公开(公告)号：US08257496B1

公开(公告)日：2012-09-04

申请号：US12315452

申请日：2008-12-03

申请人： David L. Bender ,  Gary Janik ,  Roy P. Crawford ,  David E. A. Smith

发明人： David L. Bender ,  Gary Janik ,  Roy P. Crawford ,  David E. A. Smith

IPC分类号： C30B35/00

CPC分类号： C30B15/02 ,  C30B15/28 ,  C30B29/06 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1024 ,  Y10T117/1056

摘要： A weighing system is provided for a continuous Czochralski process that accurately measures the weight of the crucible and melt during crystal growth to control the introduction of feedstock in order to keep the weight approximately constant. The system can measure the weight of the crucible while the crucible is rotating, and is insensitive to vibrations of the melt surface as well as variable torques on the crucible shaft induced by the rotation. The system also measures the weight of the crucible and its contents in order to control the amount of feedstock recharged after an ingot is withdrawn.

摘要翻译： 为连续的切克劳斯基（Czochralski）工艺提供了称重系统，可精确测量坩埚的重量，并在晶体生长过程中熔化，以控制原料的引入，以保持重量大致恒定。 该系统可以在坩埚旋转时测量坩埚的重量，并且对熔体表面的振动以及由旋转引起的坩埚轴上的可变转矩不敏感。 该系统还测量坩埚的重量及其含量，以便控制在锭被取出之后再充电的原料的量。

公开(公告)号：US08262797B1

公开(公告)日：2012-09-11

申请号：US12075513

申请日：2008-03-11

申请人： David L. Bender ,  David E. A. Smith

发明人： David L. Bender ,  David E. A. Smith

IPC分类号： C30B21/02

CPC分类号： C30B15/002 ,  C30B15/12 ,  C30B29/06 ,  Y10T117/1068 ,  Y10T117/1072

摘要： A weir is extended vertically to define an optimal annular gap between the top of the weir and the underside of a super-adjacent heat shield. The annular gap provides a high velocity stream of argon gas to be directed from the growth region to the melt region to substantially eliminate the transport of airborne particles from the melt region to the growth region. The tall weir may be configured as a modular, reusable weir extension supportably engaged with an outer (and/or inner) weir.

摘要翻译： 堰垂直延伸以限定堰顶部与超临界隔热罩下侧之间的最佳环形间隙。 环形间隙提供从生长区域引导到熔融区域的高速氩气流，以基本上消除空气传播的颗粒从熔融区域运输到生长区域。 高堰可以被配置为与外部（和/或内部）堰支撑地配合的模块化的可重复使用的堰延伸。

公开(公告)号：US20130233237A1

公开(公告)日：2013-09-12

申请号：US13604277

申请日：2012-09-05

申请人： David L. Bender ,  David E. A. Smith

发明人： David L. Bender ,  David E. A. Smith

IPC分类号： C30B15/00 ,  C30B15/12

CPC分类号： C30B15/002 ,  C30B15/12 ,  C30B29/06 ,  Y10T117/1068 ,  Y10T117/1072

摘要： A method is disclosed for continuous CZ crystal growing wherein one or more crystal ingots are pulled into a growth chamber from a crystal/melt interface defined in a crucible containing molten crystalline material that is continuously replenished by crystalline feedstock. The method includes separating the molten crystalline material, controlling the flow of the molten crystalline material and defining an annular space with respect to sidewalls of a heat shield in the chamber.

摘要翻译： 公开了一种用于连续CZ晶体生长的方法，其中将一个或多个晶锭从含有由结晶原料连续补充的熔融结晶材料的坩埚中限定的晶体/熔融界面拉入生长室。 该方法包括分离熔融结晶材料，控制熔融结晶材料的流动并且相对于腔室中的隔热罩的侧壁限定环形空间。

公开(公告)号：US09353457B2

公开(公告)日：2016-05-31

申请号：US13604277

申请日：2012-09-05

申请人： David L. Bender ,  David E. A. Smith

发明人： David L. Bender ,  David E. A. Smith

IPC分类号： C30B15/12 ,  C30B15/00 ,  C30B29/06

CPC分类号： C30B15/002 ,  C30B15/12 ,  C30B29/06 ,  Y10T117/1068 ,  Y10T117/1072

摘要： A method is disclosed for continuous CZ crystal growing wherein one or more crystal ingots are pulled into a growth chamber from a crystal/melt interface defined in a crucible containing molten crystalline material that is continuously replenished by crystalline feedstock. The method includes separating the molten crystalline material, controlling the flow of the molten crystalline material and defining an annular space with respect to sidewalls of a heat shield in the chamber.

摘要翻译： 公开了一种用于连续CZ晶体生长的方法，其中将一个或多个晶锭从含有由结晶原料连续补充的熔融结晶材料的坩埚中限定的晶体/熔融界面拉入生长室。 该方法包括分离熔融结晶材料，控制熔融结晶材料的流动并且相对于腔室中的隔热罩的侧壁限定环形空间。

公开(公告)号：US07356540B2

公开(公告)日：2008-04-08

申请号：US10189754

申请日：2002-07-03

申请人： David E. A. Smith ,  Anton R. Fleig

发明人： David E. A. Smith ,  Anton R. Fleig

IPC分类号： G06F17/30

CPC分类号： G06F17/30607 ,  Y10S707/99942 ,  Y10S707/99943

摘要： A user based computer system for information storage and retrieval in which information data items are stored in a persistent memory for later searching, retrieval and/or browsing and related in the memory by a frame system wherein the stored information includes primary information from outside the system and additional information derived from primary information and inherited from stored information.

摘要翻译： 一种用于信息存储和检索的基于用户的计算机系统，其中信息数据项被存储在持久存储器中，以便随后通过帧系统搜索，检索和/或浏览和相关于存储器，其中所存储的信息包括来自系统外的主要信息 以及从主要信息导出并从存储信息继承的附加信息。

公开(公告)号：US5502306A

公开(公告)日：1996-03-26

申请号：US214377

申请日：1994-03-17

申请人： Dan Meisburger ,  Alan D. Brodie ,  Curt Chadwick ,  Anil Desai ,  Hans Dohse ,  Dennis Emge ,  John Greene ,  Ralph Johnson ,  Ming-Yie Ling ,  John McMurtry ,  Barry Becker ,  Ray Paul ,  Mike Robinson ,  Richard Simmons ,  David E. A. Smith ,  John Taylor ,  Lee Veneklasen ,  Dean Walters ,  Paul Wieczorek ,  Sam Wong ,  April Dutta ,  Surendra Lele ,  Kirkwood Rough ,  Henry Pearce-Percy ,  Jack Y. Jau ,  Chun C. Lin ,  Hoi T. Nguyen ,  Yen-Jen Oyang ,  Timothy L. Hutcheson ,  David J. Clark ,  Chung-Shih Pan ,  Chetana Bhaskar ,  Chris Kirk ,  Eric Munro

发明人： Dan Meisburger ,  Alan D. Brodie ,  Curt Chadwick ,  Anil Desai ,  Hans Dohse ,  Dennis Emge ,  John Greene ,  Ralph Johnson ,  Ming-Yie Ling ,  John McMurtry ,  Barry Becker ,  Ray Paul ,  Mike Robinson ,  Richard Simmons ,  David E. A. Smith ,  John Taylor ,  Lee Veneklasen ,  Dean Walters ,  Paul Wieczorek ,  Sam Wong ,  April Dutta ,  Surendra Lele ,  Kirkwood Rough ,  Henry Pearce-Percy ,  Jack Y. Jau ,  Chun C. Lin ,  Hoi T. Nguyen ,  Yen-Jen Oyang ,  Timothy L. Hutcheson ,  David J. Clark ,  Chung-Shih Pan ,  Chetana Bhaskar ,  Chris Kirk ,  Eric Munro

IPC分类号： G01B15/00 ,  G01B15/08 ,  G01N23/04 ,  G01N23/203 ,  G01N23/225 ,  G01R31/307 ,  G03F1/08 ,  G03F1/16 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66 ,  H01J37/26

CPC分类号： H01J37/28 ,  G01R31/307 ,  H01J2237/063 ,  H01J2237/184 ,  H01J2237/204 ,  H01J2237/24495 ,  H01J2237/30438

摘要： There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means. To function most efficiently there is also a vacuum means for evacuating and repressurizing a chamber containing the substrate. The vacuum means can be used to hold one substrate at vacuum while a second one is being loaded/unloaded, evacuated or repressurized. Alternately, the vacuum means can simultaneously evacuate a plurality of substrates prior to inspection and repressurize of the same plurality of substrates following inspection. In the inspection configuration, there is also a comparison means for comparing the pattern on the substrate with a second pattern.

摘要翻译： 公开了用于粒子扫描系统和自动检查系统的方法和装置的许多实施例。 在其中的每一个中，粒子束被引导到用于扫描该衬底的衬底的表面。 还包括一些检测器，用于检测来自基底的二次粒子，背散射粒子和透射粒子中的至少一个。 衬底被安装在x-y平台上，以在衬底被/粒子束扫描的过程中提供至少一个自由度。 衬底也在其表面上经受电场以加速次级颗粒。 该系统还具有准确地测量衬底相对于带电粒子束的位置的能力。 另外，存在用于最初对准在粒子束装置下面的衬底的光学对准装置。 为了最有效地起作用，还有一种用于对含有基底的腔室进行抽空和再加压的真空装置。 真空装置可用于将一个基板保持在真空状态，而第二个装载/卸载，抽真空或再加压。 或者，真空装置可以在检查之后同时抽空多个基板，同时在检查之后检查并重新加压相同的​​多个基板。 在检查配置中，还存在用于将衬底上的图案与第二图案进行比较的比较装置。