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    Methods of manufacture MEMS devices
    5.
    发明授权
    Methods of manufacture MEMS devices 有权
    制造MEMS器件的方法

    公开(公告)号：US09266719B2

    公开(公告)日：2016-02-23

    申请号：US13406069

    申请日：2012-02-27

    申请人： Florian Schoen ,  Wolfgang Raberg ,  Bernhard Winkler ,  Werner Weber

    发明人： Florian Schoen ,  Wolfgang Raberg ,  Bernhard Winkler ,  Werner Weber

    IPC分类号： H01L41/00 ,  B81C1/00 ,  H01L41/09

    CPC分类号： B81C1/00182 ,  B81B2201/0271 ,  H01L41/0933 ,  Y10S977/732

    摘要： Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a first semiconductive material and at least one trench disposed in the first semiconductive material, the at least one trench having a sidewall. An insulating material layer is disposed over an upper portion of the sidewall of the at least one trench in the first semiconductive material and over a portion of a top surface of the first semiconductive material proximate the sidewall. A second semiconductive material or a conductive material is disposed within the at least one trench and at least over the insulating material layer disposed over the portion of the top surface of the first semiconductive material proximate the sidewall.

    摘要翻译： 公开了微机电系统（MEMS）装置及其制造方法。 在一个实施例中，MEMS器件包括第一半导体材料和设置在第一半导体材料中的至少一个沟槽，所述至少一个沟槽具有侧壁。 绝缘材料层设置在第一半导体材料中的至少一个沟槽的侧壁的上部上方，以及靠近侧壁的第一半导体材料的顶表面的一部分之上。 第二半导体材料或导电材料设置在至少一个沟槽内，并且至少在绝缘材料层的上方设置在靠近侧壁的第一半导体材料的顶表面的部分之上。

    CAVITY STRUCTURES FOR MEMS DEVICES
    6.
    发明申请
    CAVITY STRUCTURES FOR MEMS DEVICES 审中-公开
    MEMS器件的CAVITY结构

    公开(公告)号：US20120211805A1

    公开(公告)日：2012-08-23

    申请号：US13032334

    申请日：2011-02-22

    申请人： Bernhard Winkler ,  Andreas Zankl ,  Klemens Pruegl ,  Stefan Kolb

    发明人： Bernhard Winkler ,  Andreas Zankl ,  Klemens Pruegl ,  Stefan Kolb

    IPC分类号： H01L29/84 ,  H01L21/02

    CPC分类号： B81B7/008 ,  B81B2201/0264 ,  B81B2203/0315 ,  B81B2207/015 ,  B81C1/00158 ,  B81C1/00246 ,  B81C2203/0707 ,  B81C2203/0714 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01L27/0611

    摘要： Embodiments relate to MEMS devices, particularly MEMS devices integrated with related electrical devices on a single wafer. Embodiments utilize a modular process flow concept as part of a MEMS-first approach, enabling use of a novel cavity sealing process. The impact and potential detrimental effects on the electrical devices by the MEMS processing are thereby reduced or eliminated. At the same time, a highly flexible solution is provided that enables implementation of a variety of measurement principles, including capacitive and piezoresistive. A variety of sensor applications can therefore be addressed with improved performance and quality while remaining cost-effective.

    摘要翻译： 实施例涉及MEMS器件，特别是与单个晶片上的相关电气器件集成的MEMS器件。 实施例利用模块化工艺流程概念作为MEMS首要方法的一部分，使得能够使用新颖的腔体密封过程。 因此，通过MEMS处理对电气装置的影响和潜在的有害影响被减少或消除。 同时，提供了一种高度灵活的解决方案，可以实现各种测量原理，包括电容式和压阻式。 因此，可以在提高性能和质量的同时解决各种传感器应用，同时保持成本效益。

    MEMS devices and methods of manufacture thereof
    7.
    发明授权
    MEMS devices and methods of manufacture thereof 有权
    MEMS器件及其制造方法

    公开(公告)号：US07851875B2

    公开(公告)日：2010-12-14

    申请号：US12013174

    申请日：2008-01-11

    申请人： Florian Schoen ,  Wolfgang Raberg ,  Bernhard Winkler ,  Werner Weber

    发明人： Florian Schoen ,  Wolfgang Raberg ,  Bernhard Winkler ,  Werner Weber

    IPC分类号： H01L29/84

    CPC分类号： B81C1/00182 ,  B81B2201/0271 ,  H01L41/0933 ,  Y10S977/732

    摘要： Micro-electromechanical system (MEMS) devices and methods of manufacture thereof are disclosed. In one embodiment, a MEMS device includes a first semiconductive material and at least one trench disposed in the first semiconductive material, the at least one trench having a sidewall. An insulating material layer is disposed over an upper portion of the sidewall of the at least one trench in the first semiconductive material and over a portion of a top surface of the first semiconductive material proximate the sidewall. A second semiconductive material or a conductive material is disposed within the at least one trench and at least over the insulating material layer disposed over the portion of the top surface of the first semiconductive material proximate the sidewall.

    摘要翻译： 公开了微机电系统（MEMS）装置及其制造方法。 在一个实施例中，MEMS器件包括第一半导体材料和设置在第一半导体材料中的至少一个沟槽，所述至少一个沟槽具有侧壁。 绝缘材料层设置在第一半导体材料中的至少一个沟槽的侧壁的上部上方，以及靠近侧壁的第一半导体材料的顶表面的一部分之上。 第二半导体材料或导电材料设置在至少一个沟槽内，并且至少在绝缘材料层的上方设置在靠近侧壁的第一半导体材料的顶表面的部分之上。

    Link adjustment mechanism
    8.
    发明授权
    Link adjustment mechanism 有权
    链路调整机制

    公开(公告)号：US07111855B2

    公开(公告)日：2006-09-26

    申请号：US10740202

    申请日：2003-12-18

    申请人： Bernhard Winkler ,  Raymond H Tilly ,  Awad Ramouni ,  John F Santori

    发明人： Bernhard Winkler ,  Raymond H Tilly ,  Awad Ramouni ,  John F Santori

    IPC分类号： B62D17/00

    CPC分类号： B60G3/20 ,  B60G7/008 ,  B60G2200/144 ,  B60G2200/462 ,  B60G2204/143 ,  B60G2204/148 ,  B60G2204/422 ,  B62D17/00 ,  Y10T403/125

    摘要： A toe link assembly of a suspension system includes a cam sleeve having a first and second end, a first cam plate fixedly attached to the cam sleeve at the first end, and a second cam plate fixedly attached to the cam sleeve at the second end. In addition, the toe link assembly includes a first cam washer rotatably received by the first cam plate, a second cam washer rotatably received by the second cam plate, and a bolt having a head fixedly attached to the first cam washer, a body extending between the first and second ends of the cam sleeve, and a shank fixed for rotation with the second cam washer. Rotation of the bolt causes the first and second cam washers to react against the first and second cam plates to position the bolt relative to the cam sleeve along a first longitudinal axis.

    摘要翻译： 悬架系统的脚趾连接组件包括具有第一和第二端的凸轮套筒，在第一端处固定地连接到凸轮套筒的第一凸轮板和在第二端处固定地连接到凸轮套筒的第二凸轮板。 此外，脚趾连接组件包括由第一凸轮板可旋转地接收的第一凸轮垫圈，由第二凸轮板可旋转地接收的第二凸轮垫圈和具有固定地连接到第一凸轮垫圈的头部的螺栓， 凸轮套筒的第一端和第二端，以及固定用于与第二凸轮垫圈一起旋转的柄。 螺栓的旋转使得第一和第二凸轮垫圈相对于第一和第二凸轮板反作用以沿着第一纵向轴线相对于凸轮套筒定位螺栓。

    ANCHOR ROD
    9.
    发明申请
    ANCHOR ROD 有权
    锚杆

    公开(公告)号：US20140363239A1

    公开(公告)日：2014-12-11

    申请号：US14345903

    申请日：2012-07-10

    申请人： Josef Glogger ,  Bernhard Winkler

    发明人： Josef Glogger ,  Bernhard Winkler

    IPC分类号： E21D20/02

    CPC分类号： E21D20/02 ,  E21D20/021 ,  E21D20/025 ,  F16B13/141

    摘要： An anchor rod is disclosed. The anchor rod includes an attachment region and an anchoring region which is insertable into a borehole and which has a profiled section. The profiled section interacts with a curable organic and/or inorganic mortar compound filled into the borehole. The profiled section includes a plurality of expansion sections disposed axially in a row which are conically shaped. For each of the plurality of expansion sections, a diameter of the expansion section increases in a direction toward a free front end of the anchor rod, a ratio of a distance of the expansion section to a mean borehole diameter is 0.40 to 0.60, a ratio of an outer diameter to a core diameter of the expansion section is 1.35 to 1.55, and a cone angle of the expansion section is 22.5° to 27.5°.

    摘要翻译： 公开了一种锚杆。 锚杆包括附接区域和可插入钻孔中并具有成型部分的锚定区域。 型材部分与填充到钻孔中的可固化的有机和/或无机砂浆化合物相互作用。 成形部分包括多个沿圆锥形状排列成一列的膨胀部分。 对于多个膨胀部中的每一个，膨胀部的直径朝向锚杆的自由前端的方向增大，膨胀部的距离与平均井眼直径的比率为0.40〜0.60， 的外径与膨胀部的芯直径的比为1.35〜1.55，膨胀部的锥角为22.5°〜27.5°。