摘要:
There is provided to a pattern reversal film forming composition that is capable of forming a pattern reversal film which is not mixed with a resist pattern formed on a substrate, and that is only capable of forming a pattern reversal film advantageously covering the pattern, but also irrespective of whether the resist pattern is coarse or fine, capable of forming a planar film excellent in temporal stability on the pattern. A pattern reversal film forming composition including a polysiloxane, an additive and an organic solvent, characterized in that the polysiloxane is a product of a hydrolysis and/or condensation reaction of a silane compound containing a tetraalkoxysilane of Si(OR1)4 and an alkoxysilane of XnSi(OR2)4-n, and the tetraalkoxysilane is used in a ratio of 1 to 50% by mole based on the number of moles of the whole silane compound; and a pattern reversal film and a method of forming a reversed pattern in which the composition is used.
摘要:
There is provided to a pattern reversal film forming composition that is capable of forming a pattern reversal film which is not mixed with a resist pattern formed on a substrate, and that is only capable of forming a pattern reversal film advantageously covering the pattern, but also irrespective of whether the resist pattern is coarse or fine, capable of forming a planar film excellent in temporal stability on the pattern. A pattern reversal film forming composition including a polysiloxane, an additive and an organic solvent, characterized in that the polysiloxane is a product of a hydrolysis and/or condensation reaction of a silane compound containing a tetraalkoxysilane of Si(OR1)4 and an alkoxysilane of XnSi(OR2)4-n, and the tetraalkoxysilane is used in a ratio of 1 to 50% by mole based on the number of moles of the whole silane compound; and a pattern reversal film and a method of forming a reversed pattern in which the composition is used.
摘要:
It is an object to provide a coating composition applicable to “reversal patterning” and suitable for forming a film covering a resist pattern. The object is accomplished by a coating composition for lithography comprising an organopolysiloxane, a solvent containing the prescribed organic solvent as a main component, and a quaternary ammonium salt or a quaternary phosphonium salt; or a coating composition for lithography comprising a polysilane, a solvent containing the prescribed organic solvent as a main component, and at least one additive selected from a group consisting of a crosslinking agent, a quaternary ammonium salt, a quaternary phosphonium salt, and a sulfonic acid compound, wherein the polysilane has, at a terminal thereof, a silanol group or a silanol group together with a hydrogen atom.
摘要:
A bone resection jig that can make ligament tension equal at extension and flexion positions without any actual measurements when resecting femur and tibia during artificial knee joint replacement surgery. The bone resection jig used in artificial knee joint replacement surgery includes a spacer block (1) comprised of a grip (6), a hollow box (7) that is provided on an other end side of the grip and has a vertical hole (7a) therein, and a reference spacer part (8) that extends out from the hollow box (7) and is adapted be inserted into the resection region between femur and tibia; a reference pin guide (2) which, when the femur and tibia are in the flexion position, is inserted into the vertical hole (7a) of the hollow box, extends on the reference spacer part (8) to the other end side of the grip so as to come into contact with a resection plane (FH) of the tip of the distal end of the femur, and is formed with guide holes (9) for guiding reference pins (3) to be installed from a front side into the resection plane (FH) of the tip of the distal end of the femur; and an aiming member (12) which is, after the spacer block (1) has been removed from a space between the femur and tibia leaving the reference pins (3), brought onto the reference pins (3) by being guided thereby, the aiming member being provided with an indicator (14) that indicates a resection plane (FR) at a back of the distal end of the femur when the aiming member (12) comes into contact with the resection plane (FH) of the tip of the distal end of the femur.
摘要:
Evaluating a delivered video using a marker. A marker can be generated to be superimposed and displayed on an evaluation range from coordinate values specifying the evaluation range input to evaluate the video and that adds the marker to the video and causing the video with the marker to be deliver. An image can be generated in the evaluation range at predetermined intervals starting from the input time of the coordinate values. A similarity between two images arranged in the order of time from the input time by comparing the two images can be calculated, and a determination can be made whether the similarity is within an allowable range. The time of one of the two images generated as an extinction time of the displayed marker can be selected when the similarity is determined to be not within the allowable range.
摘要:
A test pattern generating device generates a test pattern with respect to a semiconductor circuit having first and second common circuits and a non-common circuit, wherein each of the common circuits has a scan chain for checking an operation of the circuit by applying a test pattern from the outside of the circuit. A set of scan chains and a set of assumed faults are created for each of the common circuits. Any of the common circuits is determined as the common circuit of a first test target. After the determined common circuit of the first test target is subjected to ATPG and detection of circuit fault, a test pattern generated in successful ATPG about the common circuit of the first test target is diverted to the common circuit determined as the second test target, and ATPG and detection of a circuit fault of the non-common circuit part.
摘要:
An ammonium metavanadate is heat-treated to 500° C. or less at a predetermined rate of temperature rise, whereby a microcrystal particle of a vanadium pentoxide can be formed. According to the production method described above, a crystal of a nano-vanadium having a layer length of 100 nm or less can be formed. The nano-vanadium formed by the production method described above can effectively be used for an electrode of an electric storage device such as a battery. The production method according to the present invention can be linked to a conventional production method in which an ammonium metavanadate can be formed in the course of the method, whereby the present invention can smoothly be embodied.
摘要:
There is provided anti-reflective coating forming composition containing a reaction product of an isocyanuric acid compound having two or three 2,3-epoxypropyl groups with a benzoic acid compound. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light, causes no intermixing with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
摘要:
The present invention is a test pattern generating method. And the test pattern generating method provides a counting step for counting the number of faults becoming undetectable respectively, at each of states 0 and 1 that are able to be given to each of input pins of EOR gates when each of the EOR gates becomes a D frontier (different frontier) or a J frontier (justify frontier), a selecting step for selecting a state in which the number of faults becoming undetectable is smaller in the 0 and 1 states as an allocating state to the input pin, based on a counted result at the counting step, and step for generating the test pattern based on a selected state at the selecting step. With this, dynamic compaction can be effectively executed by restraining the increase of the number of test patterns.