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公开(公告)号:US20140174936A1
公开(公告)日:2014-06-26
申请号:US13451045
申请日:2012-04-19
申请人: Gary Hamm , Jason A. Reese , Lingyun Wei
发明人: Gary Hamm , Jason A. Reese , Lingyun Wei
IPC分类号: H01L31/0224
CPC分类号: H01L31/022425 , C23C18/1653 , C23C18/32 , C23C18/38 , C25D3/12 , C25D3/38 , C25D5/006 , C25D5/12 , C25D5/50 , C25D7/126 , H01L21/288 , H01L21/2885 , Y02E10/50
摘要: Monovalent copper plating baths are used to metallize current tracks of the front side or emitter side of semiconductor wafers. Copper is selectively deposited on the current tracks by electrolytic plating or LIP. Additional metallization of the current tracks may be done using conventional metal plating baths. The metalized semiconductors may be used in the manufacture of photovoltaic devices.
摘要翻译: 单价镀铜浴用于对半导体晶片的前侧或发射极侧的电流迹线进行金属化。 铜通过电解电镀或LIP选择性沉积在电流轨道上。 可以使用传统的金属电镀浴来完成当前迹线的附加金属化。 金属化半导体可以用于制造光伏器件。
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公开(公告)号:US08603314B2
公开(公告)日:2013-12-10
申请号:US13324332
申请日:2011-12-13
申请人: Gary Hamm , Jason A. Reese , George R. Allardyce
发明人: Gary Hamm , Jason A. Reese , George R. Allardyce
CPC分类号: H01L24/03 , C25D3/12 , C25D5/00 , C25D5/12 , C25D7/123 , C25D11/32 , C25F3/12 , H01L31/022425 , H01L31/1804 , H01L2924/12036 , H01L2924/12042 , Y02E10/547 , Y02P70/521 , H01L2924/00
摘要: Semiconductors are electrochemically etched in solutions containing sources of bifluoride and nickel ions. The electrochemical etching may form pores in the surface of the semiconductor in the nanometer range. The etched semiconductor is then nickel plated.
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公开(公告)号:US20120184098A1
公开(公告)日:2012-07-19
申请号:US13324332
申请日:2011-12-13
申请人: Gary Hamm , Jason A. Reese , George R. Allardyce
发明人: Gary Hamm , Jason A. Reese , George R. Allardyce
IPC分类号: H01L21/768 , H01L21/28
CPC分类号: H01L24/03 , C25D3/12 , C25D5/00 , C25D5/12 , C25D7/123 , C25D11/32 , C25F3/12 , H01L31/022425 , H01L31/1804 , H01L2924/12036 , H01L2924/12042 , Y02E10/547 , Y02P70/521 , H01L2924/00
摘要: Semiconductors are electrochemically etched in solutions containing sources of bifluoride and nickel ions. The electrochemical etching may form pores in the surface of the semiconductor in the nanometer range. The etched semiconductor is then nickel plated.
摘要翻译: 半导体在含有二氟化物和镍离子源的溶液中进行电化学蚀刻。 电化学蚀刻可以在纳米范围内在半导体的表面中形成孔。 然后将蚀刻的半导体镀镍。
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公开(公告)号:US20130264214A1
公开(公告)日:2013-10-10
申请号:US13439617
申请日:2012-04-04
申请人: Gary Hamm , David L. Jacques , Jason A. Reese
发明人: Gary Hamm , David L. Jacques , Jason A. Reese
IPC分类号: H01L21/445 , C25D3/38
CPC分类号: H01L31/022425 , C25D3/12 , C25D3/38 , C25D3/46 , C25D5/006 , C25D5/028 , C25D5/10 , C25D5/12 , C25D7/126 , H05K3/246 , Y02E10/50
摘要: Metal electroplating processes are used in pH sensitive applications to plate metal layers on semiconductors. The semiconductors may be used in the manufacture of photovoltaic devices and solar cells.
摘要翻译: 金属电镀工艺用于pH敏感应用,以在半导体上镀覆金属层。 半导体可以用于制造光伏器件和太阳能电池。
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公开(公告)号:US07384535B2
公开(公告)日:2008-06-10
申请号:US10831726
申请日:2004-04-24
申请人: Wade Sonnenberg , Leon R. Barstad , Raymond Cruz , Gary Hamm , Mark J. Kapeckas , Erik Reddington , Katie Price , Thomas Buckley , Trevor Goodrich
发明人: Wade Sonnenberg , Leon R. Barstad , Raymond Cruz , Gary Hamm , Mark J. Kapeckas , Erik Reddington , Katie Price , Thomas Buckley , Trevor Goodrich
IPC分类号: G01N27/42
CPC分类号: G01N27/42
摘要: Analytical methods are disclosed for determining the quantity of brightener and leveler in an electroplating bath in the presence of other organic additives, such as accelerators, brighteners and suppressors. The methods improve the reproducibility of measuring brighteners and levelers in electroplating baths.
摘要翻译: 公开了用于在存在其它有机添加剂例如促进剂,增白剂和抑制剂的情况下在电镀浴中测定增白剂和矫味剂的量的分析方法。 该方法提高了电镀浴中测量增白剂和矫光剂的重现性。
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公开(公告)号:US20060151327A1
公开(公告)日:2006-07-13
申请号:US10831761
申请日:2004-04-24
申请人: Wade Sonnenberg , Leon Barstad , Raymond Cruz , Gary Hamm , Mark Kapeckas , Erik Reddington , Katie Price , Thomas Buckley , Trevor Goodrich
发明人: Wade Sonnenberg , Leon Barstad , Raymond Cruz , Gary Hamm , Mark Kapeckas , Erik Reddington , Katie Price , Thomas Buckley , Trevor Goodrich
CPC分类号: C25D21/12 , G01N27/42 , G01N27/423
摘要: Analytical methods are disclosed for determining the quantity of organic components in a bath. The analytical methods work over a broad concentration range of organic components and are sensitive in measuring organic bath components at low concentrations.
摘要翻译: 公开了用于确定浴中的有机组分的量的分析方法。 分析方法在广泛的有机组分浓度范围内工作,并且在低浓度下测量有机浴组分是敏感的。
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公开(公告)号:US09493886B2
公开(公告)日:2016-11-15
申请号:US13607737
申请日:2012-09-09
申请人: George R. Allardyce , Gary Hamm , Narsmoul Karaya
发明人: George R. Allardyce , Gary Hamm , Narsmoul Karaya
摘要: Copper electroplating methods provide low internal stress copper deposits. Concentrations of accelerators in the copper electroplating bath vary as a function of the plating current density and the low internal stress copper deposit is observed as a matt copper deposit.
摘要翻译: 铜电镀方法提供低内应力铜沉积。 铜电镀浴中的促进剂浓度随电镀电流密度的变化而变化,低内应力铜沉积物被观察为无光铜沉积物。
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公开(公告)号:US07955977B2
公开(公告)日:2011-06-07
申请号:US12456790
申请日:2009-06-23
申请人: Gary Hamm , David L. Jacques
发明人: Gary Hamm , David L. Jacques
IPC分类号: H01L21/68
CPC分类号: H01L31/022425 , C23C18/14 , C23C18/1651 , C23C18/1653 , C23C18/1667 , C23C18/1692 , C25D5/12 , H01L31/18 , Y02E10/50
摘要: Methods of light induced plating of nickel onto semiconductors are disclosed. The methods involve applying light at an initial intensity for a limited amount of time followed by reducing the intensity of the light for the remainder of the plating period to deposit nickel on a semiconductor.
摘要翻译: 公开了将镍诱导到半导体上的方法。 所述方法包括在初始强度下施加有限量的光,随后在电镀周期的剩余时间内减少光的强度以将镍沉积在半导体上。
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公开(公告)号:US20100003817A1
公开(公告)日:2010-01-07
申请号:US12456790
申请日:2009-06-23
申请人: Gary Hamm , David L. Jacques
发明人: Gary Hamm , David L. Jacques
IPC分类号: H01L21/3205
CPC分类号: H01L31/022425 , C23C18/14 , C23C18/1651 , C23C18/1653 , C23C18/1667 , C23C18/1692 , C25D5/12 , H01L31/18 , Y02E10/50
摘要: Methods of light induced plating of nickel onto semiconductors are disclosed. The methods involve applying light at an initial intensity for a limited amount of time followed by reducing the intensity of the light for the remainder of the plating period to deposit nickel on a semiconductor.
摘要翻译: 公开了将镍诱导到半导体上的方法。 所述方法包括在初始强度下施加有限量的光,随后在电镀周期的剩余时间内减少光的强度以将镍沉积在半导体上。
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公开(公告)号:US20060081475A1
公开(公告)日:2006-04-20
申请号:US11290040
申请日:2005-11-30
申请人: Leon Barstad , Thomas Buckley , Raymond Cruz , Trevor Goodrich , Gary Hamm , Mark Kapeckas , Katie Price , Erik Reddington , Wade Sonnenberg
发明人: Leon Barstad , Thomas Buckley , Raymond Cruz , Trevor Goodrich , Gary Hamm , Mark Kapeckas , Katie Price , Erik Reddington , Wade Sonnenberg
IPC分类号: C25D5/18
摘要: A composition and method for electroplating a metal on a substrate. The composition has a chloride to brightener concentration ratio of from 20:1 to 125:1. The method of electroplating, which employs the composition, employs pulse patterns that improve physical properties of metal surfaces.
摘要翻译: 用于在基板上电镀金属的组合物和方法。 该组合物的氯化物与增白剂的浓度比为20:1至125:1。 使用该组合物的电镀方法采用改善金属表面的物理性质的脉冲图案。
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