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公开(公告)号：US5097125A
公开(公告)日：1992-03-17
申请号：US45586
申请日：1987-05-04
CPC分类号： H01J49/061 , H01J49/142
摘要： A thin film structure for providing predetermined electric field boundary conditions. A thin film configuration is disposed on an insulator substrate in a selected spatial pattern with substantially uniform electrically resistive character in each of the different areas of the spatial pattern.
摘要翻译： 一种用于提供预定电场边界条件的薄膜结构。 薄膜结构以选定的空间图案设置在绝缘体基板上，在空间图案的不同区域的每个区域中具有基本均匀的电阻特性。
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2.发明授权High efficiency direct detection of ions from resonance ionization of sputtered atoms 失效高效率直接检测溅射原子的共振电离离子
公开(公告)号：US4633084A
公开(公告)日：1986-12-30
申请号：US691825
申请日：1985-01-16
IPC分类号： H01J37/256 , H01J49/16 , G01N23/00
CPC分类号： H01J49/162 , H01J37/256 , H01J49/0463 , H01J49/142 , H01J2237/31749
摘要： A method and apparatus are provided for trace and other quantitative analysis with high efficiency of a component in a sample, with the analysis involving the removal by ion or other bombardment of a small quantity of ion and neutral atom groups from the sample, the conversion of selected neutral atom groups to photoions by laser initiated resonance ionization spectroscopy, the selective deflection of the photoions for separation from original ion group emanating from the sample, and the detection of the photoions as a measure of the quantity of the component. In some embodiments, the original ion group is accelerated prior to the RIS step for separation purposes. Noise and other interference are reduced by shielding the detector from primary and secondary ions and deflecting the photoions sufficiently to avoid the primary and secondary ions.
摘要翻译： 提供了一种方法和装置，用于对样品中组分的高效率进行痕量和其他定量分析，分析涉及通过离子或其他轰击从样品中除去少量离子和中性原子团，转化为 选择的中性原子团通过激光引发的共振电离光谱法进行光致变色，用于与从样品发出的原始离子基团分离的光离子的选择性偏转，以及作为组分量的量度的光电离检测。 在一些实施方案中，在用于分离目的的RIS步骤之前加速原始离子组。 通过将检测器与初级和次级离子屏蔽，并充分偏转光照以避免初级和次级离子，降低了噪声和其他干扰。
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公开(公告)号：US4889987A
公开(公告)日：1989-12-26
申请号：US14332
申请日：1987-02-13
CPC分类号： H01J49/161 , H01J49/022 , H01J49/061 , H01J49/142 , H01J49/282 , H01J49/484
摘要： A charged particle spectrometer for performing ultrasensitive quantitative analysis of selected atomic components removed from a sample. Significant improvements in performing energy and angular refocusing spectroscopy are accomplished by means of a two dimensional structure for generating predetermined electromagnetic field boundary conditions. Both resonance and non-resonance ionization of selected neutral atomic components allow accumulation of increased chemical information. A multiplexed operation between a SIMS mode and a neutral atomic component ionization mode with EARTOF analysis enables comparison of chemical information from secondary ions and neutral atomic components removed from the sample. An electronic system is described for switching high level signals, such as SIMS signals, directly to a transient recorder and through a charge amplifier to the transient recorder for a low level signal pulse counting mode, such as for a neutral atomic component ionization mode.
摘要翻译： 一种带电粒子光谱仪，用于对从样品中除去的选定的原子成分进行超敏感定量分析。 通过用于产生预定电磁场边界条件的二维结构来实现执行能量和角度重新聚焦光谱的显着改进。 所选择的中性原子组分的共振和非共振电离都允许累积增加的化学信息。 通过EARTOF分析，SIMS模式和中性原子成分离子化模式之间的多路复用操作能够比较从样品中除去的二次离子和中性原子成分的化学信息。 描述了一种电子系统，用于将高电平信号（例如SIMS信号）直接切换到瞬态记录器，并通过电荷放大器切换到瞬态记录器，用于低电平信号脉冲计数模式，例如用于中性原子分量电离模式。
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公开(公告)号：US4864130A
公开(公告)日：1989-09-05
申请号：US870437
申请日：1986-06-04
IPC分类号： H01J37/08 , G01Q30/02 , H01J49/06 , H01J49/10 , H01J49/14 , H01J49/16 , H01J49/26 , H01J49/28
CPC分类号： H01J49/484 , H01J49/061 , H01J49/142 , H01J49/161 , H01J49/282
摘要： A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.
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公开(公告)号：US4973842A
公开(公告)日：1990-11-27
申请号：US45587
申请日：1987-05-04
IPC分类号： H01J37/08 , G01Q30/02 , H01J49/06 , H01J49/10 , H01J49/14 , H01J49/16 , H01J49/26 , H01J49/28
CPC分类号： H01J49/484 , H01J49/061 , H01J49/142 , H01J49/161 , H01J49/282
摘要： A lens system in a photo ion spectrometer for manipulating a primary ion beam and ionized atomic component. The atomic components are removed from a sample by a primary ion beam using the lens system, and the ions are extracted for analysis. The lens system further includes ionization resistant coatings for protecting the lens system.
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公开(公告)号：US4855596A
公开(公告)日：1989-08-08
申请号：US46117
申请日：1987-05-05
CPC分类号： H01J49/484 , H01J49/061 , H01J49/142 , H01J49/161 , H01J49/282
摘要： A method and apparatus for extracting for quantitative analysis ions of selected atomic components of a sample. A lens system is configured to provide a slowly diminishing field region for a volume containing the selected atomic components, enabling accurate energy analysis of ions generated in the slowly diminishing field region. The lens system also enables focusing on a sample of a charged particle beam, such as an ion beam, along a path length perpendicular to the sample and extraction of the charged particles along a path length also perpendicular to the sample. Improvement of signal to noise ratio is achieved by laser excitation of ions to selected autoionization states before carrying out quantitative analysis. Accurate energy analysis of energetic charged particles is assured by using a preselected resistive thick film configuration disposed on an insulator substrate for generating predetermined electric field boundary conditions to achieve for analysis the required electric field potential. The spectrometer also is applicable in the fields of SIMS, ISS and electron spectroscopy.
摘要翻译： 一种用于提取样品的选定原子成分的离子进行定量分析的方法和装置。 透镜系统被配置为为包含所选择的原子分量的体积提供缓慢减小的场区域，使得能够对在缓慢减小的场区域中产生的离子进行精确的能量分析。 透镜系统还可以沿垂直于样品的路径长度聚焦在带电粒子束（例如离子束）的样品上，并且沿垂直于样品的路径长度提取带电粒子。 在进行定量分析之前，通过激光激发离子到选择的自动电位状态来实现信噪比的提高。 通过使用设置在绝缘体衬底上的预选电阻厚膜配置来确保能量带电粒子的精确能量分析，以产生预定的电场边界条件以实现所需电场电位的分析。 光谱仪也适用于SIMS，ISS和电子光谱学领域。
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公开(公告)号：US4686979A
公开(公告)日：1987-08-18
申请号：US702569
申请日：1985-02-19
CPC分类号： A61F9/008 , A61B18/245 , G02B6/4296 , A61B2017/00154 , A61F2009/00863
摘要： Removal of abnormal human tissue with reduced thermal damage is achieved by selecting a laser having a wavelength in the order of 290-400 nm, orienting a laser-transmitting glass member toward the abnormal tissue and directing the laser through the glass member at power densities, pulse rates, and times sufficient to cause multiphoton absorption and bond breaking by Coulomb repulsion rather than thermal destruction. The glass member may include a laser beam concentrator provided by a lens or cone at the tissue-treatment end to increase the beam energy per unit area and reduce the treatment area.
摘要翻译： 通过选择波长为290-400nm的激光，将激光透射玻璃构件朝向异常组织定向并以功率密度引导激光穿过玻璃构件来实现热损伤降低的异常人体组织的去除， 脉冲速率和足以引起多光子吸收和断裂的时间库仑排斥而不是热破坏。 玻璃构件可以包括由组织处理端处的透镜或锥体提供的激光束聚光器，以增加每单位面积的光束能量并减少治疗面积。
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8.发明授权Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权超晶体金刚石悬臂宽动态范围加速/振动/压力传感器公开(公告)号：US06422077B1
公开(公告)日：2002-07-23
申请号：US09543992
申请日：2000-04-06
IPC分类号： G01P1508
CPC分类号： G01H9/00 , B82Y35/00 , G01D5/30 , G01H11/06 , G01L1/005 , G01L1/044 , G01P15/0888 , G01P15/0894 , G01P15/093 , Y10S977/732 , Y10S977/932
摘要： An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.
摘要翻译： 在一个高灵敏度的超小型传感器中，采用悬臂结构形成的超微晶金刚石（UNCD）元件用于在宽动态范围内测量加速度，冲击，振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用，测量光学或电容测量。 在另一个实施例中，悬臂UNCD元件设置在两个阳极之间，其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件的小的AC调制电压，并且由于Fowler-Nordheim方程中施加的电压和阳极 - 阴极间隙距离的对称性，维持指定的阳极电压比V1 / N2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化，可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极，可以精确地独立测量压力，单轴加速度，振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。
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9.发明授权Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor 有权超晶体金刚石悬臂宽动态范围加速/振动/压力传感器公开(公告)号：US06613601B1
公开(公告)日：2003-09-02
申请号：US10142814
申请日：2002-05-09
IPC分类号： H01L2100
CPC分类号： G01H9/00 , B82Y35/00 , G01D5/30 , G01H11/06 , G01L1/005 , G01L1/044 , G01P15/0888 , G01P15/0894 , G01P15/093 , Y10S977/732 , Y10S977/932
摘要： An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.
摘要翻译： 在一个高灵敏度的超小型传感器中，采用悬臂结构形成的超微晶金刚石（UNCD）元件用于在宽动态范围内测量加速度，冲击，振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用，测量光学或电容测量。 在另一个实施例中，悬臂UNCD元件设置在两个阳极之间，其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件上的小的AC调制电压，并且由于Fowler-Nordheim方程中所施加的电压和阳极 - 阴极间隙距离的对称性，维持指定的所需的阳极电压比V1 / V2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化，可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极，可以精确地独立测量压力，单轴加速度，振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。
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公开(公告)号：US09139905B2
公开(公告)日：2015-09-22
申请号：US13032395
申请日：2011-02-22
申请人： Jeffrey W. Elam , Seon W. Lee , Hsien-Hau Wang , Michael J. Pellin , Karen Byrum , Henry J. Frisch
发明人： Jeffrey W. Elam , Seon W. Lee , Hsien-Hau Wang , Michael J. Pellin , Karen Byrum , Henry J. Frisch
IPC分类号： H01J43/06 , C23C16/455 , C23C16/40
CPC分类号： C23C16/45527 , C23C16/407 , C23C16/45553
摘要： A method and system for providing a micro-channel plate detector. An anodized aluminum oxide membrane is provided and includes a plurality of nanopores which have an Al coating and a thin layer of an emissive oxide material responsive to incident radiation, thereby providing a plurality of radiation sensitive channels for the micro-channel plate detector.
摘要翻译： 一种用于提供微通道板检测器的方法和系统。 提供阳极化氧化铝膜，并且包括多个纳米孔，其具有响应于入射辐射的Al涂层和发光氧化物材料的薄层，从而为微通道板检测器提供多个辐射敏感通道。
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