摘要:
An additive for copper plating comprising, as an effective ingredient, a nitrogen-containing biphenyl derivative represented by the following formula (I): [wherein X represents a group selected from the following groups (II)-(VII): and Y represents a lower alkyl group, lower alkoxy group, nitro group, amino group, sulfonyl group, cyano group, carbonyl group, 1-pyridyl group, or the formula (VIII): (wherein R′ represents a lower alkyl group)], a copper plating solution formed by adding the additive for copper plating to a copper plating solution containing a copper ion ingredient and an anion ingredient, and a method of manufacturing on an electronic circuit substrate having a fine copper wiring circuit, which comprises electroplating in the copper plating solution using as the cathode an electronic circuit substrate in which fine microholes or microgrooves in the shape of an electronic circuit are formed on the surface.The additive for copper plating can fill through holes or via holes at a micron or sub-micron level even in a case where it consists of one component, and the copper plating solution using the additive for copper plating can be prepared and handled extremely easily and can stably fill the through holes or via holes for a long time.
摘要:
Provided is a copper plating technique that enables the filling of high aspect-ratio via-holes and through-holes in semiconductor substrates such as silicon substrates, organic material substrates or ceramic substrates. The disclosed technique involves a tertiary amine compound, which is obtained by reacting a heterocyclic compound with the epoxy group of a glycidyl ether group of a compound that has three or more glycidyl ether groups, and a quaternary amine compound thereof, as well as a copper plating additive, a copper plating bath, and a copper plating method employing the compounds.
摘要:
Provided is a copper plating technique that enables the filling of high aspect-ratio via-holes and through-holes in semiconductor substrates such as silicon substrates, organic material substrates or ceramic substrates. The disclosed technique involves a tertiary amine compound, which is obtained by reacting a heterocyclic compound with the epoxy group of a glycidyl ether group of a compound that has three or more glycidyl ether groups, and a quaternary amine compound thereof, as well as a copper plating additive, a copper plating bath, and a copper plating method employing the compounds.
摘要:
A substrate for depositing diamond by CVD, comprising a base body of hard material and a coating layer that holds diamond particles as seed crystal in a matrix and is deposited joined thereto on a surface of said base body, wherein: the seed diamond particles have an average particle size of 1 μm or smaller; the matrix comprises a first metal selected from a first group of Si, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and W and/or a first compound between said first metal and a non-metallic substance selected from boron, carbon and nitrogen, said matrix holding the diamond particles distributed therein; and a joint zone developed as a result of a diffusion process and extending over said base body and coating layer comprises either or both atoms of said first metal and a component metal of the hard material.
摘要:
A nonaqueous secondary battery comprising a positive electrode and a negative electrode both containing a material capable of reversibly intercalating and deintercalating lithium, a nonaqueous electrolyte containing a lithium salt, and a separator, which has at least one protective layer on the negative electrode and/or the positive electrode. The battery has a high discharge potential, satisfactory charge and discharge cycle characteristics, and high safety.
摘要:
A method for production of polycrystalline silicon, comprising: heating a deposition substrate in a reaction vessel of metal, bringing a gaseous silicon hydride close to said substrate, decomposing said silicon hydride, and producing to deposit silicon on the substrate, while the wall of said vessel is regulated in temperature at levels of, approximately, 100.degree. to 450.degree. C. simultaneously with a decrease of 100.degree. to 700.degree. C. from the temperature of said substrate and an apparatus for production of polycrystalline silicon, comprising: a reaction vessel of metallic material closed with a detachable lid, an inlet and an outlet for gas connected to said vessel, a jacket arranged over the substantial part of said vessel to provide an interspace between the jacket and vessel, a closed circuit for a gas consisting partly of said interspace, a two-way temperature controlling means for heating and cooling the gas provided on the circuit, and a deposition substrate of electrical conductive material extending in the vessel axially from the lid.
摘要:
An electrolytic cell for a molten salt comprising alkali- or alkaline earth metal chloride, comprising: an assembly of anode and cathode in opposed relation with each other, a tightly closable vessel containing said assembly and capable of holding in molten state a salt comprising an alkali- or alkaline earth metal chloride, an insulative partition arranged around the anode and extending axially over a height range including the intended bath level, several projections formed to a length on an effective side of the anode opposed to the cathode, said projection having upper and lower surfaces declining outwards so an open bottom-closed top space is provided under each projection, a rise bore formed lengthwise within the anode to run along the axis and a lateral hole in communicating relation with an inward ascent between said space and rise bore.
摘要:
An apparatus for molten salt electrolysis, comprising: an electrolysis chamber which is capable of holding a molten salt of metallic chloride and is closed upwards with a top cover, a cathode placed in said chamber, a lead block of metallic material which runs through the top cover and comprises therealong a bottom-closed axial cavity with inlet and outlet for a fluid coolant connected thereto, said cathode and lead block connected to each other below the bath level to be employed of said salt, and said cavity reaching below said level.
摘要:
In a vacuum separator for refractory metal from magnesium metal and magnesium chloride mixed therewith, comprising: a vertically elongated substantially cylindrical retort having, inside, a closed space, a lower section of which is capable of accommodating such mixture to be treated as held in a container and is provided with a heating means to evaporate the magnesium metal and magnesium chloride to a substantial part, and an upper section of which has a cooling means to provide, inside, a cylindrical face for condensing thereon magnesium metal and magnesium chloride which ascend as vapor, and a means for degassing the retort to an elevated level of vacuum, an improvement such that a heat shield unit is provided at an intermediate level between said upper and lower sections of the retort, said heat shield unit comprising, as a whole, opening so arranged as to block any direct sight of the surface of the retort lower section when holding the container from a substantial part of the condensation face in the upper section, thus intercepting a substantial part of primary heat radiation from the retort lower section, while allowing passage of ascending vapor
摘要:
The present invention provides an apparatus for electrolytic production of magnesium metal from its chloride, which apparatus essentially comprises at least one externally unwired electrode which is made of graphite alone or graphite-iron composite and is placed between each pair of anode and cathode with the graphite side towards the cathode. The apparatus preferably comprises further a cooling passage for electrolyte bath which allows the electrolyte bath to flow outside an electrolysis chamber where the electrodes are contained, from a bath surface level to the bottom. The bath, while it passes there, is cooled a little, not enough to solidify, to exhibit an increased density so that it flows down back into the electrolysis chamber at the bottom, thus forming a continuous upflow along the electrodes, which facilitates separation of products of magnesium metal and chlorine gas and their recovery. Preferred anode construction is also illustrated.