PLANT FOR PRODUCING TRISILYLAMINE IN THE GAS PHASE
    6.
    发明申请
    PLANT FOR PRODUCING TRISILYLAMINE IN THE GAS PHASE 审中-公开
    在气相中生产三甲硅烷的工厂

    公开(公告)号:US20150284250A1

    公开(公告)日:2015-10-08

    申请号:US14744208

    申请日:2015-06-19

    IPC分类号: C01B21/087 B01J19/24

    摘要: A plant for preparing trisilylamine in the gas phase is provided. The plant includes a reactor (1) suitable for the reaction of at least the starting materials ammonia and monohalosilane in the gas phase; a precipitation vessel (2) downstream of the reactor (1); and a mixer (3) suitable for producing a homogeneous gas mixture containing at least the starting materials ammonia and monohalosilane upstream of the reactor (1). The mixer (3), reactor (1) and precipitation vessel (2) are connected to one another structurally in such a way that a continuous gas flow through the plant is ensured, with the gas flow optionally being able to be interrupted at one or more suitable points within the plant.

    摘要翻译: 提供了一种在气相中制备三甲胺的设备。 该装置包括适于在气相中至少起始原料氨和一卤硅烷反应的反应器(1); 反应器(1)下游的沉淀容器(2); 和适于生产均匀气体混合物的混合器(3),其至少包含反应器(1)上游的原料氨和一卤代硅烷。 混合器(3),反应器(1)和沉淀容器(2)在结构上彼此连接,使得能够确保连续的气体流过设备,气流可任选地在一个或 植物内更适合的点。

    PROCESS FOR PRODUCING HOLLOW SILICON BODIES
    9.
    发明申请
    PROCESS FOR PRODUCING HOLLOW SILICON BODIES 有权
    生产中空硅体的工艺

    公开(公告)号:US20160155871A1

    公开(公告)日:2016-06-02

    申请号:US14950787

    申请日:2015-11-24

    摘要: Hollow bodies having a silicon-comprising shell, are produced by, in a gas comprising at least one silane of the general formula SinH2n+2−mXm with n=1 to 4, m=0 to 2n+2 and X=halogen, (a) generating a non-thermal plasma by an AC voltage of frequency f, or operating a light arc, or introducing electromagnetic energy in the infrared region into the gas, giving a resulting phase which (b) is dispersed in a wetting agent and distilled, and then (c) the distillate is contacted at least once with a mixture of at least two of the substances hydrofluoric acid, nitric acid, water, giving a solid residue comprising hollow bodies having a silicon-comprising shell after the conversion reaction of the distillate with the mixture has abated or ended.

    摘要翻译: 具有含硅壳体的空心体通过包含至少一种通式SinH 2 + 2-m X m的硅烷,n = 1〜4,m = 0〜2n + 2,X =卤素的气体,( a)通过频率f的交流电压产生非热等离子体,或者操作光弧,或者将红外区域的电磁能引入气体中,得到(b)分散在润湿剂中并蒸馏出的相 ,然后(c)馏出物与氢氟酸,硝酸,水中的至少两种物质的混合物至少接触一次,得到包含中空体的固体残余物,所述固体残余物在具有含硅壳体的转化反应之后 馏出物与混合物已经减少或结束。