-
公开(公告)号：US20060064191A1
公开(公告)日：2006-03-23
申请号：US10545658
申请日：2003-09-17
IPC分类号： G06F19/00
CPC分类号： H01L23/544 , G05B19/4183 , G05B2219/31304 , G05B2219/45031 , H01L21/67276 , H01L21/67294 , H01L2223/5442 , H01L2223/54433 , H01L2223/5444 , H01L2924/0002 , Y02P90/04 , Y02P90/10 , H01L2924/00
摘要： The present invention provides a semiconductor device furnished with tamper-resistant identification information by forming a circuit pattern 2B which differs from one semiconductor chip to another in a semiconductor chip 2 packaged in a semiconductor device 1 in addition to an original circuit pattern 2A and expressing the identification information by this circuit pattern 2B and the invention further provides a semiconductor manufacturing management system targeted at a product mounted with this semiconductor device, capable of managing the product from the manufacturing to the mode of use of the semiconductor device.
摘要翻译： 本发明提供了一种半导体器件，其通过在除了原始电路图案2A和半导体器件1之外的半导体器件1中封装的半导体芯片2中形成不同于一个半导体芯片的电路图案2B而配备防篡改识别信息，以及 通过该电路图案2B表示识别信息，并且本发明还提供了一种针对安装有该半导体器件的产品的半导体制造管理系统，其能够管理从半导体器件的制造到使用模式的产品。
-
公开(公告)号：US06941186B2
公开(公告)日：2005-09-06
申请号：US10625887
申请日：2003-07-23
IPC分类号： G03F1/84 , G03F1/86 , G03F7/20 , H01J37/302 , H01J37/317 , H01L21/02 , H01L21/027 , G06F19/00
CPC分类号： B82Y10/00 , B82Y40/00 , G05B19/41855 , G05B2219/31323 , G05B2219/45028 , H01J37/3023 , H01J37/3174 , H01J2237/30411 , H01J2237/3175 , H01J2237/31762 , Y02P90/185 , Y02P90/24
摘要： A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
摘要翻译： 半导体制造装置包括：计算单元，具有至少一个用于处理半导体设计信息的计算机; 控制单元，用于根据半导体设计信息的处理结果控制电子辐射; 用于根据控制单元的指令发射电子的写入单元; 和至少一个存储设备。 半导体制造装置允许存储装置，计算单元，控制单元和写入单元之间的通信。 半导体制造装置还包括可以控制存储装置的通信通路。
-
公开(公告)号：US07218985B2
公开(公告)日：2007-05-15
申请号：US11371677
申请日：2006-03-08
IPC分类号： G06F19/00
CPC分类号： B82Y10/00 , B82Y40/00 , G05B19/41855 , G05B2219/31323 , G05B2219/45028 , H01J37/3023 , H01J37/3174 , H01J2237/30411 , H01J2237/3175 , H01J2237/31762 , Y02P90/185 , Y02P90/24
摘要： A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
摘要翻译： 半导体制造装置包括：计算单元，具有至少一个用于处理半导体设计信息的计算机; 控制单元，用于根据半导体设计信息的处理结果控制电子辐射; 用于根据控制单元的指令发射电子的写入单元; 和至少一个存储设备。 半导体制造装置允许存储装置，计算单元，控制单元和写入单元之间的通信。 半导体制造装置还包括可以控制存储装置的通信通路。
-
公开(公告)号：US20060155414A1
公开(公告)日：2006-07-13
申请号：US11371677
申请日：2006-03-08
IPC分类号： G06F19/00
CPC分类号： B82Y10/00 , B82Y40/00 , G05B19/41855 , G05B2219/31323 , G05B2219/45028 , H01J37/3023 , H01J37/3174 , H01J2237/30411 , H01J2237/3175 , H01J2237/31762 , Y02P90/185 , Y02P90/24
摘要： A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
-
公开(公告)号：US07027888B2
公开(公告)日：2006-04-11
申请号：US11186455
申请日：2005-07-21
IPC分类号： G06F19/00
CPC分类号： B82Y10/00 , B82Y40/00 , G05B19/41855 , G05B2219/31323 , G05B2219/45028 , H01J37/3023 , H01J37/3174 , H01J2237/30411 , H01J2237/3175 , H01J2237/31762 , Y02P90/185 , Y02P90/24
摘要： A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
摘要翻译： 半导体制造装置包括：计算单元，具有至少一个用于处理半导体设计信息的计算机; 控制单元，用于根据半导体设计信息的处理结果控制电子辐射; 用于根据控制单元的指令发射电子的写入单元; 和至少一个存储设备。 半导体制造装置允许存储装置，计算单元，控制单元和写入单元之间的通信。 半导体制造装置还包括可以控制存储装置的通信通路。
-
公开(公告)号：US20050270857A1
公开(公告)日：2005-12-08
申请号：US11186455
申请日：2005-07-21
IPC分类号： G03F1/84 , G03F1/86 , G03F7/20 , H01J37/302 , H01J37/317 , H01L21/02 , H01L21/027 , G11C5/00
CPC分类号： B82Y10/00 , B82Y40/00 , G05B19/41855 , G05B2219/31323 , G05B2219/45028 , H01J37/3023 , H01J37/3174 , H01J2237/30411 , H01J2237/3175 , H01J2237/31762 , Y02P90/185 , Y02P90/24
摘要： A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
-
公开(公告)号：US20050160410A1
公开(公告)日：2005-07-21
申请号：US11019213
申请日：2004-12-23
摘要： A code generation system is provided which optimizes a code generation for a control system applicable to an embedded control system without the need to increase its memory capacity. A total control unit 110 causes to read a model diagram and an operation diagram which depict a software specification stored in a memory 104, and starts specification analysis unit 106 to execute lexical and grammatical analyses thereof. Then, object-oriented function removing unit 107 is started to determine any function which is not used according to a function select item stored in the memory 104. Then, code generation unit 108 is started to generate a code on the basis of the result of the lexical and grammatical analyses of the software specification, and of an output code pattern determined by the object-oriented function removing unit 107.
摘要翻译： 提供了代码生成系统，其优化了适用于嵌入式控制系统的控制系统的代码生成，而不需要增加其存储器容量。 总控制单元110使得读取模型图和描绘存储在存储器104中的软件规范的操作图，并启动指定分析单元106来执行其语法和语法分析。 然后，开始面向对象功能删除单元107，以根据存储在存储器104中的功能选择项来确定未使用的任何功能。 然后，代码生成单元108基于软件规范的词汇和语法分析的结果以及由面向对象函数去除单元107确定的输出代码模式开始生成代码。
-
8.发明授权Object oriented optimizing code generator with user selection of use or do not use for dynamic generation of functions 失效面向对象优化代码生成器，用户选择使用或不用于动态生成函数公开(公告)号：US06851106B1
公开(公告)日：2005-02-01
申请号：US09253944
申请日：1999-02-22
摘要： A code generation system is provided which optimizes a code generation for a control system applicable to an embedded control system without the need to increase its memory capacity. A total control unit 110 causes to read a model diagram and an operation diagram which depict a software specification stored in a memory 104, and starts specification analysis unit 106 to execute lexical and grammatical analyses thereof. Then, object-oriented function removing unit 107 is started to determine any function which is not used according to a function select item stored in the memory 104. Then, code generation unit 108 is started to generate a code on the basis of the result of the lexical and grammatical analyses of the software specification, and of an output code pattern determined by the object-oriented function removing unit 107.
摘要翻译： 提供了代码生成系统，其优化了适用于嵌入式控制系统的控制系统的代码生成，而不需要增加其存储器容量。 总控制单元110使得读取模型图和描绘存储在存储器104中的软件规范的操作图，并启动指定分析单元106来执行其语法和语法分析。 然后，开始面向对象功能删除单元107，以根据存储在存储器104中的功能选择项来确定任何未被使用的功能。然后，代码生成单元108基于结果为 软件规范的词汇和语法分析以及由面向对象功能删除单元107确定的输出代码模式。
-
公开(公告)号：US06850854B2
公开(公告)日：2005-02-01
申请号：US10444981
申请日：2003-05-27
IPC分类号： G01R31/26 , G01R31/28 , G03F7/20 , H01L21/00 , H01L21/02 , H01L21/027 , H01L21/66 , G06F19/00
CPC分类号： H01L21/67225 , G03F7/70508 , G03F7/70991 , G05B19/418 , G05B19/41855 , G05B2219/31323 , G05B2219/31326 , G05B2219/45031 , H01L21/67276 , H04L67/1097 , Y02P90/185 , Y02P90/24 , Y02P90/265
摘要： A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.
摘要翻译： 半导体制造系统具有具有曝光单元的半导体制造装置，用于控制曝光单元的控制单元和存储装置; 具有观察单元的半导体检查装置，用于控制观察单元的控制单元和存储装置; 以及半导体制造装置和半导体检查装置通常使用的存储装置。 制造装置，检查装置和常用的存储装置经由存储区域网互连。 随着半导体制造装置和存储装置经由存储区域网络连接在一起，可以高速地传送大量图像数据或设计数据，从而提高系统吞吐量。
-
10.发明授权公开(公告)号：US08577124B2
公开(公告)日：2013-11-05
申请号：US13344409
申请日：2012-01-05
CPC分类号： G06T7/0006 , G06T2207/30148 , H01J2237/221 , H01J2237/2817
摘要： A pattern inspection apparatus can be provided, for example, in a scanning electron microscope system. When patterns of a plurality of layers are included in a SEM image, the apparatus separates the patterns according to each layer by using design data of the plurality of layers corresponding to the patterns. Consequently, the apparatus can realize inspection with use of only the pattern of a target layer to be inspected, pattern inspection differently for different layers, or detection of a positional offset between the layers.
-
-
-
-
-
-
-
-
-
搜索结果
31 条记录 (耗时 0.052 秒)
