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    R2R controller to automate the data collection during a DOE
    2.
    发明申请
    R2R controller to automate the data collection during a DOE 审中-公开
    R2R控制器可在DOE期间自动执行数据收集

    公开(公告)号：US20060079983A1

    公开(公告)日：2006-04-13

    申请号：US10962596

    申请日：2004-10-13

    申请人： James Willis

    发明人： James Willis

    IPC分类号： G05B13/02 ,  G06F19/00

    CPC分类号： G05B17/02 ,  G05B23/0216 ,  G05B23/0259

    摘要： A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models available from the processing system. In the module and method, an experiment is designed having a number of process runs for characterization of the selected process model. Process runs to collect data are executed on a processing tool coupled to the processing system. The actual process results from the process runs are measured. The process model is solved for coefficients of the process model.

    摘要翻译： 一种操作处理系统的系统和计算机实现的方法，其中从可从处理系统获得的过程模型的菜单中选择过程模型。 在模块和方法中，设计了一个实验，其具有用于表征所选择的过程模型的多个过程运行。 用于收集数据的处理运行在耦合到处理系统的处理工具上执行。 测量过程运行的实际过程结果。 过程模型解决了过程模型的系数。

    Waterproof House Wrap
    3.
    发明申请
    Waterproof House Wrap 审中-公开
    防水屋包装

    公开(公告)号：US20130219802A1

    公开(公告)日：2013-08-29

    申请号：US13586647

    申请日：2012-08-15

    申请人： James Willis ,  Heather Willis

    发明人： James Willis ,  Heather Willis

    IPC分类号： E04B1/34

    CPC分类号： E06B9/00 ,  E02B3/108 ,  E06B2009/007

    摘要： An inflatable structure to surround a dwelling comprising: a sand base; a plurality of inflatable tubes stacked vertically on the sand base; a lip extending from the sand base; and a plurality of securing pins extending through the lip, where the plurality of pins secures the inflatable structure to the ground. The each inflatable tube may include an air nozzle, where the air nozzle enables the inflatable of each respective tube. A zipper may be provided at each end of the plurality of inflatable tubes. The inflatable structure may also include a ribbed bottom surface to provide further support.

    摘要翻译： 围绕住宅的可充气结构，包括：沙底; 多个可垂直堆叠在沙底上的可充气管; 从沙底延伸的唇; 以及延伸穿过唇缘的多个固定销，其中多个销将可充气结构固定到地面。 每个可充气管可以包括空气喷嘴，其中空气喷嘴使得每个相应的管可以充气。 可以在多个可充气管的每个端部设置拉链。 可膨胀结构还可以包括肋状底面以提供进一步的支撑。

    Method for in-situ uniformity optimization in a rapid thermal processing system
    4.
    发明授权
    Method for in-situ uniformity optimization in a rapid thermal processing system 失效
    快速热处理系统中原位均匀性优化的方法

    公开(公告)号：US07205231B2

    公开(公告)日：2007-04-17

    申请号：US10976710

    申请日：2004-10-29

    申请人： Peter A. Frisella ,  Paul Lustiber ,  James Willis

    发明人： Peter A. Frisella ,  Paul Lustiber ,  James Willis

    IPC分类号： H01L21/44

    CPC分类号： H01L21/67253 ,  H01L21/67109 ,  Y10S438/906

    摘要： The present invention is directed to a method for thermally processing a substrate in a thermal processing system. The method provides an amount of heat to the substrate and obtains information associated with the substrate when the amount of heat is provided. For example, the substrate is provided at a presoak position within the thermal processing system, wherein the presoak position, and one or more properties associated with the substrate, such as a position and temperature, are measured. An optimal process parameter value to provide an optimal thermal uniformity of the substrate is then determined, based, at least in part, on the information obtained from the substrate. For example, a soak position of the substrate is determined, wherein the determination is based, at least in part, on the one or more measured properties associated with the substrate, and a thermal uniformity associated with a reference data set.

    摘要翻译： 本发明涉及一种用于在热处理系统中热处理衬底的方法。 当提供热量时，该方法向衬底提供一定量的热量并获得与衬底相关联的信息。 例如，基板被设置在热处理系统内的预放置位置处，其中测量预放置位置以及与基板相关联的一个或多个属性，例如位置和温度。 然后，至少部分地基于从衬底获得的信息来确定提供衬底的最佳热均匀性的最佳工艺参数值。 例如，确定衬底的浸泡位置，其中所述确定至少部分地基于与衬底相关联的一个或多个测量属性以及与参考数据集相关联的热均匀性。

    Method for in-situ uniformity optimization in a rapid thermal processing system
    6.
    发明申请
    Method for in-situ uniformity optimization in a rapid thermal processing system 失效
    快速热处理系统中原位均匀性优化的方法

    公开(公告)号：US20060094261A1

    公开(公告)日：2006-05-04

    申请号：US10976710

    申请日：2004-10-29

    申请人： Peter Frisella ,  Paul Lustiber ,  James Willis

    发明人： Peter Frisella ,  Paul Lustiber ,  James Willis

    IPC分类号： H01L21/00

    CPC分类号： H01L21/67253 ,  H01L21/67109 ,  Y10S438/906

    摘要： The present invention is directed to a method for thermally processing a substrate in a thermal processing system. The method comprises providing an amount of heat to the substrate and obtaining information associated with the substrate when the amount of heat is provided. For example, the substrate is provided at a presoak position within the thermal processing system, wherein the presoak position, and one or more properties associated with the substrate, such as a position and temperature, are measured. An optimal process parameter value to provide an optimal thermal uniformity of the substrate is then determined, based, at least in part, on the information obtained from the substrate. For example, a soak position of the substrate is determined, wherein the determination is based, at least in part, on the one or more measured properties associated with the substrate, and a thermal uniformity associated with a reference data set.

    摘要翻译： 本发明涉及一种用于在热处理系统中热处理衬底的方法。 该方法包括当提供热量时向衬底提供一定量的热量并获得与衬底相关联的信息。 例如，基板被设置在热处理系统内的预放置位置处，其中测量预放置位置以及与基板相关联的一个或多个属性，例如位置和温度。 然后，至少部分地基于从衬底获得的信息来确定提供衬底的最佳热均匀性的最佳工艺参数值。 例如，确定衬底的浸泡位置，其中所述确定至少部分地基于与衬底相关联的一个或多个测量属性以及与参考数据集相关联的热均匀性。