公开(公告)号：US20080171422A1

公开(公告)日：2008-07-17

申请号：US11622209

申请日：2007-01-11

申请人： Jeffrey H. Tokie ,  Donald J. McClure ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

发明人： Jeffrey H. Tokie ,  Donald J. McClure ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

IPC分类号： H01L21/20 ,  H01L21/36

CPC分类号： H01L51/001 ,  Y02E10/549

摘要： Methods and systems for forming layered electronic devices on a flexible, elongated substrate are described. The layered electronic devices include at least one electronically or optically active layer. Deposition of one more layers of the electronic devices occurs as the flexible substrate is moved through one or more deposition stations. At each deposition station the substrate is aligned with an aperture mask having apertures arranged in a pattern. The aperture mask and the substrate are brought into proximity over a portion of a circumference of a rotating drum. A layer of the layered electronic devices is formed by deposition of material through the apertures of the aperture mask. At each deposition station, registration between at least two layers of the layered electronic devices is maintained.

摘要翻译： 描述了在柔性细长衬底上形成分层电子器件的方法和系统。 分层电子器件包括至少一个电子或光学有源层。 当柔性基板移动通过一个或多个沉积站时，会发生一层电子设备的沉积。 在每个沉积站处，基板与具有以图案布置的孔的孔径掩模对准。 孔径掩模和基底在旋转鼓的圆周的一部分附近。 层状电子器件的层通过孔径掩模的孔隙沉积材料形成。 在每个沉积站处，保持至少两层分层电子器件之间的对准。

公开(公告)号：US20080011225A1

公开(公告)日：2008-01-17

申请号：US11456687

申请日：2006-07-11

申请人： Donald J. McClure ,  Jeffrey H. Tokie ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

发明人： Donald J. McClure ,  Jeffrey H. Tokie ,  Daniel H. Carlson ,  James N. Dobbs ,  John T. Strand ,  Ronald P. Swanson

IPC分类号： B05C1/00 ,  B05C11/11

CPC分类号： H05K3/143 ,  C23C14/042 ,  C23C14/54 ,  C23C14/562 ,  H05K1/0393 ,  H05K3/0008 ,  H05K2201/09918 ,  H05K2203/0134 ,  H05K2203/0143 ,  H05K2203/1545

摘要： A pattern of material is continuously deposited onto a substrate. The substrate and a mask are continuously brought together over a portion of a drum where a deposition source emits material. The mask includes apertures that form a pattern, and the material from the deposition source passes through the pattern of the mask and collects onto the substrate to form the pattern of material. The elongation and the transverse position of the substrate and the mask may be controlled. Pattern elements of the substrate and of the mask may be sensed in order to adjust the elongation and/or the transverse position of the substrate and/or mask to maintain a precise registration. Furthermore, the apertures may have a least dimension on the order of 100 microns or less to thereby create features on the substrate having least dimensions on the order of 100 microns or less.

摘要翻译： 材料的图案被连续沉积到基底上。 衬底和掩模在沉积源发射材料的鼓的一部分上连续地接合在一起。 掩模包括形成图案的孔，并且来自沉积源的材料穿过掩模的图案并收集到基底上以形成材料图案。 可以控制衬底和掩模的伸长率和横向位置。 可以感测衬底和掩模的图案元件以调节衬底和/或掩模的伸长率和/或横向位置以保持精确的配准。 此外，孔可以具有大约100微米或更小的最小尺寸，从而在基底上产生具有小于或等于100微米的最小尺寸的特征。

公开(公告)号：US07763114B2

公开(公告)日：2010-07-27

申请号：US11275354

申请日：2005-12-28

申请人： Jeffrey H. Tokie ,  Donald J. McClure

发明人： Jeffrey H. Tokie ,  Donald J. McClure

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  B05B15/04

CPC分类号： C23C16/042 ,  C23C14/042 ,  C23C14/562 ,  C23C16/545

摘要： An aperture mask assembly includes a rotatable frame and a mask having apertures. A clamping arrangement is used to tension the mask and to conform the mask to a shape defined by the frame. Tension is applied to the mask in a direction substantially parallel to an axis of the frame and/or around the circumference of the shape defined by the frame. Deposition material emanating from a deposition source located within the rotatable frame is deposited through the mask apertures onto a web.

摘要翻译： 孔眼掩模组件包括可旋转框架和具有孔的面罩。 使用夹紧装置来张紧面罩并使面罩符合由框架限定的形状。 在基本上平行于框架的轴线的方向上和/或围绕由框架限定的形状的周围施加张力。 从位于可旋转框架内的沉积源发出的沉积材料通过掩模孔沉积到网上。

公开(公告)号：US08318552B2

公开(公告)日：2012-11-27

申请号：US12665094

申请日：2008-05-20

申请人： Jeffrey H. Tokie ,  Michael A. Haase ,  Robert J. Schubert ,  Michael W. Bench ,  Donald J. McClure ,  Grace L. Ho

发明人： Jeffrey H. Tokie ,  Michael A. Haase ,  Robert J. Schubert ,  Michael W. Bench ,  Donald J. McClure ,  Grace L. Ho

IPC分类号： H01L21/677 ,  H01L27/12 ,  H01L29/49 ,  H01L29/786

CPC分类号： H01L27/124 ,  H01L21/6776 ,  H01L27/1225 ,  H01L29/4908 ,  H01L29/7869

摘要： A process for forming gate structures is described. A web comprises a substrate, a plurality of conductive elements disposed on the substrate, and a conductive anodization bus. The web is moved through an anodization station to form a plurality of gate structures comprising a plurality of gate dielectrics adjacent to a plurality of gate electrodes. A process for forming electronic devices further providing a semiconductor, a source electrode, and a drain electrode is described.

摘要翻译： 描述了用于形成栅极结构的工艺。 网状物包括衬底，设置在衬底上的多个导电元件和导电阳极氧化母线。 幅材移动通过阳极氧化站以形成包括与多个栅电极相邻的多个栅极电介质的多个栅极结构。 描述了进一步提供半导体，源电极和漏电极的电子器件的形成工艺。

公开(公告)号：US20100252176A1

公开(公告)日：2010-10-07

申请号：US12665094

申请日：2008-05-20

申请人： Jeffrey H. Tokie ,  Michael A. Haase ,  Robert J. Schubert ,  Michael W. Bench ,  Donald J. McClure ,  Grace L. Ho

发明人： Jeffrey H. Tokie ,  Michael A. Haase ,  Robert J. Schubert ,  Michael W. Bench ,  Donald J. McClure ,  Grace L. Ho

IPC分类号： C25D7/00 ,  C25D11/02

CPC分类号： H01L27/124 ,  H01L21/6776 ,  H01L27/1225 ,  H01L29/4908 ,  H01L29/7869

摘要： A process for forming gate structures is described. A web comprises a substrate, a plurality of conductive elements disposed on the substrate, and a conductive anodization bus. The web is moved through an anodization station to form a plurality of gate structures comprising a plurality of gate dielectrics adjacent to a plurality of gate electrodes. A process for forming electronic devices further providing a semiconductor, a source electrode, and a drain electrode is described.

摘要翻译： 描述了用于形成栅极结构的工艺。 网状物包括衬底，设置在衬底上的多个导电元件和导电阳极氧化母线。 幅材移动通过阳极氧化站以形成包括与多个栅电极相邻的多个栅极电介质的多个栅极结构。 描述了进一步提供半导体，源电极和漏电极的电子器件的形成工艺。

公开(公告)号：US08647522B2

公开(公告)日：2014-02-11

申请号：US13319704

申请日：2010-06-17

申请人： Lijun Zu ,  Matthew H. Frey ,  Myungchan Kang ,  Jeffrey H. Tokie

发明人： Lijun Zu ,  Matthew H. Frey ,  Myungchan Kang ,  Jeffrey H. Tokie

IPC分类号： C23F1/02 ,  G03F7/26

CPC分类号： C23F1/02 ,  C23F1/08 ,  G03F7/40 ,  H05K3/061 ,  H05K3/068 ,  H05K2203/086 ,  H05K2203/122

摘要： Method of patterning a substrate are described including a method of providing a substrate comprising a metalized surface having a self-assembled monolayer patterned region and unpatterned region; and wet etching the metalized surface in a liquid etchant agitated with bubbling gas to remove metal from the unpatterned regions to form a metal pattern. Also described are metal patterned article including an article comprising a substrate and an etched microcontact printed metal pattern disposed on the substrate wherein the pattern has a thickness of at least 100 nanometers and a pattern feature uniformity of at least 50% for an area of at least 25 cm2.

摘要翻译： 描述图案化衬底的方法包括提供包括具有自组装单层图案区域和未图案化区域的金属化表面的衬底的方法; 并在用鼓泡气体搅拌的液体蚀刻剂中湿蚀刻金属化表面，以从未图案化的区域去除金属以形成金属图案。 还描述了金属图案化的制品，其包括一种包括衬底和设置在衬底上的经蚀刻的微接触印刷金属图案的制品，其中图案具有至少100纳米的厚度，并且对于至少一个区域的图案特征均匀度至少为50％ 25 cm2。

公开(公告)号：US08486593B2

公开(公告)日：2013-07-16

申请号：US13141108

申请日：2009-12-17

申请人： Michael A. Haase ,  Jeffrey H. Tokie ,  Daniel J. Theis ,  Brian K. Nelson

发明人： Michael A. Haase ,  Jeffrey H. Tokie ,  Daniel J. Theis ,  Brian K. Nelson

IPC分类号： G03F9/00

CPC分类号： G03F7/70516 ,  G03F7/22 ,  G03F7/70791 ,  G03F9/7003 ,  H05K1/0269 ,  H05K1/0393 ,  H05K3/0008 ,  H05K3/0082 ,  H05K2201/09918 ,  H05K2203/1545 ,  H05K2203/163 ,  H05K2203/166

摘要： Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.

摘要翻译： 制造柔性电路膜的方法包括提供具有多个对准标记的聚合物膜或其它柔性基板和其上的感光材料。 衬底绕合适的辊，带或其它非弹性输送机穿过，使得衬底和输送器至少从第一位置到第二位置一起移动。 当这些部分处于第一位置时，测量第一组对准标记在基板的第一部分上的位置，并且可以使用测量位置来计算基板的变形。 当基片的第一部分移动到第二位置时，感光材料然后以图形方式露出。 图案曝光基于第一组对准标记的测量位置，并且可以包括用变形调整图案曝光幅材。 还公开了相关系统和物品。

公开(公告)号：US20080296192A1

公开(公告)日：2008-12-04

申请号：US12054046

申请日：2008-03-24

申请人： Vicki L. Tokie ,  Jeffrey H. Tokie ,  Paul E. Gregory

发明人： Vicki L. Tokie ,  Jeffrey H. Tokie ,  Paul E. Gregory

IPC分类号： B65D85/00 ,  B42D15/00

CPC分类号： B65D23/005 ,  G09F3/0289 ,  G09F2003/027

摘要： Hanger labels that include a first label segment, a second label segment, and a hanger are described. The hanger may include a hook, a first connection connecting the hook to the first label segment, and a second connection connecting the hook to the second label segment. Alternatively, the hanger may include a strap connecting first and second label segments. Containers including such hanger labels are also described.

摘要翻译： 描述了包括第一标签段，第二标签段和衣架的衣架标签。 衣架可以包括钩子，将钩子连接到第一标签片段的第一连接件和将钩子连接到第二标签片段的第二连接件。 或者，衣架可以包括连接第一和第二标签片段的条带。 还描述了包括这种衣架标签的容器。

公开(公告)号：US06513897B2

公开(公告)日：2003-02-04

申请号：US09751142

申请日：2000-12-29

申请人： Jeffrey H. Tokie

发明人： Jeffrey H. Tokie

IPC分类号： B41J2205

CPC分类号： B41J2/205 ,  B29C64/112 ,  B41J2/01 ,  B41J3/407 ,  B41J3/546

摘要： A fluid applicator capable of both high resolution and high throughput fluid deposition includes a fluid dispensing system for dispensing fluid material, a substrate handling system for positioning a substrate with respect to the fluid dispensing system and a control system for controlling the dispensing and positioning functions. The fluid dispensing system includes a plurality of fluid dispensing mechanisms that dispense fluid material at a plurality of resolutions and a plurality of throughputs while using different fluid dispensing technologies. The fluid dispensing mechanisms preferably include an ink jet print head, a stream jet and/or a spray jet, each capable of different resolutions and throughputs, such that the ink jet lays down a precise border pattern with the stream jet and spray jet providing faster surface area coverage and higher volume deposition within the border. The fluid materials being deposited preferably include jettable adhesives, along with other jettable materials.

公开(公告)号：US20120082825A1

公开(公告)日：2012-04-05

申请号：US13319704

申请日：2010-06-17

申请人： Lijun Zu ,  Matthew H. Frey ,  Myungchan Kang ,  Jeffrey H. Tokie

发明人： Lijun Zu ,  Matthew H. Frey ,  Myungchan Kang ,  Jeffrey H. Tokie

IPC分类号： B32B3/00 ,  H01B13/00

CPC分类号： C23F1/02 ,  C23F1/08 ,  G03F7/40 ,  H05K3/061 ,  H05K3/068 ,  H05K2203/086 ,  H05K2203/122

摘要： Method of patterning a substrate are described including a method of providing a substrate comprising a metalized surface having a self-assembled monolayer patterned region and unpatterned region; and wet etching the metalized surface in a liquid etchant agitated with bubbling gas to remove metal from the unpatterned regions to form a metal pattern. Also described are metal patterned article including an article comprising a substrate and an etched microcontact printed metal pattern disposed on the substrate wherein the pattern has a thickness of at least 100 nanometers and a pattern feature uniformity of at least 50% for an area of at least 25 cm2.

摘要翻译： 描述图案化衬底的方法包括提供包括具有自组装单层图案区域和未图案化区域的金属化表面的衬底的方法; 并在用鼓泡气体搅拌的液体蚀刻剂中湿蚀刻金属化表面，以从未图案化的区域去除金属以形成金属图案。 还描述了金属图案化的制品，其包括一种包括衬底和设置在衬底上的经蚀刻的微接触印刷金属图案的制品，其中图案具有至少100纳米的厚度，并且对于至少一个区域的图案特征均匀度至少为50％ 25 cm2。