公开(公告)号：US20190198436A1

公开(公告)日：2019-06-27

申请号：US15855453

申请日：2017-12-27

Applicant: Intel Corporation

Inventor： Sai Vadlamani ,  Prithwish Chatterjee ,  Robert A. May ,  Rahul S. Jain ,  Lauren A. Link ,  Andrew J. Brown ,  Kyu Oh Lee ,  Sheng C. Li

IPC: H01L23/498 ,  H01L21/48 ,  H01F27/28 ,  H01F41/04 ,  H01F27/40

CPC classification number: H01L23/49838 ,  H01F27/2804 ,  H01F27/40 ,  H01F41/043 ,  H01F2027/2809 ,  H01L21/4853 ,  H01L21/4857 ,  H01L21/486 ,  H01L23/49811 ,  H01L23/49822 ,  H01L23/49866 ,  H01L24/16 ,  H01L2224/16157 ,  H01L2924/19042 ,  H01L2924/19102

Abstract: Methods/structures of forming embedded inductor structures are described. Embodiments include forming a first interconnect structure on a dielectric material of a substrate, selectively forming a magnetic material on a surface of the first interconnect structure, forming an opening in the magnetic material, and forming a second interconnect structure in the opening. Build up layers are then formed on the magnetic material.

公开(公告)号：US20220130748A1

公开(公告)日：2022-04-28

申请号：US17567639

申请日：2022-01-03

Applicant: INTEL CORPORATION

Inventor： Sai Vadlamani ,  Prithwish Chatterjee ,  Robert A. May ,  Rahul S. Jain ,  Lauren A. Link ,  Andrew J. Brown ,  Kyu Oh Lee ,  Sheng C. Li

IPC: H01L23/498 ,  H01F17/00 ,  H01F41/04 ,  H05K1/00 ,  H01L23/00 ,  H01F27/28 ,  H01F27/40 ,  H01L21/48

Abstract: Methods/structures of forming embedded inductor structures are described. Embodiments include forming a first interconnect structure on a dielectric material of a substrate, selectively forming a magnetic material on a surface of the first interconnect structure, forming an opening in the magnetic material, and forming a second interconnect structure in the opening. Build up layers are then formed on the magnetic material.

公开(公告)号：US11862552B2

公开(公告)日：2024-01-02

申请号：US17567639

申请日：2022-01-03

Applicant: INTEL CORPORATION

Inventor： Sai Vadlamani ,  Prithwish Chatterjee ,  Robert A. May ,  Rahul S. Jain ,  Lauren A. Link ,  Andrew J. Brown ,  Kyu Oh Lee ,  Sheng C. Li

IPC: H01L23/498 ,  H01F17/00 ,  H01F41/04 ,  H05K1/00 ,  H01L23/00 ,  H01F27/28 ,  H01F27/40 ,  H01L21/48

CPC classification number: H01L23/49838 ,  H01F17/0013 ,  H01F17/0033 ,  H01F27/2804 ,  H01F27/40 ,  H01F41/043 ,  H01F41/046 ,  H01L21/486 ,  H01L21/4853 ,  H01L21/4857 ,  H01L23/498 ,  H01L23/49811 ,  H01L23/49822 ,  H01L23/49866 ,  H01L24/19 ,  H01L24/20 ,  H05K1/00 ,  H01F2017/0066 ,  H01F2027/2809 ,  H01L24/16 ,  H01L24/48 ,  H01L24/81 ,  H01L2224/16157 ,  H01L2224/16227 ,  H01L2224/48227 ,  H01L2224/81191 ,  H01L2224/81192 ,  H01L2224/81193 ,  H01L2224/81447 ,  H01L2224/81815 ,  H01L2924/00014 ,  H01L2924/19042 ,  H01L2924/19102 ,  H01L2224/81815 ,  H01L2924/00014 ,  H01L2224/81447 ,  H01L2924/00014 ,  H01L2924/00014 ,  H01L2224/45099

Abstract: Methods/structures of forming embedded inductor structures are described. Embodiments include forming a first interconnect structure on a dielectric material of a substrate, selectively forming a magnetic material on a surface of the first interconnect structure, forming an opening in the magnetic material, and forming a second interconnect structure in the opening. Build up layers are then formed on the magnetic material.

公开(公告)号：US11251113B2

公开(公告)日：2022-02-15

申请号：US15855453

申请日：2017-12-27

Applicant: Intel Corporation

Inventor： Sai Vadlamani ,  Prithwish Chatterjee ,  Robert A. May ,  Rahul S. Jain ,  Lauren A. Link ,  Andrew J. Brown ,  Kyu Oh Lee ,  Sheng C. Li

IPC: H01L21/48 ,  H01L23/498 ,  H01F17/00 ,  H01F41/04 ,  H05K1/00 ,  H01L23/00 ,  H01F27/28 ,  H01F27/40

Abstract: Methods/structures of forming embedded inductor structures are described. Embodiments include forming a first interconnect structure on a dielectric material of a substrate, selectively forming a magnetic material on a surface of the first interconnect structure, forming an opening in the magnetic material, and forming a second interconnect structure in the opening. Build up layers are then formed on the magnetic material.