Process and apparatus for treating semiconductor production exhaust gases
    1.
    发明授权
    Process and apparatus for treating semiconductor production exhaust gases 失效
    用于处理半导体生产废气的方法和设备

    公开(公告)号:US06953557B1

    公开(公告)日:2005-10-11

    申请号:US09463961

    申请日:1998-10-15

    CPC分类号: B01D53/68 B01D53/75 B01D53/78

    摘要: A process and an apparatus for treating exhaust gases, comprising an aeration stirring tank (5) employing an aqueous alkaline liquid, and, as a posterior stage, a gas-liquid contact device (7) and/or a packed column (11). The apparatus can remove at the posterior stage harmful gases that the aeration stirring tank fails to remove, for example, water-soluble organic compounds such as ethanol, halogenated silicon compounds such as SiCl4, and halogen gases such as F2 and Cl2. The process and apparatus are particularly suitable for purifying exhaust gases discharged from a semiconductor production device.

    摘要翻译: 一种用于处理废气的方法和装置,包括使用碱性水溶液的曝气搅拌槽(5),以及作为后段的气液接触装置(7)和/或填充塔(11)。 该装置可以在后段除去通气搅拌槽不能除去的有害气体,例如水溶性有机化合物如乙醇,卤化硅化合物如SiCl 4,以及卤素气体 作为F 2和Cl 2 2。 该方法和装置特别适用于净化从半导体生产装置排出的废气。

    Method and apparatus for preventing adherence of solid products in gas exhaust pipe and exhaust gas abatement device with same apparatus
    2.
    发明授权
    Method and apparatus for preventing adherence of solid products in gas exhaust pipe and exhaust gas abatement device with same apparatus 有权
    用同一装置防止排气管和废气消除装置中固体产物粘附的方法和装置

    公开(公告)号:US07736440B2

    公开(公告)日:2010-06-15

    申请号:US10343322

    申请日:2001-08-08

    IPC分类号: B08B3/00

    摘要: A solid product removal method for removing a solid product adhering to a gas exhaust pipe member having a rinsing water inlet pipe member with a tip opening located inside the gas exhaust pipe member for feeding rinsing water into the inside of the gas exhaust pipe member from the tip opening thereof; hence a solid product formed newly upon reaction with the rinsing water and adhering thereto can be rinsed off with the rinsing water introduced from another tip opening located at a different position; and therefore, an adherence of the solid product can be prevented from heating the inner face of the gas exhaust pipe member. A scraping member for scraping the solid product stuck to the inner face of the gas exhaust pipe member may be used.

    摘要翻译: 一种固体产品去除方法,用于除去附着在具有冲洗水入口管构件的排气管构件的固体产物,该清洗水入口管构件具有位于排气管构件内部的顶端开口,用于将漂洗水从该排气管构件的内部供入到排气管构件的内部 尖端开口; 因此,与冲洗水反应形成新的粘附物的固体产品可以用从位于不同位置的另一个尖端开口引入的冲洗水清洗掉; 因此能够防止固体成分的附着加热排气管构件的内面。 也可以使用用于刮擦粘附在排气管构件的内表面上的固体产品的刮削构件。

    Si/C COMPOSITE MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND ELECTRODE
    4.
    发明申请
    Si/C COMPOSITE MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND ELECTRODE 审中-公开
    Si / C复合材料,其制造方法和电极

    公开(公告)号:US20140234722A1

    公开(公告)日:2014-08-21

    申请号:US14241839

    申请日:2012-08-31

    IPC分类号: H01M4/36 H01M4/1393 H01M4/04

    摘要: The present invention provides composite material in which Si and carbon are combined so as to form an unprecedented structure; method for fabricating the same; and negative electrode material for lithium-ion batteries ensuring high charge-discharge capacity and high cycle performance. By heating an aggregate of Si nanoparticles and using a source gas containing carbon, a carbon layer is formed on each of the Si particles. Walls 12 forming a space 13a containing Si particles 11 and a space 13b not containing Si particles 11 are constructed by this carbon layer.

    摘要翻译: 本发明提供了组合Si和碳以形成前所未有的结构的复合材料; 其制造方法; 和用于锂离子电池的负极材料,确保高充放电能力和高循环性能。 通过加热Si纳米颗粒的聚集体并使用含碳源,在每个Si颗粒上形成碳层。 通过该碳层构成形成有Si粒子11的空间13a和不含有Si粒子11的空间13b的壁12。

    Graphene grown substrate and electronic/photonic integrated circuits using same
    5.
    发明授权
    Graphene grown substrate and electronic/photonic integrated circuits using same 失效
    石墨烯生长衬底和电子/光子集成电路使用相同

    公开(公告)号:US08476739B2

    公开(公告)日:2013-07-02

    申请号:US12624437

    申请日:2009-11-24

    IPC分类号: H01L23/58

    摘要: A graphene-on-oxide substrate according to the present invention includes: a substrate having a metal oxide layer formed on its surface; and, formed on the metal oxide layer, a graphene layer including at least one atomic layer of the graphene. The graphene layer is grown generally parallel to the surface of the metal oxide layer, and the inter-atomic-layer distance between the graphene atomic layer adjacent to the surface of the metal oxide layer and the surface atomic layer of the metal oxide layer is 0.34 nm or less. Preferably, the arithmetic mean surface roughness Ra of the metal oxide layer is 1 nm or less.

    摘要翻译: 根据本发明的石墨烯氧化物衬底包括:在其表面上形成有金属氧化物层的衬底; 并且在所述金属氧化物层上形成包括所述石墨烯的至少一个原子层的石墨烯层。 石墨烯层通常平行于金属氧化物层的表面生长,并且与金属氧化物层的表面相邻的石墨烯原子层与金属氧化物层的表面原子层之间的原子间距离为0.34 nm以下。 优选地,金属氧化物层的算术平均表面粗糙度Ra为1nm以下。

    MICROPOROUS CARBON MATERIAL, MANUFACTURING METHOD THEREOF, AND HYDROGEN STORAGE METHOD USING MICROPOROUS CARBON MATERIAL
    6.
    发明申请
    MICROPOROUS CARBON MATERIAL, MANUFACTURING METHOD THEREOF, AND HYDROGEN STORAGE METHOD USING MICROPOROUS CARBON MATERIAL 有权
    微孔碳材料及其制造方法和使用微孔碳材料的氢储存方法

    公开(公告)号:US20110052486A1

    公开(公告)日:2011-03-03

    申请号:US12919308

    申请日:2009-02-25

    IPC分类号: B01J20/20 B01J20/32 C01B3/02

    摘要: The present invention provides a microporous carbon material capable of expressing functions that supported metal has while maintaining pore functions that the microporous carbon material inherently possesses. The microporous carbon material 5 includes: a three-dimensional long-range ordered structure within a range from 0.7 nm or more to 2 nm or less; and micropores 2a, wherein a transition metal 4 is supported on surfaces of the micropores 2a. The microporous carbon material is obtained by a method including: introducing an organic compound on a surface of and inside the micropores of a porous material containing transition metal, and obtaining a composite of the microporous carbon material containing the transition metal and the porous material by carbonizing the organic compound by a chemical vapor deposition method; and removing the porous material. Alternatively, the microporous carbon material is obtained by a method including: introducing an organic compound on a surface of a porous material and obtaining a microporous carbon material by a chemical vapor deposition method; and supporting the transition metal on a surface of the microporous carbon material by immersing and impregnating the microporous carbon material in a transition metal salt solution.

    摘要翻译: 本发明提供能够表现出支撑金属具有的功能的微孔碳材料,同时保持微孔碳材料固有地具有的孔隙功能。 微孔碳材料5包括:在0.7nm以上至2nm以下的范围内的三维长程有序结构; 和微孔2a,其中过渡金属4被支撑在微孔2a的表面上。 微孔碳材料通过以下方法得到:在含有过渡金属的多孔质材料的微孔的表面和内侧引入有机化合物,通过碳化获得含有过渡金属的多孔碳材料与多孔质材料的复合体 有机化合物通过化学气相沉积法; 并除去多孔材料。 或者,微孔碳材料通过以下方法获得:将有机化合物引入多孔材料的表面并通过化学气相沉积法获得微孔碳​​材料; 并通过将微多孔碳材料浸渍并浸渍在过渡金属盐溶液中来将过渡金属负载在微孔碳材料的表面上。

    Method for preventing scaling in wet-process waste gas treatment equipment
    8.
    发明授权
    Method for preventing scaling in wet-process waste gas treatment equipment 失效
    在湿法废气处理设备中防止结垢的方法

    公开(公告)号:US06409802B1

    公开(公告)日:2002-06-25

    申请号:US09463662

    申请日:2000-03-01

    申请人: Takashi Kyotani

    发明人: Takashi Kyotani

    IPC分类号: B01D5314

    摘要: A method for preventing scale formation in a wet type exhaust gas treating apparatus is disclosed. An exhaust gas is contacted with a washing liquid containing water. The washing liquid contains at least one chelating agent which reacts with ions becoming a cause of scale formation to form a water-soluble chelate compound.

    摘要翻译: 公开了一种防止湿式废气处理装置中的结垢形成的方法。 废气与含有水的洗涤液接触。 洗涤液含有至少一种螯合剂,其与离子反应成为结垢的原因,形成水溶性螯合物。

    Microporous carbon material, manufacturing method thereof, and hydrogen storage method using microporous carbon material
    9.
    发明授权
    Microporous carbon material, manufacturing method thereof, and hydrogen storage method using microporous carbon material 有权
    微孔碳材料及其制造方法以及使用微孔碳材料的储氢方法

    公开(公告)号:US08657923B2

    公开(公告)日:2014-02-25

    申请号:US12919308

    申请日:2009-02-25

    IPC分类号: C01B31/08

    摘要: The present invention provides a microporous carbon material capable of expressing functions that supported metal has while maintaining pore functions that the microporous carbon material inherently possesses. The microporous carbon material 5 includes: a three-dimensional long-range ordered structure within a range from 0.7 nm or more to 2 nm or less; and micropores 2a, wherein a transition metal 4 is supported on surfaces of the micropores 2a. The microporous carbon material is obtained by a method including: introducing an organic compound on a surface of and inside the micropores of a porous material containing transition metal, and obtaining a composite of the microporous carbon material containing the transition metal and the porous material by carbonizing the organic compound by a chemical vapor deposition method; and removing the porous material. Alternatively, the microporous carbon material is obtained by a method including: introducing an organic compound on a surface of a porous material and obtaining a microporous carbon material by a chemical vapor deposition method; and supporting the transition metal on a surface of the microporous carbon material by immersing and impregnating the microporous carbon material in a transition metal salt solution.

    摘要翻译: 本发明提供能够表现出支撑金属具有的功能的微孔碳材料,同时保持微孔碳材料固有地具有的孔隙功能。 微孔碳材料5包括:在0.7nm以上至2nm以下的范围内的三维长程有序结构; 和微孔2a,其中过渡金属4被支撑在微孔2a的表面上。 微孔碳材料通过以下方法得到:在含有过渡金属的多孔质材料的微孔的表面和内侧引入有机化合物,通过碳化获得含有过渡金属的多孔碳材料与多孔质材料的复合体 有机化合物通过化学气相沉积法; 并除去多孔材料。 或者,微孔碳材料通过以下方法获得:将有机化合物引入多孔材料的表面并通过化学气相沉积法获得微孔碳​​材料; 并通过将微多孔碳材料浸渍并浸渍在过渡金属盐溶液中来将过渡金属负载在微孔碳材料的表面上。