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公开(公告)号：US07326518B2
公开(公告)日：2008-02-05
申请号：US11287104
申请日：2005-11-23
CPC分类号： G03F7/0397 , Y10S430/106 , Y10S430/111 , Y10S430/114
摘要： Chemically-amplified positive photoresist compositions are provided that contain a resin that comprises acetal and alicyclic groups. Photoresists of the invention can exhibit notably enhanced lithographic properties. Preferred photoresists of the invention comprise one or more photoacid generator compounds and one or more phenolic resins comprise one or more photoacid-labile acetal groups and one or more alicyclic groups such as adamantyl.
摘要翻译： 提供化学扩增的正性光致抗蚀剂组合物，其含有包含缩醛和脂环族基团的树脂。 本发明的光刻胶可显示出显着增强的平版印刷性能。 本发明优选的光致抗蚀剂包含一种或多种光酸产生剂化合物，一种或多种酚醛树脂包含一种或多种光酸不稳定的缩醛基和一种或多种脂环族基，例如金刚烷基。
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公开(公告)号：US07297616B2
公开(公告)日：2007-11-20
申请号：US10822225
申请日：2004-04-09
IPC分类号： H01L21/425
CPC分类号： G03F7/40 , G03F7/0392 , G03F7/0397 , G03F7/16 , G03F7/405
摘要： New photoresists are provided that can be applied and imaged with reduced undesired outgassing and/or as thick coating layers. Preferred resists of the invention are chemically-amplified positive-acting resists that contain photoactive and resin components.
摘要翻译： 提供了新的光致抗蚀剂，其可以用减少的不需要的脱气和/或作为厚的涂层施加和成像。 本发明优选的抗蚀剂是含有光活性和树脂成分的化学放大的正性作用抗蚀剂。
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公开(公告)号：US08927681B2
公开(公告)日：2015-01-06
申请号：US12551481
申请日：2009-08-31
IPC分类号： C08G63/68 , C08G63/685 , C08L67/00 , C08K13/00 , G03C1/825 , G03C1/835 , C09D5/00 , C09D5/32 , C09D167/00 , B32B27/36 , G03F7/09
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US20120034562A1
公开(公告)日：2012-02-09
申请号：US12551481
申请日：2009-08-31
IPC分类号： G03F7/20 , G03F7/004 , C09D167/00
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US20100297851A1
公开(公告)日：2010-11-25
申请号：US12781486
申请日：2010-05-17
IPC分类号： H01L21/306 , G03F7/004
CPC分类号： H01L21/0273 , G03F7/0035 , G03F7/0382 , G03F7/0392 , G03F7/2041 , G03F7/40
摘要： Compositions for use in multiple exposure photolithography and methods of forming electronic devices using a multiple exposure lithographic process are provided. The compositions find particular applicability in semiconductor device manufacture for making high-density lithographic patterns.
摘要翻译： 提供了用于多次曝光光刻的组合物和使用多次曝光光刻工艺形成电子器件的方法。 该组合物在用于制造高密度光刻图案的半导体器件制造中具有特别的适用性。
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公开(公告)号：US07118847B2
公开(公告)日：2006-10-10
申请号：US10970837
申请日：2004-10-22
CPC分类号： G03F7/0395 , C08F32/08 , G03F7/0045 , G03F7/039 , G03F7/0397 , Y10S430/108
摘要： Disclosed are spirocyclic olefin polymers, methods of preparing spirocyclic olefin polymers, photresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
摘要翻译： 公开了螺环烯烃聚合物，制备螺环烯烃聚合物的方法，包括螺环烯烃树脂粘合剂的光热组合物以及使用这种光致抗蚀剂组合物形成浮雕图像的方法。
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公开(公告)号：US06852421B2
公开(公告)日：2005-02-08
申请号：US10256225
申请日：2002-09-26
IPC分类号： G03F7/11 , B32B27/06 , B32B27/08 , B32B27/36 , C08G63/40 , G03C1/76 , G03C1/825 , G03C1/835 , G03F7/004 , G03F7/039 , G03F7/09 , H01L21/027
CPC分类号： C09D167/00 , G03F7/091 , Y10T428/31786
摘要： In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.
摘要翻译： 在第一方面，提供了含有聚酯树脂组分的有机涂料组合物，特别是旋涂抗反射涂料组合物。 在另一方面，提供含有通过聚合多羟基化合物获得的树脂组分的涂料组合物。 本发明的涂料组合物特别可用于与外涂光致抗蚀剂层组合以制造集成电路。
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公开(公告)号：US06749765B2
公开(公告)日：2004-06-15
申请号：US10108070
申请日：2002-03-27
IPC分类号： H01L2100
CPC分类号： H01L21/02118 , H01L21/31051 , H01L21/312 , H01L21/76808 , H05K3/0076 , H05K3/0094 , H05K3/064 , Y10S428/901 , Y10T428/24322 , Y10T428/24339 , Y10T428/24521 , Y10T428/31942
摘要： Disclosed are compositions and methods for providing substantially planarized surfaces in the manufacture of electronic devices. Also disclosed are compositions and methods for protecting apertures in the manufacture of electronic devices.
摘要翻译： 公开了用于在电子设备的制造中提供基本平坦化的表面的组合物和方法。 还公开了用于在电子设备的制造中保护孔的组合物和方法。
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公开(公告)号：US06599677B2
公开(公告)日：2003-07-29
申请号：US10126904
申请日：2002-04-20
IPC分类号： G03F7004
CPC分类号： G03F7/0395 , C08F32/08 , G03F7/0045 , G03F7/039 , G03F7/0397 , Y10S430/108
摘要： Disclosed are spirocyclic olefin ploymers, methods of preparing spirocyclic olefin polymers, photoresist compositions including spirocyclic olefin resin binders and methods of forming relief images using such photoresist compositions.
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公开(公告)号：US06461717B1
公开(公告)日：2002-10-08
申请号：US09556542
申请日：2000-04-24
IPC分类号： B32B324
CPC分类号： H01L21/02118 , H01L21/31051 , H01L21/312 , H01L21/76808 , H05K3/0076 , H05K3/0094 , H05K3/064 , Y10S428/901 , Y10T428/24322 , Y10T428/24339 , Y10T428/24521 , Y10T428/31942
摘要： Disclosed are compositions and methods for providing substantially planarized surfaces in the manufacture of electronic devices. Also disclosed are compositions and methods for protecting apertures in the manufacture of electronic devices.
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