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公开(公告)号:US06492309B1
公开(公告)日:2002-12-10
申请号:US09698690
申请日:2000-10-27
申请人: Frederick E. Behr , Paul E. Rajtar , Lawrence A. Zazzera , Michael J. Parent , Silva K. Theiss , Billy L. Weaver
发明人: Frederick E. Behr , Paul E. Rajtar , Lawrence A. Zazzera , Michael J. Parent , Silva K. Theiss , Billy L. Weaver
IPC分类号: C09K1300
CPC分类号: C11D11/0047 , C11D7/08 , C11D7/5018 , H01L21/02063
摘要: A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and an optional co-solvent, and the use of these compositions for etching of microelectromechanical devices is described.
摘要翻译: 描述了包含氟化溶剂,氟化氢和任选的共溶剂的均匀组合物,以及这些组合物用于蚀刻微机电装置的用途。
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公开(公告)号:US06310018B1
公开(公告)日:2001-10-30
申请号:US09541453
申请日:2000-03-31
IPC分类号: C09K1300
CPC分类号: C11D11/0047 , C11D7/08 , C11D7/5018 , H01L21/02063
摘要: A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.
摘要翻译: 描述了含有氟化溶剂,氟化氢和共溶剂的均匀组合物,以及这些组合物用于清洗和蚀刻基材的用途。
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公开(公告)号:US06537380B2
公开(公告)日:2003-03-25
申请号:US10041924
申请日:2002-01-07
IPC分类号: C09K1300
CPC分类号: C11D3/3947 , C11D7/263 , C11D7/264 , C11D7/265 , C11D7/266 , C11D7/32 , C11D7/3263 , C11D7/3281 , C11D7/5018 , C11D11/0047 , H01L21/02052 , Y10S134/902
摘要: A homogeneous non-aqueous composition containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.
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公开(公告)号:US06372700B1
公开(公告)日:2002-04-16
申请号:US09540590
申请日:2000-03-31
IPC分类号: C09K1300
CPC分类号: C11D3/3947 , C11D7/263 , C11D7/264 , C11D7/265 , C11D7/266 , C11D7/32 , C11D7/3263 , C11D7/3281 , C11D7/5018 , C11D11/0047 , H01L21/02052 , Y10S134/902
摘要: A homogeneous non-aqueous compositions containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.
摘要翻译: 描述了含有氟化溶剂,臭氧和任选的助溶剂的均匀的非水性组合物以及这些组合物用于清洗和氧化底物的用途。
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公开(公告)号:US6048952A
公开(公告)日:2000-04-11
申请号:US794798
申请日:1997-02-04
IPC分类号: C07C17/00 , C07C17/25 , C07C19/10 , C07C19/14 , C07C19/16 , C07C31/40 , C07C51/285 , C07C53/21 , C07C69/653 , C07C303/24 , C07C303/32 , C07C305/06 , C07C309/13 , C07C309/17 , C07C319/02 , C07C319/14 , C07C319/18 , C07C323/03 , C07C323/12 , C07C323/14 , C07C323/50 , C07C323/60 , C07D303/08 , C08G18/08 , C08G18/09 , C08G18/28 , C08G18/80 , C08G63/682 , C08F18/20
CPC分类号: C08G18/8077 , C07C17/00 , C07C17/25 , C07C19/10 , C07C19/14 , C07C19/16 , C07C305/06 , C07C309/13 , C07C309/17 , C07C31/40 , C07C323/03 , C07C323/12 , C07C323/14 , C07C323/50 , C07C323/60 , C07C51/285 , C07C53/21 , C07C69/653 , C07D303/08 , C08G18/0866 , C08G18/095 , C08G18/2885 , C08G63/682
摘要: Novel mixtures of perfluoroalkyl halides and derivatives thereof are described. These mixtures contain some compounds with a straight perfluoroalkyl group and some with a branched perfluoroalkyl group. Methods of preparation and use are also described.
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公开(公告)号:US06552090B1
公开(公告)日:2003-04-22
申请号:US08931105
申请日:1997-09-15
IPC分类号: B01F1712
CPC分类号: C07C43/123 , C07C43/126 , C07C43/192 , C07D207/10 , C07D211/38 , C11D3/245
摘要: Described are compositions comprising perfluoroalkyl haloalkyl ethers and, optionally, surfactant; uses for perfluoroalkyl haloalkyl ether compounds and compositions thereof, optionally comprising surfactant; and perfluoroalkyl haloalkyl ethers.
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公开(公告)号:US5507941A
公开(公告)日:1996-04-16
申请号:US183503
申请日:1994-01-18
IPC分类号: B01D15/00 , C07C17/389 , C07C17/395 , C07C19/08 , C07C19/10 , C07C19/12 , B01D24/10
CPC分类号: B01D15/00 , C07C17/389 , C07C17/395
摘要: A method of removing olefinic impurity, such as perfluoroisobutylene, from fluoroperhalocarbon liquid, such as perfluorinated liquid, comprising the step of contacting the fluoroperhalocarbon liquid with a body of particles comprising particles selected from the group consisting of alumina, alkali metal oxide, alkali metal hydroxide, alkaline earth oxide, alkaline earth hydroxide, silicon oxide, tin oxide, zinc oxide, alkaline earth basic carbonate, and alkaline earth basic phosphate, transition metal oxide particles and mixtures thereof.
摘要翻译: 从氟卤烃液体如全氟化液体中除去全氟异丁烯等烯烃杂质的方法,包括使氟卤烃液体与包含选自氧化铝,碱金属氧化物,碱金属氢氧化物的颗粒的颗粒体接触的步骤 ,碱土金属氧化物,碱土金属氢氧化物,氧化硅,氧化锡,氧化锌,碱土碱土金属碳酸盐和碱土碱土金属磷酸盐,过渡金属氧化物颗粒及其混合物。
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公开(公告)号:US07390427B2
公开(公告)日:2008-06-24
申请号:US11536091
申请日:2006-09-28
CPC分类号: C07C43/126 , C09K5/10
摘要: The present invention provides an apparatus comprising a device and a mechanism for heat transfer comprising a hydrofluoroether heat-transfer fluid wherein the heat transfer fluid is represented by the following structure: Rf—O—Rh—O—Rf′ wherein O is oxygen; Rf and Rf′ are, independently, a fluoroaliphatic group, wherein each Rf and Rf′ contain 1 hydrogen atom; Rh is independently a linear, branched or cyclic alkylene group having from 2 to about 8 carbon atoms and at least 4 hydrogen atoms, and wherein the hydrofluoroether compound is free of —O—CH2—O—. Another embodiment of the present invention is a method therefor.
摘要翻译: 本发明提供了一种包括装置和用于传热的机构的装置,其包括氢氟醚传热流体,其中传热流体由以下结构表示:<?在线公式描述=“在线公式”结束 =“lead”?> R u> u> u> u> u>在线公式描述=“在线公式 “end =”tail“?>其中O是氧; R f和R f'独立地是氟代脂族基团,其中每个R f和R f' 含有1个氢原子; R h独立地是具有2至约8个碳原子和至少4个氢原子的直链,支链或环状亚烷基,其中所述氢氟醚化合物不含-O-CH 2 -O-。 本发明的另一个实施方案是其方法。
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公开(公告)号:US07128133B2
公开(公告)日:2006-10-31
申请号:US10738887
申请日:2003-12-16
CPC分类号: C07C43/126 , C09K5/10
摘要: The present invention provides an apparatus comprising a device and a mechanism for heat transfer comprising a hydrofluoroether heat-transfer fluid wherein the heat transfer fluid is represented by the following structure: Rf—O—Rh—O—Rf′ wherein: O is oxygen; Rf and Rf′ are, independently, a fluoroaliphatic group, wherein each Rf and Rf′ contain 1 hydrogen atom; Rh is independently a linear, branched or cyclic alkylene group having from 2 to about 8 carbon atoms and at least 4 hydrogen atoms, and wherein the hydrofluoroether compound is free of —O—CH2—O—. Another embodiment of the present invention is a method therefor.
摘要翻译: 本发明提供了一种包括装置和用于传热的机构的装置,其包括氢氟醚传热流体,其中传热流体由以下结构表示:<?在线公式描述=“在线公式”结束 =“lead”?> R u> u> u> u> u>在线公式描述=“在线公式 “end =”tail“?>其中:O是氧; R f和R f'独立地是氟代脂族基团,其中每个R f和R f' 含有1个氢原子; R h独立地是具有2至约8个碳原子和至少4个氢原子的直链,支链或环状亚烷基,其中所述氢氟醚化合物不含-O-CH 2 -O-。 本发明的另一个实施方案是其方法。
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公开(公告)号:US06953082B2
公开(公告)日:2005-10-11
申请号:US10738372
申请日:2003-12-16
CPC分类号: C09K5/10 , C07C43/126 , F28F23/00
摘要: The present invention comprises a compound represented by the following structure: Rf—O—Rh—O—Rf′ wherein: O is oxygen; Rf and Rf′ are, independently, a perfluoroaliphatic group; and Rh is independently a linear, branched or cyclic alkylene group having from 2 to about 8 carbon atoms and at least 4 hydrogen atoms, and wherein the hydrofluoroether compound is free of —O—CH2—O—. Another embodiment is an apparatus comprising a device and a mechanism for heat transfer comprising a hydrofluoroether heat-transfer fluid.Another embodiment of the present invention is a method for heat transfer.
摘要翻译: 本发明包括由以下结构表示的化合物:<?in-line-formula description =“In-line Formulas”end =“lead”?> R u> u> u>在线公式描述=“在线公式”end =“tail”?>其中:O是氧; R f和R f'独立地是全氟脂族基团; 且R h H独立地是具有2至约8个碳原子和至少4个氢原子的直链,支链或环状的亚烷基,并且其中所述氢氟醚化合物不含-O-CH 2 -O-。 另一个实施方案是一种装置,其包括装置和用于传热的机构,其包括氢氟醚传热流体。 本发明的另一个实施方案是一种热传递方法。
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