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    LED Solar Illuminator
    1.
    发明申请
    LED Solar Illuminator 失效
    LED太阳能照明器

    公开(公告)号：US20120256559A1

    公开(公告)日：2012-10-11

    申请号：US13081734

    申请日：2011-04-07

    申请人： Guoheng Zhao ,  Ady Levy ,  Alex Salnik ,  Mehdi Vaez-Iravani ,  Lena Nicolaides ,  Samuel S.H. Ngai

    发明人： Guoheng Zhao ,  Ady Levy ,  Alex Salnik ,  Mehdi Vaez-Iravani ,  Lena Nicolaides ,  Samuel S.H. Ngai

    IPC分类号： H05B37/02

    CPC分类号： H05B33/0803

    摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

    摘要翻译： 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有的阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。

    LED solar illuminator
    2.
    发明授权
    LED solar illuminator 失效
    LED太阳能照明灯

    公开(公告)号：US08436554B2

    公开(公告)日：2013-05-07

    申请号：US13081734

    申请日：2011-04-07

    申请人： Guoheng Zhao ,  Ady Levy ,  Alex Salnik ,  Mehdi Vaez-Iravani ,  Lena Nicolaides ,  Samuel S. H. Ngai

    发明人： Guoheng Zhao ,  Ady Levy ,  Alex Salnik ,  Mehdi Vaez-Iravani ,  Lena Nicolaides ,  Samuel S. H. Ngai

    IPC分类号： G05F1/00 ,  H05B37/02 ,  H05B39/04 ,  H05B41/36

    CPC分类号： H05B33/0803

    摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

    摘要翻译： 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有的阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。

    Defect detection using time delay lock-in thermography (LIT) and dark field LIT
    3.
    发明授权
    Defect detection using time delay lock-in thermography (LIT) and dark field LIT 失效
    使用时间延迟锁定热成像（LIT）和暗场LIT进行缺陷检测

    公开(公告)号：US07709794B2

    公开(公告)日：2010-05-04

    申请号：US12026539

    申请日：2008-02-05

    申请人： Guoheng Zhao ,  Geordie Zapalac ,  Samuel Ngai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  Vineet Dharmadhikari

    发明人： Guoheng Zhao ,  Geordie Zapalac ,  Samuel Ngai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  Vineet Dharmadhikari

    IPC分类号： G01J5/00

    CPC分类号： G01N25/72 ,  G01R31/308

    摘要： To increase inspection throughput, the field of view (FOV) of an IR camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation (e.g. optical or electrical) can be provided to the sample and IR images can be captured using the IR camera. Moving the FOV, providing the modulation, and capturing the IR images can be synchronized. The IR images can be filtered to generate the time delay LIT, thereby providing defect identification. In one embodiment, this filtering accounts for the number of pixels of the IR camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the FOV throughout the moving, thereby providing an improved signal-to-noise ratio (SNR) during filtering.

    摘要翻译： 为了提高检测吞吐量，IR摄像机的视野（FOV）可以以恒定速度移动到样品上。 在整个移动过程中，可以向样本提供调制（例如光学或电气），并且可以使用IR照相机捕获IR图像。 移动FOV，提供调制和捕获IR图像可以同步。 可以对IR图像进行滤波以产生时间延迟LIT，从而提供缺陷识别。 在一个实施例中，该过滤计算了IR照相机在扫描方向上的像素数量。 对于光调制的情况，可以在整个移动期间为FOV提供暗场区域，从而在滤波期间提供改善的信噪比（SNR）。

    DEFECT DETECTION USING TIME DELAY LOCK-IN THERMOGRAPHY (LIT) AND DARK FIELD LIT
    4.
    发明申请
    DEFECT DETECTION USING TIME DELAY LOCK-IN THERMOGRAPHY (LIT) AND DARK FIELD LIT 失效
    使用时间延迟锁定热像仪（LIT）和暗场灯的缺陷检测

    公开(公告)号：US20100073665A1

    公开(公告)日：2010-03-25

    申请号：US12026539

    申请日：2008-02-05

    申请人： Guoheng Zhao ,  Geordie Zapalac ,  Samuel Ngai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  Vineet Dharmadhikari

    发明人： Guoheng Zhao ,  Geordie Zapalac ,  Samuel Ngai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  Vineet Dharmadhikari

    IPC分类号： G01N1/00

    CPC分类号： G01N25/72 ,  G01R31/308

    摘要： To increase inspection throughput, the field of view (FOV) of an IR camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation (e.g. optical or electrical) can be provided to the sample and IR images can be captured using the IR camera. Moving the FOV, providing the modulation, and capturing the IR images can be synchronized. The IR images can be filtered to generate the time delay LIT, thereby providing defect identification. In one embodiment, this filtering accounts for the number of pixels of the IR camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the FOV throughout the moving, thereby providing an improved signal-to-noise ratio (SNR) during filtering.

    摘要翻译： 为了提高检测吞吐量，IR摄像机的视野（FOV）可以以恒定速度移动到样品上。 在整个移动过程中，可以向样本提供调制（例如光学或电气），并且可以使用IR照相机捕获IR图像。 移动FOV，提供调制和捕获IR图像可以同步。 可以对IR图像进行滤波以产生时间延迟LIT，从而提供缺陷识别。 在一个实施例中，该过滤计算了IR照相机在扫描方向上的像素数量。 对于光调制的情况，可以在整个移动期间为FOV提供暗场区域，从而在滤波期间提供改善的信噪比（SNR）。

    Detecting and repairing defects of photovoltaic devices
    5.
    发明授权
    Detecting and repairing defects of photovoltaic devices 有权
    检测和修复光伏器件的缺陷

    公开(公告)号：US07989729B1

    公开(公告)日：2011-08-02

    申请号：US12045724

    申请日：2008-03-11

    申请人： Guoheng Zhao ,  George H. Zapalac, Jr. ,  Samuel S. H. Ngai ,  Ady Levy ,  Mehdi Vaez-Iravani

    发明人： Guoheng Zhao ,  George H. Zapalac, Jr. ,  Samuel S. H. Ngai ,  Ady Levy ,  Mehdi Vaez-Iravani

    IPC分类号： G01J5/00 ,  G06K9/00

    CPC分类号： G01J1/08 ,  G01J1/0466 ,  G01J2005/0077 ,  H01L31/186 ,  Y02E10/50 ,  Y02P70/521 ,  Y10S136/29

    摘要： An apparatus for both detecting and repairing a shunt defect in a solar cell substrate. A shunt detection module detects the shunt defect in the substrate, using at least one of lock-in thermography and current-voltage testing. A process diagnostic module determines whether the substrate should be passed without further processing by the apparatus, rejected without further processing by the apparatus, or repaired by the apparatus. A shunt repair module electrically isolates the shunt defect in the substrate. In this manner, a single apparatus can quickly check for shunts and make a determination as to whether the substrate is worth repairing. If it is worth repairing, then the apparatus can make the repairs to the substrate.

    摘要翻译： 一种用于检测和修复太阳能电池基板中的分流缺陷的装置。 分流检测模块使用锁定热成像和电流 - 电压测试中的至少一种来检测衬底中的分流缺陷。 过程诊断模块确定衬底是否应该被通过而不被设备进一步处理，不经设备的进一步处理就被拒绝或被设备修复。 分流修复模块电隔离衬底中的分流缺陷。 以这种方式，单个装置可以快速检查分流并且确定基板是否值得修复。 如果值得修理，那么设备可以对基材进行维修。

    Segmented optical and electrical testing for photovoltaic devices
    6.
    发明授权
    Segmented optical and electrical testing for photovoltaic devices 失效
    光电器件分段光电测试

    公开(公告)号：US07733111B1

    公开(公告)日：2010-06-08

    申请号：US12045734

    申请日：2008-03-11

    申请人： Guoheng Zhao ,  Bin-Ming B. Tsai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  George H. Zapalac, Jr. ,  Samuel S. H. Ngai

    发明人： Guoheng Zhao ,  Bin-Ming B. Tsai ,  Mehdi Vaez-Iravani ,  Ady Levy ,  George H. Zapalac, Jr. ,  Samuel S. H. Ngai

    IPC分类号： G01R31/26

    CPC分类号： H02S50/10 ,  F21S8/006 ,  F21Y2115/10

    摘要： An apparatus for inducing a current in a solar cell substrate. A substrate receiving surface receives the substrate, and an array of a plurality of individually addressable light sources illuminates the substrate in a sequenced manner. A sequencer controls the sequenced manner of illumination of the substrate by the array. A front side electrical contact makes electrical contact to a front side of the substrate, and a back side electrical contact makes electrical contact to a back side of the substrate. A meter is electrically connected to the front side electrical contact and the back side electrical contact, and senses the current induced in the substrate during the sequenced illumination of the substrate.

    摘要翻译： 一种用于在太阳能电池基板中感应电流的装置。 衬底接收表面接收衬底，并且多个可单独寻址的光源的阵列以顺序的方式照射衬底。 定序器通过阵列控制衬底的照明顺序。 前侧电触点与基板的前侧电接触，并且背面电触点与基板的背面进行电接触。 仪表电连接到前侧电触头和后侧电触点，并感测在衬底的顺序照明期间在衬底中感应的电流。

    System for detecting anomalies and/or features of a surface
    7.
    发明授权
    System for detecting anomalies and/or features of a surface 有权
    用于检测表面的异常和/或特征的系统

    公开(公告)号：US07869023B2

    公开(公告)日：2011-01-11

    申请号：US12123393

    申请日：2008-05-19

    申请人： Guoheng Zhao ,  Stanley Stokowski ,  Mehdi Vaez-Iravani

    发明人： Guoheng Zhao ,  Stanley Stokowski ,  Mehdi Vaez-Iravani

    IPC分类号： G01N21/00

    CPC分类号： G01N21/9501

    摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.

    摘要翻译： 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。

    Fourier filters and wafer inspection systems
    10.
    发明授权
    Fourier filters and wafer inspection systems 有权
    傅立叶滤波器和晶圆检查系统

    公开(公告)号：US07345754B1

    公开(公告)日：2008-03-18

    申请号：US11228584

    申请日：2005-09-16

    申请人： Guoheng Zhao ,  Mehdi Vaez-Iravani ,  Andrew V. Hill ,  Avijit K. Ray-Chaudhuri

    发明人： Guoheng Zhao ,  Mehdi Vaez-Iravani ,  Andrew V. Hill ,  Avijit K. Ray-Chaudhuri

    IPC分类号： G01N21/00 ,  G02B27/46

    CPC分类号： G01N21/9501 ,  G01N21/4738 ,  G01N21/956 ,  G03F7/7065

    摘要： Fourier filters and wafer inspection systems are provided. One embodiment relates to a one-dimensional Fourier filter configured to be included in a bright field inspection system such that the bright field inspection system can be used for broadband dark field inspection of a wafer. The Fourier filter includes an asymmetric illumination aperture configured to be positioned in an illumination path of the inspection system. The Fourier filter also includes an asymmetric imaging aperture complementary to the illumination aperture. The imaging aperture is configured to be positioned in a light collection path of the inspection system such that the imaging aperture blocks light reflected and diffracted from structures on the wafer and allows light scattered from defects on the wafer to pass through the imaging aperture.

    摘要翻译： 提供傅立叶滤波器和晶片检测系统。 一个实施例涉及被配置为包括在明场检查系统中的一维傅立叶滤波器，使得明场检查系统可以用于晶片的宽带暗视场检查。 傅里叶滤波器包括被配置为定位在检查系统的照明路径中的非对称照明孔。 傅立叶滤波器还包括与照明孔径互补的非对称成像孔。 成像孔被配置为定位在检查系统的光采集路径中，使得成像孔口阻挡从晶片上的结构反射和衍射的光，并允许从晶片上的缺陷散射的光通过成像孔。