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公开(公告)号：US4769883A
公开(公告)日：1988-09-13
申请号：US472529
申请日：1983-03-07
IPC分类号： G01R31/28 , H01L21/48 , H01L23/538 , H01L23/66 , H05K1/00 , H05K1/02 , H01G7/00 , G01R23/00 , H01F7/06 , H01P3/08 , H05K3/00
CPC分类号： H01L23/66 , G01R31/2822 , H01L21/485 , H01L23/5382 , H01L2224/45015 , H01L2224/45144 , H01L2224/49175 , H01L24/45 , H01L24/49 , H01L2924/00014 , H01L2924/01014 , H01L2924/01079 , H01L2924/12042 , H01L2924/14 , H01L2924/19041 , H01L2924/30107 , H01L2924/3011 , H05K1/0237 , H05K1/0286 , Y10T29/435 , Y10T29/49004 , Y10T29/4902 , Y10T29/49082 , Y10T29/49124 , Y10T29/49156
摘要： A method of tuning a microwave integrated circuit by trimming desired film-type circuit patterns included therein by a cold-pressure bonding technique is disclosed. More specifically, intercoupled circuit patterns are formed on a semi-insulating substrate with some circuit patterns having impedance characteristics of a desired nominal value. Each circuit pattern may comprise a plurality of conductive paths of malleable metal. Gaps are provided at appropriately chosen places in the conductive paths of predetermined circuit patterns. Selected ones of the gaps of the conductive paths are bridged to adjust the impedance characteristics of the associated predetermined circuit pattern by wiping with a probe the malleable metal of the conductive path at one end of the gap, across the gap to make contact with the malleable metal of the conductive path at the other end of the gap. The method further includes steps for in-situ testing of the integrated circuit by energizing the microwave integrated circuit to effect operation thereof; testing selected parameters of the energized microwave integrated circuit for determining the operational response thereof; and performing the step of bridging selected gaps of the energized microwave integrated circuit with a probe of insulating material to adjust the impedance characteristics thereof to render a desired measure response therefrom as determined by the testing step.
摘要翻译： 公开了一种通过利用冷压接技术修整所需的薄膜型电路图案来调谐微波集成电路的方法。 更具体地说，在具有阻抗特性为期望标称值的一些电路图案的半绝缘衬底上形成相互联系的电路图案。 每个电路图案可以包括多个可延展金属的导电路径。 在预定电路图案的导电路径中的适当选择的位置提供间隙。 桥接导电路径的间隙中的选定的间隙以通过用探针擦拭间隙的一端处的导电路径的可延展金属跨越间隙以与可延展的接触来调节相关联的预定电路图案的阻抗特性 导电路径的金属在间隙的另一端。 该方法还包括通过激励微波集成电路来实现集成电路的操作来现场测试集成电路的步骤; 测试通电微波集成电路的选定参数，以确定其运行响应; 以及通过绝缘材料的探针执行桥接所述通电的微波集成电路的选定间隙的步骤，以调整其阻抗特性，以便通过测试步骤确定所需的测量响应。
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2.发明授权Transmit-receive means for phased-array active antenna system using rf redundancy 失效发射接收装置，用于使用rf冗余的相控阵有源天线系统
公开(公告)号：US4823136A
公开(公告)日：1989-04-18
申请号：US13490
申请日：1987-02-11
申请人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
发明人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
CPC分类号： H01Q21/0025 , G01S7/032 , H01Q3/26
摘要： An improved phased-array active antenna transmit-receive means utilizing a multiplicity of individual transmit-receive cells positioned in an array format upon a common wafer of semiconductor material. Each transmit-receive cell, comprises a multiplicity of redundant, integrated circuit, electronic devices implanted upon the common semiconductor substrate. The transmit-receive cells utilize novel mitered mechanical switches to permanently interconnect individual electronic devices into either transmit or receive circuits during the fabrication and test of the transmit-receive cells. Radio frequency and direct current input and output vias formed from a novel metal evaportion technique connect the devices upon the surface of the common semiconductor wafer to underlying, insulated direct current distribution circuits and a radio frequency manifold. This array of improved phased-array active antenna transmit-receive means comprised of transmit-receive cells sharing common central processing means, logic control and heat dissipation means results in a significant reduction in the size and weight of the standard phased-array active antenna system. This significant reduction in antenna system size and weight is very important in broad band electronic countermeasure systems or narrow band phased array active antenna radar systems as used in advanced tactical fighters, or space applications.
摘要翻译： 一种改进的相控阵有源天线发射 - 接收装置，利用位于半导体材料的公共晶片上的阵列格式的多个单独的发射 - 接收单元。 每个发射 - 接收单元包括多个冗余的集成电路，注入到公共半导体衬底上的电子器件。 发射接收蜂窝小区利用新颖的倾斜机械开关，在发射接收小区的制造和测试期间，将各个电子设备永久地互连到发射或接收电路中。 由新型金属蒸发技术形成的射频和直流输入和输出通孔将公共半导体晶片的表面上的器件连接到下面的绝缘直流分配电路和射频歧管。 由共享公共中央处理装置，逻辑控制和散热装置的发射 - 接收单元组成的改进的相控阵有源天线发射 - 接收装置阵列导致标准相控阵有源天线系统的尺寸和重量的显着降低 。 天线系统尺寸和重量的显着降低对于在高级战术战机或空间应用中使用的宽带电子对抗系统或窄带相控阵有源天线雷达系统是非常重要的。
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3.发明授权
公开(公告)号：US4922253A
公开(公告)日：1990-05-01
申请号：US292983
申请日：1989-01-03
CPC分类号： H01P1/10 , H01H59/0009 , H01Q15/002
摘要： A radio frequency transmitting shutter operable at low power and high speed for use in the protection of a radar or electronic warfare array comprising a multiplicity of individual conductive beam members interconnected by electrostatic switches formed using high yield, common photolithographic methods is disclosed. Further, a photosensitive embodiment of this device which would allow activation of the shutter wherever the light falls upon the shutter during radar protection, is disclosed and claimed.
摘要翻译： 公开了一种能够以低功率和高速度操作的射频发射快门，用于保护雷达或电子战阵列，其包括通过使用高产率，普通光刻方法形成的静电开关互连的多个单独的导电梁构件。 此外，公开和要求保护该装置的光敏实施例，其将允许在雷达保护期间光落在快门上的任何位置启动快门。
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公开(公告)号：US4904831A
公开(公告)日：1990-02-27
申请号：US293164
申请日：1989-01-03
申请人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
发明人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
CPC分类号： G01S7/032 , H01Q21/0025 , H01Q3/26
摘要： An improved phased-array active antenna transmit-receive means utilizing a multiplicity of individual transmit-receive cells positioned in an array format upon a common wafer of semiconductor material. Each transmit-receiver cell, comprises a multiplicity of redundant, integrated circuit, electronic devices implanted upon the common semiconductor substrate. The transmit-receive cells utilize novel mitered mechanical switches to permanently interconnect individual electronic devices into either transmit or receive circuits during the fabrication and test of the transmit-receive cells. Radio frequency and direct current input and output vias formed from a novel metal evaporation technique connect the devices upon the surface of the common semiconductor wafer to underlying, insulated direct current distribution circuits and a radio frequency manifold. This array of improved phased-array active antenna transmit-receive means comprised of transmit-receive cells sharing common central processing means, logic control and heat dissipation means results in a significant reduction in the size and weight of the standard phased-array active antenna system. This significant reduction in antenna system size and weight is very important in broad band electronic countermeasure systems or narrow band phased array active antenna radar systems as used in advanced tactical fighters, or space applications.
摘要翻译： 一种改进的相控阵有源天线发射 - 接收装置，利用位于半导体材料的公共晶片上的阵列格式的多个单独的发射 - 接收单元。 每个发射 - 接收器单元包括多个冗余的集成电路，注入到公共半导体衬底上的电子器件。 发射接收蜂窝小区利用新颖的倾斜机械开关，在发射接收小区的制造和测试期间，将各个电子设备永久地互连到发射或接收电路中。 由新型金属蒸发技术形成的射频和直流输入和输出通孔将公共半导体晶片的表面上的器件连接到下面的绝缘直流分配电路和射频歧管。 由共享公共中央处理装置，逻辑控制和散热装置的发射 - 接收单元组成的改进的相控阵有源天线发射 - 接收装置阵列导致标准相控阵有源天线系统的尺寸和重量的显着降低 。 天线系统尺寸和重量的显着降低对于在高级战术战机或空间应用中使用的宽带电子对抗系统或窄带相控阵有源天线雷达系统是非常重要的。
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公开(公告)号：US4381341A
公开(公告)日：1983-04-26
申请号：US344467
申请日：1982-02-01
IPC分类号： H01L21/306 , H01L21/768 , H01L23/535 , H01L21/312 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01L23/535 , H01L21/30612 , H01L21/76898 , H01L2924/0002 , H01L2924/3011 , Y10S438/928 , Y10S438/977
摘要： Electrical interconnection paths or vias are provided through relatively thick type III/V semiconductive substrates, such as gallium arsenide, to permit through the substrate electrical interconnection of planar transistor devices. The vias are etched in a two-step process which ensures that the via lateral dimensions are less than the transistor contacts with which they are aligned. The first step comprises selectively thinning the thick substrate from the back surface over an area which encompasses the transistor array formed in the front surface of the substrate. The second step is to etch the individual vias through this prior thinned substrate at areas aligned with the transistor contacts.
摘要翻译： 通过诸如砷化镓的相对厚的类型III / V半导体衬底提供电互连通路或通孔，以允许平面晶体管器件的衬底电互连。 通孔以两步法进行蚀刻，这确保通孔横向尺寸小于它们对准的晶体管触点。 第一步骤包括在包围形成在衬底的前表面中的晶体管阵列的区域上从后表面选择性地稀薄厚衬底。 第二步是在与晶体管触点对准的区域处蚀刻通过该先前减薄的衬底的各个通孔。
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公开(公告)号：US4894114A
公开(公告)日：1990-01-16
申请号：US292973
申请日：1989-01-03
申请人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
发明人： Harvey C. Nathanson , Michael C. Driver , Michael W. Cresswell , Ronald G. Freitag , Donald K. Alexander , Daniel F. Yaw
CPC分类号： H01Q21/0025 , G01S7/032 , H01Q3/26 , Y10S438/928 , Y10S438/944
摘要： An improved phased-array active antenna transmit-receive means utilizing a multiplicity of individual transmit-receive cells positioned in an array format upon a common wafer of semiconductor material. Each transmit-receive cell, comprises a multiplicity of redundant, integrated circuit, electronic devices implanted upon the common semiconductor substrate. The transmit-receive cells utilize novel mitered mechanical switches to permanently interconnect individual electronic devices into either transmit or receive circuits during the fabrication and test of the transmit-receive cells. Radio frequency and direct current input and output vias formed from a novel metal evaporation technique connect the devices upon the surface of the common semiconductor wafer to underlying, insulated direct current distribution circuits and a radio frequency manifold. This array of improved phased-array active antenna transmit-receive means comprised of transmit-receive cells sharing common central processing means, logic control and heat dissipation means results in a significant reduction in the size and weight of the standard phased-array active antenna system. This significant reduction in antenna system size and weight is very important in broad band electronic countermeasure systems or narrow band phased array active antenna radar systems as used in advanced tactical fighters, or space applications.
摘要翻译： 一种改进的相控阵有源天线发射 - 接收装置，利用位于半导体材料的公共晶片上的阵列格式的多个单独的发射 - 接收单元。 每个发射 - 接收单元包括多个冗余的集成电路，注入到公共半导体衬底上的电子器件。 发射接收蜂窝小区利用新颖的倾斜机械开关，在发射接收小区的制造和测试期间，将各个电子设备永久地互连到发射或接收电路中。 由新型金属蒸发技术形成的射频和直流输入和输出通孔将公共半导体晶片的表面上的器件连接到下面的绝缘直流分配电路和射频歧管。 由共享公共中央处理装置，逻辑控制和散热装置的发射 - 接收单元组成的改进的相控阵有源天线发射 - 接收装置阵列导致标准相控阵有源天线系统的尺寸和重量的显着降低 。 天线系统尺寸和重量的显着降低对于在高级战术战机或空间应用中使用的宽带电子对抗系统或窄带相控阵有源天线雷达系统是非常重要的。
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公开(公告)号：US5412421A
公开(公告)日：1995-05-02
申请号：US122134
申请日：1993-09-15
CPC分类号： H04N5/23258 , G01S3/043 , H04N5/23248 , H04N5/23287 , H04N7/18
摘要： A sensor produces signals corresponding to positions of objects within a field of view over time. A motion detector is provided for determining movement of the sensor. Signals from the sensor and the detector go to a processing unit which causes an appropriate modification of the signal received from the sensor to compensate for the movement.
摘要翻译： 传感器随着时间的推移产生与视场内的对象位置对应的信号。 提供运动检测器以确定传感器的运动。 来自传感器和检测器的信号进入处理单元，该处理单元对从传感器接收的信号进行适当的修改以补偿运动。
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8.发明授权Broadband microwave integrated circuit amplifier with capacitive neutralization 失效宽带微波集成电路放大器采用电容中和
公开(公告)号：US5355095A
公开(公告)日：1994-10-11
申请号：US838971
申请日：1992-02-21
CPC分类号： H03F3/265
摘要： Push-pull complimentary MOSFET devices are formed in a thin active layer between the top surface of a high resistivity silicon wafer and a insulating layer implanted below the top surface. Each MOSFET is composed of a plurality of cells each having a source, a gate, and a drain region extending fully through the active layer. Grooves extending through the wafer are lined with vias which connect the source regions with a floating ground plane on the bottom of the wafer. The gates of all the cells are connected by a gate bus on the top surface. Air bridges spanning the gates and the source vias connect the drain conductors of each cell. Neutralizing capacitors connected between an input and an opposite output of the push-pull complimentary MOSFET devices match the parasitic capacitances of the devices and provide wide bandwidth amplification with roll off well into the GHz range without the need for tuning inductors.
摘要翻译： 推挽互补MOSFET器件形成在高电阻率硅晶片的顶表面和植入在顶表面下方的绝缘层之间的薄的有源层中。 每个MOSFET由多个单元组成，每个单元具有完全延伸穿过有源层的源极，栅极和漏极区域。 延伸穿过晶片的沟槽衬有通孔，其将源区域与晶片底部上的浮动接地平面连接。 所有电池的栅极通过顶部表面上的栅极总线连接。 跨过门和源通孔的空气桥连接每个电池的漏极导体。 连接在推挽互补MOSFET器件的输入端和反相输出端之间的中和电容器与器件的寄生电容相匹配，并提供宽带宽放大，无需调谐电感器即可滚动到GHz范围内。
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公开(公告)号：US08018053B2
公开(公告)日：2011-09-13
申请号：US12023831
申请日：2008-01-31
申请人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
发明人： Harvey C. Nathanson , Robert M. Young , Joseph T. Smith , Robert S. Howell , Archer S. Mitchell
CPC分类号： H01L35/00 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： One example discloses a heat transfer device that can comprise a semiconductor material having a first region and a second region. The first region and the second region are doped to propel a charged carrier from the first region to the second region. The heat transfer device can also comprise an array of pointed tips thermoelectrically communicating with the second region. A heat sink faces the array, and a vacuum tunneling region is formed between the pointed tips and the heat sink. The heat transfer device further can further comprise a power source for biasing the heat sink with respect to the first region. The first region defines an N-type semiconductor material and the second region defines a P-type semiconductor material.
摘要翻译： 一个实例公开了一种传热装置，其可以包括具有第一区域和第二区域的半导体材料。 第一区域和第二区域被掺杂以将带电载体从第一区域推动到第二区域。 传热装置还可以包括与第二区域热电连通的尖端的阵列。 散热器面向阵列，并且在尖端和散热器之间形成真空隧道区域。 传热装置还可以进一步包括用于相对于第一区域偏置散热器的电源。 第一区域限定N型半导体材料，第二区域限定P型半导体材料。
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公开(公告)号：US07119942B2
公开(公告)日：2006-10-10
申请号：US10879040
申请日：2004-06-30
申请人： Harvey C. Nathanson , Robert S. Howell , Garrett A. Storaska , John B. Goodell , Stephen D. Vancampen
发明人： Harvey C. Nathanson , Robert S. Howell , Garrett A. Storaska , John B. Goodell , Stephen D. Vancampen
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-electrical mechanical system (MEMS) mirror assembly including an array of micro-mirrors formed on a substrate and having springs on one side and which angularly tilt between ON and OFF states in response to an electrostatic force generated by a voltage applied to an electrode located on the substrate. At least one, but preferably two springs in the form of two thin strips of metal attach to post(s) at the side edge of the mirror and act as springs which provide a restoring force when the mirror is tilted between an OFF state which occurs when the mirror is flat relative to the substrate with no voltage applied, and in the ON state when the mirror is tilted when a voltage is applied.
摘要翻译： 一种微电机械系统（MEMS）反射镜组件，包括形成在基板上的微反射镜阵列，并且在一侧具有弹簧，并且响应于施加到一个电压的电压产生的静电力而在ON和OFF状态之间成角度地倾斜 电极位于基板上。 至少一个，但最好是两个金属条带形式的两个弹簧，在镜子的侧边缘附着到柱上，并且当弹簧在镜子在发生的关闭状态之间倾斜时提供恢复力 当反射镜相对于没有施加电压的基板是平坦的，并且当施加电压时镜子倾斜时处于导通状态。
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