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1.发明授权Method to fabricate high-performance NPN transistors in a BiCMOS process 有权在BiCMOS工艺中制造高性能NPN晶体管的方法公开(公告)号：US06906401B2
公开(公告)日：2005-06-14
申请号：US10856503
申请日：2004-05-28
IPC分类号： H01L21/331 , H01L21/8249 , H01L29/737 , H01L29/72
CPC分类号： H01L29/66242 , H01L21/8249 , H01L29/7378
摘要： A method of forming a quasi-self-aligned heterojunction bipolar transistor (HBT) that exhibits high-performance is provided. The method includes the use of a patterned emitter landing pad stack which serves to improve the alignment for the emitter-opening lithography and as an etch stop layer for the emitter opening etch. The present invention also provides an HBT that includes a raised extrinsic base having monocrystalline regions located beneath the emitter landing pad stack.
摘要翻译： 提供了一种形成表现出高性能的准自对准异质结双极晶体管（HBT）的方法。 该方法包括使用图案化的发射器着陆焊盘叠层，其用于改进发射极开口光刻的对准以及用于发射极开口蚀刻的蚀刻停止层。 本发明还提供了一种HBT，其包括具有位于发射器着陆焊盘堆叠下方的单晶区域的凸起的外部基极。
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公开(公告)号：US06809024B1
公开(公告)日：2004-10-26
申请号：US10249821
申请日：2003-05-09
IPC分类号： H01L2972
CPC分类号： H01L29/66242 , H01L21/8249 , H01L29/7378
摘要： A method of forming a quasi-self-aligned heterojunction bipolar transistor (HBT) that exhibits high-performance is provided. The method includes the use of a patterned emitter landing pad stack which serves to improve the alignment for the emitter-opening lithography and as an etch stop layer for the emitter opening etch. The present invention also provides an HBT that includes a raised extrinsic base having monocrystalline regions located beneath the emitter landing pad stack.
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3.发明授权Bipolar transistor having raised extrinsic base with selectable self-alignment and methods of forming same 失效双极晶体管具有可选择的自对准的外部基极和其形成方法公开(公告)号：US07253096B2
公开(公告)日：2007-08-07
申请号：US11289915
申请日：2005-11-30
申请人： Marwan H. Khater , James S. Dunn , David L. Harame , Alvin J. Joseph , Qizhi Liu , Francois Pagette , Stephen A. St. Onge , Andreas D. Stricker
发明人： Marwan H. Khater , James S. Dunn , David L. Harame , Alvin J. Joseph , Qizhi Liu , Francois Pagette , Stephen A. St. Onge , Andreas D. Stricker
IPC分类号： H01L21/4763
CPC分类号： H01L29/66287 , H01L29/1004 , H01L29/66242 , H01L29/732 , H01L29/7378
摘要： A bipolar transistor with raised extrinsic base and selectable self-alignment between the extrinsic base and the emitter is disclosed. The fabrication method may include the formation of a predefined thickness of a first extrinsic base layer of polysilicon or silicon on an intrinsic base. A dielectric landing pad is then formed by lithography on the first extrinsic base layer. Next, a second extrinsic base layer of polysilicon or silicon is formed on top of the dielectric landing pad to finalize the raised extrinsic base total thickness. An emitter opening is formed using lithography and RIE, where the second extrinsic base layer is etched stopping on the dielectric landing pad. The degree of self-alignment between the emitter and the raised extrinsic base is achieved by selecting the first extrinsic base layer thickness, the dielectric landing pad width, and the spacer width.
摘要翻译： 公开了一种具有凸起的外在基极和在本征基极和发射极之间可选自对准的双极晶体管。 制造方法可以包括在内在基底上形成多晶硅或硅的第一非本征基极层的预定厚度。 然后通过在第一非本征基层上的光刻形成电介质着色焊盘。 接下来，在电介质贴片垫的顶部上形成第二非多晶硅或硅的非本征基极层，以最终确定凸出的非本征基本总厚度。 使用光刻和RIE形成发射器开口，其中第二外部基极层被蚀刻停止在电介质着色焊盘上。 通过选择第一非本征基极层厚度，电介质着陆焊盘宽度和间隔物宽度来实现发射极和凸出的外部基极之间的自对准程度。
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公开(公告)号：US07002221B2
公开(公告)日：2006-02-21
申请号：US10604988
申请日：2003-08-29
申请人： Marwan H. Khater , James S. Dunn , David L. Harame , Alvin J. Joseph , Qizhi Liu , Francois Pagette , Stephen A. St. Onge , Andreas D. Stricker
发明人： Marwan H. Khater , James S. Dunn , David L. Harame , Alvin J. Joseph , Qizhi Liu , Francois Pagette , Stephen A. St. Onge , Andreas D. Stricker
IPC分类号： H01L23/62
CPC分类号： H01L29/66287 , H01L29/1004 , H01L29/66242 , H01L29/732 , H01L29/7378
摘要： A bipolar transistor with raised extrinsic base and selectable self-alignment between the extrinsic base and the emitter is disclosed. The fabrication method may include the formation of a predefined thickness of a first extrinsic base layer of polysilicon or silicon on an intrinsic base. A dielectric landing pad is then formed by lithography on the first extrinsic base layer. Next, a second extrinsic base layer of polysilicon or silicon is formed on top of the dielectric landing pad to finalize the raised extrinsic base total thickness. An emitter opening is formed using lithography and RIE, where the second extrinsic base layer is etched stopping on the dielectric landing pad. The degree of self-alignment between the emitter and the raised extrinsic base is achieved by selecting the first extrinsic base layer thickness, the dielectric landing pad width, and the spacer width.
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公开(公告)号：US07776704B2
公开(公告)日：2010-08-17
申请号：US11830376
申请日：2007-07-30
申请人： James S. Dunn , Alvin J. Joseph , Qizhi Liu
发明人： James S. Dunn , Alvin J. Joseph , Qizhi Liu
IPC分类号： H01L21/8222
CPC分类号： H01L29/66242 , H01L29/7378
摘要： The present invention provides a method of forming a self-aligned heterobipolar transistor (HBT) device in a BiCMOS technology. The method includes forming a raised extrinsic base structure by using an epitaxial growth process in which the growth rate between single crystal silicon and polycrystalline silicon is different and by using a low temperature oxidation process such as a high-pressure oxidation (HIPOX) process to form a self-aligned emitter/extrinsic base HBT structure.
摘要翻译： 本发明提供了一种在BiCMOS技术中形成自对准异双极晶体管（HBT）器件的方法。 该方法包括通过使用其中单晶硅和多晶硅的生长速率不同的外延生长工艺和通过使用诸如高压氧化（HIPOX）工艺的低温氧化工艺形成凸起的外在基体结构来形成 自对准发射极/非本征基极HBT结构。
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公开(公告)号：US07265018B2
公开(公告)日：2007-09-04
申请号：US10711486
申请日：2004-09-21
申请人： James S. Dunn , Alvin J. Joseph , Qizhi Liu
发明人： James S. Dunn , Alvin J. Joseph , Qizhi Liu
IPC分类号： H01L21/8222
CPC分类号： H01L29/66242 , H01L29/7378
摘要： The present invention provides a method of forming a self-aligned heterobipolar transistor (HBT) device in a BiCMOS technology. The method includes forming a raised extrinsic base structure by using an epitaxial growth process in which the growth rate between single crystal silicon and polycrystalline silicon is different and by using a low temperature oxidation process such as a high-pressure oxidation (HIPOX) process to form a self-aligned emitter/extrinsic base HBT structure.
摘要翻译： 本发明提供了一种在BiCMOS技术中形成自对准异双极晶体管（HBT）器件的方法。 该方法包括通过使用其中单晶硅和多晶硅的生长速率不同的外延生长工艺和通过使用诸如高压氧化（HIPOX）工艺的低温氧化工艺形成凸起的外在基体结构来形成 自对准发射极/非本征基极HBT结构。
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7.发明申请INTEGRATED CIRCUIT STRUCTURE HAVING AIR-GAP TRENCH ISOLATION AND RELATED DESIGN STRUCTURE 有权具有空气阻隔层分离的集成电路结构及相关设计结构公开(公告)号：US20130256758A1
公开(公告)日：2013-10-03
申请号：US13436045
申请日：2012-03-30
IPC分类号： H01L29/737 , H01L21/764
CPC分类号： H01L29/0649 , H01L21/76224 , H01L21/764 , H01L29/737
摘要： A method of forming an integrated circuit structure includes: forming a vent via extending through a shallow trench isolation (STI) and into a substrate; selectively removing an exposed portion of the substrate at a bottom of the vent via to form an opening within the substrate, wherein the opening within the substrate abuts at least one of a bottom surface or a sidewall of the STI; and sealing the vent via to form an air gap in the opening within the substrate.
摘要翻译： 形成集成电路结构的方法包括：通过延伸通过浅沟槽隔离（STI）形成通气孔并进入衬底; 在所述通气孔的底部选择性地去除所述衬底的暴露部分以在所述衬底内形成开口，其中所述衬底内的所述开口邻接所述STI的底表面或侧壁中的至少一个; 并密封通气孔以在基底内的开口中形成气隙。
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公开(公告)号：US20130140668A1
公开(公告)日：2013-06-06
申请号：US13312442
申请日：2011-12-06
申请人： Alan B. Botula , Renata Camillo-Castillo , James S. Dunn , Jeffrey P. Gambino , Douglas B. Hershberger , Alvin J. Joseph , Mark E. Stidham , Robert M. Rassel
发明人： Alan B. Botula , Renata Camillo-Castillo , James S. Dunn , Jeffrey P. Gambino , Douglas B. Hershberger , Alvin J. Joseph , Mark E. Stidham , Robert M. Rassel
CPC分类号： H01L21/76224 , H01L21/26506 , H01L21/823892 , H01L27/04 , H01L27/0623 , H01L27/0635 , H01L27/0802 , H01L27/0811 , H01L27/0928
摘要： A substrate includes a first region having a first resistivity, for optimizing a field effect transistor, a second region having a second resistivity, for optimizing an npn subcollector of a bipolar transistor device and triple well, a third region having a third resistivity, with a high resistivity for a passive device, a fourth region, substantially without implantation, to provide low perimeter capacitance for devices.
摘要翻译： 衬底包括具有第一电阻率的第一区域，用于优化场效应晶体管，具有第二电阻率的第二区域，用于优化双极晶体管器件和三阱的npn子集电极，具有第三电阻率的第三区域，具有第三电阻率 用于无源器件的高电阻率，第四区域，基本上没有植入，以为器件提供低周边电容。
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9.发明授权Complimentary metal-insulator-metal (MIM) capacitors and method of manufacture 有权免费金属绝缘体金属（MIM）电容器和制造方法公开(公告)号：US09424992B2
公开(公告)日：2016-08-23
申请号：US13427216
申请日：2012-03-22
CPC分类号： H01G4/33 , H01G4/1209 , H01G4/232 , H01G4/38 , H01L23/5223 , H01L27/0805 , H01L28/40 , H01L28/60 , H01L2924/0002 , Y10T29/43 , Y10T29/435 , Y10T29/49156 , H01L2924/00
摘要： A high density capacitor and low density capacitor simultaneously formed on a single wafer and a method of manufacture is provided. The method includes depositing a bottom plate on a dielectric material; depositing a low-k dielectric on the bottom plate; depositing a high-k dielectric on the low-k dielectric and the bottom plate; depositing a top plate on the high-k dielectric; and etching a portion of the bottom plate and the high-k dielectric to form a first metal-insulator-metal (MIM) capacitor having a dielectric stack with a first thickness and a second MIM capacitor having a dielectric stack with a second thickness different than the first thickness.
摘要翻译： 同时形成在单个晶片上的高密度电容器和低密度电容器和制造方法。 该方法包括在电介质材料上沉积底板; 在底板上沉积低k电介质; 在低k电介质和底板上沉积高k电介质; 在高k电介质上沉积顶板; 以及蚀刻所述底板和所述高k电介质的一部分以形成具有第一厚度的电介质堆叠的第一金属 - 绝缘体金属（MIM）电容器和具有不同于第二厚度的第二厚度的电介质叠层的第二MIM电容器 第一厚度。
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公开(公告)号：US08735986B2
公开(公告)日：2014-05-27
申请号：US13312442
申请日：2011-12-06
申请人： Alan B. Botula , Renata Camillo-Castillo , James S. Dunn , Jeffrey P. Gambino , Douglas B. Hershberger , Alvin J. Joseph , Robert M. Rassel , Mark E. Stidham
发明人： Alan B. Botula , Renata Camillo-Castillo , James S. Dunn , Jeffrey P. Gambino , Douglas B. Hershberger , Alvin J. Joseph , Robert M. Rassel , Mark E. Stidham
IPC分类号： H01L27/12
CPC分类号： H01L21/76224 , H01L21/26506 , H01L21/823892 , H01L27/04 , H01L27/0623 , H01L27/0635 , H01L27/0802 , H01L27/0811 , H01L27/0928
摘要： A substrate includes a first region having a first resistivity, for optimizing a field effect transistor, a second region having a second resistivity, for optimizing an npn subcollector of a bipolar transistor device and triple well, a third region having a third resistivity, with a high resistivity for a passive device, a fourth region, substantially without implantation, to provide low perimeter capacitance for devices.
摘要翻译： 衬底包括具有第一电阻率的第一区域，用于优化场效应晶体管，具有第二电阻率的第二区域，用于优化双极晶体管器件和三阱的npn子集电极，具有第三电阻率的第三区域，具有第三电阻率 用于无源器件的高电阻率，第四区域，基本上没有植入，以为器件提供低周边电容。
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