Silicon containing material for patterning polymeric memory element
    4.
    发明授权
    Silicon containing material for patterning polymeric memory element 有权
    含硅材料用于图案化聚合物记忆元件

    公开(公告)号:US06803267B1

    公开(公告)日:2004-10-12

    申请号:US10614484

    申请日:2003-07-07

    IPC分类号: H01L21336

    摘要: The present invention provides a method to fabricate an organic memory device, wherein the fabrication method includes forming a lower electrode, depositing a passive material over the surface of the lower electrode, applying an organic semiconductor material over the passive material, and operatively coupling the an upper electrode to the lower electrode through the organic semiconductor material and the passive material. Patterning of the organic semiconductor material is achieved by depositing a silicon-based resist over the organic semiconductor, irradiating portions of the silicon-based resist and patterning the silicon-based resist to remove the irradiated portions of the silicon-based resist. Thereafter, the exposed organic semiconductor can be patterned, and the non-irradiated silicon-based resist can be stripped to expose the organic semiconductor material that can be employed as a memory cell for single and multi-cell memory devices. A partitioning component can be integrated with the memory device to facilitate stacking memory devices and programming, reading, writing and erasing memory elements.

    摘要翻译: 本发明提供一种制造有机存储器件的方法,其中所述制造方法包括形成下电极,在所述下电极的表面上沉积无源材料,在所述被动材料上施加有机半导体材料,以及将所述有源半导体材料 上电极通过有机半导体材料和被动材料到下电极。 有机半导体材料的图案化是通过在有机半导体上沉积硅基抗蚀剂,照射硅基抗蚀剂的部分并图案化硅基抗蚀剂以除去硅基抗蚀剂的照射部分来实现的。 此后,可以对暴露的有机半导体进行构图,并且可以剥离未照射的硅基抗蚀剂以暴露可用作单电池和多电池存储器件的存储器单元的有机半导体材料。 分区组件可以与存储器件集成,以便于堆叠存储器件和编程,读取,写入和擦除存储器元件。

    Multi-cell organic memory element and methods of operating and fabricating
    5.
    发明授权
    Multi-cell organic memory element and methods of operating and fabricating 有权
    多单元有机存储元件及其操作和制造方法

    公开(公告)号:US06900488B1

    公开(公告)日:2005-05-31

    申请号:US10284946

    申请日:2002-10-31

    摘要: The present invention provides a multi-cell organic memory device that can operate as a non-volatile memory device having a plurality of multi-cell structures constructed within the memory device. A lower electrode can be formed, wherein one or more passive layers are formed on top of the lower electrode. An Inter Layer Dielectric (ILD) is formed above the passive layers and lower electrode, whereby a via or other type relief is created within the ILD and an organic semiconductor material is then utilized to partially fill the via above the passive layer. The portions of the via that are not filled with organic material are filled with dielectric material, thus forming a multi-dimensional memory structure above the passive layer or layers and the lower electrode. One or more top electrodes are then added above the memory structure, whereby distinctive memory cells are created within the organic portions of the memory structure and activated (e.g., read/write) between the top electrodes and bottom electrode, respectively. In this manner, multiple storage cells can be formed within a singular organic structure thereby increasing memory device density and storage.

    摘要翻译: 本发明提供一种多小区有机存储装置,其可以作为具有构造在存储装置内的多个多小区结构的非易失性存储装置来操作。 可以形成下电极,其中在下电极的顶部上形成一个或多个钝化层。 在无源层和下电极之上形成层间电介质(ILD),由此在ILD内产生通孔或其它类型的浮雕,然后利用有机半导体材料部分地填充钝化层以上的通孔。 通孔中没有填充有机材料的部分用电介质材料填充,从而在钝化层或下层电极之上形成多维存储结构。 然后在存储器结构上方添加一个或多个顶部电极,由此在存储器结构的有机部分内分别创建独特的存储单元,并分别在顶部电极和底部电极之间激活(例如,读取/写入)。 以这种方式,可以在单个有机结构内形成多个存储单元,从而增加存储器件密度和存储。

    Self aligned memory element and wordline
    7.
    发明授权
    Self aligned memory element and wordline 有权
    自对准存储元件和字线

    公开(公告)号:US07645632B2

    公开(公告)日:2010-01-12

    申请号:US11750724

    申请日:2007-05-18

    IPC分类号: H01L51/40

    CPC分类号: H01L27/28

    摘要: An organic polymer memory cell is provided having an organic polymer layer and an electrode layer formed over a first conductive (e.g., copper) layer (e.g., bitline). The memory cells are connected to a second conductive layer (e.g., forming a wordline), and more particularly the top of the electrode layer of the memory cells to the second conductive layer. Optionally, a conductivity facilitating layer is formed over the conductive layer. Dielectric material separates the memory cells. The memory cells are self-aligned with the bitlines formed in the first conductive layer and the wordlines formed in the second conductive layer.

    摘要翻译: 提供了一种有机聚合物记忆单元,其具有形成在第一导电(例如铜)层(例如位线)上的有机聚合物层和电极层。 存储单元连接到第二导电层(例如,形成字线),更具体地,将存储器单元的电极层的顶部连接到第二导电层。 可选地,导电促进层形成在导电层上。 电介质材料分离存储单元。 存储单元与形成在第一导电层中的位线和形成在第二导电层中的字线自对准。

    Simplified graded LDD transistor using controlled polysilicon gate profile
    9.
    发明授权
    Simplified graded LDD transistor using controlled polysilicon gate profile 有权
    使用受控多晶硅栅极配置的简化分级LDD晶体管

    公开(公告)号:US06274443B1

    公开(公告)日:2001-08-14

    申请号:US09162116

    申请日:1998-09-28

    IPC分类号: H01L21336

    摘要: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures having gradual doping profiles and reduced process complexity is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer; forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a first polysilicon gate, wherein the first polysilicon gate has sidewalls with sloped profiles and the sloped profiles are used as masks during the ion implantation of the LDD structures to space the resultant LDD structures away from the edges of second polysilicon gates to be formed subsequently with substantially vertical profiles. Since the LDD structures are spaced away from the edges of the second polysilicon gates, the lateral diffusion of the LDD structures into the channel due to rapid thermal annealing is reduced.

    摘要翻译: 通过在半导体衬底上形成栅氧化层,制造具有逐渐掺杂分布和降低工艺复杂度的LDD结构的超大规模CMOS集成电路半导体器件; 在所述栅极氧化物层上形成多晶硅层; 在所述多晶硅层上形成第一掩模层; 图案化和蚀刻第一掩模层以形成第一栅极掩模; 各向异性地蚀刻所述多晶硅层以形成第一多晶硅栅极,其中所述第一多晶硅栅极具有具有倾斜轮廓的侧壁,并且所述倾斜轮廓在所述LDD结构的离子注入期间用作掩模,以使所得到的LDD结构远离所述第二多晶硅的边缘 随后将形成具有基本垂直轮廓的多晶硅栅极。 由于LDD结构与第二多晶硅栅极的边缘间隔开,所以LDD结构由于快速热退火而向沟道中的横向扩散减小。

    Simplified graded LDD transistor using controlled polysilicon gate profile
    10.
    发明授权
    Simplified graded LDD transistor using controlled polysilicon gate profile 有权
    使用受控多晶硅栅极配置的简化分级LDD晶体管

    公开(公告)号:US06350639B1

    公开(公告)日:2002-02-26

    申请号:US09832684

    申请日:2001-04-10

    IPC分类号: H01L218238

    摘要: An ultra-large scale CMOS integrated circuit semiconductor device with LDD structures is manufactured by forming a gate oxide layer over the semiconductor substrate; forming a polysilicon layer over the gate oxide layer; forming a first mask layer over the polysilicon layer; patterning and etching the first mask layer to form a first gate mask; anisotropically etching the polysilicon layer to form a first polysilicon gate, wherein the first polysilicon gate has sidewalls with sloped profiles and the sloped profiles are used as masks during the ion implantation of the LDD structures to space the resultant LDD structures away from the edges of second polysilicon gates to be formed subsequently with substantially vertical profiles.

    摘要翻译: 通过在半导体衬底上形成栅极氧化层制造具有LDD结构的超大规模CMOS集成电路半导体器件; 在所述栅极氧化物层上形成多晶硅层; 在所述多晶硅层上形成第一掩模层; 图案化和蚀刻第一掩模层以形成第一栅极掩模; 各向异性地蚀刻所述多晶硅层以形成第一多晶硅栅极,其中所述第一多晶硅栅极具有具有倾斜轮廓的侧壁,并且所述倾斜轮廓在所述LDD结构的离子注入期间用作掩模,以将所得到的LDD结构远离所述第二多晶硅的边缘 随后将形成具有基本垂直轮廓的多晶硅栅极。