摘要:
A non-volatile memory device and a fabrication method thereof. A high-k layer is formed between nitrogen-containing insulating layers. Accordingly, an interface reaction between an underlying oxide layer and the high-k insulating layer or between the oxide layer and a floating gate or a control gate can be prohibited and the electrical characteristics of the high-k layer can be improved, and a non-volatile memory device with high performance and high reliability can be fabricated.
摘要:
A method of forming a tunnel insulating layer in a flash memory device, comprising: forming an oxide layer on a semiconductor substrate, forming a nitrogen-containing layer to a surface of the oxide layer, and forming a nitrogen-accumulating layer on an interface defined between the semiconductor substrate and the oxide layer.
摘要:
An image processing method based on zooming for a mobile terminal permits touch zooming on touch screens of a plurality of devices. The image processing method preferably includes: displaying, in response to entering a touch on a touch screen displaying an image, a zooming GUI indicator for image zooming operation; performing image zooming on the touch screen in response to entering a touch point move while retaining the touch; and hiding the zooming GUI indicator from the touch screen in response to entering a touch release.
摘要:
The present invention relates to a motion input device for portable terminal and an operation method using the same. A motion input device of a portable terminal of the present invention includes a sensor unit configured to collect a sensor signal from at least one sensor; an operation recognition unit configured to generate a motion signal corresponding to an operation of portable terminal based on the sensor signal; a scenario preparation unit configured to generate an input scenario based on at least one motion signal; and a scenario mapping unit configured to detect, in a scenario database, a standards scenario corresponding to the input scenario, and to generate an input signal corresponding to the standards scenario.
摘要:
Provided is an equipment for manufacturing a semiconductor. The equipment for manufacturing a semiconductor includes a cleaning chamber in which a cleaning process is performed on substrates, an epitaxial chamber in which an epitaxial process for forming an epitaxial layer on each of the substrates is performed, a buffer chamber having a storage space for storing the substrates, and a transfer chamber to which the cleaning chamber, the buffer chamber, and the epitaxial chamber are connected to side surfaces thereof, the transfer chamber comprising a substrate handler for transferring the substrates between the cleaning chamber, the buffer chamber, and the epitaxial chamber. The substrate handler successively transfers the substrates, on which the cleaning process is completed, into the buffer chamber, transfers the substrates stacked within the buffer chamber the epitaxial chamber, and successively transfers the substrates, on which the epitaxial layers are respectively formed, into the buffer chamber.
摘要:
An operating mode control apparatus and method for a mobile terminal are disclosed. The apparatus and method enable the user to control the operation of a mobile terminal on the basis of the proximity of the user to the mobile terminal, the movement of the mobile terminal, and the housing orientation thereof. Hence, the user may enjoy a visuo-spatial user interface.
摘要:
Disclosed herein is a method of fabricating a semiconductor flash memory device, which method avoids and prevents damage to the conductive layer of a floating gate. The disclosed method can prevent a reduction in the charge trap density characteristics and improve the yield of the device.
摘要:
Disclosed is a method of forming an oxynitride film. The method comprises the steps of loading a silicon substrate into an oxidization furnace, implanting an oxygen based source gas into the oxidization furnace to grow a pure silicon oxide film on the silicon substrate, blocking implantation of the oxygen based source gas and implanting an inert gas to exhaust the oxygen based source gas remaining within the oxidization furnace, raising a temperature within the oxidization furnace to a nitrification process temperature, stabilizing the temperature within the oxidization furnace, implementing a nitrification process for the pure silicon oxide film by implanting a nitrogen based source gas, and stopping implantation of the nitrogen based source gas and rapidly cooling the oxidization furnace while implanting the inert gas into the oxidization furnace.
摘要:
Provided is a method of manufacturing a memory device having a 3-dimensional structure, which includes alternately stacking one or more dielectric layers and one or more sacrificial layers on a substrate, forming a through hole passing through the dielectric layers and the sacrificial layers, forming a pattern filling the through hole, forming an opening passing through the dielectric layers and the sacrificial layers, and supplying an etchant through the opening to remove the sacrificial layers. The stacking of the dielectric layers includes supplying the substrate with one or more gases selected from the group consisting of SiH4, Si2H6, Si3H8, and Si4H10, to deposit a silicon oxide layer. The stacking of the sacrificial layers includes supplying the substrate with one or more gases selected from the group consisting of SiH4, Si2H6, Si3H8, Si4H10, and dichloro silane (SiCl2H2), and ammonia-based gas, to deposit a silicon nitride layer.
摘要翻译:提供一种制造具有三维结构的存储器件的方法,其包括在衬底上交替堆叠一个或多个电介质层和一个或多个牺牲层,形成通过电介质层和牺牲层的通孔,形成 填充通孔的图案,形成穿过电介质层和牺牲层的开口,以及通过开口提供蚀刻剂以除去牺牲层。 电介质层的堆叠包括向衬底供给选自由SiH 4,Si 2 H 6,Si 3 H 8和Si 4 H 10组成的组中的一种或多种气体,以沉积氧化硅层。 牺牲层的堆叠包括向基板供应一种或多种选自SiH 4,Si 2 H 6,Si 3 H 8,Si 4 H 10和二氯硅烷(SiCl 2 H 2)的气体和氨基气体,以沉积氮化硅层。
摘要:
Provided is an equipment for manufacturing a semiconductor. The equipment for manufacturing a semiconductor includes a cleaning chamber in which a cleaning process is performed on substrates, an epitaxial chamber in which an epitaxial process for forming an epitaxial layer on each of the substrates is performed, and a transfer chamber to which the cleaning chamber and the epitaxial chamber are connected to sides surfaces thereof, the transfer chamber including a substrate handler for transferring the substrates, on which the cleaning process is completed, into the epitaxial chamber. The cleaning chamber is performed in a batch type with respect to the plurality of substrates.