fee or cost over a network such as the Internet.

摘要翻译： 本发明是一种方法和系统，用于通过诸如因特网的网络来实现，组织和促进用于费用或成本的通信的传输。

公开(公告)号：US20050198262A1

公开(公告)日：2005-09-08

申请号：US10757297

申请日：2004-01-14

申请人： Jon Barry ,  Johannes Gutter ,  Peter Heimann ,  John Jensen ,  Ronald Schwabol ,  Maria Spieler ,  Christopher Wu

发明人： Jon Barry ,  Johannes Gutter ,  Peter Heimann ,  John Jensen ,  Ronald Schwabol ,  Maria Spieler ,  Christopher Wu

IPC分类号： G06F15/16 ,  G06F15/173

CPC分类号： H04L41/5009 ,  G06F15/16 ,  H04L12/00 ,  H04L41/00 ,  H04L43/0805 ,  H04L43/0811 ,  H04L63/0272

摘要： A method and apparatus for providing quality of service (QoS) measurements for remote-access users of a virtual private network (VPN) utilizes hardware/software at the remote VPN client to collect information related to the remote client's ability to connect to the VPN and remain connected. A centralized server is configured to query each remote client and upload the collected connection data, the server functioning to analyze the collected data to determine QoS information in terms of, for example, “VPN accessibility” (defined as success rate for connection to VPN servers), “VPN sustainability” (defined as the ability to maintain a network connection), and “VPN availability” (defined as the ability of a persistent remote-access location to maintain its network connect). The QoS measurements allow the VPN service provider to improve the experience of remote access users, generate alarms and reports, and may also be used to form service level agreements (SLAs) with such users.

摘要翻译： 用于为虚拟专用网（VPN）的远程访问用户提供服务质量（QoS）测量的方法和装置利用远程VPN客户端处的硬件/软件来收集与远程客户端连接到VPN的能力相关的信息，以及 保持连接。 集中式服务器被配置为查询每个远程客户端并上传收集的连接数据，服务器用于分析收集的数据，以根据例如“VPN可访问性”（定义为连接到VPN服务器的成功率）来确定QoS信息 ），“VPN可持续性”（定义为维护网络连接的能力）和“VPN可用性”（定义为持久远程访问位置维护其网络连接的能力）。 QoS测量允许VPN服务提供商改进远程访问用户的体验，生成报警和报告，并且还可以用于与这些用户形成服务级别协议（SLA）。

公开(公告)号：US20050093102A1

公开(公告)日：2005-05-05

申请号：US10699276

申请日：2003-10-31

申请人： John Jensen ,  Robert Muller ,  Mark Simmons

发明人： John Jensen ,  Robert Muller ,  Mark Simmons

IPC分类号： G03C8/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/337 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/48 ,  H01L21/50 ,  H01L23/544

CPC分类号： G03F7/70433

摘要： An embodiment of the present invention provides a novel method which makes LVR to HVR registration possible by wrapping the X and Y scribes around each instance of each layer on both the LVR and HVR reticles; standard HVR reticles and LVR reticles will not align to one another due to registration and electrical test structures in the scribe being in different locations. Another embodiment of the present invention addresses the loss of die per wafer due to increased scribe area when using LVR and HVR reticles in the same set.

摘要翻译： 本发明的一个实施例提供了一种新颖的方法，其通过在LVR和HVR光栅两者上的每个层的每个实例周围缠绕X和Y划线器来使得LVR到HVR配准成为可能; 标准的HVR标线片和LVR标线器由于在不同位置的划线器中的配准和电气测试结构而不会彼此对准。 本发明的另一个实施例解决了当在同一组中使用LVR和HVR掩模版时，由于增加的划片面积而导致每个晶片的晶片损耗。

公开(公告)号：US07223363B2

公开(公告)日：2007-05-29

申请号：US10204913

申请日：2002-03-08

申请人： Michael McNeely ,  Nils Adey ,  Mark Spute ,  Edward Ayliffe ,  Michael Howard ,  Darin Beutel ,  John Jensen ,  Stephen Coffin ,  Thomas Moyer

发明人： Michael McNeely ,  Nils Adey ,  Mark Spute ,  Edward Ayliffe ,  Michael Howard ,  Darin Beutel ,  John Jensen ,  Stephen Coffin ,  Thomas Moyer

IPC分类号： B01L3/00 ,  G01N31/22

CPC分类号： B01F5/10 ,  B01F11/0045 ,  B01F11/0266 ,  B01F13/0059 ,  B01J19/0093 ,  B01J2219/00351 ,  B01J2219/0043 ,  B01J2219/00527 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00659 ,  B01L3/0293 ,  B01L3/502715 ,  B01L3/50273 ,  B01L3/502746 ,  B01L3/5085 ,  B01L9/52 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/026 ,  B01L2200/0689 ,  B01L2300/0636 ,  B01L2300/0819 ,  B01L2300/0822 ,  B01L2300/0877 ,  B01L2300/0883 ,  B01L2300/0887 ,  C40B60/14 ,  G01N33/543 ,  G01N35/00 ,  G01N35/025 ,  G01N35/028 ,  G01N2035/00158 ,  G01N2035/00237 ,  G01N2035/00544

摘要： A method and system for providing a fluidic interface to slides bearing microarrays of biomolecules or other samples immobilized thereon to perform a variety of chemical reactions or processing steps on the slide. An interface device seals against the slide to form a chamber or chambers containing all or a portion of the microarray, providing selective access to portions of the slide. The interface device includes inlet and outlet ports permitting liquid sample and reagents to be introduced to and removed from the chamber accessing the slide surface. Pre- and post-array microfluidic circuitry may be included in the interface device or in attachable modules. The system may include one or more compartments for collecting and storing waste fluids.

摘要翻译： 一种方法和系统，用于向承载微生物分子或固定在其上的其它样品的微阵列提供流体界面，以在载玻片上进行各种化学反应或加工步骤。 接口装置密封滑动件以形成容纳微阵列的全部或一部分的腔室，从而提供对滑块部分的选择性接近。 界面装置包括入口和出口，允许液体样品和试剂被引入和移出进入滑动表面的室。 阵列后和阵列后的微流体电路可能包含在接口装置或可附接模块中。 该系统可以包括一个或多个用于收集和储存废液的隔间。

公开(公告)号：US20070050777A1

公开(公告)日：2007-03-01

申请号：US11455312

申请日：2006-06-16

申请人： Thomas Hutchinson ,  Andrew Ginter ,  Daryl Harms ,  John Jensen

发明人： Thomas Hutchinson ,  Andrew Ginter ,  Daryl Harms ,  John Jensen

IPC分类号： G06F9/46

CPC分类号： H04L63/02 ,  G06F11/0709 ,  G06F11/0769 ,  G06F11/0781 ,  H04L63/1416

摘要： Described are techniques used in monitoring the performance, security and health of a system used in an industrial application. Agents included in the industrial network report data to an appliance or server. The appliance stores the data and determines when an alarm condition has occurred. Notifications are sent upon detecting an alarm condition. The alarm thresholds may be user defined. A threat thermostat controller determines a threat level used to control the connectivity of a network used in the industrial application.

摘要翻译： 描述了用于监测工业应用中使用的系统的性能，安全性和健康性的技术。 工业网络中包含的代理将数据报告给设备或服务器。 设备存储数据并确定何时发生报警条件。 检测到报警状态时，通知被发送。 警报阈值可以是用户定义的。 威胁温控器控制器确定用于控制工业应用中使用的网络的连接性的威胁级别。