METHOD OF DICING
    1.
    发明申请
    METHOD OF DICING 审中-公开
    方法

    公开(公告)号:US20080160724A1

    公开(公告)日:2008-07-03

    申请号:US11945896

    申请日:2007-11-27

    IPC分类号: H01L21/304

    摘要: Provided is a method of dicing a wafer where a plurality of semiconductor device regions is formed on a front side of the wafer, the semiconductor device regions being separated by scribe lanes, the method comprising dicing the wafer by irradiating a laser beam on a backside of the wafer along the scribe lanes. A laser beam is irradiated from an opposite side of the semiconductor device regions of the wafer so that thermal influence on the semiconductor device regions is minimized to improve the strength of a semiconductor chip. Furthermore, a third tape is used to maintain an arrangement of the semiconductor chips so as to minimize adherence problems caused by the laser beam.

    摘要翻译: 本发明提供一种切割晶片的方法,其中在晶片的正面形成有多个半导体器件区域,半导体器件区域被划线分隔开,该方法包括通过在背面侧照射激光束来对晶片进行切割 沿着划线的晶圆。 从晶片的半导体器件区域的相对侧照射激光束,使得对半导体器件区域的热影响最小化,以提高半导体芯片的强度。 此外,使用第三带来保持半导体芯片的布置,以便最小化由激光束引起的粘附问题。

    SEMICONDUCTOR DIE PICK UP APPARATUS AND METHOD THEREOF
    2.
    发明申请
    SEMICONDUCTOR DIE PICK UP APPARATUS AND METHOD THEREOF 审中-公开
    SEMICONDUCTOR DIE PICK UP APPARATUS及其方法

    公开(公告)号:US20080160725A1

    公开(公告)日:2008-07-03

    申请号:US11959299

    申请日:2007-12-18

    IPC分类号: H01L21/304 H01L21/683

    摘要: According to example embodiments, an apparatus for picking up a semiconductor die includes an electromagnetic collet unit configured to selectively generate an attractive force between the electromagnetic collet unit and a magnetic wafer adhesive tape disposed on a surface of the semiconductor die. The apparatus further includes a transfer head unit attached to the electromagnetic collet unit, the transfer head unit structured to move the semiconductor die picked up by the collet unit through a drive of a drive device.

    摘要翻译: 根据示例性实施例,用于拾取半导体管芯的设备包括电磁夹头单元,其被配置为选择性地在电磁夹头单元和设置在半导体管芯的表面上的磁性晶片粘合带之间产生吸引力。 该装置还包括附接到电磁夹头单元的传送头单元,传送头单元构造成通过驱动装置的驱动来移动由夹头单元拾取的半导体管芯。