摘要:
A lithium or lithium alloy film forming method comprises: the step of heating and evaporating lithium or lithium alloy under an atmosphere of inert gas in an ultra fine particle producing chamber to produce ultra fine particles of lithium or lithium alloy therein; the step of transporting the ultra fine particles through a transfer pipe with the inert gas into a film forming chamber under vacuum atmosphere; the step of jetting the ultra fine particles onto a substrate arranged in the film forming chamber from a nozzle; the step of moving a substrate holder holding the substrate in the X-direction and/or Y-direction; the step of preheating the substrate at a predetermined temperature within the range of 100 to the melting point of lithium or lithium alloy: and the step of forming a film of lithium or lithium alloy on the substrate being moved with the substrate holder.
摘要:
[PROBLEM] The purpose of the present invention is to provide a reference electrode which is easy to manufacture and handle, its manufacturing method, and an electrochemical cell using this.[METHOD FOR SOLVING THE PROBLEM] The reference electrode 10 comprises a core material 11 extending parallel to the anode 14 or the cathode 16 from a terminal, a lithium membrane 12 coating from a tip of the core material 11 to a field with predetermined length, and an insulator 13 partially coating a field uncoated with the lithium membrane 12 on the core material 11. The material consisting of at least a surface of the core material 11 is a conductive material which is substantially unresponsive to lithium or lithium alloy. The maximum width in a cross section of the core material 11 is preferably in the range of not less than 5 micrometers but not more than 50 micrometers, and thickness of the lithium membrane is preferably in the range of not less than 0.1 micrometers but not more than 20 micrometers. By using the core material 11 with higher rigidity than lithium or lithium alloy, handling and manufacturing the reference material 10 is easy, for example, the material can be processed easily and its shape can be stabilized.[SELECTED FIGURE] FIG. 2
摘要:
This invention relates to grease compositions containing mineral oil and/or synthetic oil as base oil, (A) lithium stearate as thickener, and (B) one kind or two kinds of more of compounds selected from a group of oxidized paraffins and diphenyl hydrogenphosphite and displaying a worked penetration in the range 270-350 and also to bearings such a s linear guides, ball screws, and rolling bearings sealed with said grease compositions. This invention can provide grease compositions of low dust emission which perform with an excellent balance of low dust emission, low rolling characteristics and fretting resistance, extend the lubricating period, reduce the maintenance cost, and are suitable for use in a clean environment. This invention can also provide bearings sealed with said grease compositions of low dust emission suitable for use in a clean environment such as semiconductor manufacturing equipment, liquid crystal manufacturing equipment, and electronic computers.
摘要:
A state detecting apparatus S for detecting a current operating state of an LM (linear motion) system includes an AE sensor 1 generating a detection signal Sae by detecting an AE wave elastically generated when a plurality of balls contained in the LM system revolve in a circulation portion while spinning themselves; and a signal processing unit 4 generating a parameter indicating an intensity of the AE wave based on only the detection signal Sae corresponding to an operating frequency of the ball, and uses the parameter to determine a lubrication state of the LM system. Thereby, it is possible to provide the state detecting apparatus capable of predicting failure occurrence in the LM system; providing an improved maintenance to a user of the LM system and further longer lifetime thereof; and providing a performance guarantee and an improved quality of a device or equipment manufactured using the LM system.
摘要:
A state detecting apparatus S for detecting a current operating state of an LM (linear motion) system includes an AE sensor 1 generating a detection signal Sae by detecting an AE wave elastically generated when a plurality of balls contained in the LM system revolve in a circulation portion while spinning themselves; and a signal processing unit 4 generating a parameter indicating an intensity of the AE wave based on only the detection signal Sae corresponding to an operating frequency of the ball, and uses the parameter to determine a lubrication state of the LM system. Thereby, it is possible to provide the state detecting apparatus capable of predicting failure occurrence in the LM system; providing an improved maintenance to a user of the LM system and further longer lifetime thereof; and providing a performance guarantee and an improved quality of a device or equipment manufactured using the LM system.
摘要:
A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainability for a user of the LM system, and to contribute to the prolonging of the operation life of the LM system as well as performance assurance and quality improvement of apparatuses or devices incorporated with the LM system.
摘要:
A condition detection apparatus comprising an AE sensor 1 that detects AE waves, which elastically-occur when a plurality of balls included in an LM system self-rotate and revolve within a circulation section at the same time, and generates detection signals Sae, and a signal processing unit 4 that generates a first parameter indicating an intensity of the AE waves based on the generated detection signals Sae, generates based on the detection signals Sae a second parameter by weighting only detection signals Sae temporally-continuously detected among the detection signals Sae, generates based on the detection signals Sae a third parameter by weighting only detection signals Sae temporally-discontinuously detected in correspondence with the movement of the balls among the detection signals Sae, and judges contents of an operational condition of the LM system using any one of the first, second or third parameter, is provided to enable prognosis of occurrences of failures in the LM system, to improve maintainability for a user of the LM system, and to contribute to the prolonging of the operation life of the LM system as well as performance assurance and quality improvement of apparatuses or devices incorporated with the LM system.