Silicon thin film and method of producing the same
    4.
    发明授权
    Silicon thin film and method of producing the same 失效
    硅薄膜及其制造方法

    公开(公告)号:US5017308A

    公开(公告)日:1991-05-21

    申请号:US377985

    申请日:1989-07-11

    摘要: A silicon thin film is composed of primarily silicon atoms, 0 to 8 atm % hydrogen, at least one element selected from the group including fluorine, chlorine, bromine and iodine, and an impurity element, wherein about 80 to 100% of microcrystalline grains are interspersed in an amorphous phase. The thin film is produced by deposition on a substrate in a plasma atmosphere using as a raw material gas silane (SiH.sub.4) or halogenated silane (SiH.sub.o--3 X.sub.4--1) wherein X represents a halogen or a combination of two or more halogens, and a dopant gas mixed with the raw material gas. The method comprises the steps of: (1) diluting the mixed gas with hydrogen in a ratio of the diluting gas to the raw material gas of from 50:1 to 100:1, to control the film deposition rate to produce a layer including mixed crystalline and amorphous substances; and (2) applying an electric power to provide a plasma discharge power density of from 0.1 to about 0.5 W/cm.sup.2, at a reaction pressure of 5 to 10 torr.

    摘要翻译: 硅薄膜主要由0〜8atm%的氢原子,至少一种选自氟,氯,溴和碘的元素和杂质元素组成,其中约80〜100%的微晶粒为 散布在非晶相中。 通过使用其中X表示卤素或两种或更多种卤素的组合的原料气体硅烷(SiH 4)或卤代硅烷(SiHo-3X4-1)在等离子体气氛中在基板上沉积而制造薄膜, 掺杂气体与原料气体混合。 该方法包括以下步骤:(1)将稀释气体与原料气体的比例用氢气稀释为50:1至100:1,以控制膜沉积速率以产生包括混合物 结晶和无定形物质; 和(2)施加电力以提供0.1至约0.5W / cm 2的等离子体放电功率密度,反应压力为5至10托。

    Mask for the selective growth of a solid
    5.
    发明授权
    Mask for the selective growth of a solid 有权
    用于固体选择性生长的面膜

    公开(公告)号:US06287699B1

    公开(公告)日:2001-09-11

    申请号:US09263223

    申请日:1999-03-05

    IPC分类号: H01L2132

    摘要: A mask for a selective growth of a solid, is provided in which the solid is selectively grown in a predetermined region of a substrate and growth on other regions is suppressed. A method is also provided for selectively growing a solid on only the predetermined region of a substrate using the mask. In the mask, a surface layer and an underlayer are provided, each having different chemical compositions. Thus, even if the mask is formed on a substrate in an ultra thin film, the generation of mask defects can be suppressed and stability provided to heat and electron beams.

    摘要翻译: 提供了用于选择性生长固体的掩模,其中固体选择性地生长在基板的预定区域中,并抑制其它区域上的生长。 还提供了一种方法,用于使用掩模仅在基板的预定区域上选择性地生长固体。 在掩模中,提供表面层和底层,每层具有不同的化学组成。 因此,即使在超薄膜中的基板上形成掩模,也可以抑制掩模缺陷的产生,并且对热和电子束提供稳定性。

    Heat-resistant, high-impact resin composition
    7.
    发明授权
    Heat-resistant, high-impact resin composition 失效
    耐热,高冲击性树脂组合物

    公开(公告)号:US4584345A

    公开(公告)日:1986-04-22

    申请号:US614915

    申请日:1984-05-29

    IPC分类号: C08L51/00 C08L51/04 C08L69/00

    CPC分类号: C08L51/04 C08L69/00

    摘要: Heat-resistant, high-impact thermoplastic resin compositions comprising a graft copolymer (A) obtained by graft-copolymerizing an aromatic vinyl compound and an unsaturated carboxylic acid anhydride onto a rubbery polymer; a composite modifier (B) obtained by graft-copolymerizing an aromatic vinyl compound and a methacrylate ester monomer onto a diene rubber polymer; and an aromatic polycarbonate resin (C).

    摘要翻译: 包含通过将芳族乙烯基化合物和不饱和羧酸酐接枝共聚到橡胶状聚合物上而获得的接枝共聚物(A)的耐热,高冲击性热塑性树脂组合物; 通过将芳香族乙烯基化合物和甲基丙烯酸酯单体接枝共聚到二烯橡胶聚合物上而得到的复合改性剂(B) 和芳香族聚碳酸酯树脂(C)。