Protective film for base substrates of multi-layered board and method and apparatus for inspecting base substrates
    1.
    发明授权
    Protective film for base substrates of multi-layered board and method and apparatus for inspecting base substrates 有权
    多层基板基板用保护膜及基板检查方法及装置

    公开(公告)号:US07061599B2

    公开(公告)日:2006-06-13

    申请号:US10465821

    申请日:2003-06-20

    IPC分类号: G01N21/00

    摘要: An inspection apparatus for a base substrate of a multi-layered board irradiates light to the base substrate of a multilayered board to which a protective film is attached. An image of a surface, to which the protective film is attached, is picturized by a camera, so that an acceptability of a state of a via hole is inspected on the basis of a difference between a light reflectivity of the via hole and a light reflectivity of the protective film. The protective film is colored so as to lower its light reflectivity so that the difference between the light reflectivity of the via hole and that of the protective film is clearly generated. Accordingly, on the basis of the image picturized by the camera, the size of the via hole, dusts therein and the acceptability of the via hole can be accurately inspected.

    摘要翻译: 多层基板的基板检查装置将光照射到附着有保护膜的多层基板的基板上。 通过照相机对附着有保护膜的表面的图像进行检查,从而基于通孔的光反射率和光的差异来检查通孔的状态的可接受性 保护膜的反射率。 保护膜着色以降低其光反射率,从而清楚地产生通孔的光反射率与保护膜的光反射率之间的差异。 因此,基于由照相机拍摄的图像,可以精确地检查通孔的尺寸,其中的灰尘和通孔的可接受性。