Wafer packaging and singulation method
    1.
    发明授权
    Wafer packaging and singulation method 有权
    晶圆包装和切片方法

    公开(公告)号:US07682934B2

    公开(公告)日:2010-03-23

    申请号:US11011640

    申请日:2004-12-14

    IPC分类号: H01L21/46 H01L21/30

    摘要: A method includes providing a micro device wafer having micro devices supported by a wafer substrate and a multi-device lid substrate coupled to and spaced from the wafer substrate. The method further includes sawing through the multi-device lid substrate to a depth between the wafer substrate and the lid substrate.

    摘要翻译: 一种方法包括提供具有由晶片衬底支撑的微器件和耦合到晶片衬底并与其间隔开的多器件盖衬底的微器件晶片。 该方法还包括通过多器件盖衬底锯切到晶片衬底和盖衬底之间的深度。

    Method of singulating electronic devices
    3.
    发明授权
    Method of singulating electronic devices 有权
    单片电子设备的方法

    公开(公告)号:US07422962B2

    公开(公告)日:2008-09-09

    申请号:US10975797

    申请日:2004-10-27

    IPC分类号: H01L21/30

    摘要: A method of singulating electronic devices, including aligning a saw blade over a lid street disposed on a lid substrate that is disposed over a device substrate. An electronic device that includes a bond pad is disposed on the device substrate, wherein the lid street is disposed over the bond pad. In addition, the method also includes sawing partially through the lid street to form a trench in the lid street. The trench includes a trench bottom in the lid substrate.

    摘要翻译: 一种单片电子设备的方法,包括将设置在设置在设备基板上的盖基板上的盖街道上的锯片对准。 包括接合焊盘的电子设备设置在设备基板上,其中盖路设置在接合焊盘上方。 此外,该方法还包括部分地通过盖街道锯切以在盖街道中形成沟槽。 沟槽包括在盖基板中的沟槽底部。

    Micro electrical mechanical system
    9.
    发明授权
    Micro electrical mechanical system 有权
    微机电系统

    公开(公告)号:US08497577B2

    公开(公告)日:2013-07-30

    申请号:US11870306

    申请日:2007-10-10

    IPC分类号: H01L23/12

    CPC分类号: B81B7/007 H01L2924/16235

    摘要: An apparatus includes a Micro Electrical Mechanical System (MEMS) having electrical contacts and a MEMS device in electrical communication with the electrical contacts. A lid is oriented over the MEMS device and not the electrical contacts. The lid has a base region and a top region, the base region being wider in dimension than the top region and oriented in closer proximity to the MEMS device than the top region.

    摘要翻译: 一种装置包括具有电触头的微机电系统(MEMS)和与电触头电连通的MEMS装置。 盖子定位在MEMS器件上,而不是电触头。 盖子具有基部区域和顶部区域,基底区域的尺寸比顶部区域宽,并且被定向成比顶部区域更靠近MEMS装置。

    Semiconductor package and method for making the same
    10.
    发明授权
    Semiconductor package and method for making the same 有权
    半导体封装及其制造方法

    公开(公告)号:US08368173B2

    公开(公告)日:2013-02-05

    申请号:US12795357

    申请日:2010-06-07

    IPC分类号: H01L27/08

    摘要: The present invention relates to a semiconductor package and a method for making the same. The semiconductor package includes a base material, a first metal layer, a first dielectric layer, a first upper electrode and a first protective layer. The first metal layer is disposed on a first surface of the base material, and includes a first inductor and a first lower electrode. The first dielectric layer is disposed on the first lower electrode. The first upper electrode is disposed on the first dielectric layer, and the first upper electrode, the first dielectric layer and the first lower electrode form a first capacitor. The first protective layer encapsulates the first inductor and the first capacitor. Whereby, the first inductor and the first lower electrode of the first capacitor are disposed on the same layer, so that the thickness of the product is reduced.

    摘要翻译: 半导体封装及其制造方法技术领域本发明涉及半导体封装及其制造方法。 半导体封装包括基底材料,第一金属层,第一介电层,第一上电极和第一保护层。 第一金属层设置在基材的第一表面上,并且包括第一电感器和第一下电极。 第一介电层设置在第一下电极上。 第一上电极设置在第一电介质层上,第一上电极,第一电介质层和第一下电极形成第一电容器。 第一保护层封装第一电感器和第一电容器。 由此,第一电容器的第一电感器和第一下电极设置在同一层上,从而减小了产品的厚度。