Driving device and exposure apparatus
    1.
    发明授权
    Driving device and exposure apparatus 有权
    驱动装置和曝光装置

    公开(公告)号:US06750947B1

    公开(公告)日:2004-06-15

    申请号:US09590182

    申请日:2000-06-09

    IPC分类号: G03B2768

    摘要: A driving device includes a first member, an annular second member arranged outside the first member, an annular first plate for connecting the first and second members to each other, and an annular second plate for connecting the first and second members to each other. The first and second members are moved relative to each other by supplying or exhausting a fluid into or from a space surrounded by the first and second members and the first and second plates. Also, at least one of (i) an inner diameter a1 of a portion of the second member at which the second member is connected to the first plate is different from an inner diameter a2 of a portion of the second member at which the second member is connected to the second plate and (ii) an outer diameter b1 of a portion of the first member at which the first member is connected to the first plate is different from an outer diameter b2 of a portion of the first member at which the first member is connected to the second plate.

    摘要翻译: 驱动装置包括第一构件,布置在第一构件外部的环形第二构件,用于将第一构件和第二构件彼此连接的环形第一板和用于将第一构件和第二构件彼此连接的环形第二板。 通过向第一和第二构件以及第一和第二板围绕的空间供应或排出流体,第一和第二构件相对于彼此移动。 此外,(i)第二构件的与第一板连接的部分的内径a1中的至少一个与第二构件的第二构件的一部分的内径a2不同, 连接到第二板,并且(ii)第一构件与第一板连接的部分的外径b1不同于第一构件的第一构件的第一构件的一部分的外径b2 构件连接到第二板。

    Semiconductor integrated circuit device
    5.
    发明授权
    Semiconductor integrated circuit device 有权
    半导体集成电路器件

    公开(公告)号:US08174901B2

    公开(公告)日:2012-05-08

    申请号:US12721553

    申请日:2010-03-10

    IPC分类号: G11C11/34

    摘要: This invention is to reduce the number of memory gate drivers, while lessening the number of times of disturb occurrence in a memory array configuration that implements writing in small byte units. A memory array comprises a plurality of sub-arrays, MG transfers, SL drivers, and CG drivers. Each sub-array includes a plurality of memory gate lines, control gate lines, source lines, and bit lines. Memory cells are arranged in positions of intersections of these lines. The control gate lines, CG drivers, source lines, and SL drivers are common to the sub-arrays, whereas the memory gate lines and MG buffer circuits are provided for each sub-array. Thereby, the units in which data is written are decreased and adverse effects of disturb are reduced without increasing the circuit size of the memory array.

    摘要翻译: 本发明是减少存储器栅极驱动器的数量,同时减少以小字节为单位实现写入的存储器阵列配置中的干扰发生次数。 存储器阵列包括多个子阵列,MG传输,SL驱动器和CG驱动器。 每个子阵列包括多个存储器栅极线,控制栅极线,源极线和位线。 存储单元布置在这些线的相交位置。 控制栅极线,CG驱动器,源极线和SL驱动器对于子阵列是共同的,而为每个子阵列提供存储器栅极线和MG缓冲电路。 因此,数据写入的单元减少,并且不增加存储器阵列的电路尺寸的同时降低了干扰的不利影响。

    SEMICONDUCTOR DEVICE
    6.
    发明申请
    SEMICONDUCTOR DEVICE 有权
    半导体器件

    公开(公告)号:US20110208904A1

    公开(公告)日:2011-08-25

    申请号:US13099720

    申请日:2011-05-03

    IPC分类号: G06F12/00

    摘要: The semiconductor device includes a nonvolatile memory, having a memory array containing 1-bit twin cells, each composed of electrically rewritable first and second storage devices, the first and second storage devices holding binary data according to difference of their threshold voltages, and having different retention characteristics depending on difference of the binary data thereof; a read circuit for differentially amplifying complementary data output from the first and second storage devices of the twin cell selected for read, and judging information stored in the twin cell; and a control circuit. Two memory cells constituting a twin cell are arranged to hold different data. Therefore, even when the retention performance of one memory cell deteriorates, the difference between data held by the two memory cells can be maintained. Hence, differential amplification of such difference enables acquisition of proper stored information. Thus, retention performance of an electrically rewritable nonvolatile memory cell is improved.

    摘要翻译: 半导体器件包括非易失性存储器,具有包含1比特双胞格的存储器阵列,每个存储器阵列由电可重写的第一和第二存储器件组成,第一和第二存储器件根据其阈值电压的差异保持二进制数据,并且具有不同的 保留特性取决于其二进制数据的差异; 用于差分放大从被选择读取的双胞胎的第一和第二存储装置输出的互补数据的读取电路,以及判断存储在双胞胎中的信息; 和控制电路。 布置构成双胞胎的两个存储单元以保存不同的数据。 因此,即使一个存储单元的保持性能劣化,也能够维持由两个存储单元保持的数据之间的差异。 因此,这种差异的差分放大使得能够获得正确的存储信息。 因此,提高了电可重写非易失性存储单元的保持性能。

    OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AND EXPOSURE APPARATUS
    8.
    发明申请
    OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION OPTICAL SYSTEM AND EXPOSURE APPARATUS 有权
    光学元件定位装置,投影光学系统和曝光装置

    公开(公告)号:US20090021847A1

    公开(公告)日:2009-01-22

    申请号:US12171644

    申请日:2008-07-11

    IPC分类号: G02B7/00

    摘要: The apparatus includes a holder holding an optical element, a back plate supporting the optical element via the holder, a mechanism moving the optical element in a six-degree-of-freedom, a base plate supporting the back plate via the mechanism, and six displacement sensors disposed on the base plate and measuring displacement amounts of different points on the optical element. The displacement sensors includes three ones measuring them in a first direction, one measuring it in a second direction, and two ones measuring them in a third direction. The apparatus further includes a transformation processor transforming the six measured displacement amounts into displacement amounts of the optical element in the six-degree-of-freedom, a calibration processor calibrating the transformed displacement amounts, and a controller outputting command values to the displacing mechanism based on differences between the calibrated displacement amounts and target displacement amounts of the optical element.

    摘要翻译: 该装置包括保持光学元件的保持器,经由保持器支撑光学元件的背板,以六自由度移动光学元件的机构,经由机构支撑背板的基板,以及六个 位移传感器设置在基板上并测量光学元件上的不同点的位移量。 位移传感器包括在第一方向上测量它们的三个位移传感器,一个在第二方向上测量它们,并且在第三方向上测量它们的两个。 该装置还包括变换处理器,将六个测量的位移量变换为六自由度中的光学元件的位移量,校准经变换的位移量的校准处理器,以及基于位移机构输出命令值的控制器 在校准位移量和光学元件的目标位移量之间的差异。

    Methods for prevention and treatment of arteriosclerosis, hypertension and restenosis
    9.
    发明申请
    Methods for prevention and treatment of arteriosclerosis, hypertension and restenosis 审中-公开
    预防和治疗动脉硬化,高血压和再狭窄的方法

    公开(公告)号:US20080176909A1

    公开(公告)日:2008-07-24

    申请号:US12074778

    申请日:2008-03-06

    IPC分类号: A61K31/4422 A61P9/12 A61P9/10

    摘要: Methods for the prophylaxis and/or treatment of arteriosclerosis, hypertension, restenosis, heart diseases, renal diseases and cerebrovascular diseases by administering a pharmaceutical composition comprising the following active ingredients: (A) an angiotensin II receptor antagonist selected from the group consisting of a compound having a formula (I), a pharmacologically acceptable ester thereof and a pharmacologically acceptable salt thereof (for example, olmesartan medoxomil), the compound having the following formula: and (B) a calcium channel blocker selected from the group consisting of a 1,4-dihydropyridine compound and a pharmacologically acceptable salt thereof (for example, azelnidipine), wherein the composition does not include the combination of olmesartan medoxomil and amlodipine or amlodipine besylate.

    摘要翻译: 通过施用包含以下活性成分的药物组合物来预防和/或治疗动脉硬化,高血压,再狭窄,心脏病,肾脏疾病和脑血管疾病的方法:(A)选自下列化合物的血管紧张素II受体拮抗剂 具有式(I),其药理学上可接受的酯和其可药用盐(例如奥美沙坦酯),具有下式的化合物和(B)选自以下的钙通道阻断剂:1, 4-二氢吡啶化合物及其药理学上可接受的盐(例如,氮卓尼地平),其中该组合物不包括奥美沙坦酯和氨氯地平或苯磺酸氨氯地平的组合。

    Drive mechanism, exposure device, optical equipment, and device manufacturing method
    10.
    发明授权
    Drive mechanism, exposure device, optical equipment, and device manufacturing method 有权
    驱动机构,曝光装置,光学设备和装置制造方法

    公开(公告)号:US07110089B2

    公开(公告)日:2006-09-19

    申请号:US10799424

    申请日:2004-03-11

    申请人: Makoto Mizuno

    发明人: Makoto Mizuno

    IPC分类号: G03B27/42

    摘要: The present invention provides a drive mechanism having a high rigidity and capable of performing fine adjustment in 6-axis directions of an optical element such as a mirror or a lens, or a support member for supporting the optical element, in optical equipment such as an exposure device. The drive mechanism has such a feature that three monolithic planar 3-joint or 4-joint link mechanisms are each arranged between a movable portion and a stationary portion through the intermediation of a bearing having at least one degree of freedom of rotation.

    摘要翻译: 本发明提供一种驱动机构,其具有高刚性并且能够在诸如反射镜或透镜的光学元件或用于支撑光学元件的支撑构件的6轴方向上进行微调, 曝光装置 驱动机构具有这样的特征,即通过具有至少一个旋转自由度的轴承,可以在可动部分和固定部分之间设置三个整体平面3关节或4关节连杆机构。