Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane
    1.
    发明授权
    Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane 有权
    制造Al2O3陶瓷弹性体的方法,用于压力传感器的测量膜和具有这种膜的压力传感器

    公开(公告)号:US08485042B2

    公开(公告)日:2013-07-16

    申请号:US13057487

    申请日:2009-06-23

    IPC分类号: G01L7/08

    摘要: A method for manufacturing an elastic deformation body made of an Al2O3 ceramic according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m2/g, an average grain size of at most 0.3 μm is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress σc, whose distribution F(σc) is given by the Weibull parameters σ0≧800 MPa and m≧24, with an average grain size of the sintered material of no more than 2 μm, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm3.

    摘要翻译: 一种制造由Al 2 O 3陶瓷制成的弹性变形体的方法,根据该方法制备具有至多2000ppm MgO,至多200ppm无机杂质,比表面积至少为10m 2 / g的高纯氧化铝,平均粒径为 施加0.3μm以下。 使用氧化铝和添加剂,通过水性加工生产均匀的混合物,通过单轴压制方法制备可挤压的喷雾颗粒,该均匀的混合物经受烧结过程的均匀的生坯。 所得到的弹性变形体具有弯曲断裂应力sigmac,其分布F(sigmac)由威布尔参数σ= 800MPa和m = 24给出,烧结材料的平均粒径不大于2μm 所述变形体的烧结体的密度为3.98g / cm 3以上。

    METHOD FOR MANUFACTURING AN ELASTIC BODY OF Al2O3 CERAMIC, MEASURING MEMBRANE FOR A PRESSURE SENSOR AND PRESSURE SENSOR WITH SUCH A MEMBRANE
    2.
    发明申请
    METHOD FOR MANUFACTURING AN ELASTIC BODY OF Al2O3 CERAMIC, MEASURING MEMBRANE FOR A PRESSURE SENSOR AND PRESSURE SENSOR WITH SUCH A MEMBRANE 有权
    用于制造Al2O3陶瓷的弹性体的方法,用于压力传感器的测量膜和具有这种膜的压力传感器

    公开(公告)号:US20110132097A1

    公开(公告)日:2011-06-09

    申请号:US13057487

    申请日:2009-06-23

    IPC分类号: G01L7/08 B29B9/12

    摘要: A method for manufacturing an elastic deformation body made of an Al2O3 ceramic, according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m2/g, an average grain size of at most 0.3 μm is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress σc, whose distribution F(σc) is given by the Weibull parameters σ0≧800 MPa and m≧24, with an average grain size of the sintered material of no more than 2 μm, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm3.

    摘要翻译: 一种制造由Al 2 O 3陶瓷制成的弹性变形体的方法,根据该方法,具有至多2000ppm MgO,至多200ppm无机杂质,至少10m 2 / g比表面积的高纯度氧化铝,平均粒径 最多0.3μm。 使用氧化铝和添加剂,通过水性加工生产均匀的混合物,通过单轴压制方法制备可挤压的喷雾颗粒,该均匀的混合物经受烧结过程的均匀的生坯。 所得到的弹性变形体具有弯曲断裂应力σ,其分布F(&sgr; c)由Weibull参数&sgr;0≥800MPa和m≥24给出,烧结材料的平均晶粒尺寸为no 大于2μm,并且其中变形体的烧结材料具有不小于3.98g / cm 3的密度。

    Process for joining alumina ceramic bodies
    3.
    发明授权
    Process for joining alumina ceramic bodies 失效
    氧化铝陶瓷体的接合方法

    公开(公告)号:US5954900A

    公开(公告)日:1999-09-21

    申请号:US935417

    申请日:1997-09-23

    摘要: This process serves to form a long-time-vacuum-tight, high-strength, and corrosion-resistant joint, by means of a joining material, between a first body and a second body each made of sintered, polycrystalline alumina ceramic with a purity greater than 92 wt. % or of sapphire. The joining material is interposed in the form of a paste, a foil, or a slip between the first body and the second body. The joining material has been made from 1) an agglomerate-free, highly disperse, high-purity .alpha.-alumina powder with particles of as high a degree of calcination as possible and of a size not exceeding 100 nm (=10.sup.-7 m), 2) an anorganic oxidic powder of an auxiliary sintering agent with particles of approximately the same size as the particle size of the .alpha.-alumina powder, 3) an organic vehicle which is dissolved or suspended in an organic or aqueous solvant and in which the particles of the respective powder are distributed as evenly as possible. Instead of the anorganic oxidic powder of an auxiliary sintering agent an anorganic oxidic auxiliary sintering agent produced chemically as envelopes around or attachment to the particles of the .alpha.-alumina powder can be used, the total .alpha.-alumina and auxiliary-sintering-agent content of the paste, the foil, or the slip ranging between 50% and 70%. After interposing the joining material the bodies are heated to a temperature of not more than 1,300.degree. C. and then allowing them to cool down.

    摘要翻译: 该方法用于通过连接材料在第一主体和第二主体之间形成长时间真空密封,高强度和耐腐蚀的接头,每个第一主体和第二主体由具有纯度的烧结多晶氧化铝陶瓷制成 大于92wt。 %或蓝宝石。 接合材料以第一主体和第二主体之间的糊状物,箔片或滑动片的形式插入。 接合材料由1)无聚集高分散,高纯度的α-氧化铝粉末制成,该粉末具有尽可能高的煅烧程度且尺寸不超过100nm(=10-7μm) 2)一种辅助烧结剂的无机氧化粉末,其颗粒大小与α-氧化铝粉末的粒度大致相同,3)有机载体,其溶解或悬浮在有机或水溶液中,其中 各粉末的颗粒尽可能均匀地分布。 代替辅助烧结剂的无机氧化物粉末,可以使用以α-氧化铝粉末的颗粒包围或附着于其上化学形成的无机氧化物辅助烧结剂,总α-氧化铝和辅助烧结剂的总量 糊,箔或滑差在50%至70%之间。 在插入接合材料之后,将本体加热至不高于1300℃的温度,然后使其冷却。

    Capacitive pressure sensor
    5.
    发明授权

    公开(公告)号:US07150197B2

    公开(公告)日:2006-12-19

    申请号:US10518546

    申请日:2003-07-01

    IPC分类号: G01L9/12

    CPC分类号: G01L19/02 G01L9/0075

    摘要: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

    Pressure measuring cell
    8.
    发明授权

    公开(公告)号:US06499352B2

    公开(公告)日:2002-12-31

    申请号:US09931760

    申请日:2001-08-20

    IPC分类号: G01L708

    CPC分类号: G01L9/0075

    摘要: A ceramic pressure measuring cell with a basic body (1, 3), a diaphragm (5) connected to the basic body (1, 3) to form a measuring chamber (7, 9), which during operation undergoes a deflection dependent on a pressure (p1-p2) to be measured and the deflection of which is registered by means of an electromechanical transducer and is made accessible for further evaluation and/or processing, and a bore (13, 17) which penetrates the basic body (1, 3) and into which a small pressure tube (15, 19) is soldered in a pressure-resistant and gastight manner, and via which a pressure (p1, p2) is introduced into the measuring chamber (7, 9), is provided, in which a volume inside the measuring cell and the small pressure tube is precisely known, since the mechanical stop (33, 35) fixes a depth of penetration of the small pressure tube (15, 19) into the basic body (1, 3).

    Method for making an interface connection through an insulating part
    9.
    发明授权
    Method for making an interface connection through an insulating part 失效
    通过绝缘部分进行接口连接的方法

    公开(公告)号:US5670063A

    公开(公告)日:1997-09-23

    申请号:US599677

    申请日:1996-02-12

    摘要: This interface connection through a hole (2) in a high-temperature-resistant and vacuum-proof insulating part (1), particularly of ceramic, glass, or a single crystal, consists of a metallic lead (4, 17) inserted into the hole (2) and having a coefficient of thermal expansion less than that of the insulating part (1), wherein at least one end of the lead, if it is flush with at least one surface of the insulating part, is covered with active brazing material which high-vacuum-seals it to the insulating part, or, if it projects beyond at least one surface of the insulating part, is high-vacuum-sealed to the insulating part by means of ring-shaped active brazing material (5'), since in the liquid phase, the active brazing material moves into the gap between the wall of the hole (2) and the lead (4, 17) due to capillary action. Thus, the available materials (insulating material, metals having a smaller coefficient of thermal expansion than the insulating part, active brazing materials) can be used in a different and novel manner such that the use of a lead covered with active brazing material can be dispensed with.

    摘要翻译: 这种通过高温和真空绝缘部分(1)中的孔(2)的接口连接,特别是陶瓷,玻璃或单晶的接口连接由插入到 孔(2),其热膨胀系数小于绝缘部件(1)的热膨胀系数,其中如果与绝缘部件的至少一个表面齐平,则引线的至少一端被活性钎焊 将绝缘部分进行高真空密封的材料,或者如果突出超过绝缘部分的至少一个表面,则通过环形活性钎焊材料(5')将绝缘部件进行高真空密封, ),因为在液相中,由于毛细管作用,活性钎焊材料移动到孔(2)的壁和引线(4,17)之间的间隙中。 因此,可以以不同和新颖的方式使用可用材料(绝缘材料,具有比绝缘部分更小的热膨胀系数的金属,活性钎焊材料),使得可以分配使用活性钎焊材料覆盖的引线 与。

    Interface connection through an insulating part
    10.
    发明授权
    Interface connection through an insulating part 失效
    通过绝缘部分的接口连接

    公开(公告)号:US5539611A

    公开(公告)日:1996-07-23

    申请号:US981781

    申请日:1992-11-25

    摘要: This interface connection through a hole (2) in a high-temperature-resistant and vacuum-proof insulating part (1), particularly of ceramic, glass, or a single crystal, consists of a metallic lead (4, 17) inserted into the hole (2) and having a coefficient of thermal expansion less than that of the insulating part (1), wherein at least one end of the lead, if it is flush with at least one surface of the insulating part, is covered with active brazing material which high-vacuum-seals it to the insulating part, or, if it projects beyond at least one surface of the insulating part, is high-vacuum-sealed to the insulating part by means of ring-shaped active brazing material (5'), since in the liquid phase, the active brazing material moves into the gap between the wall of the hole (2) and the lead (4, 17) due to capillary action. Thus, the available materials (insulating material, metals having a smaller coefficient of thermal expansion than the insulating part, active brazing materials) can be used in a different and novel manner such that the use of a lead covered with active brazing material can be dispensed with.

    摘要翻译: 这种通过高温和真空绝缘部分(1)中的孔(2)的接口连接,特别是陶瓷,玻璃或单晶的接口连接由插入到 孔(2),其热膨胀系数小于绝缘部件(1)的热膨胀系数,其中如果与绝缘部件的至少一个表面齐平,则引线的至少一端被活性钎焊 将绝缘部分进行高真空密封的材料,或者如果突出超过绝缘部分的至少一个表面,则通过环形活性钎焊材料(5')将绝缘部件进行高真空密封, ),因为在液相中,由于毛细管作用,活性钎焊材料移动到孔(2)的壁和引线(4,17)之间的间隙中。 因此,可以以不同和新颖的方式使用可用材料(绝缘材料,具有比绝缘部分更小的热膨胀系数的金属,活性钎焊材料),使得可以分配使用活性钎焊材料覆盖的引线 与。