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    Methods and systems for utilizing design data in combination with inspection data
    3.
    发明授权
    Methods and systems for utilizing design data in combination with inspection data 有权
    利用设计数据结合检验数据的方法和系统

    公开(公告)号：US08139843B2

    公开(公告)日：2012-03-20

    申请号：US13115957

    申请日：2011-05-25

    申请人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse

    发明人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse

    IPC分类号： G06K9/00

    CPC分类号： G06F17/5045 ,  H01L21/67005

    摘要： Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.

    摘要翻译： 提供了与检测数据结合使用设计数据的各种方法和系统。 用于对在晶片上检测到的缺陷进行合并的计算机实现的方法包括将设计数据的部分靠近设计数据空间中的缺陷的位置进行比较。 该方法还包括基于比较步骤的结果确定部分中的设计数据是否至少相似。 此外，该方法包括将组中的缺陷合并成使得设计数据中靠近每个组中的缺陷的位置的部分至少相似。 该方法还包括将合并步骤的结果存储在存储介质中。

    METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA
    4.
    发明申请
    METHODS AND SYSTEMS FOR UTILIZING DESIGN DATA IN COMBINATION WITH INSPECTION DATA 有权
    与检验数据组合使用设计数据的方法和系统

    公开(公告)号：US20110286656A1

    公开(公告)日：2011-11-24

    申请号：US13115957

    申请日：2011-05-25

    申请人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse

    发明人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse

    IPC分类号： G06K9/00

    CPC分类号： G06F17/5045 ,  H01L21/67005

    摘要： Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least to similar. The method further includes storing results of the binning step in a storage medium.

    摘要翻译： 提供了与检测数据结合使用设计数据的各种方法和系统。 用于对在晶片上检测到的缺陷进行合并的计算机实现的方法包括将设计数据的部分靠近设计数据空间中的缺陷的位置进行比较。 该方法还包括基于比较步骤的结果确定部分中的设计数据是否至少相似。 此外，该方法包括将组中的缺陷合并，使得接近每个组中的缺陷的位置的设计数据的部分至少相似。 该方法还包括将合并步骤的结果存储在存储介质中。

    Impeller exhaust ridge vent
    5.
    发明申请
    Impeller exhaust ridge vent 有权
    叶轮废气排气口

    公开(公告)号：US20080113612A1

    公开(公告)日：2008-05-15

    申请号：US11599087

    申请日：2006-11-14

    申请人： Adem Chich ,  Sudhir Railkar ,  Walter Zarate ,  Brian Duffy

    发明人： Adem Chich ,  Sudhir Railkar ,  Walter Zarate ,  Brian Duffy

    IPC分类号： F24F7/02 ,  F24F7/06 ,  F24F13/20

    CPC分类号： F24F7/025 ,  F24F11/0001 ,  F24F11/30 ,  F24F2110/20

    摘要： An impeller exhaust ridge vent is provided for covering a ridge slot formed along the ridge of a roof. The ridge vent has an elongated laterally flexible center panel with edge portions along which vents are formed. Standoffs can depend from the bottom of the center panel for supporting the center panel a predetermined distance above the roof deck so that attic air can vent through the ridge slot, beneath the center panel, and exit through the vents. A base panel can be provided to cover the roof deck and form a smooth substantially sealed air duct for passage of the air. Upstanding wind baffles are disposed outboard of and spaced from the vents. One or more tangential impellers is rotatably mounted in the pace between the vents and wind baffles and can be free spinning or driven by an electric motor. Rotation of the tangential impellers creates a cross-flow fan effect that draws air forcibly from beneath the center panel and exhausts it to ambience. The attic space is thereby actively ventilated.

    摘要翻译： 提供了一个叶轮排气通道，用于覆盖沿屋顶的脊形成的脊槽。 脊部通气口具有细长的侧向柔性中心面板，边缘部分沿着该边缘部分形成排气孔。 支座可以从中心面板的底部取决于支撑中心面板在屋顶板上方一预定的距离，以便阁楼空气可以通过中心面板下方的脊槽排出，并通过通风口排出。 可以设置底板以覆盖屋顶板并形成用于空气通过的平滑的基本密封的空气管道。 直立挡风板设置在通风口外侧和与通风口间隔开。 一个或多个切向叶轮可旋转地安装在通风口和风挡板之间的节奏中，并且可以由电动机自由旋转或驱动。 切向叶轮的旋转产生横流风扇效应，从中心面板下方强制吸入空气，并将其排放到环境中。 因此阁楼空间积极通风。

    Methods and systems for determining a position of inspection data in design data space
    8.
    发明授权
    Methods and systems for determining a position of inspection data in design data space 有权
    用于确定设计数据空间中检查数据位置的方法和系统

    公开(公告)号：US08041103B2

    公开(公告)日：2011-10-18

    申请号：US11759607

    申请日：2007-06-07

    申请人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse ,  Eugene Shifrin

    发明人： Ashok Kulkarni ,  Brian Duffy ,  Kais Maayah ,  Gordon Rouse ,  Eugene Shifrin

    IPC分类号： G06K9/00

    CPC分类号： G06F17/5045 ,  G06T7/0006 ,  G06T7/33 ,  G06T2207/30148 ,  H01L21/67005

    摘要： Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.

    摘要翻译： 提供了用于确定设计数据空间中检查数据位置的各种方法和系统。 一种计算机实现的方法包括使用通过对晶片成像获得的对准目标的图像来确定形成在晶片上的对准目标的质心。 该方法还包括将质心对准描述对准目标的几何形状的质心。 此外，该方法包括将对准目标的质心的设计数据空间位置分配为设计数据空间中几何形状的质心的位置。 该方法还包括基于对准目标的质心的设计数据空间位置确定在设计数据空间中为晶片获取的检查数据的位置。

    MONITORING OF TIME-VARYING DEFECT CLASSIFICATION PERFORMANCE
    9.
    发明申请
    MONITORING OF TIME-VARYING DEFECT CLASSIFICATION PERFORMANCE 有权
    监测时变缺陷分类性能

    公开(公告)号：US20110224932A1

    公开(公告)日：2011-09-15

    申请号：US12811319

    申请日：2010-06-23

    申请人： Patrick Huet ,  Brian Duffy ,  Martin Plihal ,  Thomas Trautzsch ,  Chris Maher

    发明人： Patrick Huet ,  Brian Duffy ,  Martin Plihal ,  Thomas Trautzsch ,  Chris Maher

    IPC分类号： G06F19/00

    CPC分类号： G01R31/2656 ,  G01R31/2894 ,  G05B19/41875 ,  G05B2219/37224 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  Y02P90/22 ,  H01L2924/00

    摘要： Systems and methods for monitoring time-varying classification performance are disclosed. A method may include, but is not limited to: receiving one or more signals indicative of one or more properties of one or more samples from one or more scanning inspection tools; determining populations of one or more defect types for the one or more samples according an application of one or more classification rules to the one or more signals received from the one or more scanning inspection tools; determining populations of the one or more defect types for the one or more samples using one or more high-resolution inspection tools; and computing one or more correlations between populations of one or more defect types for one or more samples determined from application of one or more classification rules applied to one or more signals received from the one or more scanning inspection tools and populations of the one or more defect types for the one or more samples determined using the one or more high-resolution inspection tools.

    摘要翻译： 公开了用于监视时变分类性能的系统和方法。 方法可以包括但不限于：从一个或多个扫描检查工具接收指示一个或多个样品的一个或多个特性的一个或多个信号; 根据一个或多个分类规则对从一个或多个扫描检查工具接收的一个或多个信号的应用来确定一个或多个样本的一个或多个缺陷类型的种群; 使用一个或多个高分辨率检查工具确定所述一个或多个样品的一种或多种缺陷类型的种群; 以及计算一个或多个缺陷类型的群体之间的一个或多个相关性，所述一个或多个缺陷类型的群体由应用于从所述一个或多个扫描检查工具和所述一个或多个扫描检查工具的群体接收到的一个或多个信号应用的一个或多个分类规则确定 使用一个或多个高分辨率检查工具确定的一个或多个样品的缺陷类型。

    Semiconductor device property extraction, generation, visualization, and monitoring methods
    10.
    发明授权
    Semiconductor device property extraction, generation, visualization, and monitoring methods 有权
    半导体器件属性提取，生成，可视化和监控方法

    公开(公告)号：US08611639B2

    公开(公告)日：2013-12-17

    申请号：US11830485

    申请日：2007-07-30

    申请人： Ashok Kulkarni ,  Chien-Huei (Adam) Chen ,  Cecelia Campochiaro ,  Richard Wallingford ,  Yong Zhang ,  Brian Duffy

    发明人： Ashok Kulkarni ,  Chien-Huei (Adam) Chen ,  Cecelia Campochiaro ,  Richard Wallingford ,  Yong Zhang ,  Brian Duffy

    IPC分类号： G06K9/00

    CPC分类号： G01N21/9501

    摘要： Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions.

    摘要翻译： 提供了各种方法，载体介质和用于监测试样特征的系统。 一种用于监测样本特征的计算机实现方法包括使用通过用检查系统检查样本产生的输出来确定样本上的各个像素的特性。 该方法还包括使用各个区域中的各个像素的特性来确定样本上的各个区域的特征。 该方法还包括基于各个区域的特征来监测样本的特性。