Radio frequency signal processing device
    1.
    发明授权
    Radio frequency signal processing device 失效
    射频信号处理装置

    公开(公告)号:US07439621B1

    公开(公告)日:2008-10-21

    申请号:US09707844

    申请日:2000-11-08

    IPC分类号: H01L23/34 H01L23/552

    摘要: The RF device of the present invention includes: a semiconductor substrate; and first and second semiconductor components provided on the substrate. Each of the components includes source electrodes, a gate electrode and a drain electrode. And multiple through holes, which pass through the substrate in the thickness direction, are opened in a region of the substrate between the two components. To enhance the effect of suppressing electrical interference between the components, a gap between two adjacent ones of the through holes is preferably smaller than the thickness of the substrate.

    摘要翻译: 本发明的RF器件包括:半导体衬底; 以及设置在基板上的第一和第二半导体部件。 每个组件包括源电极,栅电极和漏电极。 并且在两个部件之间的基板的区域中打开穿过基板的厚度方向上的多个通孔。 为了增强抑制部件之间的电气干扰的效果,两个相邻的通孔之间的间隙优选小于基板的厚度。