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公开(公告)号：US6124650A
公开(公告)日：2000-09-26
申请号：US418874
申请日：1999-10-15
CPC分类号： H01H50/005 , H02K99/20 , H01H2050/007 , Y10S310/06
摘要： An actuation device employing square-loop latchable magnetic material having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field is created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material is disposed on the mobile electrode of a switching device, and another magnetic material is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface. By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on the stationary electrode. The resulting relative displacement of the mobile and stationary electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of the electrodes.
摘要翻译： 公开了一种使用具有能够响应于暴露于外部磁场而变化的磁化方向（极化））的方形可闭锁磁性材料的致动装置。 磁场由具有非螺线管配置的导体组件产生。 一旦材料的磁化方向如此改变，则不再需要外部磁场来保持新的磁化方向。 可锁定磁性材料设置在开关装置的移动电极上，并且另一磁性材料以与固定电极或表面上的可锁定磁性材料隔开的关系设置。 通过对布置在可闭锁材料附近的导体组件施加电流，产生围绕可锁定磁性材料的磁场，以改变磁化方向，从而能够吸引或斥力位于固定电极上的另一磁性材料。 所产生的移动和固定电极的相对位移影响了携带在致动装置的相应电极上或与驱动装置的相应电极相关联的电触头的选择性连接或断开，而不需要额外的电力以保持电极的开关状态。
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2.发明授权公开(公告)号：US06400009B1
公开(公告)日：2002-06-04
申请号：US09419488
申请日：1999-10-15
IPC分类号： H01L2312
CPC分类号： B81B7/0041 , B81C2203/019 , H01L23/04 , H01L23/057 , H01L23/10 , H01L2924/0002 , H01L2924/01079 , H01L2924/00
摘要： A package for hermetically sealing a micro-electromechanical systems (MEMS) device in a hybrid circuit comprise a firewall formed on a substrate for the MEMS device and which has a height defining a cavity of the package in which the MEMS device will be sealed. A second substrate spaced from the first substrate hermetically seals the cavity when the second substrate is flip-chip bonded to the first substrate and soldered to the first substrate with a thin film metal material placed on at least a top portion of the firewall. The resulting firewall MEMS device package can be further packaged using conventional CMOS packaging techniques. By hermetically sealing the cavity, the enclosed MEMS device is protected from deleterious conditions found in the environment of conventional CMOS packaging techniques which is often detrimental to MEMS device function.
摘要翻译： 用于气密地密封混合电路中的微机电系统（MEMS）装置的封装包括形成在用于MEMS器件的衬底上的防火墙，其具有限定封装的空腔的高度，其中MEMS器件将被密封。 与第一基板间隔开的第二基板在第二基板被倒装芯片接合到第一基板时气密地密封空腔，并且将金属材料焊接到第一基板上，薄膜金属材料放置在防火墙的至少顶部上。 所得到的防火墙MEMS器件封装可以使用传统的CMOS封装技术进一步封装。 通过密封空腔，封装的MEMS器件得到保护，防止在常规CMOS封装技术的环境中发现有害条件，这常常对MEMS器件功能有害。
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公开(公告)号：US07220388B2
公开(公告)日：2007-05-22
申请号：US10786199
申请日：2004-02-25
申请人： David John Bishop , John VanAtta Gates , Marc Scott Hodes , Avinoam Kornblit , Stanley Pau , Brijesh Vyas
发明人： David John Bishop , John VanAtta Gates , Marc Scott Hodes , Avinoam Kornblit , Stanley Pau , Brijesh Vyas
IPC分类号： B01L3/02 , B01L11/00 , B32B5/02 , B32B27/04 , B32B27/12 , G01N1/22 , G01N1/18 , G01N1/10 , B01D63/00
CPC分类号： B01D61/364 , B01D1/00 , B01D63/087 , B01D63/088 , G01N2001/4027 , Y10T436/255 , Y10T436/2575 , Y10T436/25875
摘要： Apparatus and method for increasing the concentration of a chemical substance in a fluid comprise a micro-fluidic elongated channel formed in a substrate, with the channel being in fluid-flow communication with an ambient region along its elongated dimension. In general, the fluid includes first and second chemical substances having different vapor pressures. The apparatus includes an evaporation controller for increasing the evaporation rate of the fluid from the channel into the ambient region, thereby increasing the concentration of the higher vapor pressure (HVP) substance in the portion of the fluid remaining in the channel and increasing the concentration of the lower vapor pressure (LVP) substance in the portion of the fluid evaporated into the ambient region.
摘要翻译： 用于增加流体中化学物质浓度的装置和方法包括形成在基底中的微流体细长通道，其中通道沿其细长尺寸与环境区域流体流动连通。 通常，流体包括具有不同蒸气压的第一和第二化学物质。 该装置包括用于增加流体从通道进入环境区域的蒸发速率的蒸发控制器，从而增加通道中保留的流体部分中较高蒸气压（HVP）物质的浓度， 流体部分中的较低蒸汽压（LVP）物质蒸发到环境区域。
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公开(公告)号：US5767997A
公开(公告)日：1998-06-16
申请号：US675980
申请日：1996-07-05
CPC分类号： H04B10/40
摘要： Apparatus and methods for a combined optical modulator/photodetector are disclosed. A modulator chip is attached to a photodetector chip using a non-conductive epoxy or solder. The combined modulator/photodetector can be configured in at least two ways. In one configuration, the modulator is located on the upper surface of a chip that is attached, at its lower surface, to a photodetector containing chip. In another configuration, the modulator is located on the lower surface of the modulator chip, which is again attached at its lower surface to the pbotodetector chip. By combining the modulator and photodetector in the manner described above, they can be placed in a single package, resulting in reduced packaging costs versus a separately packaged modulator and a separately packaged photodetector. Moreover, feedback from the photodetector can used to optimize the operation of micromechanical optical modulators.
摘要翻译： 公开了用于组合光调制器/光电检测器的装置和方法。 使用非导电环氧树脂或焊料将调制器芯片附接到光电检测器芯片。 组合的调制器/光电检测器可以至少两种方式配置。 在一种配置中，调制器位于芯片的上表面上，芯片的下表面附接到包含光电检测器的芯片。 在另一种配置中，调制器位于调制器芯片的下表面上，该调制器芯片的下表面再次连接到波导检测器芯片。 通过以上述方式组合调制器和光电检测器，它们可以放置在单个封装中，从而与单独封装的调制器和单独封装的光电检测器相比降低了封装成本。 此外，来自光电检测器的反馈可用于优化微机械光学调制器的操作。
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公开(公告)号：US07180652B2
公开(公告)日：2007-02-20
申请号：US11060870
申请日：2005-02-18
IPC分类号： G02B26/00
CPC分类号： G02B26/0825
摘要： The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
摘要翻译： 该规范描述了改进的移动防反射开关（MARS）器件结构，其大大消除了可移动膜上的电荷积累，并且减少了引起膜卷曲的应力。 改进的装置使用由单晶硅制成的可移动膜。
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6.发明授权Method and device for optically crossconnecting optical signals using tilting mirror MEMS with drift monitoring feature 有权使用具有漂移监测功能的倾斜镜MEMS光学交叉连接光信号的方法和装置公开(公告)号：US06798992B1
公开(公告)日：2004-09-28
申请号：US09518070
申请日：2000-03-02
IPC分类号： H04J1400
CPC分类号： G02B6/359 , G02B6/3512 , G02B6/3556 , G02B6/3582
摘要： A device and method for detecting rotational drift of mirror elements in a MEMS tilt mirror array used in an optical crossconnect. The optical crossconnect directs optical signals from an input fiber to an output fiber along an optical path by rotatably positioning mirror elements in desired positions. A monitoring device disposed outside of the optical path is used to obtain images of the MEMS array or to transmit and receive a test signal through the crossconnect for detecting the presence of mirror element drift.
摘要翻译： 一种用于检测在光学交叉连接中使用的MEMS倾斜反射镜阵列中的镜元件的旋转漂移的装置和方法。 光学交叉连接器通过将镜子元件可旋转地定位在期望的位置，将光信号从输入光纤引导到输出光纤。 设置在光路外部的监视装置用于获得MEMS阵列的图像，或者通过交叉连接器发送和接收测试信号，以检测镜元件漂移的存在。
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公开(公告)号：US06441360B1
公开(公告)日：2002-08-27
申请号：US09515412
申请日：2000-02-29
IPC分类号： H01J314
CPC分类号： G02B6/3566 , G02B6/3512 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B6/3598 , G02B26/02 , G02B26/0841
摘要： An opto-isolator incorporating a MEMS device includes an optical signal source and an optical signal detector defining therebeween an optical path for communication of optical signals. A MEMS device having an actuator for controlling a moveable element is disposed between the source and detector for manipulating the optical signals. In one embodiment, the moveable element is a shutter which is operable to selectively allow optical signals to be received by the detector and prevent signals from being detected. In another embodiment, the moveable member is a MEMS tilt mirror for selectively directing optical signals to the detector.
摘要翻译： 结合MEMS器件的光隔离器包括光信号源和光信号检测器，其中定义用于光信号通信的光路。 具有用于控制可移动元件的致动器的MEMS装置设置在源和检测器之间，用于操纵光信号。 在一个实施例中，可移动元件是快门，其可操作以选择性地允许光信号被检测器接收并防止检测信号。 在另一个实施例中，可移动构件是用于将光信号选择性地引导到检测器的MEMS倾斜镜。
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公开(公告)号：US06288821B1
公开(公告)日：2001-09-11
申请号：US09410586
申请日：1999-10-01
申请人： Vladimir Anatolyevich Aksyuk , David John Bishop , Cristian A. Bolle , John VanAtta Gates, II , Randy Clinton Giles , Ronald Edward Scotti
发明人： Vladimir Anatolyevich Aksyuk , David John Bishop , Cristian A. Bolle , John VanAtta Gates, II , Randy Clinton Giles , Ronald Edward Scotti
IPC分类号： G02F103
CPC分类号： G02B26/0816 , G02B6/3512 , G02B6/3556 , H01L2224/48091 , H01L2224/48227 , Y10S359/904 , H01L2924/00014
摘要： An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.
摘要翻译： 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片，以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线，至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。
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公开(公告)号：US06351577B1
公开(公告)日：2002-02-26
申请号：US09211185
申请日：1998-12-14
IPC分类号： G02B612
CPC分类号： G02B6/29358 , G02B6/122 , G02B6/29395 , G02B26/001 , G02B2006/12104
摘要： The invention provides tunable optical filters which incorporate a surface-micromachined out-of-plane plate having a moveable membrane with a high reflective (HR) coated mirror. The mirror defines one side of a Fabry-Perot (FP) filter cavity and is movable in a direction along an axis of the filter cavity. The other side of the filter cavity is defined by a second HR-coated mirror. In one illustrative embodiment, a first plate is formed on a substrate, and then subsequently released from the substrate and secured in a plane orthogonal to the substrate. The first HR-coated mirror is formed as part of a movable membrane supported in an opening through the first plate. The second mirror is formed on a second plate secured in another plane orthogonal to the plane of the substrate, such that the filter cavity is defined horizontally between the first and second mirrors. In another embodiment, the second mirror is formed on an endface of an external fiber, such that light from the fiber can pass from the second mirror through an opening in the second plate to the first mirror. In another possible embodiment, the second plate is eliminated and the second mirror is formed on the substrate. The first plate is then arranged over the second mirror, in a plane parallel to the substrate, and separated from the substrate by spacers, such that the filter cavity is defined vertically.
摘要翻译： 本发明提供了可调谐光学滤波器，其结合了具有高反射（HR）涂覆反射镜的可移动膜的表面微加工的平面外板。 反射镜定义了法布里 - 珀罗（FP）过滤器腔的一侧，并且可沿着过滤腔的轴线的方向移动。 过滤腔的另一侧由第二HR涂层镜定义。 在一个说明性实施例中，第一板形成在衬底上，然后随后从衬底释放并固定在与衬底正交的平面中。 第一HR涂覆镜形成为支撑在通过第一板的开口中的可移动膜的一部分。 第二反射镜形成在固定在与基板的平面正交的另一平面中的第二板上，使得过滤腔在水平地限定在第一和第二反射镜之间。 在另一个实施例中，第二反射镜形成在外部光纤的端面上，使得来自光纤的光可以从第二反射镜通过第二板中的开口传递到第一反射镜。 在另一个可能的实施例中，第二板被去除并且第二反射镜形成在基板上。 然后将第一板布置在平行于基板的平面中的第二反射镜上，并且通过间隔件与基板分离，使得过滤腔垂直地限定。
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公开(公告)号：US06265239B1
公开(公告)日：2001-07-24
申请号：US09390580
申请日：1999-09-03
IPC分类号： H01L2100
CPC分类号： G02B26/0866 , B81B3/004 , B81B3/0062 , B81B7/0003 , B81B2201/042 , G02B26/0841
摘要： A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electromechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.
摘要翻译： 公开了一种用于围绕其一个或多个轴线枢转光学装置的方法。 弹簧将光学装置耦合到微机电结构。 弹簧的一部分紧固在微机电结构上。 紧固机电结构上的每个弹簧的部分防止当这种光学装置围绕一个或多个轴枢转时弹簧沿平移方向移动光学装置。
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