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公开(公告)号:US09962711B2
公开(公告)日:2018-05-08
申请号:US14953547
申请日:2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chien-Chih Chen , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
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2.
公开(公告)号:US09363881B2
公开(公告)日:2016-06-07
申请号:US14547149
申请日:2014-11-19
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chiang Weng , Jui-Mei Hsu , Chen-Chung Du , Chen-Der Tsai
CPC classification number: H05H1/46 , H01J37/32009 , H01J37/32348 , H01J37/32541 , H01J37/32568 , H05H1/2406 , H05H2001/2412
Abstract: A plasma device includes a dielectric barrier, a first electrode structure, a second electrode structure, and a third electrode structure. The dielectric barrier has an upstream terminal and a downstream terminal and defines a space, in which the first electrode structure is disposed. A gap with multiple widths is formed between the first electrode structure and the dielectric barrier. The dielectric barrier is located between the first electrode structure and the second electrode structure. The second electrode structure includes electrode blocks sequentially arranged from the upstream terminal to the downstream terminal. The dielectric barrier, the first electrode structure, and the second electrode structure are located on the same side of the third electrode structure located at the downstream terminal. A minimum distance between the electrode blocks and the third electrode structure is not less than a distance between the first electrode structure and the third electrode structure.
Abstract translation: 等离子体装置包括介电阻挡层,第一电极结构,第二电极结构和第三电极结构。 电介质阻挡层具有上游端子和下游端子,并且限定了设置有第一电极结构的空间。 在第一电极结构和电介质屏障之间形成具有多个宽度的间隙。 电介质阻挡层位于第一电极结构和第二电极结构之间。 第二电极结构包括从上游端子到下游端子顺序排列的电极块。 电介质势垒,第一电极结构和第二电极结构位于位于下游端子处的第三电极结构的同一侧。 电极块和第三电极结构之间的最小距离不小于第一电极结构和第三电极结构之间的距离。
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3.
公开(公告)号:US20150156857A1
公开(公告)日:2015-06-04
申请号:US14547149
申请日:2014-11-19
Applicant: Industrial Technology Research Institute
Inventor: Chih-Chiang Weng , Jui-Mei Hsu , Chen-Chung Du , Chen-Der Tsai
CPC classification number: H05H1/46 , H01J37/32009 , H01J37/32348 , H01J37/32541 , H01J37/32568 , H05H1/2406 , H05H2001/2412
Abstract: A plasma device includes a dielectric barrier, a first electrode structure, a second electrode structure, and a third electrode structure. The dielectric barrier has an upstream terminal and a downstream terminal and defines a space, in which the first electrode structure is disposed. A gap with multiple widths is formed between the first electrode structure and the dielectric barrier. The dielectric barrier is located between the first electrode structure and the second electrode structure. The second electrode structure includes electrode blocks sequentially arranged from the upstream terminal to the downstream terminal. The dielectric barrier, the first electrode structure, and the second electrode structure are located on the same side of the third electrode structure located at the downstream terminal. A minimum distance between the electrode blocks and the third electrode structure is not less than a distance between the first electrode structure and the third electrode structure.
Abstract translation: 等离子体装置包括介电阻挡层,第一电极结构,第二电极结构和第三电极结构。 电介质阻挡层具有上游端子和下游端子,并且限定了设置有第一电极结构的空间。 在第一电极结构和电介质屏障之间形成具有多个宽度的间隙。 电介质阻挡层位于第一电极结构和第二电极结构之间。 第二电极结构包括从上游端子到下游端子顺序排列的电极块。 电介质势垒,第一电极结构和第二电极结构位于位于下游端子处的第三电极结构的同一侧。 电极块和第三电极结构之间的最小距离不小于第一电极结构和第三电极结构之间的距离。
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公开(公告)号:US20140130740A1
公开(公告)日:2014-05-15
申请号:US13726239
申请日:2012-12-24
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Jui-Mei Hsu , Chen-Der Tsai , Jiuan-Ren Jei , Ying-Fang Chang , Chia-Chiang Chang
IPC: B05C9/02
CPC classification number: H05H1/42 , C23C16/4486 , C23C16/45519 , C23C16/50
Abstract: A plasma deposition apparatus including a plasma generation unit and a droplet separation unit is provided. The plasma generation unit includes an inlet end and an outlet end. The droplet separation unit is located at the inlet end. Besides, the droplet separation unit includes a first chamber, an import port, and a connection port. The import port and the connection port are connected to the first chamber. The connection port is connected to the inlet end, and the import port serves to receive an atomized precursor. The atomized precursor is separated into a first portion and a second portion after entering the first chamber, and droplets of the first portion are smaller than droplets of the second portion. The first portion of the atomized precursor is suitable for entering the inlet end through the connection port.
Abstract translation: 提供了包括等离子体产生单元和液滴分离单元的等离子体沉积设备。 等离子体产生单元包括入口端和出口端。 液滴分离单元位于入口端。 此外,液滴分离单元包括第一室,进口和连接口。 进口端口和连接端口连接到第一个室。 连接端口连接到入口端,导入口用于接收雾化前体。 雾化的前体在进入第一室之后被分离成第一部分和第二部分,并且第一部分的液滴小于第二部分的液滴。 雾化前体的第一部分适于通过连接口进入入口端。
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公开(公告)号:US09953809B2
公开(公告)日:2018-04-24
申请号:US14972985
申请日:2015-12-17
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chih-Chiang Weng , Chen-Der Tsai , Yu-Ming Wang
CPC classification number: H01J37/32394 , B65D25/14 , C23C16/045 , C23C16/26 , C23C16/507 , H01J37/3244 , H01J37/32467 , H01J37/32513 , H01J37/32541 , H01J37/32568 , H01J37/32577 , H01J37/32715 , H01J37/32743 , H01J37/32834 , H01J2237/3321
Abstract: An apparatus for coating a film in a container and a method for coating a film are provided. The apparatus includes a cylindrical housing having a containing space penetrating through both ends thereof; a first arc-shaped electrode and a second arc-shaped electrode surrounding and covering an outer side of the cylindrical housing with a gap formed between the first and second arc-shaped electrodes such that the first arc-shaped electrode is free from electrically connected to the second arc-shaped electrode; a first conductive ring and a second conductive ring surrounding on the first and second arc-shaped electrodes, respectively; an upper supporting seat and a lower supporting seat disposed at the both ends of the cylindrical housing, respectively, to form a sealed environment for the containing space; and a valve component furnished at the upper supporting seat and inserted into the container for providing a processing gas in a film-coating process.
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公开(公告)号:US20160158766A1
公开(公告)日:2016-06-09
申请号:US14953547
申请日:2015-11-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: CHIEN-CHIH CHEN , Chih-Chen Chang , Chen-Der Tsai , Chih-Yung Huang
CPC classification number: B03C3/47 , B03C3/12 , B03C3/366 , B03C3/368 , B03C3/41 , B03C3/49 , B03C2201/06 , B03C2201/10
Abstract: An electrostatic air cleaner comprises a main body, a corona discharged module, a collector module and a fan. The main body has an airflow passage for disposing the corona discharged module, the collector module and the fan. The fan is used for drawing an air stream into the airflow passage. The corona discharged module is used for discharging particles in the air stream. The charged particles are then captured by the collector module.
Abstract translation: 静电空气净化器包括主体,电晕放电模块,收集器模块和风扇。 主体具有用于布置电晕放电模块,收集器模块和风扇的气流通道。 风扇用于将气流吸入气流通道。 电晕放电模块用于排出气流中的颗粒。 带电粒子然后被收集器模块捕获。
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