公开(公告)号：US20050212906A1

公开(公告)日：2005-09-29

申请号：US11125367

申请日：2005-05-09

申请人： James Cordingley ,  Roger Dowd ,  Jonathan Ehrmann ,  Joseph Griffiths ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

发明人： James Cordingley ,  Roger Dowd ,  Jonathan Ehrmann ,  Joseph Griffiths ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

IPC分类号： B23K26/00 ,  B23K26/03 ,  B23K26/04 ,  B23K26/06 ,  B23K26/067 ,  B23K26/073 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  B23K101/40 ,  G11C29/04 ,  H01L21/304 ,  H01L21/48 ,  H01L21/66 ,  H01L21/768 ,  H01L21/82 ,  H01L23/525 ,  H05K3/00 ,  B41J2/47

CPC分类号： B23K26/0736 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/082 ,  B23K26/10 ,  B23K26/16 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76888 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

公开(公告)号：US20060216927A1

公开(公告)日：2006-09-28

申请号：US11441763

申请日：2006-05-26

申请人： James Cordingley ,  Jonathan Ehrmann ,  Joseph Griffiths ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

发明人： James Cordingley ,  Jonathan Ehrmann ,  Joseph Griffiths ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

IPC分类号： H01L21/4763 ,  H01L21/302 ,  H01L21/461

CPC分类号： B23K26/0736 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/082 ,  B23K26/10 ,  B23K26/16 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76888 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

公开(公告)号：US20050115937A1

公开(公告)日：2005-06-02

申请号：US11004191

申请日：2004-12-03

申请人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

发明人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

IPC分类号： B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B23K26/073 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01L21/48 ,  H01L21/66 ,  H01L21/768 ,  H01L23/525 ,  H01S20060101 ,  H05K3/00

CPC分类号： H01L23/5258 ,  B23K26/04 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76894 ,  H01L22/12 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.

公开(公告)号：US20050150879A1

公开(公告)日：2005-07-14

申请号：US11003096

申请日：2004-12-03

申请人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

发明人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

IPC分类号： B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B23K26/073 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01L21/48 ,  H01L21/66 ,  H01L21/768 ,  H01L23/525 ,  H01S20060101 ,  H05K3/00

CPC分类号： H01L23/5258 ,  B23K26/04 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76894 ,  H01L22/12 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.

公开(公告)号：US20070215820A1

公开(公告)日：2007-09-20

申请号：US11643023

申请日：2006-12-20

申请人： James Cordingley ,  Jonathan Ehrmann ,  David Filgas ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

发明人： James Cordingley ,  Jonathan Ehrmann ,  David Filgas ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

IPC分类号： G21K5/10

CPC分类号： B23K26/0736 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/082 ,  B23K26/10 ,  B23K26/16 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76888 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

公开(公告)号：US20070052791A1

公开(公告)日：2007-03-08

申请号：US11593797

申请日：2006-11-07

申请人： James Cordingley ,  Jonathan Ehrmann ,  David Filgas ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

发明人： James Cordingley ,  Jonathan Ehrmann ,  David Filgas ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

IPC分类号： B41J2/47

CPC分类号： B23K26/0736 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/082 ,  B23K26/10 ,  B23K26/16 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76888 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

摘要翻译： 提供一种用于局部处理形成在基板上的预定微结构而不引起基板或其上形成在基板上的其它结构的电学或物理特性的不希望的变化的方法和系统。 该方法包括基于与预定微结构，衬底和其它结构的激光脉冲相互作用的模型来提供信息。 基于该信息确定至少一个脉冲的至少一个特性。 生成包括至少一个脉冲的脉冲激光束。 该方法还包括将具有至少一个确定特性的至少一个脉冲照射到预定微结构上的点中。 所述至少一个脉冲的至少一个确定的特征和其它特征足以在不引起不期望的变化的情况下局部地处理预定的微结构。

公开(公告)号：US20060192845A1

公开(公告)日：2006-08-31

申请号：US11415547

申请日：2006-05-02

申请人： James Cordingley ,  Jonathan Ehrmann ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

发明人： James Cordingley ,  Jonathan Ehrmann ,  Shepard Johnson ,  Joohan Lee ,  Donald Smart ,  Donald Svetkoff

IPC分类号： B41J2/47

CPC分类号： B23K26/0736 ,  B23K26/032 ,  B23K26/04 ,  B23K26/043 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0652 ,  B23K26/0665 ,  B23K26/067 ,  B23K26/082 ,  B23K26/10 ,  B23K26/16 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/172 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76888 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

公开(公告)号：US20050150880A1

公开(公告)日：2005-07-14

申请号：US11004773

申请日：2004-12-03

申请人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

发明人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

IPC分类号： B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B23K26/073 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01L21/48 ,  H01L21/66 ,  H01L21/768 ,  H01L23/525 ,  H01S20060101 ,  H05K3/00

CPC分类号： H01L23/5258 ,  B23K26/04 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76894 ,  H01L22/12 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.

公开(公告)号：US20050092720A1

公开(公告)日：2005-05-05

申请号：US11003885

申请日：2004-12-03

申请人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

发明人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

IPC分类号： B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B23K26/073 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01L21/48 ,  H01L21/66 ,  H01L21/768 ,  H01L23/525 ,  H01S20060101 ,  H05K3/00

CPC分类号： H01L23/5258 ,  B23K26/04 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76894 ,  H01L22/12 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： A laser-based method of removing a target link structure of a circuit fabricated on a substrate includes generating a pulsed laser output at a pre-determined wavelength less than an absorption edge of the substrate. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target structure to reduce the reflectivity of the target structure and efficiently couple the focused laser output into the target structure to remove the link without damaging the substrate.

公开(公告)号：US20070199927A1

公开(公告)日：2007-08-30

申请号：US11700386

申请日：2007-01-31

申请人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

发明人： Bo Gu ,  Donald Smart ,  James Cordingley ,  Joohan Lee ,  Donald Svetkoff ,  Shepard Johnson ,  Jonathan Ehrmann

IPC分类号： B23K26/38

CPC分类号： B23K26/0626 ,  B23K26/04 ,  B23K26/0624 ,  B23K26/0736 ,  B23K26/361 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/38 ,  B23K2101/40 ,  B23K2103/08 ,  B23K2103/10 ,  B23K2103/12 ,  B23K2103/50 ,  H01L21/485 ,  H01L21/76894 ,  H01L22/12 ,  H01L23/5258 ,  H01L2924/0002 ,  H05K3/0026 ,  H01L2924/00

摘要： Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.

摘要翻译： 设置用于去除在衬底上制造的电路的一个或多个目标链路结构的基于激光的方法和系统包括产生具有小于衬底的吸收边缘的预定波长的脉冲激光输出。 激光输出包括脉冲持续时间在约10皮秒至小于1纳秒范围内的至少一个脉冲，脉冲持续时间在热激光器处理范围内。 该方法还包括将激光输出传送和聚焦到目标链路结构上。 聚焦的激光输出在目标链路结构内的位置处具有足够的功率密度，以减少目标链路结构的反射率，并将聚焦的激光输出有效地耦合到目标链路结构中以去除目标链路结构而不损坏基板。