Plasma device and operation method of plasma device
    2.
    发明授权
    Plasma device and operation method of plasma device 有权
    等离子体装置和等离子体装置的操作方法

    公开(公告)号:US09363881B2

    公开(公告)日:2016-06-07

    申请号:US14547149

    申请日:2014-11-19

    Abstract: A plasma device includes a dielectric barrier, a first electrode structure, a second electrode structure, and a third electrode structure. The dielectric barrier has an upstream terminal and a downstream terminal and defines a space, in which the first electrode structure is disposed. A gap with multiple widths is formed between the first electrode structure and the dielectric barrier. The dielectric barrier is located between the first electrode structure and the second electrode structure. The second electrode structure includes electrode blocks sequentially arranged from the upstream terminal to the downstream terminal. The dielectric barrier, the first electrode structure, and the second electrode structure are located on the same side of the third electrode structure located at the downstream terminal. A minimum distance between the electrode blocks and the third electrode structure is not less than a distance between the first electrode structure and the third electrode structure.

    Abstract translation: 等离子体装置包括介电阻挡层,第一电极结构,第二电极结构和第三电极结构。 电介质阻挡层具有上游端子和下游端子,并且限定了设置有第一电极结构的空间。 在第一电极结构和电介质屏障之间形成具有多个宽度的间隙。 电介质阻挡层位于第一电极结构和第二电极结构之间。 第二电极结构包括从上游端子到下游端子顺序排列的电极块。 电介质势垒,第一电极结构和第二电极结构位于位于下游端子处的第三电极结构的同一侧。 电极块和第三电极结构之间的最小距离不小于第一电极结构和第三电极结构之间的距离。

    PLASMA DEVICE AND OPERATION METHOD OF PLASMA DEVICE
    3.
    发明申请
    PLASMA DEVICE AND OPERATION METHOD OF PLASMA DEVICE 有权
    等离子体装置的等离子体装置和操作方法

    公开(公告)号:US20150156857A1

    公开(公告)日:2015-06-04

    申请号:US14547149

    申请日:2014-11-19

    Abstract: A plasma device includes a dielectric barrier, a first electrode structure, a second electrode structure, and a third electrode structure. The dielectric barrier has an upstream terminal and a downstream terminal and defines a space, in which the first electrode structure is disposed. A gap with multiple widths is formed between the first electrode structure and the dielectric barrier. The dielectric barrier is located between the first electrode structure and the second electrode structure. The second electrode structure includes electrode blocks sequentially arranged from the upstream terminal to the downstream terminal. The dielectric barrier, the first electrode structure, and the second electrode structure are located on the same side of the third electrode structure located at the downstream terminal. A minimum distance between the electrode blocks and the third electrode structure is not less than a distance between the first electrode structure and the third electrode structure.

    Abstract translation: 等离子体装置包括介电阻挡层,第一电极结构,第二电极结构和第三电极结构。 电介质阻挡层具有上游端子和下游端子,并且限定了设置有第一电极结构的空间。 在第一电极结构和电介质屏障之间形成具有多个宽度的间隙。 电介质阻挡层位于第一电极结构和第二电极结构之间。 第二电极结构包括从上游端子到下游端子顺序排列的电极块。 电介质势垒,第一电极结构和第二电极结构位于位于下游端子处的第三电极结构的同一侧。 电极块和第三电极结构之间的最小距离不小于第一电极结构和第三电极结构之间的距离。

    PLASMA DEPOSITION APPARATUS
    4.
    发明申请
    PLASMA DEPOSITION APPARATUS 审中-公开
    等离子体沉积装置

    公开(公告)号:US20140130740A1

    公开(公告)日:2014-05-15

    申请号:US13726239

    申请日:2012-12-24

    CPC classification number: H05H1/42 C23C16/4486 C23C16/45519 C23C16/50

    Abstract: A plasma deposition apparatus including a plasma generation unit and a droplet separation unit is provided. The plasma generation unit includes an inlet end and an outlet end. The droplet separation unit is located at the inlet end. Besides, the droplet separation unit includes a first chamber, an import port, and a connection port. The import port and the connection port are connected to the first chamber. The connection port is connected to the inlet end, and the import port serves to receive an atomized precursor. The atomized precursor is separated into a first portion and a second portion after entering the first chamber, and droplets of the first portion are smaller than droplets of the second portion. The first portion of the atomized precursor is suitable for entering the inlet end through the connection port.

    Abstract translation: 提供了包括等离子体产生单元和液滴分离单元的等离子体沉积设备。 等离子体产生单元包括入口端和出口端。 液滴分离单元位于入口端。 此外,液滴分离单元包括第一室,进口和连接口。 进口端口和连接端口连接到第一个室。 连接端口连接到入口端,导入口用于接收雾化前体。 雾化的前体在进入第一室之后被分离成第一部分和第二部分,并且第一部分的液滴小于第二部分的液滴。 雾化前体的第一部分适于通过连接口进入入口端。

    ELECTROSTATIC AIR CLEANER
    6.
    发明申请
    ELECTROSTATIC AIR CLEANER 有权
    静电空气清洁机

    公开(公告)号:US20160158766A1

    公开(公告)日:2016-06-09

    申请号:US14953547

    申请日:2015-11-30

    Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.

    Abstract translation: 静电空气净化器包括主体,电晕放电模块,收集器模块和风扇。 主体具有用于布置电晕放电模块,收集器模块和风扇的气流通道。 风扇用于将气流吸入气流通道。 电晕放电模块用于排出气流中的颗粒。 带电粒子然后被收集器模块捕获。

Patent Agency Ranking