摘要:
Disclosed is a sintered compact target containing an element (A) and an element (B) below, wherein the sintered compact target is free from pores having an average diameter of 1 μm or more, and the number of micropores having an average diameter of less than 1 μm existing in 40000 μm2 of the target surface is 100 micropores or less:(A): one or more chalcogenide elements selected from S, Se, and Te; and (B): one or more Vb group elements selected from Bi, Sb, As, P, and N.The provided technology is able to eliminate the source of grain dropping or generation of nodules in the target during sputtering, and additionally inhibit the generation of particles.
摘要:
A sintered sputtering target having a structure where the average crystallize size is 1 nm to 50 nm and preferably comprises an alloy having a three-component system or greater containing, as its primary component, at least one element selected from among Zr, Pd, Cu, Co, Fe, Ti, Mg, Sr, Y, Nb, Mo, Tc, Ru, Rh, Ag, Cd, In, Sn, Sb, Te and a rare earth metal. This target is manufactured by sintering atomized powder. Thereby provided is a high density target having an extremely fine and uniform structure manufactured with the sintering method, in place of a conventional bulk metal glass produced by the quenching of a molten metal, which has a coarse crystal structure and requires a high cost for its production.
摘要:
Provided is an Sb—Te base alloy sinter sputtering target having Sb and Te as its primary component and comprising a structure in which Sb—Te base alloy particles are surrounded by fine carbon or boron particles; wherein, if the mean diameter of the Sb—Te base alloy particles is X and the particle size of carbon or boron is Y, Y/X is within the range of 1/10 to 1/10000. The present invention seeks to improve the Sb—Te base alloy sputtering target structure, inhibit the generation of cracks in the sintered target, and prevent the generation of arcing during the sputtering process.
摘要:
Provided is an Sb—Te base alloy sinter sputtering target having Sb and Te as its primary component and comprising a structure in which Sb—Te base alloy particles are surrounded by fine carbon or boron particles; wherein, if the mean diameter of the Sb—Te base alloy particles is X and the particle size of carbon or boron is Y, Y/X is within the range of 1/10 to 1/10000. The present invention seeks to improve the Sb—Te base alloy sputtering target structure, inhibit the generation of cracks in the sintered target, and prevent the generation of arcing during the sputtering process.
摘要:
A titanium sputtering target that contains a concentration of oxygen in an amount of 20 ppm or less and has a maximum grain diameter of 20 &mgr;m or less. The target permits a sputtering operation to be accomplished substantially free from the formation of particles or the occurrence of an abnormal discharge phenomenon. In addition, the target contains a reduced amount of contaminants and is soft.
摘要:
A sintered sputtering target having a structure where the average crystallize size is 1 nm to 50 nm and preferably comprises an alloy having a three-component system or greater containing, as its primary component, at least one element selected from among Zr, Pd, Cu, Co, Fe, Ti, Mg, Sr, Y, Nb, Mo, Tc, Ru, Rh, Ag, Cd, In, Sn, Sb, Te and a rare earth metal. This target is manufactured by sintering atomized powder. Thereby provided is a high density target having an extremely fine and uniform structure manufactured with the sintering method, in place of a conventional bulk metal glass produced by the quenching of a molten metal, which has a coarse crystal structure and requires a high cost for its production.
摘要:
Liquid to be injected from an injection nozzle is supplied through a liquid supply channel toward the injection nozzle. Negative pressure for sucking the liquid injected from the injection nozzle through a suction port is produced by a suction unit and guided through a suction channel toward the suction port. A bypass channel which bypasses the liquid supply channel on the upstream side with respect to the injection nozzle and connects with the suction channel is provided. The bypass channel is opened and closed by an opening and closing unit. According to this structure, flow of unnecessary liquid from the injection nozzle can be reduced by opening the opening and closing unit while injection of liquid is stopping.
摘要:
According to an embodiment, a transmission apparatus is installed in a locomotive having ID information. A first connecting direction and a second connecting direction opposite the first connecting direction are defined for the locomotive. The transmission apparatus includes a transmission unit and a connection state determination unit. The transmission unit transmits the ID information received from other locomotive from one of the first connecting direction and the second connecting direction to other one of the first connecting direction and the second connecting direction. The connection state determination unit determines a connection state between the other locomotive and the locomotive in which the transmission apparatus is installed, based on the received ID information.
摘要:
A power supply control method of performing a feedback control of an output voltage based on a deviation signal for a standard voltage value serving as a target value for the output voltage and a digital signal generated by analog/digital (A/D) conversion of the output voltage, the method includes selecting a range of the reference voltage for the A/D conversion based on the digital signal in a power supply startup period, and selecting a range of the reference voltage for the A/D conversion based on the deviation signal or a signal corresponding to the deviation signal in a steady state period.
摘要:
A control device includes a first terminal receiving a monitored output voltage and a second terminal transmitting a pulse width modulation (PWM) signal. A converting unit generates an A/D conversion synchronous signal, and an A/D converter samples the monitored output voltage in accordance with the A/D conversion synchronous signal. A pulse oscillator controls a position of a first edge on the PWM signal in accordance with the A/D conversion synchronous signal, and controls a position of a second edge based on the monitored voltage.