公开(公告)号：US20060154438A1

公开(公告)日：2006-07-13

申请号：US11233377

申请日：2005-09-23

申请人： Daisuke Kishimoto ,  Hitoshi Kuribayashi ,  Yuji Sano ,  Akihiko Ohi ,  Yoshihiko Nagayasu

发明人： Daisuke Kishimoto ,  Hitoshi Kuribayashi ,  Yuji Sano ,  Akihiko Ohi ,  Yoshihiko Nagayasu

IPC分类号： H01L21/76 ,  H01L21/302

CPC分类号： H01L29/7813 ,  H01L21/02057 ,  H01L21/3065 ,  H01L21/3247 ,  H01L21/76248 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/513 ,  H01L29/66734

摘要： In the method for manufacturing a semiconductor device according to the invention including the step of forming trenches having the depth thereof in perpendicular to the major surface of a semiconductor substrate, the step of forming trenches includes the steps of performing trench etching using an insulator film, formed on the major surface of the semiconductor substrate and shaped with a predetermined pattern, for a mask to form the trenches; etching the inside of the trenches using a halogen containing gas to smoothen the inside of the trenches; and thermally treating in a non-oxidizing and non-nitriding atmosphere. The manufacturing method according to the invention facilitates well removing the etching residues remaining in the trenches and rounding the trench corners properly when the trenches are 2 μm or narrower in width and even when the trenches are 1 μm or narrower in width.

摘要翻译： 在根据本发明的半导体器件的制造方法中，包括形成其深度与半导体衬底的主表面垂直的沟槽的步骤，形成沟槽的步骤包括以下步骤：使用绝缘膜进行沟槽蚀刻， 形成在半导体衬底的主表面上并以预定图案成形，用于掩模以形成沟槽; 使用含卤素气体蚀刻沟槽的内部以平滑沟槽的内部; 并在非氧化和非氮化气氛中进行热处理。 根据本发明的制造方法有助于很好地去除残留在沟槽中的蚀刻残留物，并且当沟槽为2μm或宽度较窄时，甚至当沟槽为1μm或宽度较窄时，恰当地对沟槽角进行四舍五入。

公开(公告)号：US07510975B2

公开(公告)日：2009-03-31

申请号：US11233377

申请日：2005-09-23

申请人： Daisuke Kishimoto ,  Hitoshi Kuribayashi ,  Yuji Sano ,  Akihiko Ohi ,  Yoshihiko Nagayasu

发明人： Daisuke Kishimoto ,  Hitoshi Kuribayashi ,  Yuji Sano ,  Akihiko Ohi ,  Yoshihiko Nagayasu

IPC分类号： H01L21/302

CPC分类号： H01L29/7813 ,  H01L21/02057 ,  H01L21/3065 ,  H01L21/3247 ,  H01L21/76248 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/513 ,  H01L29/66734

摘要： In the method for manufacturing a semiconductor device according to the invention including the step of forming trenches having the depth thereof in perpendicular to the major surface of a semiconductor substrate, the step of forming trenches includes the steps of performing trench etching using an insulator film, formed on the major surface of the semiconductor substrate and shaped with a predetermined pattern, for a mask to form the trenches; etching the inside of the trenches using a halogen containing gas to smoothen the inside of the trenches; and thermally treating in a non-oxidizing and non-nitriding atmosphere. The manufacturing method according to the invention facilitates well removing the etching residues remaining in the trenches and rounding the trench corners properly when the trenches are 2 μm or narrower in width and even when the trenches are 1 μm or narrower in width.

摘要翻译： 在根据本发明的半导体器件的制造方法中，包括形成其深度与半导体衬底的主表面垂直的沟槽的步骤，形成沟槽的步骤包括以下步骤：使用绝缘膜进行沟槽蚀刻， 形成在半导体衬底的主表面上并以预定图案成形，用于掩模以形成沟槽; 使用含卤素气体蚀刻沟槽的内部以平滑沟槽的内部; 并在非氧化和非氮化气氛中进行热处理。 根据本发明的制造方法有助于很好地去除残留在沟槽中的蚀刻残留物，并且当沟槽为2μm或宽度较窄时，甚至当沟槽为1μm或宽度较窄时，恰当地对沟槽角进行四舍五入。

公开(公告)号：US08928646B2

公开(公告)日：2015-01-06

申请号：US13325983

申请日：2011-12-14

申请人： Yuji Sano ,  Akihiro Takagi ,  Tomokatsu Kishi ,  Toyoshi Kawada ,  Hirokazu Inoue

发明人： Yuji Sano ,  Akihiro Takagi ,  Tomokatsu Kishi ,  Toyoshi Kawada ,  Hirokazu Inoue

IPC分类号： G09G3/28 ,  H05B33/08 ,  G09G3/296 ,  H01J11/26

CPC分类号： G09G3/28 ,  G09G3/296 ,  G09G3/2965 ,  G09G2310/0289 ,  G09G2330/02 ,  G09G2330/021 ,  G09G2330/045 ,  H01J11/26 ,  H05B33/08

摘要： A plasma display apparatus including a capacitive load and a driving circuit is provided. The plasma display apparatus includes a driving power source supplying a drive voltage to the capacitive load and a reference potential terminal supplying a reference potential to the capacitive load. A drive IC is coupled to the driving power source.

摘要翻译： 提供了包括电容性负载和驱动电路的等离子体显示装置。 等离子体显示装置包括向容性负载提供驱动电压的驱动电源和向电容性负载提供参考电位的参考电位端子。 驱动IC耦合到驱动电源。

公开(公告)号：US07737641B2

公开(公告)日：2010-06-15

申请号：US11350848

申请日：2006-02-10

申请人： Yuji Sano ,  Akihiro Takagi ,  Tomokatsu Kishi ,  Toyoshi Kawada ,  Hirokazu Inoue

发明人： Yuji Sano ,  Akihiro Takagi ,  Tomokatsu Kishi ,  Toyoshi Kawada ,  Hirokazu Inoue

IPC分类号： G09G3/10

CPC分类号： G09G3/28 ,  G09G3/296 ,  G09G3/2965 ,  G09G2310/0289 ,  G09G2330/02 ,  G09G2330/021 ,  G09G2330/045 ,  H01J11/26 ,  H05B33/08

摘要： A capacitive-load driving circuit has a configuration in which a driving power supply source is connected to an output terminal via a driving device. The capacitive-load driving circuit has a power distributing circuit inserted between the driving power supply source and the driving device. Therefore, temperature rise (power consumption) in the capacitive-load driving circuit can be distributed.

摘要翻译： 电容负载驱动电路具有驱动电源通过驱动装置与输出端子连接的结构。 电容负载驱动电路具有插入在驱动电源和驱动装置之间的功率分配电路。 因此，可以分配电容负载驱动电路中的温度上升（功率消耗）。

公开(公告)号：US20080005604A1

公开(公告)日：2008-01-03

申请号：US11761057

申请日：2007-06-11

申请人： Masayoshi Mizukado ,  Atsushi Hasegawa ,  Yuji Sano ,  Takashi Misawa

发明人： Masayoshi Mizukado ,  Atsushi Hasegawa ,  Yuji Sano ,  Takashi Misawa

IPC分类号： G06F1/00

CPC分类号： G05B19/404 ,  G05B2219/37134 ,  G05B2219/37241 ,  G08B13/1436

摘要： A gyro sensor is secured to a machine tool. When the machine tool is displaced, the gyro sensor detects rotation of the machine tool. The machine tool has a rotation detecting unit. Based on rotation data obtained by the gyro sensor, the rotation detecting unit determines whether the machine tool has been displaced. If the maximal rotation angle of the machine tool exceeds a predetermined value, the rotation detecting unit determines that the machine tool has been displaced. The rotation detecting unit has history data of the rotation angle recorded in a period from the time at which detection of the rotation angle of the machine tool is started to the time at which such detection is ended. The rotation detecting unit determines whether the machine tool has been displaced using the history data.

摘要翻译： 陀螺仪传感器固定在机床上。 当机床移动时，陀螺传感器检测机床的旋转。 机床具有旋转检测单元。 旋转检测部基于由陀螺仪传感器获得的旋转数据，判定机床是否已经移位。 如果机床的最大旋转角度超过预定值，则旋转检测单元确定机床已经移位。 旋转检测单元具有从从机床的旋转角度的检测开始到结束检测的时间的期间记录的旋转角度的历史数据。 旋转检测单元使用历史数据来确定机床是否已被移位。

公开(公告)号：US07224044B2

公开(公告)日：2007-05-29

申请号：US10331918

申请日：2002-12-31

申请人： Toyoshi Kawada ,  Yuji Sano

发明人： Toyoshi Kawada ,  Yuji Sano

IPC分类号： H01L23/495

CPC分类号： H01L23/538 ,  H01L23/057 ,  H01L23/3171 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/451 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2224/49171 ,  H01L2224/8592 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/0102 ,  H01L2924/14 ,  H01L2924/16152 ,  H01L2924/19041 ,  H01L2924/19105 ,  H01L2924/3025 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A semiconductor chip mounting substrate having a semiconductor bare chip and a substrate electrically connected to the semiconductor bare chip by wire bonding is provided. Here, a protective film is provided on the surface of the semiconductor bare chip and is disposed so as to expose all or a part of a bonding wire.

摘要翻译： 提供了具有半导体裸芯片的半导体芯片安装基板和通过引线接合与半导体裸芯片电连接的基板。 这里，在半导体裸芯片的表面上设置保护膜，并设置成露出接合线的全部或一部分。

公开(公告)号：US20050230818A1

公开(公告)日：2005-10-20

申请号：US11052909

申请日：2005-02-09

申请人： Taizou Ohno ,  Yoshinori Okada ,  Kunio Umehara ,  Yoshikazu Kanazawa ,  Tomokatsu Kishi ,  Haruo Koizumi ,  Takayuki Kobayashi ,  Yuji Sano

发明人： Taizou Ohno ,  Yoshinori Okada ,  Kunio Umehara ,  Yoshikazu Kanazawa ,  Tomokatsu Kishi ,  Haruo Koizumi ,  Takayuki Kobayashi ,  Yuji Sano

IPC分类号： G09G3/294 ,  H01L23/31 ,  H01L23/36 ,  H01L23/367 ,  H01L23/373 ,  H01L23/40 ,  H01L23/538 ,  H01L23/10

CPC分类号： H01L23/3735 ,  G09G3/294 ,  G09G2300/0408 ,  G09G2330/045 ,  G09G2330/06 ,  H01L23/3121 ,  H01L23/36 ,  H01L23/5386 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/48091 ,  H01L2224/49109 ,  H01L2224/49171 ,  H01L2924/00014 ,  H01L2924/01013 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/0105 ,  H01L2924/01079 ,  H01L2924/014 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/1517 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19107 ,  H01L2224/45099 ,  H01L2924/00012

摘要： A drive circuit module capable of dissipating heat produced by a semiconductor device, in the form of a bare chip, and in which the semiconductor device can be driven in a floating state, and a display device in which the drive circuit module is mounted have been disclosed. The drive circuit module comprises a heat dissipation plate, a flexible circuit board, an insulation layer having a wiring pattern, a semiconductor device mounting insulation layer, and a semiconductor device mounted on the heat dissipation plate via the semiconductor device mounting insulation layer, in which the insulation layer having the wiring pattern and the semiconductor device mounting insulation layer are made of a non-conductive resin, the flexible circuit board and the insulation layer having the wiring pattern are fixed on the heat dissipation plate directly or indirectly, and the semiconductor device is electrically connected to the wiring pattern and the flexible circuit board.

摘要翻译： 一种驱动电路模块，其能够以裸芯片的形式散发由半导体器件产生的热量，并且其中半导体器件可以以浮置状态驱动，并且其中安装有驱动电路模块的显示器件已经被 披露 驱动电路模块包括散热板，柔性电路板，具有布线图案的绝缘层，半导体器件安装绝缘层和半导体器件，该半导体器件经由半导体器件安装绝缘层安装在散热板上，其中 具有布线图案的绝缘层和半导体器件安装绝缘层由非导电树脂制成，柔性电路板和具有布线图案的绝缘层直接或间接固定在散热板上，半导体器件 电连接到布线图案和柔性电路板。

公开(公告)号：US06539035B1

公开(公告)日：2003-03-25

申请号：US09429728

申请日：1999-10-29

申请人： Masaki Yoda ,  Yuji Sano ,  Naruhiko Mukai ,  Koki Okazaki

发明人： Masaki Yoda ,  Yuji Sano ,  Naruhiko Mukai ,  Koki Okazaki

IPC分类号： H01S330

CPC分类号： G02B27/0927 ,  G02B6/4206 ,  G02B6/4296 ,  G02B27/09 ,  G02B27/0961 ,  G02B27/48 ,  H04B10/50

摘要： A laser transmission system for transmitting laser beam to an optical fiber comprises a pulse laser oscillator unit, a beam guide unit having an optical condensing unit for condensing a pulse laser beam radiated from the pulse laser oscillator unit, an optical fiber unit for transmitting the pulse laser beam condensed by the optical fiber beam guide unit, and a device for reducing a coherence of the pulse laser beam provided for at least one of the pulse laser oscillator unit, the beam guide unit and the optical fiber unit. This coherence reducing device is for making substantially uniform distribution of laser beams at a beam entrance portion of the optical fiber unit and preventing the laser beams from focussing or converging on one point in the optical fiber unit.

摘要翻译： 一种用于将激光束传输到光纤的激光传输系统包括脉冲激光振荡器单元，具有用于聚集从脉冲激光振荡器单元辐射的脉冲激光束的聚光单元的光束引导单元，用于发送脉冲的光纤单元 由光纤束引导单元聚光的激光束，以及用于降低为脉冲激光振荡器单元，光束引导单元和光纤单元中的至少一个提供的脉冲激光束的相干性的装置。 该相干降低装置用于使激光束在光纤单元的光束入口部分上的分布基本均匀，并且防止激光束聚焦或会聚在光纤单元中的一个点上。

公开(公告)号：US06304236B1

公开(公告)日：2001-10-16

申请号：US09498618

申请日：2000-02-07

申请人： Ikuya Arai ,  Kouji Kitou ,  Yuji Sano

发明人： Ikuya Arai ,  Kouji Kitou ,  Yuji Sano

IPC分类号： G09G106

CPC分类号： G09G1/167 ,  G06F3/14 ,  G09G1/165 ,  G09G5/006 ,  G09G2320/08 ,  G09G2330/021 ,  G09G2340/02 ,  G09G2340/125 ,  G09G2360/18 ,  G09G2370/04 ,  G09G2370/045

摘要： An image display apparatus capable of adjusting a display picture by an input unit through a computer body is disclosed. When the user inputs a control instruction for adjusting the display picture of the display unit by the input unit connected to the computer body, a control signal addition circuit prepares a control signal Sc corresponding to the control instruction and adds the control signal to a video signal R, G or B or a synchronizing signal Hs or Vs produced by a display control circuit during a vertical retrace period. A-control signal separation circuit separates the added control signal Sc from the video signal R, G or B or the synchronizing signal Hs or Vs produced by the control signal addition circuit. A display control circuit produces adjustment signals Sa and Sb on the basis of the control signal from the control signal separation circuit to adjust a video circuit and a deflection circuit. Thus, the user can adjust the display picture by the input unit near at hand without extending the hands to adjustment switches of the display unit.

摘要翻译： 公开了能够通过计算机主体通过输入单元调整显示图像的图像显示装置。 当用户通过连接到计算机机身的输入单元输入用于调整显示单元的显示画面的控制指令时，控制信号加法电路准备与控制指令相对应的控制信号Sc，并将控制信号加到视频信号 R，G或B或在垂直回扫期间由显示控制电路产生的同步信号Hs或Vs。 A控制信号分离电路将附加的控制信号Sc与视频信号R，G或B或由控制信号加法电路产生的同步信号Hs或Vs分离。 显示控制电路基于来自控制信号分离电路的控制信号产生调节信号Sa和Sb，以调整视频电路和偏转电路。 因此，用户可以通过手头附近的输入单元来调整显示图像而不将手伸展到显示单元的调节开关。

公开(公告)号：US6084202A

公开(公告)日：2000-07-04

申请号：US79519

申请日：1998-05-15

申请人： Kouki Okazaki ,  Arata Ito ,  Yuji Sano ,  Naruhiko Mukai ,  Nobutada Aoki ,  Chikara Konagai ,  Muneyoshi Kikunaga

发明人： Kouki Okazaki ,  Arata Ito ,  Yuji Sano ,  Naruhiko Mukai ,  Nobutada Aoki ,  Chikara Konagai ,  Muneyoshi Kikunaga

IPC分类号： B23K26/12 ,  G21C13/087 ,  B23K26/00

CPC分类号： B23K26/0608 ,  B23K26/0069 ,  B23K26/082 ,  B23K26/0821 ,  B23K26/122 ,  B23K26/142 ,  G21C13/087 ,  G21Y2002/10 ,  G21Y2004/201 ,  G21Y2004/504 ,  Y02E30/40

摘要： An underwater laser processing method is carried out by irradiating, through a laser beam irradiation apparatus, a laser beam having a high output, a short pulse and a visible wavelength to a surface of a structure immersed in a water to improve residual stress of a material of the surface of the structure and remove a crack or a CRUD thereof. The laser beam irradiation apparatus comprises a pulse laser device suspended into a water in which a metal material is accommodated from an upper side thereof for irradiating a laser beam having a visible wavelength to a processing position, a beam strength adjusting device for adjusting an output per 1 pulse of a laser beam generated by the pulse laser device and a mechanism for adjusting a spot diameter and a multiplexing ratio of an irradiated beam.

摘要翻译： 通过激光束照射装置将具有高输出，短脉冲和可见波长的激光束照射到浸入水中的结构的表面，以提高材料的残余应力来进行水中激光加工方法 的结构的表面，并去除裂纹或其CRUD。 激光束照射装置包括悬挂在水中的脉冲激光装置，其中从其上侧容纳有金属材料，用于将具有可见波长的激光束照射到处理位置;光束强度调节装置，用于调节每个 由脉冲激光装置产生的激光束的1脉冲和用于调整照射光束的光点直径和复用率的机构。