Chattering Correction for Accurate Sensor Position Determination on Wafer

    公开(公告)号:US20190084119A1

    公开(公告)日:2019-03-21

    申请号:US16122682

    申请日:2018-09-05

    摘要: A method of controlling polishing includes sweeping a sensor of an in-situ monitoring system across a substrate as a layer of the substrate undergoes polishing, generating from the in-situ monitoring system a sequence of signal values that depend on a thickness of the layer, detecting from the sequence of signal values, a time that the sensor traverses a leading edge of the substrate or a retaining ring and a time that the sensor traverses a trailing edge of the substrate or retaining ring; and for each signal value of at least some of the sequence of signal values, determining a position on the substrate for the signal value based on the time that the sensor traverses the leading edge and the time that the sensor traverses a trailing edge.

    Energetic modulation of nerves
    6.
    发明授权
    Energetic modulation of nerves 有权
    神经的能量调节

    公开(公告)号:US08992447B2

    公开(公告)日:2015-03-31

    申请号:US13523835

    申请日:2012-06-14

    摘要: A system for applying focused ultrasound energy to a nerve surrounding an artery of a patient includes a piezoelectric array comprising a plurality of piezoelectric elements, a controller configured to control at least a subset of the piezoelectric elements so that at least one of the piezoelectric elements in the subset is in a signal transmitting mode, in a signal sensing mode, or both, a first platform on which the piezoelectric elements are coupled and a second platform, wherein the second platform is configured to support at least a part of the patient, a programmable generator configured to generate output power for one or more of the piezoelectric elements, and a programmable processor configured to process a signal sensed by at least one of the piezoelectric elements.

    摘要翻译: 将聚焦超声能量施加到患者动脉周围的神经的系统包括包括多个压电元件的压电阵列,控制器,被配置为控制压电元件的至少一个子集,使得至少一个压电元件 所述子集处于信号传输模式,信号感测模式或两者中,所述压电元件耦合在其上的第一平台和第二平台,其中所述第二平台被配置为支撑所述患者的至少一部分, 可编程发生器被配置为产生一个或多个压电元件的输出功率,以及被配置为处理由至少一个压电元件感测的信号的可编程处理器。