公开(公告)号：US07263895B2

公开(公告)日：2007-09-04

申请号：US11182341

申请日：2005-07-15

申请人： Hiroshi Nagasaka ,  Takeshi Abe ,  Yoshikazu Kaneko

发明人： Hiroshi Nagasaka ,  Takeshi Abe ,  Yoshikazu Kaneko

IPC分类号： G01B7/16

CPC分类号： G01L9/0051 ,  F02M2200/24 ,  G01L9/0055

摘要： A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (12). The silicon oxide film (21) is formed with the internal stress thereof adjusted to the range from −150 to 130 MPa. With this feature, the fluid pressure sensor (1) ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.

摘要翻译： 用于测量流体压力的流体压力传感器（1）包括作为应变发生体的膜部分（12），作为绝缘膜的氧化硅膜（21）和由结晶制成的应变片（20） 硅和奥氏体沉淀硬化型Fe-Ni耐热钢用于隔膜部分（12），机械强度和耐腐蚀性优异。 氧化硅膜（21）的内应力为-150〜130MPa。 通过该特征，流体压力传感器（1）确保高精度和可靠性，并且甚至可以用于高腐蚀性流体的测量。

公开(公告)号：US20060016268A1

公开(公告)日：2006-01-26

申请号：US11182341

申请日：2005-07-15

申请人： Hiroshi Nagasaka ,  Takeshi Abe ,  Yoshikazu Kaneko

发明人： Hiroshi Nagasaka ,  Takeshi Abe ,  Yoshikazu Kaneko

IPC分类号： G01B7/16

CPC分类号： G01L9/0051 ,  F02M2200/24 ,  G01L9/0055

摘要： A fluid pressure sensor (1) for measuring the pressure of a fluid comprises a diaphragm portion (12) which is a strain generating body, a silicon oxide film (21) as an insulating film, and a strain gauge (20) made of crystalline silicon, and austenitic precipitation hardening type Fe—Ni heat-resisting steel excellent in mechanical strength and corrosion resistance is used for the diaphragm portion (12). The silicon oxide film (21) is formed with the internal stress thereof adjusted to the range from −150 to 130 MPa. With this feature, the fluid pressure sensor (1) ensures high precision and reliability, and may be used even for measurement of a highly corrosive fluid.

摘要翻译： 用于测量流体压力的流体压力传感器（1）包括作为应变发生体的膜部分（12），作为绝缘膜的氧化硅膜（21）和由结晶制成的应变片（20） 硅和奥氏体沉淀硬化型Fe-Ni耐热钢用于隔膜部分（12），机械强度和耐腐蚀性优异。 氧化硅膜（21）的内应力为-150〜130MPa。 通过该特征，流体压力传感器（1）确保高精度和可靠性，并且甚至可以用于高腐蚀性流体的测量。

公开(公告)号：US06883379B2

公开(公告)日：2005-04-26

申请号：US10440158

申请日：2003-05-19

申请人： Yoshikazu Kaneko ,  Hiroshi Nagasaka

发明人： Yoshikazu Kaneko ,  Hiroshi Nagasaka

IPC分类号： G01L9/04 ,  G01L9/00

CPC分类号： G01L19/143 ,  G01L19/0061 ,  G01L19/0084 ,  G01L19/146 ,  G01L19/148

摘要： An absolute-pressure type of pressure sensor is provided. The sensor has a pressure detecting device having a metal diaphragm. Strain gauges are disposed on one surface of the diaphragm, whose other surface is formed to receive fluid to be detected. The sensor comprises a lid, relay board, two seal rings, and input/output terminal. The lid provides a reference pressure space. The relay board is electrically connected to the gauge and composed of laminated ceramic members having both of through holes formed to pass through both sides thereof and a protrusion formed outwardly. The two seal rings are located to face the two sides of the board, respectively. The one seal ring air-tightly connects the relay board and the diaphragm. The other seal ring air-tightly connects the relay board and the lid. The terminal is electrically connected to the relay board and mounted on the protrusion of the relay board.

摘要翻译： 提供绝对压力型压力传感器。 传感器具有具有金属隔膜的压力检测装置。 应变计布置在隔膜的一个表面上，其另一表面被形成以接收待检测的流体。 传感器包括盖子，继电器板，两个密封环和输入/输出端子。 盖子提供参考压力空间。 继电器板电连接到量规，由具有形成为穿过其两侧的通孔和向外形成的突起的层叠陶瓷构件组成。 两个密封环分别位于板的两侧。 一个密封环气密地连接继电器板和隔膜。 另一个密封圈将继电器板和盖子紧密连接。 端子电连接到继电器板并安装在继电器板的突起上。

公开(公告)号：US4657775A

公开(公告)日：1987-04-14

申请号：US815305

申请日：1985-12-30

申请人： Hisanori Shioiri ,  Mitsuhiro Kiuchi ,  Mineo Takayama ,  Toshio Homma ,  Hiroshi Nagasaka ,  Yoshikazu Kaneko

发明人： Hisanori Shioiri ,  Mitsuhiro Kiuchi ,  Mineo Takayama ,  Toshio Homma ,  Hiroshi Nagasaka ,  Yoshikazu Kaneko

IPC分类号： H01C10/10 ,  H01C17/075 ,  H01L21/205 ,  H01L29/84 ,  B05D3/06

CPC分类号： H01C10/10 ,  H01C17/075

摘要： Semiconductor piezoresistive devices can be obtained by the plasma CVD method, i.e., exposing a substrate to a plasma atmosphere produced from silicon hydride gas containing boron hydride to deposit on the substrate a thin film of crystalline silicon as a piezoresistive material. In accordance with this method, it is possible to form piezoresistive devices into IC's and also to impart excellent properties thereto.

摘要翻译： 半导体压阻器件可以通过等离子体CVD方法获得，即将衬底暴露于由含有氢化硼的氢化硅气体产生的等离子体气氛中，以沉积在衬底上的晶体硅薄膜作为压阻材料。 根据该方法，可以将IC形成压阻器件并赋予其优异的性能。

公开(公告)号：US07194923B2

公开(公告)日：2007-03-27

申请号：US11066907

申请日：2005-02-25

申请人： Naoki Yoshida ,  Hiroshi Kodama ,  Hiroshi Nagasaka

发明人： Naoki Yoshida ,  Hiroshi Kodama ,  Hiroshi Nagasaka

IPC分类号： G01L9/06

CPC分类号： G01L9/0051 ,  Y10T29/49103

摘要： A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).

摘要翻译： 一种薄膜电阻器（5），其通过绝缘膜（4）设置在应变产生部件（2）上;以及电极薄膜（6），其包括配置在薄膜电阻器（5）中的电极焊盘 ）。 薄膜电阻器（5）包括应变检测薄膜电阻部分（8）和连接到电阻部分（8）的电极连接（9）。 电极连接（9）形成为延伸到电极焊盘（10）。 电极焊盘（10）包括形成在不同位置的外部连接接合区域（12）和测试探针区域（13）。 电极焊盘（10）设置在设置在应变产生部（2）的外周缘的管状刚体（1）上。

公开(公告)号：US07061599B2

公开(公告)日：2006-06-13

申请号：US10465821

申请日：2003-06-20

申请人： Tomohiro Yokochi ,  Yoshitaro Yazaki ,  Hiroshi Nagasaka

发明人： Tomohiro Yokochi ,  Yoshitaro Yazaki ,  Hiroshi Nagasaka

IPC分类号： G01N21/00

CPC分类号： H05K3/4069 ,  H05K1/0269 ,  H05K3/0035 ,  H05K3/0055 ,  H05K3/4614 ,  H05K3/4617 ,  H05K2201/0394 ,  H05K2203/0191 ,  H05K2203/0264 ,  H05K2203/108 ,  H05K2203/161

摘要： An inspection apparatus for a base substrate of a multi-layered board irradiates light to the base substrate of a multilayered board to which a protective film is attached. An image of a surface, to which the protective film is attached, is picturized by a camera, so that an acceptability of a state of a via hole is inspected on the basis of a difference between a light reflectivity of the via hole and a light reflectivity of the protective film. The protective film is colored so as to lower its light reflectivity so that the difference between the light reflectivity of the via hole and that of the protective film is clearly generated. Accordingly, on the basis of the image picturized by the camera, the size of the via hole, dusts therein and the acceptability of the via hole can be accurately inspected.

摘要翻译： 多层基板的基板检查装置将光照射到附着有保护膜的多层基板的基板上。 通过照相机对附着有保护膜的表面的图像进行检查，从而基于通孔的光反射率和光的差异来检查通孔的状态的可接受性 保护膜的反射率。 保护膜着色以降低其光反射率，从而清楚地产生通孔的光反射率与保护膜的光反射率之间的差异。 因此，基于由照相机拍摄的图像，可以精确地检查通孔的尺寸，其中的灰尘和通孔的可接受性。

公开(公告)号：US07331102B2

公开(公告)日：2008-02-19

申请号：US11298527

申请日：2005-12-12

申请人： Hiroshi Nagasaka ,  Naoki Yoshida ,  Hiroshi Kodama

发明人： Hiroshi Nagasaka ,  Naoki Yoshida ,  Hiroshi Kodama

IPC分类号： H01C17/06 ,  H01C17/28

CPC分类号： G01L9/0042 ,  Y10T29/49099

摘要： An apparatus for detecting an amount of strain comprises a strain generating part, an electrical insulating layer and sensing elements. The strain generating part is a member to which strain is to be applied. The electrical insulating layer is formed on the strain generating part. The sensing elements are formed on the electrical insulating layer. Each of the sensing elements is made of a silicon film. The silicon film comprises a poly-crystalline main layer and a poly-crystalline interface-layer, which comes into contact with the electrical insulating layer.

摘要翻译： 用于检测应变量的装置包括应变发生部分，电绝缘层和传感元件。 应变发生部是要施加应变的部件。 电绝缘层形成在应变发生部上。 传感元件形成在电绝缘层上。 每个感测元件由硅膜制成。 硅膜包括与电绝缘层接触的多晶主层和多晶界面层。

公开(公告)号：US06176619B1

公开(公告)日：2001-01-23

申请号：US09339189

申请日：1999-06-24

申请人： Hiroshi Nagasaka ,  Yoshikazu Kimura ,  Kenichi Sugiyama ,  Momoko Kakutani

发明人： Hiroshi Nagasaka ,  Yoshikazu Kimura ,  Kenichi Sugiyama ,  Momoko Kakutani

IPC分类号： F16C3206

CPC分类号： F16C32/0662 ,  F16C17/03 ,  F16C17/06 ,  F16C17/14 ,  F16C33/043 ,  Y10S384/912

摘要： A water lubricated bearing or water lubricated seal using water as a lubricant. The bearing or seal has: a rotary member secured directly or indirectly to a rotary side, and a stationary member secured directly or indirectly to a stationary side and facing the rotary member for making sliding contact therewith. A substrate of either one of the rotary member and the stationary member is a metallic material and a thin titanium nitride film is formed on the sliding surface thereof. The other member is made of a non-brittle material or a film of hard material is formed on the sliding surface thereof. Thereby, a coefficient of friction of the bearing or seal is reduced and a wear resistance of the same is improved.

摘要翻译： 水润滑轴承或水润滑密封，使用水作为润滑剂。 所述轴承或密封件具有：直接或间接固定在旋转侧的旋转部件，以及直接或间接固定在固定侧并面向旋转部件以与其滑动接触的固定部件。 旋转构件和静止构件中的任一个的基板是金属材料，并且在其滑动表面上形成薄的氮化钛膜。 另一个构件由非脆性材料制成，或者在其滑动表面上形成硬质材料膜。 因此，减小了轴承或密封件的摩擦系数，并提高了其耐磨性。

公开(公告)号：US20130209777A1

公开(公告)日：2013-08-15

申请号：US13610411

申请日：2012-09-11

申请人： Hiroshi Nagasaka ,  Hiroshi Yokota ,  Junya Kawabata ,  Hideki Kanno ,  Kenichi Hoshino ,  Satoshi Fujiwara ,  Eiji Okumachi

发明人： Hiroshi Nagasaka ,  Hiroshi Yokota ,  Junya Kawabata ,  Hideki Kanno ,  Kenichi Hoshino ,  Satoshi Fujiwara ,  Eiji Okumachi

IPC分类号： B32B5/16

CPC分类号： B32B5/16 ,  B32B18/00 ,  C04B2235/3834 ,  C04B2235/762 ,  C04B2235/767 ,  C04B2235/782 ,  C04B2235/786 ,  C04B2235/788 ,  C04B2237/365 ,  C04B2237/58 ,  C04B2237/765 ,  C04B2237/84 ,  F04D29/026 ,  F04D29/126 ,  F05D2300/2261 ,  F05D2300/605 ,  F05D2300/608 ,  H02K5/1285 ,  H02K5/1672 ,  H02K7/083 ,  H02K7/14 ,  H02K9/197 ,  H02K9/26 ,  Y10T428/249921

摘要： A ceramics sliding member for use in ultrapure water or pure water of the present invention is made of a non-continuous-pore SiC sintered body. The non-continuous-pore SiC sintered body includes β-SiC at a ratio of 20% by weight or more thereto and has an average crystal structure whose aspect ratio is 2 or greater.

摘要翻译： 用于本发明的超纯水或纯水的陶瓷滑动构件由非连续孔SiC烧结体制成。 非连续孔SiC烧结体包含比例为20重量％以上的β-SiC，其平均晶体结构的纵横比为2以上。

公开(公告)号：US07708051B2

公开(公告)日：2010-05-04

申请号：US11657162

申请日：2007-01-24

申请人： Tetsuya Katsumi ,  Hitoshi Ofune ,  Tadashi Yamaguchi ,  Hiroshi Nagasaka ,  Naoki Yoshida

发明人： Tetsuya Katsumi ,  Hitoshi Ofune ,  Tadashi Yamaguchi ,  Hiroshi Nagasaka ,  Naoki Yoshida

IPC分类号： B22D17/00 ,  B22D33/04

CPC分类号： G01L9/0051 ,  B22D15/02

摘要： A physical quantity detector, such as a pressure sensor and a load sensor, includes a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part. The cylindrical part is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold includes a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part.

摘要翻译： 诸如压力传感器和负载传感器的物理量检测器包括其一端被应变产生部分封闭的圆柱形部分和形成在应变发生部分上的传感器部分。 通过熔化具有能够产生非晶合金的组成的合金材料，将所得熔融合金注入金属模具中，并且冷却金属模具中的熔融合金以赋予合金非晶性，从而制造圆柱形部分。 金属模具包括具有用于形成空腔的至少两个分开部分和插入空腔中的插入销以便限定圆柱形部件的内部构造的分开模具，或者还包括插入模具中的插入芯部 从而形成与应变发生部的表面对应的空腔的表面。