APPARATUS AND METHODS FOR CONTINUOUSLY DEPOSITING A PATTERN OF MATERIAL ONTO A SUBSTRATE
    1.
    发明申请
    APPARATUS AND METHODS FOR CONTINUOUSLY DEPOSITING A PATTERN OF MATERIAL ONTO A SUBSTRATE 审中-公开
    将材料图案连续沉积到基材上的装置和方法

    公开(公告)号:US20080011225A1

    公开(公告)日:2008-01-17

    申请号:US11456687

    申请日:2006-07-11

    IPC分类号: B05C1/00 B05C11/11

    摘要: A pattern of material is continuously deposited onto a substrate. The substrate and a mask are continuously brought together over a portion of a drum where a deposition source emits material. The mask includes apertures that form a pattern, and the material from the deposition source passes through the pattern of the mask and collects onto the substrate to form the pattern of material. The elongation and the transverse position of the substrate and the mask may be controlled. Pattern elements of the substrate and of the mask may be sensed in order to adjust the elongation and/or the transverse position of the substrate and/or mask to maintain a precise registration. Furthermore, the apertures may have a least dimension on the order of 100 microns or less to thereby create features on the substrate having least dimensions on the order of 100 microns or less.

    摘要翻译: 材料的图案被连续沉积到基底上。 衬底和掩模在沉积源发射材料的鼓的一部分上连续地接合在一起。 掩模包括形成图案的孔,并且来自沉积源的材料穿过掩模的图案并收集到基底上以形成材料图案。 可以控制衬底和掩模的伸长率和横向位置。 可以感测衬底和掩模的图案元件以调节衬底和/或掩模的伸长率和/或横向位置以保持精确的配准。 此外,孔可以具有大约100微米或更小的最小尺寸,从而在基底上产生具有小于或等于100微米的最小尺寸的特征。

    APPARATUS AND METHODS FOR FABRICATION OF THIN FILM ELECTRONIC DEVICES AND CIRCUITS
    2.
    发明申请
    APPARATUS AND METHODS FOR FABRICATION OF THIN FILM ELECTRONIC DEVICES AND CIRCUITS 审中-公开
    薄膜电子器件和电路的制造方法和装置

    公开(公告)号:US20080171422A1

    公开(公告)日:2008-07-17

    申请号:US11622209

    申请日:2007-01-11

    IPC分类号: H01L21/20 H01L21/36

    CPC分类号: H01L51/001 Y02E10/549

    摘要: Methods and systems for forming layered electronic devices on a flexible, elongated substrate are described. The layered electronic devices include at least one electronically or optically active layer. Deposition of one more layers of the electronic devices occurs as the flexible substrate is moved through one or more deposition stations. At each deposition station the substrate is aligned with an aperture mask having apertures arranged in a pattern. The aperture mask and the substrate are brought into proximity over a portion of a circumference of a rotating drum. A layer of the layered electronic devices is formed by deposition of material through the apertures of the aperture mask. At each deposition station, registration between at least two layers of the layered electronic devices is maintained.

    摘要翻译: 描述了在柔性细长衬底上形成分层电子器件的方法和系统。 分层电子器件包括至少一个电子或光学有源层。 当柔性基板移动通过一个或多个沉积站时,会发生一层电子设备的沉积。 在每个沉积站处,基板与具有以图案布置的孔的孔径掩模对准。 孔径掩模和基底在旋转鼓的圆周的一部分附近。 层状电子器件的层通过孔径掩模的孔隙沉积材料形成。 在每个沉积站处,保持至少两层分层电子器件之间的对准。

    Method and apparatus for controlling a moving web
    7.
    发明授权
    Method and apparatus for controlling a moving web 有权
    用于控制移动网的方法和装置

    公开(公告)号:US07296717B2

    公开(公告)日:2007-11-20

    申请号:US10719557

    申请日:2003-11-21

    IPC分类号: B65H23/02

    摘要: A method of controlling a moving web in relation to a selected transverse position comprising positioning a first positioning guide proximate a second positioning guide wherein the second positioning guide has a mechanism for positioning the web having minimal backlash. The web is passed through the first positioning guide and the second positioning guide. A sensor detects the transverse position of the moving web at the second positioning guide. The sensor transmits the transverse location of the web at the second positioning guide to a controller. The controller manipulates a zero-backlash actuator wherein the zero-backlash actuator is coupled to the second positioning guide such that the transverse position of the web is controllable to within a preselected dimension of the selected transverse position.

    摘要翻译: 一种相对于所选择的横向位置控制移动幅材的方法,包括将第一定位引导件定位在第二定位引导件附近,其中所述第二定位引导件具有用于定位具有最小间隙的所述幅材的机构。 纸幅通过第一定位引导件和第二定位引导件。 传感器检测在第二定位引导件处的移动幅材的横向位置。 传感器将纸张在第二定位导轨上的横向位置传送到控制器。 控制器操纵零间隙驱动器,其中零间隙驱动器联接到第二定位引导件,使得幅材的横向位置可控制到所选横向位置的预选尺寸内。