Method for manufacturing micro-structure
    1.
    发明授权
    Method for manufacturing micro-structure 有权
    微结构制造方法

    公开(公告)号:US08785114B2

    公开(公告)日:2014-07-22

    申请号:US13157460

    申请日:2011-06-10

    摘要: A micro-structure is manufactured by patterning a sacrificial film, forming an inorganic material film on the pattern, providing the inorganic material film with an aperture, and etching away the sacrificial film pattern through the aperture to define a space having the contour of the pattern. The patterning stage includes the steps of (A) forming a sacrificial film using a composition comprising a cresol novolac resin and a crosslinker, (B) exposing patternwise the film to first high-energy radiation, (C) developing, and (D) exposing the sacrificial film pattern to second high-energy radiation and heat treating for thereby forming crosslinks within the cresol novolac resin.

    摘要翻译: 通过图案化牺牲膜来制造微结构,在图案上形成无机材料膜,为无机材料膜提供孔,并通过孔蚀刻掉牺牲膜图案,以限定具有图案轮廓的空间 。 图案化阶段包括以下步骤:(A)使用包含甲酚酚醛清漆树脂和交联剂的组合物形成牺牲膜,(B)将膜图案化为第一高能辐射,(C)显影,和(D)曝光 牺牲膜图案到第二高能量辐射和热处理,从而在甲酚酚醛清漆树脂内形成交联。

    METHOD FOR MANUFACTURING MICRO-STRUCTURE
    2.
    发明申请
    METHOD FOR MANUFACTURING MICRO-STRUCTURE 有权
    制造微结构的方法

    公开(公告)号:US20110305990A1

    公开(公告)日:2011-12-15

    申请号:US13157460

    申请日:2011-06-10

    IPC分类号: G03F7/20 G03F7/004

    摘要: A micro-structure is manufactured by patterning a sacrificial film, forming an inorganic material film on the pattern, providing the inorganic material film with an aperture, and etching away the sacrificial film pattern through the aperture to define a space having the contour of the pattern. The patterning stage includes the steps of (A) forming a sacrificial film using a composition comprising a cresol novolac resin and a crosslinker, (B) exposing patternwise the film to first high-energy radiation, (C) developing, and (D) exposing the sacrificial film pattern to second high-energy radiation and heat treating for thereby forming crosslinks within the cresol novolac resin.

    摘要翻译: 通过图案化牺牲膜来制造微结构,在图案上形成无机材料膜,为无机材料膜提供孔,并通过孔蚀刻掉牺牲膜图案,以限定具有图案轮廓的空间 。 图案化阶段包括以下步骤:(A)使用包含甲酚酚醛清漆树脂和交联剂的组合物形成牺牲膜,(B)将膜图案化为第一高能辐射,(C)显影,和(D)曝光 牺牲膜图案到第二高能量辐射和热处理,从而在甲酚酚醛清漆树脂内形成交联。

    Resist compositions
    4.
    发明授权
    Resist compositions 失效
    抗蚀剂组合物

    公开(公告)号:US5422221A

    公开(公告)日:1995-06-06

    申请号:US197524

    申请日:1994-02-16

    摘要: In a resist composition, a novolak resin including at least one recurring unit of the formula (1): ##STR1## wherein n is an integer of 1 to 4 and m is an integer of 0 to 3, having a weight average molecular weight of 1,000 to 10,000 calculated as polystyrene, and having the hydrogen atom of a hydroxyl group therein replaced by a 1,2-naphthoquinonediazidosulfonyl group in a proportion of 0.03 to 0.27 mol per hydrogen atom serves as an alkali-soluble resin and a photosensitive agent. The composition is uniform in that the photosensitive agent is uniformly incorporated in the novolak resin, and thus forms a uniform resist film. It is a useful positive resist having improved sensitivity, resolution, heat resistance, and film retentivity.

    摘要翻译: 在抗蚀剂组合物中,包含至少一种式(1)的重复单元的酚醛清漆树脂:m为0〜3的整数,以聚苯乙烯计,重均分子量为1,000〜10,000,具有氢原子 的羟基取代为1,2-萘醌二叠氮基磺酰基,每个氢原子为0.03〜0.27mol,用作碱溶性树脂和感光剂。 组合物是均匀的,因为感光剂均匀地结合在酚醛清漆树脂中,从而形成均匀的抗蚀剂膜。 它是一种有用的正抗蚀剂,具有改进的灵敏度,分辨率,耐热性和膜保持性。

    Organosilicon compounds having a mercapto group in the molecule
    6.
    发明授权
    Organosilicon compounds having a mercapto group in the molecule 失效
    在分子中具有巯基的有机硅化合物

    公开(公告)号:US4962217A

    公开(公告)日:1990-10-09

    申请号:US460788

    申请日:1990-01-04

    IPC分类号: C07F7/18

    CPC分类号: C07F7/182

    摘要: Novel organosilicon compounds containing a mercapto group are provided, which compounds are of the following general formula, HSCH.sub.2 C.sub.6 H.sub.4 (CH.sub.2).sub.n Si(CH.sub.3).sub.3-m (OR).sub.m, wherein R represents a methyl group or an ethyl group, n is a value of 0,1 or 2, and m is a value or 1, 2 or 3. the ocmpounds are substantially free of any offensive odor derived from the mercapto group and are useful as a silane coupling or crosslinking agent.

    摘要翻译: 提供了含有巯基的新型有机硅化合物,该化合物具有以下通式:HSCH2C6H4(CH2)nSi(CH3)3-m(OR)m,其中R表示甲基或乙基,n表示 为0,1或2,m为数值或1,2或3.这种情况基本上不含有衍生自巯基的任何异味,并且可用作硅烷偶联剂或交联剂。

    Air-conditioning unit and air-conditioning apparatus incorporating same
    9.
    发明授权
    Air-conditioning unit and air-conditioning apparatus incorporating same 有权
    空调机组和空调机组合

    公开(公告)号:US07055334B2

    公开(公告)日:2006-06-06

    申请号:US10801555

    申请日:2004-03-17

    IPC分类号: F24F3/16

    摘要: An indoor air-conditioning unit 10 which can effectively deactivate allergens includes an intake grill 11 for drawing in indoor air. Indoor heat exchangers 13, 14, and 15 exchange heat between air drawn in from the intake grill 11 and a refrigerant to thereby cool or heat the air. A diffuser 16 returns the air which has been heat-exchanged with the indoor heat exchangers 13, 14, 15, back into the room. A cross-flow fan 17 blows air which has been drawn in from the inlet and heat exchanged from the diffuser 16 into the room. An allergen deactivation filter 18 is arranged in an internal space 5 through which the air flows and supports an allergen deactivation enzyme. An enzyme activation device maintains the internal space S in an atmosphere for activating the allergen deactivation enzyme.

    摘要翻译: 可以有效地使过敏原失活的室内空调机10包括吸入室内空气的进气格栅11。 室内热交换器13,14和15在从进气格栅11吸入的空气与制冷剂之间进行热交换,由此冷却或加热空气。 扩散器16将与室内热交换器13,14,15的热交换的空气返回到室内。 横流风扇17吹入从入口吸入并从扩散器16热交换到室内的空气。 过敏原失活过滤器18布置在内部空间5中,空气通过该空间流动并支撑变应原失活酶。 酶活化装置将内部空间S保持在用于活化变应原失活酶的气氛中。

    Rubber composition, crosslinkable rubber compositions, and crosslinked articles
    10.
    发明申请
    Rubber composition, crosslinkable rubber compositions, and crosslinked articles 审中-公开
    橡胶组合物,可交联橡胶组合物和交联物品

    公开(公告)号:US20060189720A1

    公开(公告)日:2006-08-24

    申请号:US10544769

    申请日:2004-02-09

    IPC分类号: C08L63/00 C08L19/00 B32B27/38

    摘要: A rubber composition includes (1) a diene rubber, (2) a silica and (3) an epoxidized liquid diene rubber having a number-average molecular weight of 10000 to 100000, wherein based on 100 parts by mass of the diene rubber (1), the rubber composition comprises 0.1 to 150 parts by mass of the silica (2) and 0.1 to 30 parts by mass of the epoxidized liquid diene rubber (3). A crosslinkable rubber composition includes the above rubber composition and crosslinking agent. A crosslinked article is prepared by crosslinking the above crosslinkable rubber composition. The rubber compositions have improved silica dispersibility in the case of mixing a silica with a diene rubber, excellent processability, and excellent mechanical properties after crosslinking.

    摘要翻译: 橡胶组合物包括(1)二烯橡胶,(2)二氧化硅和(3)数均分子量为10000〜100000的环氧化液态二烯系橡胶,其中,基于100质量份的二烯橡胶 ),橡胶组合物包含0.1〜150质量份的二氧化硅(2)和0.1〜30质量份的环氧化液态二烯系橡胶(3)。 可交联橡胶组合物包括上述橡胶组合物和交联剂。 通过交联上述可交联橡胶组合物制备交联物品。 在将二氧化硅与二烯橡胶混合的情况下,橡胶组合物具有改善的二氧化硅分散性,加工性优异,交联后的机械性能优异。