公开(公告)号：US09331450B2

公开(公告)日：2016-05-03

申请号：US14663086

申请日：2015-03-19

申请人： Gigaphoton Inc.

发明人： Takeshi Asayama ,  Hakaru Mizoguchi ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Osamu Wakabayashi ,  Kazuya Takezawa

IPC分类号： H01S3/097 ,  H01S3/038 ,  H01S3/225 ,  H01S3/034 ,  H01S3/08 ,  H01S3/104 ,  H01S3/036

CPC分类号： H01S3/038 ,  H01S3/03 ,  H01S3/034 ,  H01S3/036 ,  H01S3/0388 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/104 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

摘要： A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.

摘要翻译： 根据实施例的激光装置可以包括包括激光增益介质的激光室; 电源; 从电源施加电压的第一电极和接地的第二电极，第一和第二电极设置在激光室中; 以及连接到所述电源的连接器，并且以允许所述第一电极向所述第二电极设置的一侧移动的方式支撑所述第一电极。

公开(公告)号：US09130338B2

公开(公告)日：2015-09-08

申请号：US13738028

申请日：2013-01-10

申请人： Gigaphoton Inc.

发明人： Takahito Kumazaki ,  Takashi Matsunaga ,  Kazuya Takezawa

IPC分类号： H01S3/22 ,  H01S3/04 ,  G02B7/00 ,  H01S3/08 ,  H01S3/106 ,  H01S3/225 ,  H01S3/23

CPC分类号： H01S3/04 ,  G02B7/008 ,  H01S3/0401 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/106 ,  H01S3/225 ,  H01S3/2333

摘要： An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.

摘要翻译： 准分子激光器可以包括框架，设置框架的基板，被配置为通过在包含激光气体的腔室内的放电泵送来振荡和输出激光的准分子激光器，安装在框架上的光学元件和 其设置在输出的激光的光路中，以及连接到框架和底板的散热机构。

公开(公告)号：US10050403B2

公开(公告)日：2018-08-14

申请号：US15680474

申请日：2017-08-18

申请人： Gigaphoton Inc.

发明人： Hisakazu Katsuumi ,  Kazuya Takezawa ,  Kouji Kakizaki ,  Hiroaki Tsushima ,  Takeshi Asayama

IPC分类号： H01S3/038 ,  H01S3/225 ,  H01S3/0977 ,  H01S3/036 ,  H01S3/09

摘要： An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.