公开(公告)号：US07675300B2

公开(公告)日：2010-03-09

申请号：US11957835

申请日：2007-12-17

申请人： Christof Baur ,  Robert J. Folaron ,  Adam Hartman ,  Philip C. Foster ,  Jay C. Nelson ,  Richard E. Stallcup, II

发明人： Christof Baur ,  Robert J. Folaron ,  Adam Hartman ,  Philip C. Foster ,  Jay C. Nelson ,  Richard E. Stallcup, II

IPC分类号： G01R31/305 ,  G01R31/02 ,  G01R31/26

CPC分类号： G01N1/28 ,  G01N1/32 ,  G01R31/307 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/24592 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2817 ,  H01J2237/31745

摘要： An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.

摘要翻译： 一种包括定位器控制装置，测量装置和控制程序的装置。 定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和 位于CPBD室中的样品的多个接触点。 测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。 控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。

公开(公告)号：US07319336B2

公开(公告)日：2008-01-15

申请号：US11064127

申请日：2005-02-23

申请人： Christof Baur ,  Robert J. Folaron ,  Adam Hartman ,  Philip C. Foster ,  Jay C. Nelson ,  Richard E. Stallcup, II

发明人： Christof Baur ,  Robert J. Folaron ,  Adam Hartman ,  Philip C. Foster ,  Jay C. Nelson ,  Richard E. Stallcup, II

IPC分类号： G01R31/305 ,  G01R31/02 ,  G01R31/26

CPC分类号： G01N1/28 ,  G01N1/32 ,  G01R31/307 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/24592 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2817 ,  H01J2237/31745

摘要： An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.

摘要翻译： 一种包括定位器控制装置，测量装置和控制程序的装置。 定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和 位于CPBD室中的样品的多个接触点。 测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。 控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。

公开(公告)号：US06900459B2

公开(公告)日：2005-05-31

申请号：US10310752

申请日：2002-12-05

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/00 ,  H01L21/60 ,  H01L21/66 ,  H01L21/68 ,  H05K13/08 ,  H01L23/58 ,  G01R31/02

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  G01R31/311 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H01L2924/12042 ,  H01L2924/14 ,  H05K13/08 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of dice to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在骰子的老化和其他预包装测试中具有特殊的用途，以建立已知的骰子（KGD）。

公开(公告)号：US06353312B1

公开(公告)日：2002-03-05

申请号：US09234226

申请日：1999-01-20

申请人： Warren M. Farnworth ,  Jennifer L. Folaron ,  Robert J. Folaron ,  John O. Jacobson ,  David R. Hembree ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Jennifer L. Folaron ,  Robert J. Folaron ,  John O. Jacobson ,  David R. Hembree ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R3102

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  G01R31/311 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H01L2924/12042 ,  H01L2924/14 ,  H05K13/08 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method for positioning a semiconductor die within a temporary package, including forming a representation of at least a portion of a semiconductor die, moving the semiconductor die to a location proximate a temporary package, and comparing the representation of the at least a portion of the semiconductor die to a representation of at least a portion of the temporary package. The compared representations are then used to define movement of a die moving assembly, in order to move the die to place the semiconductor die and the temporary package into a desired relationship to one another. A restraining device is then secured to the temporary package to retain the semiconductor die in the desired relationship to the temporary package.

摘要翻译： 一种用于将半导体管芯定位在临时封装内的方法，包括形成半导体管芯的至少一部分的表示，将半导体管芯移动到靠近临时封装的位置，以及将半导体管芯的至少一部分的表示 半导体管芯到所述临时封装的至少一部分的表示。 然后将所比较的表示用于定义模具移动组件的移动，以便移动模具以将半导体管芯和临时封装放置成彼此期望的关系。 然后将约束装置固定到临时包装以将半导体管芯保持在与临时包装件所期望的关系中。

公开(公告)号：US5955877A

公开(公告)日：1999-09-21

申请号：US170844

申请日：1998-10-13

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/00 ,  H01L21/60 ,  H01L21/66 ,  H01L21/68 ,  H05K13/08

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H05K13/08 ,  G01R31/311 ,  H01L2924/12042 ,  H01L2924/14 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of dice to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在骰子的老化和其他预包装测试中具有特殊的用途，以建立已知的骰子（KGD）。

公开(公告)号：US06492187B1

公开(公告)日：2002-12-10

申请号：US09651490

申请日：2000-08-30

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： H01L2166

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  G01R31/311 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H01L2924/12042 ,  H01L2924/14 ,  H05K13/08 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of dice to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在骰子的老化和其他预包装测试中具有特殊的用途，以建立已知的骰子（KGD）。

公开(公告)号：US6150828A

公开(公告)日：2000-11-21

申请号：US400515

申请日：1999-09-20

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/00 ,  H01L21/60 ,  H01L21/66 ,  H01L21/68 ,  H05K13/08 ,  B65G49/07

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H05K13/08 ,  G01R31/311 ,  H01L2924/12042 ,  H01L2924/14 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of dice to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在骰子的老化和其他预包装测试中具有特殊的用途，以建立已知的骰子（KGD）。

公开(公告)号：US5894218A

公开(公告)日：1999-04-13

申请号：US693398

申请日：1996-08-07

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/00 ,  H01L21/60 ,  H01L21/66 ,  H01L21/68 ,  H05K13/08 ,  G01R31/02

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H05K13/08 ,  G01R31/311 ,  H01L2924/12042 ,  H01L2924/14 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of die to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在模具的老化和其他预包装测试中具有特别的用途，以建立已知的骰子（KGD）。

公开(公告)号：US06210984B1

公开(公告)日：2001-04-03

申请号：US09399640

申请日：1999-09-20

申请人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Alan G. Wood ,  John O. Jacobson ,  David R. Hembree ,  James M. Wark ,  Jennifer L. Folaron ,  Robert J. Folaron ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： H01L2166

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  G01R31/311 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H01L2924/12042 ,  H01L2924/14 ,  H05K13/08 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178 ,  H01L2924/00

摘要： A method and apparatus of assembling and disassembling semiconductor dice to be tested from the components of a temporary test package. A computer-controlled vision system is employed to align the dice with the temporary test package bases, and an automated robot arm system is employed to retrieve and assemble the dice with the various package components. The invention has particular utility in the burn-in and other pre-packaging testing of dice to establish known good dice (KGD).

摘要翻译： 从临时测试包的组件组装和拆卸要测试的半导体骰子的方法和装置。 采用计算机控制的视觉系统将骰子与临时测试包基座对准，并且采用自动机器人手臂系统来检索和组装骰子与各种包装部件。 本发明在骰子的老化和其他预包装测试中具有特殊的用途，以建立已知的骰子（KGD）。

公开(公告)号：US6064194A

公开(公告)日：2000-05-16

申请号：US767700

申请日：1996-12-17

申请人： Warren M. Farnworth ,  Jennifer L. Folaron ,  Robert J. Folaron ,  David R. Hembree ,  John O. Jacobson ,  Jay C. Nelson ,  Lelan D. Warren

发明人： Warren M. Farnworth ,  Jennifer L. Folaron ,  Robert J. Folaron ,  David R. Hembree ,  John O. Jacobson ,  Jay C. Nelson ,  Lelan D. Warren

IPC分类号： G01R31/26 ,  G01R31/28 ,  G01R31/311 ,  H01L21/00 ,  H01L21/60 ,  H01L21/66 ,  H01L21/68 ,  H05K13/08 ,  G01R31/02

CPC分类号： H01L21/67276 ,  G01R31/2851 ,  G01R31/2886 ,  G01R31/2893 ,  H01L21/67126 ,  H01L21/67242 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/74 ,  H05K13/08 ,  G01R31/311 ,  H01L2924/12042 ,  H01L2924/14 ,  Y10T29/49004 ,  Y10T29/49131 ,  Y10T29/53174 ,  Y10T29/53178

摘要： An apparatus for automatically positioning electronic dice within temporary packages to enable continuity testing between the dice bond pads and the temporary package electrical interconnects is provided. The apparatus includes a robot having a programmable robot arm with a gripper assembly, die and lid feeder stations, a die inverter, and a plurality of cameras. The cameras take several pictures of the die and temporary packages to precisely align the die bond pads with the temporary package electrical interconnects. A predetermined assembly position is located along a conveyor that conveys a carrier between a first position, corresponding to an inlet, and a second position, corresponding to an outlet. The die, a restraining device and temporary package are assembled at the predetermined assembly position and tested for continuity therebetween. The apparatus further includes a fifth camera which locates the die at a wafer handler. The apparatus has a control mechanism including a microprocessor and program routines that selectively control the robot arm (i) to move the gripper assembly to the lid feeder station to pick up a lid, (ii) to move the gripper assembly along with the lid to pick up the die, (iii) to move the gripper assembly along with the lid and the die to a position to be photographed by the fine die camera, and (iv) to move the lid and the die to the predetermined assembly position located along the conveyor. The method and apparatus may also be used for disassembly.

摘要翻译： 提供了一种用于将电子骰子自动定位在临时包装内的装置，以实现骰子接合焊盘和临时封装电互连之间的连续性测试。 该装置包括具有可编程机器人臂的机器人，其具有夹持器组件，模具和盖子馈送站，模具反相器和多个相机。 相机拍摄模具和临时包装的几张照片，以便将芯片接合焊盘与临时封装电气互连精确对准。 预定的组装位置沿着输送机定位，该输送器在对应于出口的第一位置（对应于入口）和第二位置之间输送载体。 模具，约束装置和临时包装组装在预定的组装位置，并测试其间的连续性。 该设备还包括一个将晶片定位在晶片处理器上的第五相机。 该装置具有包括微处理器和程序程序的控制机构，该程序程序选择性地控制机器人手臂（i）将夹持器组件移动到盖子馈送站以拾取盖子，（ii）将夹持器组件与盖子一起移动到 拾取模具，（iii）将夹具组合件与盖和模具一起移动到由精细模具相机拍摄的位置，以及（iv）将盖子和模具移动到沿着预定的组装位置 输送机 该方法和装置也可以用于拆卸。