公开(公告)号：US12085497B1

公开(公告)日：2024-09-10

申请号：US18400300

申请日：2023-12-29

申请人： Elemental Scientific, Inc. ,  Samsung Electronics Co., Ltd.

发明人： Myung Hwan Kim ,  Daesung Kim ,  Austin Schultz ,  Cole Nardini ,  David Diaz ,  Kyle Uhlmeyer ,  Daniel R. Wiederin ,  Jaeyoung Kim ,  Min-Soo Suh ,  So Young Kim ,  Sooyeon Kim ,  Junghee Shin ,  Suyeon Jeong

IPC分类号： G01N15/1429 ,  G01N30/72 ,  H01J49/10 ,  H01J49/36 ,  G01N15/10

CPC分类号： G01N15/1429 ,  G01N30/72 ,  H01J49/105 ,  H01J49/36 ,  G01N2015/1029

摘要： Systems and methods for analyzing ultra-low level concentration nanoparticles in semiconductor cleaning chemicals by single particle inductively coupled plasma mass spectrometry (spICP-MS) are described. In aspects, the methods described herein include determination factors that are specific to each of the chemical matrix and the type of analyte associated with the nanoparticles present in a fluid sample for both a particle baseline intensity value and a nanoparticle detection threshold.

公开(公告)号：US11927508B1

公开(公告)日：2024-03-12

申请号：US17152910

申请日：2021-01-20

申请人： Elemental Scientific, Inc.

发明人： Kevin Wiederin ,  Daniel R. Wiederin ,  Ean Kiddoo

IPC分类号： G01N21/73 ,  G01N1/20

CPC分类号： G01N1/20 ,  G01N21/73 ,  G01N2001/205

摘要： Systems and methods are described for transporting sample using a first vacuum configuration and subsequently isolating the sample at a valve prior to introduction to an analysis system, where a second vacuum configuration transports other fluids through the system. A system embodiment can include, but is not limited to, a valve system including a first valve in fluid communication with a sample reservoir and a second valve having at least a first vacuum configuration to fluidically couple a first vacuum line with the first valve and having a second vacuum configuration to fluidically couple a second vacuum line with the first valve; a sensor system configured to detect presence or absence of a fluid at the first valve; and a controller configured to control operation of the second valve to block access of the first vacuum line to the first valve upon detection of the fluid at the first valve.

公开(公告)号：US20230395406A1

公开(公告)日：2023-12-07

申请号：US18320748

申请日：2023-05-19

申请人： Elemental Scientific, Inc.

发明人： Tyler Yost ,  Daniel R. Wiederin ,  Beau A. Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC分类号： H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  H01J49/10 ,  G01N21/73

CPC分类号： H01L21/6719 ,  H01L21/67126 ,  H01L22/34 ,  H01L21/67772 ,  H01J49/105 ,  H01L21/67748 ,  H01L21/67051 ,  H01L21/67259 ,  H01L21/6708 ,  G01N21/73 ,  H01L22/14 ,  H01L21/6715 ,  H01L22/12 ,  H01J49/00

摘要： Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20230152340A1

公开(公告)日：2023-05-18

申请号：US18053960

申请日：2022-11-09

申请人： Elemental Scientific, Inc.

发明人： Daniel R. Wiederin ,  David Diaz ,  Karl Hauke

IPC分类号： G01N35/00

CPC分类号： G01N35/0092 ,  G01N35/00732 ,  G01N21/73

摘要： Systems and methods are described to determine a prioritization schedule for samples handled by a system with multiple remote sampling systems. A system embodiment includes, but is not limited to, an analysis system at a first location; one or more remote sampling systems at remote from the first location, the one or more remote sampling systems configured to receive a liquid segment and transfer a liquid sample to the analysis system via a transfer line; and a controller communicatively coupled with the analysis system and the one or more remote sampling systems, the controller configured to assign a priority value to a sample for analysis by the analysis system and to manage a queue of samples received from at the one or more remote sampling systems on the basis of the assigned priority value.

公开(公告)号：US11531038B2

公开(公告)日：2022-12-20

申请号：US16441447

申请日：2019-06-14

申请人： Elemental Scientific, Inc.

发明人： Daniel R. Wiederin ,  David Diaz ,  Karl Hauke

IPC分类号： G01N35/00 ,  G01N21/73

摘要： Systems and methods are described to determine a prioritization schedule for samples handled by a system with multiple remote sampling systems. A system embodiment includes, but is not limited to, an analysis system at a first location; one or more remote sampling systems at remote from the first location, the one or more remote sampling systems configured to receive a liquid segment and transfer a liquid sample to the analysis system via a transfer line; and a controller communicatively coupled with the analysis system and the one or more remote sampling systems, the controller configured to assign a priority value to a sample for analysis by the analysis system and to manage a queue of samples received from at the one or more remote sampling systems on the basis of the assigned priority value.

公开(公告)号：US11515135B1

公开(公告)日：2022-11-29

申请号：US16847376

申请日：2020-04-13

申请人： Elemental Scientific, Inc.

发明人： Daniel R. Wiederin ,  Kevin Wiederin

IPC分类号： H01J49/04 ,  G01N35/00 ,  H01J49/10

摘要： Systems and methods are described for indirect detection of a missed sample from an autosampler. A method embodiment includes, but is not limited to, drawing a fluid through operation of an autosampler; directing the fluid via a fluid line to a valve of a fluid handling system, the valve including or being adjacent to a sensor to detect a presence or absence of liquid sample; directing the fluid from the valve into a holding line coupled to the valve; determining whether a threshold amount of liquid sample is present in the fluid in the holding line; and when it is determined that liquid sample is present in the fluid in the holding line in an amount less than the threshold amount, transferring a carrier fluid having a marker component to an analytic detector, the marker component present in the carrier fluid in an amount indicative of a missed sample.

公开(公告)号：US20220346215A1

公开(公告)日：2022-10-27

申请号：US17726001

申请日：2022-04-21

申请人： Elemental Scientific, Inc.

发明人： Daniel R. Wiederin ,  Gary J. Barrett ,  Kevin Wiederin

IPC分类号： H05H1/22 ,  G01N21/73 ,  H05H1/30 ,  H05H1/34

摘要： An inductively coupled plasma (ICP) torch is described that includes an injector protector to shield an injector end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an injector protector surrounding at least a portion of the tubular sample injector; an inner tube surrounding at least a portion of the injector protector to form a first annular space between the inner tube and the injector protector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space.

公开(公告)号：US11476134B2

公开(公告)日：2022-10-18

申请号：US17361943

申请日：2021-06-29

申请人： Elemental Scientific, Inc.

发明人： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC分类号： H01L21/67 ,  H01L21/66 ,  G01N21/73 ,  H01L21/677 ,  H01J49/10 ,  H01J49/00 ,  G01N33/00

摘要： Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20220328297A1

公开(公告)日：2022-10-13

申请号：US17704739

申请日：2022-03-25

申请人： Elemental Scientific, Inc.

发明人： Austin Schultz ,  Daniel R. Wiederin

IPC分类号： H01J49/04 ,  G01N1/28

摘要： An analysis system includes a degassing cell, at least one first valve, and at least one second valve. The at least one first valve is fluidly coupled with a top of the degassing cell, the at least one first valve configured selectably connect the degassing cell to a displacement gas flow and to a vacuum source. The at least one second valve is fluidly connected with a lateral side of the degassing cell and separately fluidly connected with a bottom of the degassing cell. The at least one second valve is selectably coupled with any of a source of a sample-carrying fluid, a transfer line configured to deliver a sample to an analysis device, or a waste output.

公开(公告)号：US11316462B1

公开(公告)日：2022-04-26

申请号：US16458956

申请日：2019-07-01

申请人： Elemental Scientific, Inc.

发明人： Daniel R. Wiederin ,  Austin Schultz

IPC分类号： B01L3/02 ,  H02P25/18 ,  C01B6/06 ,  C01B6/00 ,  H02K16/04 ,  B63H21/20 ,  B63H23/10 ,  G01N21/73 ,  C01B6/10 ,  B63H21/14 ,  H02P31/00 ,  H02K3/28 ,  H02K7/18 ,  H02K19/16 ,  H02K21/02 ,  G01N21/71

摘要： The present disclosure is directed to a system and a method for hydride generation. In some embodiments, the system includes an assembly for introducing hydride generation reagents into a mixing path or mixing container, where the assembly includes first chamber configured to contain a first hydride generation reagent and a second chamber configured to contain a second hydride generation reagent. A first plunger is configured to translate within the first chamber and cause a displacement of the first hydride generation reagent, and a second plunger is configured to translate within the second chamber and cause a displacement of the second hydride generation reagent. The assembly further includes base coupling the first plunger and the second plunger together.