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    ACCELERATION SENSOR
    2.
    发明申请
    ACCELERATION SENSOR 审中-公开

    公开(公告)号：US20180372774A1

    公开(公告)日：2018-12-27

    申请号：US16064562

    申请日：2016-04-18

    申请人： HITACHI, LTD.

    发明人： Atsushi ISOBE ,  Takashi SHIOTA ,  Yuudai KAMADA ,  Chisaki TAKUBO ,  Noriyuki SAKUMA

    IPC分类号： G01P15/125 ,  G01P15/08

    摘要： An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.

    ACCELERATION SENSOR
    3.
    发明申请
    ACCELERATION SENSOR 审中-公开

    公开(公告)号：US20170292970A1

    公开(公告)日：2017-10-12

    申请号：US15511444

    申请日：2014-11-11

    申请人： HITACHI, LTD.

    发明人： Atsushi ISOBE ,  Noriyuki SAKUMA ,  Chisaki TAKUBO ,  Yuudai KAMADA ,  Takashi SHIOTA

    IPC分类号： G01P15/125

    CPC分类号： G01P15/125

    摘要： An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).

    Physical Quantity Sensor
    4.
    发明申请
    Physical Quantity Sensor 审中-公开
    物理量传感器

    公开(公告)号：US20170018471A1

    公开(公告)日：2017-01-19

    申请号：US15182657

    申请日：2016-06-15

    申请人： Hitachi, Ltd.

    发明人： Takanori AONO ,  Tomonori SEKIGUCHI ,  Takashi SHIOTA ,  Yuudai KAMADA ,  Atsushi ISOBE

    IPC分类号： H01L23/053 ,  G01L9/02 ,  G01P15/18 ,  G01P3/44 ,  H01L23/498 ,  B81B7/00

    CPC分类号： G01L9/02 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2207/07 ,  G01C19/5783 ,  G01L9/12 ,  G01P1/006 ,  G01P1/023 ,  H01L23/057 ,  H01L23/49838 ,  H01L23/49861 ,  H01L2224/16225

    摘要： To provide a physical quantity sensor in which the influence of deformation of a package substrate on the measuring accuracy of a sensor element can be suppressed. A physical quantity sensor includes a sensor element that detects a predetermined physical quantity and outputs an electrical signal, a plurality of lead portions that are connected to the sensor element, and a package substrate that accommodates the sensor element and the plurality of lead portions. The plurality of lead portions are connected at proximal end sides thereof to the package substrate side, and connected at distal end sides thereof to the sensor element side, and the plurality of lead portions support the sensor element in such a manner that the sensor element does not contact the package substrate and that the transmission of deformation of the package substrate side to the sensor element is suppressed.

    摘要翻译： 提供能够抑制封装基板的变形对传感器元件的测量精度的影响的物理量传感器。 物理量传感器包括检测预定物理量并输出电信号的传感器元件，连接到传感器元件的多个引线部分和容纳传感器元件和多个引线部分的封装基板。 多个引线部分在其近端侧连接到封装基板侧，并且在其远端侧连接到传感器元件侧，并且多个引线部分以传感器元件的方式支撑传感器元件 不接触封装基板，并且抑制封装基板侧向传感器元件的变形的传输。

    Acceleration Sensor
    6.
    发明申请
    Acceleration Sensor 审中-公开

    公开(公告)号：US20180252745A1

    公开(公告)日：2018-09-06

    申请号：US15758188

    申请日：2015-09-15

    申请人： HITACHI, LTD.

    发明人： Atsushi ISOBE ,  Takashi SHIOTA ,  Yuudai KAMADA ,  Chisaki TAKUBO ,  Noriyuki SAKUMA

    IPC分类号： G01P15/125 ,  G01P15/18 ,  G01P15/08

    摘要： There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.